ATE324475T1 - Durch ultraschall verstärkte elektroplattierungsvorrichtung und verfahren - Google Patents

Durch ultraschall verstärkte elektroplattierungsvorrichtung und verfahren

Info

Publication number
ATE324475T1
ATE324475T1 AT02756872T AT02756872T ATE324475T1 AT E324475 T1 ATE324475 T1 AT E324475T1 AT 02756872 T AT02756872 T AT 02756872T AT 02756872 T AT02756872 T AT 02756872T AT E324475 T1 ATE324475 T1 AT E324475T1
Authority
AT
Austria
Prior art keywords
ultrasonic energy
electroplating
electroplatting
cathode
ultrasonic enhanced
Prior art date
Application number
AT02756872T
Other languages
English (en)
Inventor
Haiyan Zhang
Harlan L Krinke
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Application granted granted Critical
Publication of ATE324475T1 publication Critical patent/ATE324475T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/20—Electroplating using ultrasonic waves
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/18—Electroplating using modulated, pulsed or reversing current
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60—Electroplating characterised by the structure or texture of the layers
    • C25D5/605—Surface topography of the layers, e.g. rough, dendritic or nodular layers
    • C25D5/611—Smooth layers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Manufacture Of Alloys Or Alloy Compounds (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
AT02756872T 2001-09-05 2002-08-01 Durch ultraschall verstärkte elektroplattierungsvorrichtung und verfahren ATE324475T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/946,922 US6746590B2 (en) 2001-09-05 2001-09-05 Ultrasonically-enhanced electroplating apparatus and methods

Publications (1)

Publication Number Publication Date
ATE324475T1 true ATE324475T1 (de) 2006-05-15

Family

ID=25485192

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02756872T ATE324475T1 (de) 2001-09-05 2002-08-01 Durch ultraschall verstärkte elektroplattierungsvorrichtung und verfahren

Country Status (10)

Country Link
US (1) US6746590B2 (de)
EP (1) EP1516077B1 (de)
JP (1) JP4440636B2 (de)
KR (1) KR100920789B1 (de)
CN (1) CN100432300C (de)
AT (1) ATE324475T1 (de)
AU (1) AU2002322853A1 (de)
DE (1) DE60211035T2 (de)
TW (1) TW574439B (de)
WO (1) WO2003021007A2 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6908453B2 (en) * 2002-01-15 2005-06-21 3M Innovative Properties Company Microneedle devices and methods of manufacture
US7429400B2 (en) * 2005-12-14 2008-09-30 Steve Castaldi Method of using ultrasonics to plate silver
US20080271995A1 (en) * 2007-05-03 2008-11-06 Sergey Savastiouk Agitation of electrolytic solution in electrodeposition
WO2009005902A1 (en) * 2007-06-28 2009-01-08 3M Innovative Properties Company Method for forming gate structures
US9512012B2 (en) * 2007-12-08 2016-12-06 Comsats Institute Of Information Technology Sonoelectrolysis for metal removal
JP5437665B2 (ja) * 2009-03-06 2014-03-12 住友電気工業株式会社 高速連続めっき処理装置
KR101117441B1 (ko) 2009-08-04 2012-02-29 고려대학교 산학협력단 폴리이미드 전극의 백금 도금 방법
CN102127784B (zh) * 2010-01-20 2012-06-27 中国科学院金属研究所 一种电镀Cu叠层膜及其制备方法
CN102277604B (zh) * 2010-06-10 2013-11-27 中国科学院金属研究所 一种电镀Ni叠层膜及其制备方法
KR102119634B1 (ko) * 2013-04-22 2020-06-08 에이씨엠 리서치 (상하이) 인코포레이티드 기판 상에서의 균일한 금속화를 위한 방법 및 장치
CN103255452B (zh) * 2013-05-03 2016-02-24 中国人民解放军装甲兵工程学院 一种选择性金属电沉积装置及其应用
KR101595717B1 (ko) * 2014-06-09 2016-02-22 남부대학교산학협력단 초음파 도금 시스템
JP6499598B2 (ja) * 2015-10-06 2019-04-10 富士フイルム株式会社 経皮吸収シートの製造方法
US11692278B2 (en) * 2017-12-07 2023-07-04 Tesla, Inc. Coating system and method for e-coating and degasification of e-coat fluid during e-coat
TWI697265B (zh) * 2018-08-09 2020-06-21 元智大學 高速電鍍方法
CN110184625A (zh) * 2019-07-08 2019-08-30 昆明理工大学 一种提高纯镍力学性能的方法
CN110777407A (zh) * 2019-11-26 2020-02-11 湖州努特表面处理科技有限公司 一种超声波电镀装置
CN112391657A (zh) * 2020-10-29 2021-02-23 江西上品金刚石工具科技有限公司 一种利用超声波电镀金刚石钻头的方法
CN115305559B (zh) * 2022-09-01 2023-10-13 温州泰钰新材料科技有限公司 镀液分散方法
CN115992379A (zh) * 2023-02-16 2023-04-21 湖北九峰山实验室 半导体电镀装置

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US3351539A (en) * 1965-04-06 1967-11-07 Branson Instr Sonic agitating method and apparatus
JPS51138538A (en) 1975-05-27 1976-11-30 Fujitsu Ltd Ultasonic plating apparatus
JPH0726221B2 (ja) * 1986-01-09 1995-03-22 昭和電工株式会社 電解鉄の製造方法
US4647345A (en) * 1986-06-05 1987-03-03 Olin Corporation Metallurgical structure control of electrodeposits using ultrasonic agitation
US4842699A (en) 1988-05-10 1989-06-27 Avantek, Inc. Method of selective via-hole and heat sink plating using a metal mask
JP2628886B2 (ja) 1988-05-19 1997-07-09 三菱電機株式会社 電解メッキ装置
US5185073A (en) * 1988-06-21 1993-02-09 International Business Machines Corporation Method of fabricating nendritic materials
JP2875680B2 (ja) 1992-03-17 1999-03-31 株式会社東芝 基材表面の微小孔又は微細凹みの充填又は被覆方法
US5409594A (en) * 1993-11-23 1995-04-25 Dynamotive Corporation Ultrasonic agitator
GB2313605A (en) 1996-06-01 1997-12-03 Cope Chapman B Application of ultrasonic wave energy to electrolytic cell to reduce fume emission
US5695621A (en) 1996-07-31 1997-12-09 Framatome Technologies, Inc. Resonating electroplating anode and process
AU6159898A (en) 1997-02-14 1998-09-08 Dover Industrial Chrome, Inc. Plating apparatus and method
CN2441817Y (zh) * 2000-08-31 2001-08-08 湖南省郴州市山河电子设备有限公司 超声波电镀装置
US6368482B1 (en) * 2000-09-19 2002-04-09 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration, Washington, Dc (Us) Plating processes utilizing high intensity acoustic beams

Also Published As

Publication number Publication date
AU2002322853A1 (en) 2003-03-18
JP2005524764A (ja) 2005-08-18
US6746590B2 (en) 2004-06-08
WO2003021007A2 (en) 2003-03-13
CN1612950A (zh) 2005-05-04
DE60211035D1 (de) 2006-06-01
DE60211035T2 (de) 2006-11-30
CN100432300C (zh) 2008-11-12
KR20040035757A (ko) 2004-04-29
KR100920789B1 (ko) 2009-10-08
EP1516077B1 (de) 2006-04-26
TW574439B (en) 2004-02-01
JP4440636B2 (ja) 2010-03-24
EP1516077A2 (de) 2005-03-23
US20030042145A1 (en) 2003-03-06
WO2003021007A3 (en) 2005-01-06

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