ATE314135T1 - Plasmabehandlung von porösen materialien - Google Patents

Plasmabehandlung von porösen materialien

Info

Publication number
ATE314135T1
ATE314135T1 AT02786390T AT02786390T ATE314135T1 AT E314135 T1 ATE314135 T1 AT E314135T1 AT 02786390 T AT02786390 T AT 02786390T AT 02786390 T AT02786390 T AT 02786390T AT E314135 T1 ATE314135 T1 AT E314135T1
Authority
AT
Austria
Prior art keywords
plasma treatment
articles
porous materials
porous
capacitively
Prior art date
Application number
AT02786390T
Other languages
English (en)
Inventor
Moses M David
Brinda B Lakshmi
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Application granted granted Critical
Publication of ATE314135T1 publication Critical patent/ATE314135T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/02—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor characterised by their properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0081—After-treatment of organic or inorganic membranes
    • B01D67/0088—Physical treatment with compounds, e.g. swelling, coating or impregnation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0081—After-treatment of organic or inorganic membranes
    • B01D67/009—After-treatment of organic or inorganic membranes with wave-energy, particle-radiation or plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M10/00—Physical treatment of fibres, threads, yarns, fabrics or fibrous goods made from such materials, e.g. by ultrasonic waves, corona discharge, irradiation, electric currents or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements
    • D06M10/02—Sonic or ultrasonic waves; Corona discharge
    • D06M10/025—Corona discharge or low temperature plasma
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M10/00—Physical treatment of fibres, threads, yarns, fabrics or fibrous goods made from such materials, e.g. by ultrasonic waves, corona discharge, irradiation, electric currents or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements
    • D06M10/04—Physical treatment combined with treatment with chemical compounds or elements
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M10/00—Physical treatment of fibres, threads, yarns, fabrics or fibrous goods made from such materials, e.g. by ultrasonic waves, corona discharge, irradiation, electric currents or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements
    • D06M10/04—Physical treatment combined with treatment with chemical compounds or elements
    • D06M10/06—Inorganic compounds or elements
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M10/00—Physical treatment of fibres, threads, yarns, fabrics or fibrous goods made from such materials, e.g. by ultrasonic waves, corona discharge, irradiation, electric currents or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements
    • D06M10/04—Physical treatment combined with treatment with chemical compounds or elements
    • D06M10/08—Organic compounds
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M10/00—Physical treatment of fibres, threads, yarns, fabrics or fibrous goods made from such materials, e.g. by ultrasonic waves, corona discharge, irradiation, electric currents or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements
    • D06M10/04—Physical treatment combined with treatment with chemical compounds or elements
    • D06M10/08—Organic compounds
    • D06M10/10—Macromolecular compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
    • B01J37/34—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation
    • B01J37/349—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation making use of flames, plasmas or lasers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2105/00—Condition, form or state of moulded material or of the material to be shaped
    • B29K2105/04—Condition, form or state of moulded material or of the material to be shaped cellular or porous
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2995/00—Properties of moulding materials, reinforcements, fillers, preformed parts or moulds
    • B29K2995/0037—Other properties
    • B29K2995/0092—Other properties hydrophilic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00—Other particular articles
    • B29L2031/755—Membranes, diaphragms
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249961—With gradual property change within a component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249967—Inorganic matrix in void-containing component
    • Y10T428/249969—Of silicon-containing material [e.g., glass, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249978—Voids specified as micro
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249978—Voids specified as micro
    • Y10T428/249979—Specified thickness of void-containing component [absolute or relative] or numerical cell dimension
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249986—Void-containing component contains also a solid fiber or solid particle
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249987—With nonvoid component of specified composition
    • Y10T428/24999—Inorganic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Textile Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Manufacture Of Porous Articles, And Recovery And Treatment Of Waste Products (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
AT02786390T 2001-12-14 2002-10-11 Plasmabehandlung von porösen materialien ATE314135T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/023,267 US6878419B2 (en) 2001-12-14 2001-12-14 Plasma treatment of porous materials
PCT/US2002/032570 WO2003051498A1 (en) 2001-12-14 2002-10-11 Plasma treatment of porous materials

Publications (1)

Publication Number Publication Date
ATE314135T1 true ATE314135T1 (de) 2006-01-15

Family

ID=21814076

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02786390T ATE314135T1 (de) 2001-12-14 2002-10-11 Plasmabehandlung von porösen materialien

