ATE314135T1 - Plasmabehandlung von porösen materialien - Google Patents

Plasmabehandlung von porösen materialien

Info

Publication number
ATE314135T1
ATE314135T1 AT02786390T AT02786390T ATE314135T1 AT E314135 T1 ATE314135 T1 AT E314135T1 AT 02786390 T AT02786390 T AT 02786390T AT 02786390 T AT02786390 T AT 02786390T AT E314135 T1 ATE314135 T1 AT E314135T1
Authority
AT
Austria
Prior art keywords
plasma treatment
articles
porous materials
porous
capacitively
Prior art date
Application number
AT02786390T
Other languages
English (en)
Inventor
Moses M David
Brinda B Lakshmi
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Application granted granted Critical
Publication of ATE314135T1 publication Critical patent/ATE314135T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/02—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor characterised by their properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0081—After-treatment of organic or inorganic membranes
    • B01D67/0088—Physical treatment with compounds, e.g. swelling, coating or impregnation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0081—After-treatment of organic or inorganic membranes
    • B01D67/009—After-treatment of organic or inorganic membranes with wave-energy, particle-radiation or plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M10/00—Physical treatment of fibres, threads, yarns, fabrics or fibrous goods made from such materials, e.g. by ultrasonic waves, corona discharge, irradiation, electric currents or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements
    • D06M10/02—Sonic or ultrasonic waves; Corona discharge
    • D06M10/025—Corona discharge or low temperature plasma
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M10/00—Physical treatment of fibres, threads, yarns, fabrics or fibrous goods made from such materials, e.g. by ultrasonic waves, corona discharge, irradiation, electric currents or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements
    • D06M10/04—Physical treatment combined with treatment with chemical compounds or elements
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M10/00—Physical treatment of fibres, threads, yarns, fabrics or fibrous goods made from such materials, e.g. by ultrasonic waves, corona discharge, irradiation, electric currents or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements
    • D06M10/04—Physical treatment combined with treatment with chemical compounds or elements
    • D06M10/06—Inorganic compounds or elements
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M10/00—Physical treatment of fibres, threads, yarns, fabrics or fibrous goods made from such materials, e.g. by ultrasonic waves, corona discharge, irradiation, electric currents or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements
    • D06M10/04—Physical treatment combined with treatment with chemical compounds or elements
    • D06M10/08—Organic compounds
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M10/00—Physical treatment of fibres, threads, yarns, fabrics or fibrous goods made from such materials, e.g. by ultrasonic waves, corona discharge, irradiation, electric currents or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements
    • D06M10/04—Physical treatment combined with treatment with chemical compounds or elements
    • D06M10/08—Organic compounds
    • D06M10/10—Macromolecular compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
    • B01J37/34—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation
    • B01J37/349—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation making use of flames, plasmas or lasers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2105/00—Condition, form or state of moulded material or of the material to be shaped
    • B29K2105/04—Condition, form or state of moulded material or of the material to be shaped cellular or porous
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2995/00—Properties of moulding materials, reinforcements, fillers, preformed parts or moulds
    • B29K2995/0037—Other properties
    • B29K2995/0092—Other properties hydrophilic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00—Other particular articles
    • B29L2031/755—Membranes, diaphragms
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249961—With gradual property change within a component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249967—Inorganic matrix in void-containing component
    • Y10T428/249969—Of silicon-containing material [e.g., glass, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249978—Voids specified as micro
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249978—Voids specified as micro
    • Y10T428/249979—Specified thickness of void-containing component [absolute or relative] or numerical cell dimension
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249986—Void-containing component contains also a solid fiber or solid particle
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249987—With nonvoid component of specified composition
    • Y10T428/24999—Inorganic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Textile Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Manufacture Of Porous Articles, And Recovery And Treatment Of Waste Products (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
AT02786390T 2001-12-14 2002-10-11 Plasmabehandlung von porösen materialien ATE314135T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/023,267 US6878419B2 (en) 2001-12-14 2001-12-14 Plasma treatment of porous materials
PCT/US2002/032570 WO2003051498A1 (en) 2001-12-14 2002-10-11 Plasma treatment of porous materials

Publications (1)

Publication Number Publication Date
ATE314135T1 true ATE314135T1 (de) 2006-01-15

Family

ID=21814076

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02786390T ATE314135T1 (de) 2001-12-14 2002-10-11 Plasmabehandlung von porösen materialien

Country Status (11)

