ATE320082T1 - Verbessertes plasma-ätzverfahren - Google Patents

Verbessertes plasma-ätzverfahren

Info

Publication number
ATE320082T1
ATE320082T1 AT95117335T AT95117335T ATE320082T1 AT E320082 T1 ATE320082 T1 AT E320082T1 AT 95117335 T AT95117335 T AT 95117335T AT 95117335 T AT95117335 T AT 95117335T AT E320082 T1 ATE320082 T1 AT E320082T1
Authority
AT
Austria
Prior art keywords
chamber
source
planar coil
radiofrequency source
etch
Prior art date
Application number
AT95117335T
Other languages
English (en)
Inventor
Virinder S Grewal
Original Assignee
Infineon Technologies Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies Ag filed Critical Infineon Technologies Ag
Application granted granted Critical
Publication of ATE320082T1 publication Critical patent/ATE320082T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/26—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials
    • H10P50/264—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials by chemical means
    • H10P50/266—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials by chemical means by vapour etching only
    • H10P50/267—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials by chemical means by vapour etching only using plasmas
    • H10P50/268—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials by chemical means by vapour etching only using plasmas of silicon-containing layers

Landscapes

  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
AT95117335T 1994-12-22 1995-11-03 Verbessertes plasma-ätzverfahren ATE320082T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/362,398 US5591301A (en) 1994-12-22 1994-12-22 Plasma etching method

Publications (1)

Publication Number Publication Date
ATE320082T1 true ATE320082T1 (de) 2006-03-15

Family

ID=23425970

Family Applications (1)

Application Number Title Priority Date Filing Date
AT95117335T ATE320082T1 (de) 1994-12-22 1995-11-03 Verbessertes plasma-ätzverfahren

Country Status (7)

Country Link
US (1) US5591301A (de)
EP (1) EP0718876B1 (de)
JP (1) JPH08236513A (de)
KR (1) KR100413894B1 (de)
AT (1) ATE320082T1 (de)
DE (1) DE69534832T2 (de)
TW (1) TW410401B (de)

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US6017825A (en) * 1996-03-29 2000-01-25 Lam Research Corporation Etch rate loading improvement
KR100230981B1 (ko) * 1996-05-08 1999-11-15 김광호 반도체장치 제조공정의 플라즈마 식각 방법
US5880033A (en) * 1996-06-17 1999-03-09 Applied Materials, Inc. Method for etching metal silicide with high selectivity to polysilicon
US6008139A (en) * 1996-06-17 1999-12-28 Applied Materials Inc. Method of etching polycide structures
US6562724B1 (en) * 1997-06-09 2003-05-13 Texas Instruments Incorporated Self-aligned stack formation
US6479785B1 (en) 1998-07-09 2002-11-12 Richard J. Fugo Device for plasma incision of mater with a specifically tuned radiofrequencty electromagnetic field generator
KR100543054B1 (ko) * 1997-10-24 2006-01-20 리처드 제이 푸고 무선주파수 전자기장 발생기를 이용한 플라즈마 절개 방법
US5958266A (en) * 1997-10-24 1999-09-28 Fugo; Richard J. Method of plasma incision of matter with a specifically tuned radiofrequency electromagnetic field generator
JPH11145113A (ja) * 1997-11-13 1999-05-28 Nec Corp エッチング方法
EP0932190A1 (de) * 1997-12-30 1999-07-28 International Business Machines Corporation Plasmaätzverfahren der Wolframsilicidschicht bei der Herstellung von mehrschichtleitfähigem Gitter
US6787730B2 (en) * 1998-07-09 2004-09-07 Damian Coccio Device for plasma incision of matter with a specifically tuned radiofrequency electromagnetic field generator
US6309926B1 (en) 1998-12-04 2001-10-30 Advanced Micro Devices Thin resist with nitride hard mask for gate etch application
WO2000052749A1 (en) 1999-03-05 2000-09-08 Applied Materials, Inc. Method for enhancing etching of titanium silicide
US6261967B1 (en) 2000-02-09 2001-07-17 Infineon Technologies North America Corp. Easy to remove hard mask layer for semiconductor device fabrication
EP1156519A1 (de) * 2000-05-16 2001-11-21 Semiconductor 300 GmbH & Co. KG Gateätzverfahren für 12 Zoll-Wafern
US6461974B1 (en) 2000-10-06 2002-10-08 Lam Research Corporation High temperature tungsten etching process
US6642584B2 (en) 2001-01-30 2003-11-04 International Business Machines Corporation Dual work function semiconductor structure with borderless contact and method of fabricating the same
WO2008021321A2 (en) * 2006-08-17 2008-02-21 Rjf Holdings Iv, Inc Method and apparatus for plasma incision of cardiovascular tissue
KR100927398B1 (ko) * 2007-06-26 2009-11-19 주식회사 하이닉스반도체 반도체 소자의 미세 패턴 형성 방법
US20120244693A1 (en) * 2011-03-22 2012-09-27 Tokyo Electron Limited Method for patterning a full metal gate structure
US8946002B2 (en) 2012-07-24 2015-02-03 Semiconductor Components Industries, Llc Method of forming a semiconductor device having a patterned gate dielectric and structure therefor
KR101582542B1 (ko) * 2014-08-19 2016-01-05 국방과학연구소 대면적 플라즈마를 이용한 전자기파 감쇠 장치