Country Status (11)

Country Link
US (2) US6878419B2 (de)
EP (2) EP1632280B1 (de)
JP (1) JP4768225B2 (de)
KR (1) KR100970025B1 (de)
AT (1) ATE314135T1 (de)
AU (1) AU2002351473A1 (de)
BR (1) BR0214908B1 (de)
CA (1) CA2469739A1 (de)
DE (1) DE60208440T2 (de)
MX (1) MXPA04005625A (de)
WO (1) WO2003051498A1 (de)

Families Citing this family (81)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7887889B2 (en) * 2001-12-14 2011-02-15 3M Innovative Properties Company Plasma fluorination treatment of porous materials
GB0206932D0 (en) * 2002-03-23 2002-05-08 Univ Durham Preparation of superabsorbent materials by plasma modification
GB0207350D0 (en) * 2002-03-28 2002-05-08 Univ Sheffield Surface
SE527054C2 (sv) * 2002-04-23 2005-12-13 Gambro Lundia Ab Förfarande för framställning av ett regioselektivt membran
JP4628109B2 (ja) * 2003-04-25 2011-02-09 株式会社半導体エネルギー研究所 半導体装置の作製方法
US7462494B2 (en) 2003-06-09 2008-12-09 3M Innovative Properties Company Method for laser desorption mass spectrometry using porous polymeric substrates with particle fillers
JP2006272076A (ja) * 2005-03-28 2006-10-12 Seinan Kogyo Kk イオンビームによる表面改質方法
US20060283259A1 (en) * 2005-06-21 2006-12-21 Unger Marketing International, Llc Method of grading microfiber cleaning cloths
US20070117490A1 (en) * 2005-11-23 2007-05-24 Trillas Xavier C Process to produce nonwoven fabrics with totally or partially hydrophilic areas and hydrophobic areas
US7556774B2 (en) * 2005-12-21 2009-07-07 3M Innovative Properties Company Optochemical sensor and method of making the same
US8293340B2 (en) * 2005-12-21 2012-10-23 3M Innovative Properties Company Plasma deposited microporous analyte detection layer
US7504643B2 (en) * 2005-12-22 2009-03-17 Asml Netherlands B.V. Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement
US7495239B2 (en) * 2005-12-22 2009-02-24 Asml Netherlands B.V. Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement
US8263360B2 (en) * 2006-01-30 2012-09-11 The United States Of America, As Represented By The Secretary, Department Of Health & Human Services Hydrophilic IR transparent membrane, spectroscopic sample holder comprising same and method of using same
CN101687127B (zh) 2006-04-03 2015-06-17 安格斯公司 大气压微波等离子体处理的多孔膜
US8158264B2 (en) * 2006-10-20 2012-04-17 3M Innovative Properties Company Method for easy-to-clean substrates and articles therefrom
FR2909013B1 (fr) * 2006-11-28 2011-02-25 Commissariat Energie Atomique Procede de revetement en film mince.
US8241713B2 (en) * 2007-02-21 2012-08-14 3M Innovative Properties Company Moisture barrier coatings for organic light emitting diode devices
US7842214B2 (en) * 2007-03-28 2010-11-30 3M Innovative Properties Company Process for forming microporous membranes
CN101668498A (zh) * 2007-04-23 2010-03-10 3M创新有限公司 在其上具有一个或多个高分子电解质层的纤维制品以及制备该纤维制品的方法
EP2203144A2 (de) 2007-10-01 2010-07-07 3M Innovative Properties Company Kieferorthopädische zusammensetzung mit polymerfüllern
GB0721739D0 (en) * 2007-11-06 2007-12-19 3M Innovative Properties Co medicinal inhalation devices and components thereof
GB0721737D0 (en) * 2007-11-06 2007-12-19 3M Innovative Properties Co Medicinal inhalation devices and components thereof