Country Link
US (2) US6878419B2 (de)
EP (2) EP1453595B1 (de)
JP (1) JP4768225B2 (de)
KR (1) KR100970025B1 (de)
AT (1) ATE314135T1 (de)
AU (1) AU2002351473A1 (de)
BR (1) BR0214908B1 (de)
CA (1) CA2469739A1 (de)
DE (1) DE60208440T2 (de)
MX (1) MXPA04005625A (de)
WO (1) WO2003051498A1 (de)

Families Citing this family (81)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7887889B2 (en) * 2001-12-14 2011-02-15 3M Innovative Properties Company Plasma fluorination treatment of porous materials
GB0206932D0 (en) * 2002-03-23 2002-05-08 Univ Durham Preparation of superabsorbent materials by plasma modification
GB0207350D0 (en) * 2002-03-28 2002-05-08 Univ Sheffield Surface
SE527054C2 (sv) * 2002-04-23 2005-12-13 Gambro Lundia Ab Förfarande för framställning av ett regioselektivt membran
CN100467141C (zh) * 2003-04-25 2009-03-11 株式会社半导体能源研究所 图形的制作方法和液滴排出装置
US7462494B2 (en) * 2003-06-09 2008-12-09 3M Innovative Properties Company Method for laser desorption mass spectrometry using porous polymeric substrates with particle fillers
JP2006272076A (ja) * 2005-03-28 2006-10-12 Seinan Kogyo Kk イオンビームによる表面改質方法
US20060283259A1 (en) * 2005-06-21 2006-12-21 Unger Marketing International, Llc Method of grading microfiber cleaning cloths
US20070117490A1 (en) * 2005-11-23 2007-05-24 Trillas Xavier C Process to produce nonwoven fabrics with totally or partially hydrophilic areas and hydrophobic areas
US7556774B2 (en) * 2005-12-21 2009-07-07 3M Innovative Properties Company Optochemical sensor and method of making the same
US8293340B2 (en) * 2005-12-21 2012-10-23 3M Innovative Properties Company Plasma deposited microporous analyte detection layer
US7504643B2 (en) * 2005-12-22 2009-03-17 Asml Netherlands B.V. Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement
US7495239B2 (en) * 2005-12-22 2009-02-24 Asml Netherlands B.V. Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement
US8263360B2 (en) * 2006-01-30 2012-09-11 The United States Of America, As Represented By The Secretary, Department Of Health & Human Services Hydrophilic IR transparent membrane, spectroscopic sample holder comprising same and method of using same
US7963401B2 (en) * 2006-04-03 2011-06-21 Entegris, Inc. Atmospheric pressure microwave plasma treated porous membranes
ATE458839T1 (de) * 2006-10-20 2010-03-15 3M Innovative Properties Co Verfahren für leicht zu reinigende substrate und artikel daraus
FR2909013B1 (fr) * 2006-11-28 2011-02-25 Commissariat Energie Atomique Procede de revetement en film mince.
US8241713B2 (en) * 2007-02-21 2012-08-14 3M Innovative Properties Company Moisture barrier coatings for organic light emitting diode devices
US7842214B2 (en) 2007-03-28 2010-11-30 3M Innovative Properties Company Process for forming microporous membranes
KR20100016507A (ko) * 2007-04-23 2010-02-12 쓰리엠 이노베이티브 프로퍼티즈 컴파니 하나 이상의 고분자 전해질 층을 갖는 섬유질 물품 및 그 제조 방법
WO2009045752A2 (en) 2007-10-01 2009-04-09 3M Innovative Properties Company Orthodontic composition with polymeric fillers
GB0721737D0 (en) * 2007-11-06 2007-12-19 3M Innovative Properties Co Medicinal inhalation devices and components thereof
CA2704985C (en) 2007-11-06 2017-02-28 Philip A. Jinks Medicinal inhalation devices and components thereof
GB0721739D0 (en) * 2007-11-06 2007-12-19 3M Innovative Properties Co medicinal inhalation devices and components thereof
