ATE318449T1 - Vorrichtung zur messung oder maschinellen bearbeitung eines objekts mit einer verschiebungsstufe mit keilförmigen führungen - Google Patents

Vorrichtung zur messung oder maschinellen bearbeitung eines objekts mit einer verschiebungsstufe mit keilförmigen führungen

Info

Publication number
ATE318449T1
ATE318449T1 AT02769194T AT02769194T ATE318449T1 AT E318449 T1 ATE318449 T1 AT E318449T1 AT 02769194 T AT02769194 T AT 02769194T AT 02769194 T AT02769194 T AT 02769194T AT E318449 T1 ATE318449 T1 AT E318449T1
Authority
AT
Austria
Prior art keywords
wedge
measuring
translated
wedges
machining
Prior art date
Application number
AT02769194T
Other languages
English (en)
Inventor
Theo A J Ruijl
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Application granted granted Critical
Publication of ATE318449T1 publication Critical patent/ATE318449T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • G01B5/0009—Guiding surfaces; Arrangements compensating for non-linearity there-of
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Machine Tool Units (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
AT02769194T 2001-05-09 2002-05-06 Vorrichtung zur messung oder maschinellen bearbeitung eines objekts mit einer verschiebungsstufe mit keilförmigen führungen ATE318449T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP01201684 2001-05-09

Publications (1)

Publication Number Publication Date
ATE318449T1 true ATE318449T1 (de) 2006-03-15

Family

ID=8180270

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02769194T ATE318449T1 (de) 2001-05-09 2002-05-06 Vorrichtung zur messung oder maschinellen bearbeitung eines objekts mit einer verschiebungsstufe mit keilförmigen führungen

Country Status (6)

Country Link
US (1) US6857195B2 (de)
EP (1) EP1396014B1 (de)
JP (1) JP4353702B2 (de)
AT (1) ATE318449T1 (de)
DE (1) DE60209367T2 (de)
WO (1) WO2002091436A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10349947B3 (de) * 2003-10-24 2005-07-14 Werth Messtechnik Gmbh Koordinatenmessgerät
DE102004020996A1 (de) * 2004-04-19 2005-11-03 Carl Zeiss Industrielle Messtechnik Gmbh Koordinatenmessgerät zum messtechnischen Bestimmen einer Koordinate an einem Messobjekt
KR100785424B1 (ko) * 2006-07-25 2007-12-13 엘지전자 주식회사 에어베어링을 이용한 가이드장치
DE502007004028D1 (de) * 2007-10-24 2010-07-15 Klingelnberg Ag Messvorrichtung für schwere Werkstücke
EP2244052B1 (de) 2009-04-24 2016-02-24 Mitutoyo Corporation Koordinatenmessmaschine mit Präzisionsträger
FR2965046B1 (fr) * 2010-09-16 2012-09-14 Nat De Metrologie Et D Essais Lab Dispositif et procede de mesure de caracteristiques geometriques
JP5247934B2 (ja) * 2010-11-15 2013-07-24 株式会社アルバック 触針式測定装置
CN102079046A (zh) * 2010-12-24 2011-06-01 东莞市尚正机电科技有限公司 高承载机床运行高精度液体支承悬浮导轨
JP5767473B2 (ja) * 2010-12-27 2015-08-19 ヒーハイスト精工株式会社 位置決め部品
KR102528371B1 (ko) 2022-03-14 2023-05-03 (주)오로스테크놀로지 광학 장비의 이동 장치

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US472712A (en) * 1892-04-12 Bed for metal-working machines
FR1369998A (fr) * 1963-04-17 1964-08-21 Alsacienne D Electronique Et D Dispositif de mesure précise des profils de droites
US3572680A (en) * 1968-03-28 1971-03-30 Frederick R Neff Machine tool table
JPS5650517Y2 (de) * 1977-02-09 1981-11-26
US4589351A (en) * 1984-10-23 1986-05-20 Love Norman H Vertical support apparatus
DE3637410A1 (de) * 1986-11-03 1988-05-11 Zeiss Carl Fa Verfahren zur messung von drehtischabweichungen
JPH01240246A (ja) * 1988-03-22 1989-09-25 Kazuya Hirose テーブルの縦横移動機構
US5280677A (en) * 1990-05-17 1994-01-25 Canon Kabushiki Kaisha Positioning mechanism
US5731641A (en) * 1996-02-28 1998-03-24 Aerotech, Inc. Linear motor driven vertical lift stage
US6764272B1 (en) * 1999-05-27 2004-07-20 Micron Technology, Inc. Adjustable coarse alignment tooling for packaged semiconductor devices
US6260428B1 (en) * 1999-09-09 2001-07-17 Donald W. Clement Z-axis precision positioner
US6421929B1 (en) * 2000-12-21 2002-07-23 Command Tooling Systems Apparatus and method to measure tapered or conical parts

Also Published As

Publication number Publication date
JP4353702B2 (ja) 2009-10-28
JP2004529354A (ja) 2004-09-24
EP1396014A1 (de) 2004-03-10
EP1396014B1 (de) 2006-02-22
US6857195B2 (en) 2005-02-22
DE60209367D1 (de) 2006-04-27
WO2002091436A1 (en) 2002-11-14
DE60209367T2 (de) 2006-11-30
US20040134083A1 (en) 2004-07-15

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