WO2009061891A2 (en) * 2007-11-06 2009-05-14 3M Innovative Properties Company Medicinal inhalation devices and components thereof
FR2923494B1 (fr) * 2007-11-09 2010-01-15 Hutchinson Membranes imper-respirantes et leur procede de fabrication
JP2011507683A (ja) * 2007-12-21 2011-03-10 スリーエム イノベイティブ プロパティズ カンパニー 流体濾過システム
US20110006007A1 (en) * 2008-02-12 2011-01-13 Gokhan Kuruc Composite polymeric filtration media
EP2294118B1 (de) 2008-05-30 2012-07-04 3M Innovative Properties Company Verfahren zur herstellung von ligandenfunktionalisierten substraten
JP2011523965A (ja) 2008-05-30 2011-08-25 スリーエム イノベイティブ プロパティズ カンパニー リガンド官能化基材
JP5093686B2 (ja) * 2008-08-27 2012-12-12 富士電機株式会社 磁気記録媒体用保護膜の形成方法
WO2010033807A1 (en) * 2008-09-19 2010-03-25 3M Innovative Properties Company Ligand graft functionalized substrates
EP2341885A2 (de) * 2008-09-30 2011-07-13 3M Innovative Properties Company Kieferorthopädische zusammensetzung mit wärmemodifizierten mineralien
EP2365869B1 (de) 2008-11-21 2017-10-04 3M Innovative Properties Company Verfahren zur herstellung einer mikroporösen membran
US20100151114A1 (en) * 2008-12-17 2010-06-17 Zimmer, Inc. In-line treatment of yarn prior to creating a fabric
US20100159195A1 (en) * 2008-12-24 2010-06-24 Quincy Iii Roger B High repellency materials via nanotopography and post treatment
WO2010129753A1 (en) 2009-05-06 2010-11-11 3M Innovative Properties Company Medicinal inhalation device
EP2427902B1 (de) 2009-05-06 2017-01-18 3M Innovative Properties Company Vorrichtung und verfahren zur plasmabehandlung von behältern
BRPI1011747A2 (pt) 2009-06-23 2018-02-27 3M Innovative Properties Co artigo não tecido funcionalizado.
FR2947814B1 (fr) * 2009-07-13 2011-10-14 Serigne Dioum Produit de depollution d'un fluide et procede d'obtention
KR101714814B1 (ko) * 2009-09-22 2017-03-09 쓰리엠 이노베이티브 프로퍼티즈 컴파니 다공성 비세라믹 기판상에 원자층 증착 코팅을 도포하는 방법
JP2013511362A (ja) 2009-11-23 2013-04-04 スリーエム イノベイティブ プロパティズ カンパニー 処理された多孔質粒子を含む吸収性物品、及び処理された多孔質粒子を使用する乾燥方法
US8377672B2 (en) 2010-02-18 2013-02-19 3M Innovative Properties Company Ligand functionalized polymers
BR112012021943B1 (pt) 2010-03-03 2021-09-28 3M Innovative Properties Company Método de separação de uma espécie biológica-alvo de um fluido
US8664323B2 (en) 2010-06-25 2014-03-04 3M Innovative Properties Company Fluorinated composition, method of coating the composition, and article thereby
US20120109301A1 (en) 2010-11-03 2012-05-03 Zimmer, Inc. Modified Polymeric Materials And Methods Of Modifying Polymeric Materials
EP2638117B1 (de) 2010-11-10 2015-09-23 3M Innovative Properties Company Oberflächenbehandlungsverfahren, zusammensetzung zur verwendung darin und behandelter artikel
EP2638116B1 (de) 2010-11-10 2015-08-12 3M Innovative Properties Company Oberflächenbehandlungsverfahren für optische vorrichtung und damit hergestellter wischfester artikel
EP2688508A1 (de) * 2011-03-24 2014-01-29 3M Innovative Properties Company Dentales haftmittel mit einer beschichteten polymerkomponente
US9272246B2 (en) 2011-03-28 2016-03-01 3M Innovative Properties Company Ligand functional substrates
US20120258853A1 (en) 2011-04-11 2012-10-11 3M Innovative Property Company Porous particles with masking powder and methods of making and using the same