FR2923494B1 (fr) * 2007-11-09 2010-01-15 Hutchinson Membranes imper-respirantes et leur procede de fabrication
BRPI0820601A2 (pt) * 2007-12-21 2015-06-16 3M Innovative Properties Co Meio filtrante, matriz de filtração, sistema de filtração, método de filtração e método de fabricação de um sistema de filtração
EP2240415A4 (de) * 2008-02-12 2012-08-15 3M Innovative Properties Co Zusammengesetzte polymerfilterungsmedien
WO2009146321A1 (en) 2008-05-30 2009-12-03 3M Innovative Properties Company Ligand functionalized substrates
EP2294118B1 (de) 2008-05-30 2012-07-04 3M Innovative Properties Company Verfahren zur herstellung von ligandenfunktionalisierten substraten
JP5093686B2 (ja) * 2008-08-27 2012-12-12 富士電機株式会社 磁気記録媒体用保護膜の形成方法
JP5744737B2 (ja) 2008-09-19 2015-07-08 スリーエム イノベイティブ プロパティズ カンパニー リガンドグラフト官能化基材
EP2341885A2 (de) * 2008-09-30 2011-07-13 3M Innovative Properties Company Kieferorthopädische zusammensetzung mit wärmemodifizierten mineralien
BRPI0921970A2 (pt) 2008-11-21 2018-06-05 3M Innovative Properties Co membrana microporosa e método para sua formação.
US20100151114A1 (en) * 2008-12-17 2010-06-17 Zimmer, Inc. In-line treatment of yarn prior to creating a fabric
US20100159195A1 (en) * 2008-12-24 2010-06-24 Quincy Iii Roger B High repellency materials via nanotopography and post treatment
WO2010129753A1 (en) 2009-05-06 2010-11-11 3M Innovative Properties Company Medicinal inhalation device
US10410838B2 (en) 2009-05-06 2019-09-10 3M Innovative Properties Company Apparatus and method for plasma treatment of containers
WO2010151447A1 (en) 2009-06-23 2010-12-29 3M Innovative Properties Company Functionalized nonwoven article
FR2947814B1 (fr) * 2009-07-13 2011-10-14 Serigne Dioum Produit de depollution d'un fluide et procede d'obtention
WO2011037798A1 (en) * 2009-09-22 2011-03-31 3M Innovative Properties Company Method of applying atomic layer deposition coatings onto porous non-ceramic substrates
JP2013511362A (ja) 2009-11-23 2013-04-04 スリーエム イノベイティブ プロパティズ カンパニー 処理された多孔質粒子を含む吸収性物品、及び処理された多孔質粒子を使用する乾燥方法
US8377672B2 (en) 2010-02-18 2013-02-19 3M Innovative Properties Company Ligand functionalized polymers
KR101786140B1 (ko) 2010-03-03 2017-10-17 쓰리엠 이노베이티브 프로퍼티즈 컴파니 리간드 구아니디닐 기능화된 중합체
US8664323B2 (en) 2010-06-25 2014-03-04 3M Innovative Properties Company Fluorinated composition, method of coating the composition, and article thereby
US20120109301A1 (en) 2010-11-03 2012-05-03 Zimmer, Inc. Modified Polymeric Materials And Methods Of Modifying Polymeric Materials
US20130229378A1 (en) 2010-11-10 2013-09-05 Suresh S. Iyer Optical device surface treatment process and smudge-resistant article produced thereby
EP2638117B1 (de) 2010-11-10 2015-09-23 3M Innovative Properties Company Oberflächenbehandlungsverfahren, zusammensetzung zur verwendung darin und behandelter artikel
US20140017637A1 (en) * 2011-03-24 2014-01-16 3M Iinnovative Properties Company Dental adhesive comprising a coated polymeric component
US9272246B2 (en) 2011-03-28 2016-03-01 3M Innovative Properties Company Ligand functional substrates
US20120258853A1 (en) 2011-04-11 2012-10-11 3M Innovative Property Company Porous particles with masking powder and methods of making and using the same
EP2559806A1 (de) 2011-08-17 2013-02-20 Center of Excellence Polymer Materials and Technologies (Polimat) Verfahren zum Steigern der Hydrophilie polymerer Materialien
JP5783890B2 (ja) * 2011-12-07 2015-09-24 株式会社日立ハイテクノロジーズ プラズマ処理方法