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US4030967A (en) * 1976-08-16 1977-06-21 Northern Telecom Limited Gaseous plasma etching of aluminum and aluminum oxide
US4253907A (en) * 1979-03-28 1981-03-03 Western Electric Company, Inc. Anisotropic plasma etching
US4297162A (en) * 1979-10-17 1981-10-27 Texas Instruments Incorporated Plasma etching using improved electrode
US4444618A (en) * 1983-03-03 1984-04-24 General Electric Company Processes and gas mixtures for the reactive ion etching of aluminum and aluminum alloys
US5112435A (en) * 1985-10-11 1992-05-12 Applied Materials, Inc. Materials and methods for etching silicides, polycrystalline silicon and polycides
JPS62162362A (ja) * 1986-01-10 1987-07-18 Mitsubishi Electric Corp Ｍｏｓ型集積回路及びその製造方法
US4789426A (en) * 1987-01-06 1988-12-06 Harris Corp. Process for performing variable selectivity polysilicon etch
JPS63215076A (ja) * 1987-03-04 1988-09-07 Matsushita Electric Ind Co Ltd 半導体集積回路装置
JPS63238288A (ja) * 1987-03-27 1988-10-04 Fujitsu Ltd ドライエツチング方法
US4838992A (en) * 1987-05-27 1989-06-13 Northern Telecom Limited Method of etching aluminum alloys in semi-conductor wafers
US5248636A (en) * 1987-07-16 1993-09-28 Texas Instruments Incorporated Processing method using both a remotely generated plasma and an in-situ plasma with UV irradiation
US4948458A (en) 1989-08-14 1990-08-14 Lam Research Corporation Method and apparatus for producing magnetically-coupled planar plasma
JP2673380B2 (ja) * 1990-02-20 1997-11-05 三菱電機株式会社 プラズマエッチングの方法
KR0176715B1 (ko) * 1990-07-30 1999-04-15 오가 노리오 드라이에칭방법
US5259922A (en) * 1990-08-14 1993-11-09 Matsushita Electric Industrial Co., Ltd. Drying etching method
JPH04196529A (ja) * 1990-11-28 1992-07-16 Toshiba Corp プラズマ処理装置
JP2519364B2 (ja) * 1990-12-03 1996-07-31 アプライド マテリアルズ インコーポレイテッド Ｕｈｆ／ｖｈｆ共振アンテナ供給源を用いたプラズマリアクタ
DE4107006A1 (de) * 1991-03-05 1992-09-10 Siemens Ag Verfahren zum anisotropen trockenaetzen von aluminium bzw. aluminiumlegierungen enthaltenden leiterbahnebenen in integrierten halbleiterschaltungen
US5201990A (en) * 1991-05-23 1993-04-13 Applied Materials, Inc. Process for treating aluminum surfaces in a vacuum apparatus
JPH0582481A (ja) * 1991-09-18 1993-04-02 Nippon Telegr & Teleph Corp <Ntt> ガーネツト膜加工方法
US5323053A (en) * 1992-05-28 1994-06-21 At&T Bell Laboratories Semiconductor devices using epitaxial silicides on (111) surfaces etched in (100) silicon substrates
US5346578A (en) * 1992-11-04 1994-09-13 Novellus Systems, Inc. Induction plasma source
US5401350A (en) * 1993-03-08 1995-03-28 Lsi Logic Corporation Coil configurations for improved uniformity in inductively coupled plasma systems
US5449433A (en) * 1994-02-14 1995-09-12 Micron Semiconductor, Inc. Use of a high density plasma source having an electrostatic shield for anisotropic polysilicon etching over topography

Also Published As

Publication number Publication date
KR960026340A (ko) 1996-07-22
EP0718876A3 (de) 1998-05-20
DE69534832T2 (de) 2006-09-28
KR100413894B1 (ko) 2004-04-21
EP0718876B1 (de) 2006-03-08
DE69534832D1 (de) 2006-05-04
TW410401B (en) 2000-11-01
EP0718876A2 (de) 1996-06-26
US5591301A (en) 1997-01-07
JPH08236513A (ja) 1996-09-13

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