EP2559806A1 (de) 2011-08-17 2013-02-20 Center of Excellence Polymer Materials and Technologies (Polimat) Verfahren zum Steigern der Hydrophilie polymerer Materialien
JP5783890B2 (ja) 2011-12-07 2015-09-24 株式会社日立ハイテクノロジーズ プラズマ処理方法
CN103160807B (zh) * 2011-12-15 2015-04-01 中国科学院微电子研究所 提高聚四氟乙烯薄膜亲水性的原子层沉积方法
DE102012009801A1 (de) * 2012-05-16 2013-11-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zum Beschichten elektrisch leitfähiger Faserwerkstoffe
US8956704B2 (en) 2012-05-21 2015-02-17 Novellus Systems, Inc. Methods for modulating step coverage during conformal film deposition
WO2013184366A1 (en) 2012-06-05 2013-12-12 3M Innovative Properties Company Graft copolymer functionalized article
KR101300627B1 (ko) * 2012-09-17 2013-08-28 김재천 저온플라즈마 처리하여 표면을 개질한 발포성 폴리스티렌 수지입자의 제조방법
JP2016503486A (ja) 2012-09-27 2016-02-04 スリーエム イノベイティブ プロパティズ カンパニー リガンドグラフト化基材
CN104884490B (zh) 2012-10-12 2018-11-23 加州大学评议会 聚苯胺膜、其用途及其方法
KR101483846B1 (ko) * 2013-03-07 2015-01-19 성균관대학교산학협력단 플라즈마를 이용하여 내부 표면이 개질된 튜브 및 이의 제조방법
JP6159470B2 (ja) 2013-03-13 2017-07-05 セラニーズ アセテート，エルエルシー 煙流中の成分を低減するための煙フィルター
CN105451866B (zh) 2013-05-15 2019-04-09 加州大学评议会 用于正向渗透应用的通过相反转形成的聚苯胺膜
WO2014204763A1 (en) 2013-06-17 2014-12-24 3M Innovative Properties Company Process for preparing guanidino-functional monomers
JP6576335B2 (ja) 2013-10-03 2019-09-18 スリーエム イノベイティブ プロパティズ カンパニー 結合能力が向上したリガンド官能化基材
JP6674383B2 (ja) 2014-04-08 2020-04-01 ザ リージェンツ オブ ザ ユニバーシティ オブ カリフォルニア ポリアニリン系耐塩素性親水性濾過膜
CN106488779B (zh) 2014-06-27 2020-02-21 3M创新有限公司 吸收制品及其制备方法
CN106470654B (zh) 2014-06-27 2020-08-25 3M创新有限公司 吸收制品及其制备方法
KR102386179B1 (ko) 2014-06-30 2022-04-14 쓰리엠 이노베이티브 프로퍼티즈 캄파니 다공성 기재 및 그 기재 내로 연장되는 중합체 코팅을 갖는 비대칭 물품 및 이의 제조 방법
US20170292445A1 (en) 2014-09-22 2017-10-12 3M Innovative Properties Company Internal combustion engine components with anti-fouling properties and methods of making same
JP6218716B2 (ja) * 2014-09-30 2017-10-25 富士フイルム株式会社 多孔フィルム及びその製造方法
CN107003021B (zh) 2014-12-15 2020-01-14 3M创新有限公司 具有形成降膜的可湿层的热质传递装置
US20190194250A1 (en) 2016-09-09 2019-06-27 3M Innovative Properties Company Processes for separating aggregated proteins from monomeric proteins in a biological solution
CN109689189B (zh) 2016-09-09 2022-02-01 3M创新有限公司 官能化共聚物及其使用
KR101926627B1 (ko) * 2017-04-13 2018-12-11 더블유스코프코리아 주식회사 다공막의 친수화 방법 및 이를 이용한 이온교환막의 제조방법
KR20190135140A (ko) * 2018-05-28 2019-12-06 한국기초과학지원연구원 통기성 부재의 내면을 플라즈마 처리하는 방법 및 이의 장치
EP3877454B1 (de) 2018-11-09 2026-04-29 3M Innovative Properties Company Nanostrukturierte optische filme und zwischenprodukte
WO2021105843A1 (en) 2019-11-25 2021-06-03 3M Innovative Properties Company Biotin-containing monomers and articles formed therefrom
WO2021186326A1 (en) 2020-03-18 2021-09-23 3M Innovative Properties Company Abrasive article
WO2026027951A1 (en) 2024-07-31 2026-02-05 3M Innovative Properties Company Nanoparticle-filled masks for reactive ion etching silicon and methods thereof
WO2026027952A1 (en) 2024-07-31 2026-02-05 3M Innovative Properties Company A high particle loaded thin film for use as a reactive ion etching mask and methods thereof
CN118846841B (zh) * 2024-08-09 2026-03-06 青岛科技大学 一种等离子体改性的聚乙烯/聚酰胺复合膜及其制备方法和应用