CN103160807B (zh) * 2011-12-15 2015-04-01 中国科学院微电子研究所 提高聚四氟乙烯薄膜亲水性的原子层沉积方法
DE102012009801A1 (de) * 2012-05-16 2013-11-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zum Beschichten elektrisch leitfähiger Faserwerkstoffe
US8956704B2 (en) 2012-05-21 2015-02-17 Novellus Systems, Inc. Methods for modulating step coverage during conformal film deposition
JP6257605B2 (ja) 2012-06-05 2018-01-10 スリーエム イノベイティブ プロパティズ カンパニー グラフトコポリマー官能化物品
KR101300627B1 (ko) * 2012-09-17 2013-08-28 김재천 저온플라즈마 처리하여 표면을 개질한 발포성 폴리스티렌 수지입자의 제조방법
JP2016503486A (ja) 2012-09-27 2016-02-04 スリーエム イノベイティブ プロパティズ カンパニー リガンドグラフト化基材
HUE069614T2 (hu) 2012-10-12 2025-03-28 Univ California Polianilin membránok, alkalmazásaik és vonatkozó eljárások
KR101483846B1 (ko) * 2013-03-07 2015-01-19 성균관대학교산학협력단 플라즈마를 이용하여 내부 표면이 개질된 튜브 및 이의 제조방법
CA2896773C (en) 2013-03-13 2017-12-19 Celanese Acetate Llc Smoke filters for reducing components in a smoke stream
BR112015028583B1 (pt) 2013-05-15 2022-02-15 The Regents Of The University Of California Membranas de osmose direta compreendendo polianilina e método para sua formação bem como método de osmose direta
WO2014204763A1 (en) 2013-06-17 2014-12-24 3M Innovative Properties Company Process for preparing guanidino-functional monomers
WO2015050767A1 (en) 2013-10-03 2015-04-09 3M Innovative Properties Company Ligand-functionalized substrates with enhanced binding capacity
US10532328B2 (en) 2014-04-08 2020-01-14 The Regents Of The University Of California Polyaniline-based chlorine resistant hydrophilic filtration membranes
WO2015200131A1 (en) 2014-06-27 2015-12-30 1/13M Innovative Properties Company Absorbent articles and methods of making
CN106488779B (zh) 2014-06-27 2020-02-21 3M创新有限公司 吸收制品及其制备方法
US10807046B2 (en) 2014-06-30 2020-10-20 3M Innovative Properties Company Asymmetric articles with a porous substrate and a polymeric coating extending into the substrate and methods of making the same
CN106687225A (zh) 2014-09-22 2017-05-17 3M创新有限公司 具有防污特性的内燃机部件及其制造方法
JP6218716B2 (ja) * 2014-09-30 2017-10-25 富士フイルム株式会社 多孔フィルム及びその製造方法
WO2016100080A1 (en) 2014-12-15 2016-06-23 3M Innovative Properties Company Heat and mass transfer devices with wettable layers for forming falling films
WO2018048698A1 (en) 2016-09-09 2018-03-15 3M Innovative Properties Company Processes for separating aggregated proteins from monomeric proteins in a biological solution
JP7085533B2 (ja) 2016-09-09 2022-06-16 スリーエム イノベイティブ プロパティズ カンパニー 官能化コポリマー及びその使用
KR101926627B1 (ko) * 2017-04-13 2018-12-11 더블유스코프코리아 주식회사 다공막의 친수화 방법 및 이를 이용한 이온교환막의 제조방법
KR20190135140A (ko) * 2018-05-28 2019-12-06 한국기초과학지원연구원 통기성 부재의 내면을 플라즈마 처리하는 방법 및 이의 장치
US12343953B2 (en) 2018-11-09 2025-07-01 3M Innovative Properties Company Nanostructured optical films and intermediates
EP4065619A1 (de) 2019-11-25 2022-10-05 3M Innovative Properties Company Biotin-enthaltende monomere und daraus hergestellte gegenstände
EP4121249A1 (de) 2020-03-18 2023-01-25 3M Innovative Properties Company Schleifartikel
WO2026027951A1 (en) 2024-07-31 2026-02-05 3M Innovative Properties Company Nanoparticle-filled masks for reactive ion etching silicon and methods thereof
WO2026027952A1 (en) 2024-07-31 2026-02-05 3M Innovative Properties Company A high particle loaded thin film for use as a reactive ion etching mask and methods thereof
CN118846841B (zh) * 2024-08-09 2026-03-06 青岛科技大学 一种等离子体改性的聚乙烯/聚酰胺复合膜及其制备方法和应用