Family Cites Families (60)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3635811A (en) * 1967-11-06 1972-01-18 Warner Lambert Co Method of applying a coating
US4438154A (en) * 1982-04-28 1984-03-20 Stanley Electric Co., Ltd. Method of fabricating an amorphous silicon film
US4539256A (en) 1982-09-09 1985-09-03 Minnesota Mining And Manufacturing Co. Microporous sheet material, method of making and articles made therewith
US5034265A (en) * 1983-08-01 1991-07-23 Washington Research Foundation Plasma gas discharge treatment for improving the compatibility of biomaterials
DE3337763A1 (de) * 1983-10-18 1985-05-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Verfahren und vorrichtung zur oberflaechenmodifizierung der poreninnenwaende von membranen
US4749588A (en) * 1984-09-07 1988-06-07 Nobuhiro Fukuda Process for producing hydrogenated amorphous silicon thin film and a solar cell
US4643876A (en) * 1985-06-21 1987-02-17 Surgikos, Inc. Hydrogen peroxide plasma sterilization system
JPH0647059B2 (ja) * 1985-06-22 1994-06-22 住友電気工業株式会社 液体膜
US4869922A (en) * 1986-01-24 1989-09-26 Ausimont S.P.A. Method of coating with polyfluorocarbons
US4806246A (en) * 1986-04-11 1989-02-21 Applied Membrane Technology, Inc. Pore size control using plasma polymerization techniques
US4760005A (en) * 1986-11-03 1988-07-26 Xerox Corporation Amorphous silicon imaging members with barrier layers
US4726989A (en) 1986-12-11 1988-02-23 Minnesota Mining And Manufacturing Microporous materials incorporating a nucleating agent and methods for making same
US5871811A (en) * 1986-12-19 1999-02-16 Applied Materials, Inc. Method for protecting against deposition on a selected region of a substrate
US4968918A (en) * 1987-07-06 1990-11-06 Kanebo, Ltd. Apparatus for plasma treatment
US4946903A (en) * 1989-03-27 1990-08-07 The Research Foundation Of State University Of Ny Oxyfluoropolymers having chemically reactive surface functionality and increased surface energies
US5120594A (en) 1989-11-20 1992-06-09 Minnesota Mining And Manufacturing Company Microporous polyolefin shaped articles with patterned surface areas of different porosity
US4980196A (en) * 1990-02-14 1990-12-25 E. I. Du Pont De Nemours And Company Method of coating steel substrate using low temperature plasma processes and priming
JP2739129B2 (ja) 1990-02-21 1998-04-08 日本碍子株式会社 複合部材の製造方法
JPH0418922A (ja) 1990-05-11 1992-01-23 Nok Corp モザイク荷電膜の製造法
US5102738A (en) * 1990-11-01 1992-04-07 Kimberly-Clark Corporation High hydrohead fibrous porous web with improved retentive absorption and acquision rate
US5486357A (en) * 1990-11-08 1996-01-23 Cordis Corporation Radiofrequency plasma biocompatibility treatment of inside surfaces
US5462781A (en) * 1991-06-14 1995-10-31 W. L. Gore & Associates, Inc. Surface modified porous expanded polytetrafluoroethylene and process for making
DE4122834A1 (de) 1991-07-10 1993-01-14 Siemens Ag Verfahren zur beschichtung von lwl-fasern
US5260345A (en) * 1991-08-12 1993-11-09 The Procter & Gamble Company Absorbent foam materials for aqueous body fluids and absorbent articles containing such materials
US5443743A (en) * 1991-09-11 1995-08-22 Pall Corporation Gas plasma treated porous medium and method of separation using same
US5224441A (en) * 1991-09-27 1993-07-06 The Boc Group, Inc. Apparatus for rapid plasma treatments and method
US5234529A (en) * 1991-10-10 1993-08-10 Johnson Wayne L Plasma generating apparatus employing capacitive shielding and process for using such apparatus
US5260360A (en) 1991-10-18 1993-11-09 Minnesota Mining And Manufacturing Company Oil, water and sweat repellent microporous membrane materials
US5308673A (en) * 1992-05-07 1994-05-03 Minnesota Mining And Manufacturing Company Stitchbonded absorbent articles and method of making same
US5275766A (en) * 1992-10-30 1994-01-04 Corning Incorporate Method for making semi-permeable polymer membranes
JPH06184533A (ja) 1992-12-21 1994-07-05 Mitsubishi Cable Ind Ltd 被覆蛍光体の製造方法
JPH06299146A (ja) 1993-04-20 1994-10-25 Mitsubishi Cable Ind Ltd シリカ被覆蛍光体の製造方法
DE69420774T2 (de) * 1993-05-13 2000-01-13 Applied Materials, Inc. Kontrolle der Kontamination in einem Plasma durch Ausgestaltung des Plasmaschildes unter Verwendung von Materialien mit verschiedenen RF-Impedanzen
JPH06327950A (ja) * 1993-05-26 1994-11-29 Nitto Denko Corp 液体用濾過膜とその製造方法及び濾過装置
US5494744A (en) * 1994-10-12 1996-02-27 Kimberly-Clark Corporation Method of applying a protein coating to a substrate and article thereof
AU3458095A (en) 1994-11-03 1996-05-09 Johnson & Johnson Medical, Inc. Liquid repellent sterilizable material
SE514726C2 (sv) 1995-02-27 2001-04-09 Sca Hygiene Prod Ab Förfarande för framställning av hydroentanglat nonwovenmaterial med förhöjd våtstyrka samt material framställt genom förfarandet
US5783641A (en) * 1995-04-19 1998-07-21 Korea Institute Of Science And Technology Process for modifying surfaces of polymers, and polymers having surfaces modified by such process
US5980814A (en) * 1995-09-01 1999-11-09 Mcneil-Ppc, Inc. Method for making an apertured film coated with a surface-active agent
US6468642B1 (en) * 1995-10-03 2002-10-22 N.V. Bekaert S.A. Fluorine-doped diamond-like coatings
FR2744649B1 (fr) * 1996-02-12 1998-04-10 Conte Procede pour augmenter la mouillabilite d'un corps poreux et dispositif de mise en oeuvre du procede
US6116185A (en) 1996-05-01 2000-09-12 Rietzel; James G. Gas injector for plasma enhanced chemical vapor deposition
EP0949200A1 (de) 1996-06-05 1999-10-13 R-Amtech International, Inc. Verfahren zur herstellung sich anpassender kohlenstoffbeschichtungen vom diamant-typ, harte kohlenstoffbeschichtung von diamant-typ, und dessen verwendung in einem porösen filtrationselement
US6243112B1 (en) * 1996-07-01 2001-06-05 Xerox Corporation High density remote plasma deposited fluoropolymer films
US5948166A (en) * 1996-11-05 1999-09-07 3M Innovative Properties Company Process and apparatus for depositing a carbon-rich coating on a moving substrate
US5888594A (en) * 1996-11-05 1999-03-30 Minnesota Mining And Manufacturing Company Process for depositing a carbon-rich coating on a moving substrate
JP3571180B2 (ja) * 1997-06-06 2004-09-29 日本バイリーン株式会社 非導電性多孔質体の総表面の処理方法
GB9715508D0 (en) 1997-07-24 1997-10-01 Scapa Group Plc Industrial fabrics and method of treatment
US6537932B1 (en) 1997-10-31 2003-03-25 Kimberly-Clark Worldwide, Inc. Sterilization wrap, applications therefor, and method of sterilizing
US6015597A (en) * 1997-11-26 2000-01-18 3M Innovative Properties Company Method for coating diamond-like networks onto particles
KR19990047370A (ko) 1997-12-04 1999-07-05 구자홍 표면의 친수성 또는 소수성이 향상된 냉동, 공조용 금속재료 및 그 향상 방법
US6046758A (en) * 1998-03-10 2000-04-04 Diamonex, Incorporated Highly wear-resistant thermal print heads with silicon-doped diamond-like carbon protective coatings
EP0985741A1 (de) 1998-09-07 2000-03-15 The Procter & Gamble Company Modulierte Plasma-Glimmentladung-Behandlungen zur Herstellung super-hydrophober Substrate
ES2209554T3 (es) 1998-09-21 2004-06-16 THE PROCTER & GAMBLE COMPANY Bandas permeables a los liquidos duramente humectables preparadas usando un procedimiento de polimerizacion por plasma distante.
AU6051199A (en) 1998-09-21 2000-04-10 Procter & Gamble Company, The Durably wettable, liquid pervious webs
JP2000117880A (ja) 1998-10-15 2000-04-25 Toray Ind Inc 機能性構造物およびその製造方法
JP2000239963A (ja) 1999-02-24 2000-09-05 Mitsubishi Paper Mills Ltd 親水性不織布
JP2001313286A (ja) * 2000-02-24 2001-11-09 Tokyo Electron Ltd 平行平板型ドライエッチング装置
US6696157B1 (en) 2000-03-05 2004-02-24 3M Innovative Properties Company Diamond-like glass thin films
ATE365658T1 (de) * 2004-10-01 2007-07-15 Delphi Tech Inc Verfahren und system zur erkennung eines fahrzeugüberschlags