Family Cites Families (60)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3635811A (en) 1967-11-06 1972-01-18 Warner Lambert Co Method of applying a coating
US4438154A (en) 1982-04-28 1984-03-20 Stanley Electric Co., Ltd. Method of fabricating an amorphous silicon film
US4539256A (en) 1982-09-09 1985-09-03 Minnesota Mining And Manufacturing Co. Microporous sheet material, method of making and articles made therewith
US5034265A (en) 1983-08-01 1991-07-23 Washington Research Foundation Plasma gas discharge treatment for improving the compatibility of biomaterials
DE3337763A1 (de) 1983-10-18 1985-05-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Verfahren und vorrichtung zur oberflaechenmodifizierung der poreninnenwaende von membranen
US4749588A (en) 1984-09-07 1988-06-07 Nobuhiro Fukuda Process for producing hydrogenated amorphous silicon thin film and a solar cell
US4643876A (en) 1985-06-21 1987-02-17 Surgikos, Inc. Hydrogen peroxide plasma sterilization system
JPH0647059B2 (ja) * 1985-06-22 1994-06-22 住友電気工業株式会社 液体膜
US4869922A (en) 1986-01-24 1989-09-26 Ausimont S.P.A. Method of coating with polyfluorocarbons
US4806246A (en) 1986-04-11 1989-02-21 Applied Membrane Technology, Inc. Pore size control using plasma polymerization techniques
US4760005A (en) 1986-11-03 1988-07-26 Xerox Corporation Amorphous silicon imaging members with barrier layers
US4726989A (en) 1986-12-11 1988-02-23 Minnesota Mining And Manufacturing Microporous materials incorporating a nucleating agent and methods for making same
US5755886A (en) * 1986-12-19 1998-05-26 Applied Materials, Inc. Apparatus for preventing deposition gases from contacting a selected region of a substrate during deposition processing
US4968918A (en) 1987-07-06 1990-11-06 Kanebo, Ltd. Apparatus for plasma treatment
US4946903A (en) 1989-03-27 1990-08-07 The Research Foundation Of State University Of Ny Oxyfluoropolymers having chemically reactive surface functionality and increased surface energies
US5120594A (en) 1989-11-20 1992-06-09 Minnesota Mining And Manufacturing Company Microporous polyolefin shaped articles with patterned surface areas of different porosity
US4980196A (en) 1990-02-14 1990-12-25 E. I. Du Pont De Nemours And Company Method of coating steel substrate using low temperature plasma processes and priming
JP2739129B2 (ja) 1990-02-21 1998-04-08 日本碍子株式会社 複合部材の製造方法
JPH0418922A (ja) 1990-05-11 1992-01-23 Nok Corp モザイク荷電膜の製造法
US5102738A (en) 1990-11-01 1992-04-07 Kimberly-Clark Corporation High hydrohead fibrous porous web with improved retentive absorption and acquision rate
US5486357A (en) * 1990-11-08 1996-01-23 Cordis Corporation Radiofrequency plasma biocompatibility treatment of inside surfaces
US5462781A (en) 1991-06-14 1995-10-31 W. L. Gore & Associates, Inc. Surface modified porous expanded polytetrafluoroethylene and process for making
DE4122834A1 (de) 1991-07-10 1993-01-14 Siemens Ag Verfahren zur beschichtung von lwl-fasern
US5260345A (en) 1991-08-12 1993-11-09 The Procter & Gamble Company Absorbent foam materials for aqueous body fluids and absorbent articles containing such materials
US5443743A (en) 1991-09-11 1995-08-22 Pall Corporation Gas plasma treated porous medium and method of separation using same
US5224441A (en) 1991-09-27 1993-07-06 The Boc Group, Inc. Apparatus for rapid plasma treatments and method
US5234529A (en) 1991-10-10 1993-08-10 Johnson Wayne L Plasma generating apparatus employing capacitive shielding and process for using such apparatus
US5260360A (en) 1991-10-18 1993-11-09 Minnesota Mining And Manufacturing Company Oil, water and sweat repellent microporous membrane materials
US5308673A (en) 1992-05-07 1994-05-03 Minnesota Mining And Manufacturing Company Stitchbonded absorbent articles and method of making same
US5275766A (en) * 1992-10-30 1994-01-04 Corning Incorporate Method for making semi-permeable polymer membranes
JPH06184533A (ja) 1992-12-21 1994-07-05 Mitsubishi Cable Ind Ltd 被覆蛍光体の製造方法
JPH06299146A (ja) 1993-04-20 1994-10-25 Mitsubishi Cable Ind Ltd シリカ被覆蛍光体の製造方法
DE69420774T2 (de) 1993-05-13 2000-01-13 Applied Materials, Inc. Kontrolle der Kontamination in einem Plasma durch Ausgestaltung des Plasmaschildes unter Verwendung von Materialien mit verschiedenen RF-Impedanzen
JPH06327950A (ja) * 1993-05-26 1994-11-29 Nitto Denko Corp 液体用濾過膜とその製造方法及び濾過装置
US5494744A (en) * 1994-10-12 1996-02-27 Kimberly-Clark Corporation Method of applying a protein coating to a substrate and article thereof
AU3458095A (en) 1994-11-03 1996-05-09 Johnson & Johnson Medical, Inc. Liquid repellent sterilizable material
SE514726C2 (sv) 1995-02-27 2001-04-09 Sca Hygiene Prod Ab Förfarande för framställning av hydroentanglat nonwovenmaterial med förhöjd våtstyrka samt material framställt genom förfarandet
US5783641A (en) 1995-04-19 1998-07-21 Korea Institute Of Science And Technology Process for modifying surfaces of polymers, and polymers having surfaces modified by such process
US5980814A (en) * 1995-09-01 1999-11-09 Mcneil-Ppc, Inc. Method for making an apertured film coated with a surface-active agent
US6468642B1 (en) * 1995-10-03 2002-10-22 N.V. Bekaert S.A. Fluorine-doped diamond-like coatings
FR2744649B1 (fr) * 1996-02-12 1998-04-10 Conte Procede pour augmenter la mouillabilite d'un corps poreux et dispositif de mise en oeuvre du procede
US6116185A (en) 1996-05-01 2000-09-12 Rietzel; James G. Gas injector for plasma enhanced chemical vapor deposition
WO1997046484A1 (fr) 1996-06-05 1997-12-11 R. Amtekh International, Inc. Procede de production de revetements conformes a base de carbone et de type diamant, revetement dur a base de carbone et de type diamant, et materiau de filtration poreux faisant appel a ces revetements
US6243112B1 (en) * 1996-07-01 2001-06-05 Xerox Corporation High density remote plasma deposited fluoropolymer films
US5888594A (en) 1996-11-05 1999-03-30 Minnesota Mining And Manufacturing Company Process for depositing a carbon-rich coating on a moving substrate
US5948166A (en) 1996-11-05 1999-09-07 3M Innovative Properties Company Process and apparatus for depositing a carbon-rich coating on a moving substrate
JP3571180B2 (ja) * 1997-06-06 2004-09-29 日本バイリーン株式会社 非導電性多孔質体の総表面の処理方法
GB9715508D0 (en) 1997-07-24 1997-10-01 Scapa Group Plc Industrial fabrics and method of treatment
US6537932B1 (en) 1997-10-31 2003-03-25 Kimberly-Clark Worldwide, Inc. Sterilization wrap, applications therefor, and method of sterilizing
US6015597A (en) 1997-11-26 2000-01-18 3M Innovative Properties Company Method for coating diamond-like networks onto particles
KR19990047370A (ko) 1997-12-04 1999-07-05 구자홍 표면의 친수성 또는 소수성이 향상된 냉동, 공조용 금속재료 및 그 향상 방법
WO1999046128A1 (en) 1998-03-10 1999-09-16 Diamonex, Incorporated Highly wear-resistant thermal print heads with silicon-doped diamond-like carbon protective coatings
EP0985741A1 (de) 1998-09-07 2000-03-15 The Procter & Gamble Company Modulierte Plasma-Glimmentladung-Behandlungen zur Herstellung super-hydrophober Substrate
WO2000016913A1 (en) 1998-09-21 2000-03-30 The Procter & Gamble Company Durably wettable, liquid pervious webs
ES2209554T3 (es) 1998-09-21 2004-06-16 THE PROCTER & GAMBLE COMPANY Bandas permeables a los liquidos duramente humectables preparadas usando un procedimiento de polimerizacion por plasma distante.
JP2000117880A (ja) 1998-10-15 2000-04-25 Toray Ind Inc 機能性構造物およびその製造方法
JP2000239963A (ja) 1999-02-24 2000-09-05 Mitsubishi Paper Mills Ltd 親水性不織布
JP2001313286A (ja) * 2000-02-24 2001-11-09 Tokyo Electron Ltd 平行平板型ドライエッチング装置
US6696157B1 (en) 2000-03-05 2004-02-24 3M Innovative Properties Company Diamond-like glass thin films
DE602004007270T2 (de) * 2004-10-01 2008-02-21 Delphi Technologies, Inc., Troy Verfahren und System zur Erkennung eines Fahrzeugüberschlags

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EP1632280A2 (de) 2006-03-08

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