Also Published As

Publication number Publication date
BR0214908B1 (pt) 2011-02-22
KR100970025B1 (ko) 2010-07-16
WO2003051498A1 (en) 2003-06-26
US7125603B2 (en) 2006-10-24
JP4768225B2 (ja) 2011-09-07
DE60208440D1 (de) 2006-02-02
EP1453595B1 (de) 2005-12-28
EP1453595A1 (de) 2004-09-08
EP1632280A2 (de) 2006-03-08
AU2002351473A1 (en) 2003-06-30
DE60208440T2 (de) 2006-08-24
BR0214908A (pt) 2004-11-30
MXPA04005625A (es) 2004-12-06
EP1632280B1 (de) 2014-11-26
US20030138619A1 (en) 2003-07-24
JP2005511297A (ja) 2005-04-28
KR20040074083A (ko) 2004-08-21
EP1632280A3 (de) 2008-01-09
CA2469739A1 (en) 2003-06-26
US20050181198A1 (en) 2005-08-18
US6878419B2 (en) 2005-04-12

Similar Documents

Publication Publication Date Title
ATE314135T1 (de) Plasmabehandlung von porösen materialien
ID29642A (id) Lembaran berpori, benda penyerap yang menggunakan lembaran berpori dan metode pembuatannya
MXPA02011571A (es) Matrices de polisulfonamida.
WO2003008078A3 (en) Asymmetric gel-filled microporous membranes
ATE548097T1 (de) Poröse verbundmembran und herstellungsverfahren dafür
SG100735A1 (en) Porous hollow fiber membranes and method of making the same
DE59913783D1 (de) Mikrosysteme zur zellpermeation und zellfusion
ATE148838T1 (de) Hydrophile membrane, hergestellt aus polyäthersulfon-/poly-2- oxazolin/polyvinylpyrrolidon-mischung
ATE340766T1 (de) Verfahren zur reinigung von wässrigen suspensionen durch membranfiltration
CA2364839A1 (en) Negatively charged membrane
DE69030065D1 (de) Immunadsorbentien
SE0102389D0 (sv) Förfarande vid implantat samt sådant implantat
WO2003009926A1 (en) Hollow fiber membrane for purifying blood
ATE332188T1 (de) Adsorbens mit unterschiedlich modifizierten oberflächenbereichen, verfahren zu dessen herstellung und verwendung davon
FR2744125B1 (fr) Copolymeres greffes, leur procede de fabrication, les compositions les contenant et leur utilisation pour la preparation de dispersions pigmentaires en milieu aqueux et/ou organique
DE60016889D1 (de) Zusammengesetzte Umkehrosmosemembranen und Verfahren zu ihrer Herstellung
ATE307333T1 (de) Chromatographische vorrichtung
WO2002002585A3 (en) Low fluorescence nylon/glass composites for microdiagnostics
EP1249269A3 (de) Poröser Film
ES2050717T3 (es) Membrana semipermeable organomineral y su procedimiento de fabricacion.
DE60235385D1 (de) Laminiertes zeolithverbundmaterial und herstellungsverfahren dafür
WO2002081045A3 (en) Meniscus membranes for separations
WO2002004477A3 (en) Combination of microporous membrane and solid support for microdiagnostics
EP1382378A4 (de) Halbdurchlässige verbundmembran, verfahren zur herstellung derselben und verfahren zur wasserbehandlung unter verwendung derselben
DE60206056D1 (de) Herstellung von polymerteilchen

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties