ATE327864T1 - Leitender polierkörper zum elektrochemisch- mechanischen polieren - Google Patents

Leitender polierkörper zum elektrochemisch- mechanischen polieren

Info

Publication number
ATE327864T1
ATE327864T1 AT02728695T AT02728695T ATE327864T1 AT E327864 T1 ATE327864 T1 AT E327864T1 AT 02728695 T AT02728695 T AT 02728695T AT 02728695 T AT02728695 T AT 02728695T AT E327864 T1 ATE327864 T1 AT E327864T1
Authority
AT
Austria
Prior art keywords
polishing
article
conductive
electrochemical
substrate
Prior art date
Application number
AT02728695T
Other languages
English (en)
Inventor
Liang-Yuh Chen
Yuchun Wang
Yan Wang
Alain Duboust
Daniel A Carl
Ralph Wadensweiler
Manoocher Birang
Paul D Butterfield
Rashid Mavliev
Stan D Tsai
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Application granted granted Critical
Publication of ATE327864T1 publication Critical patent/ATE327864T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/12—Lapping plates for working plane surfaces
    • B24B37/14—Lapping plates for working plane surfaces characterised by the composition or properties of the plate materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H5/00—Combined machining
    • B23H5/06—Electrochemical machining combined with mechanical working, e.g. grinding or honing
    • B23H5/08—Electrolytic grinding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/005—Contacting devices
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/22—Electroplating combined with mechanical treatment during the deposition
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/16—Polishing
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
AT02728695T 2001-04-24 2002-04-10 Leitender polierkörper zum elektrochemisch- mechanischen polieren ATE327864T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US28610701P 2001-04-24 2001-04-24
US32626301P 2001-10-01 2001-10-01

Publications (1)

Publication Number Publication Date
ATE327864T1 true ATE327864T1 (de) 2006-06-15

Family

ID=26963595

Family Applications (2)

Application Number Title Priority Date Filing Date
AT05077958T ATE432145T1 (de) 2001-04-24 2002-04-10 Leitender polierkörper zum elektrochemisch- mechanischen polieren
AT02728695T ATE327864T1 (de) 2001-04-24 2002-04-10 Leitender polierkörper zum elektrochemisch- mechanischen polieren

Family Applications Before (1)

Application Number Title Priority Date Filing Date
AT05077958T ATE432145T1 (de) 2001-04-24 2002-04-10 Leitender polierkörper zum elektrochemisch- mechanischen polieren

Country Status (8)

Country Link
EP (1) EP1381491B1 (de)
JP (1) JP2004531885A (de)
KR (2) KR20070103091A (de)
CN (1) CN100398261C (de)
AT (2) ATE432145T1 (de)
DE (2) DE60211878T2 (de)
TW (1) TW536450B (de)
WO (1) WO2002085570A2 (de)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
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US7112121B2 (en) 2000-08-30 2006-09-26 Micron Technology, Inc. Methods and apparatus for electrical, mechanical and/or chemical removal of conductive material from a microelectronic substrate
US7129160B2 (en) 2002-08-29 2006-10-31 Micron Technology, Inc. Method for simultaneously removing multiple conductive materials from microelectronic substrates
US7220166B2 (en) 2000-08-30 2007-05-22 Micron Technology, Inc. Methods and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate
US7078308B2 (en) 2002-08-29 2006-07-18 Micron Technology, Inc. Method and apparatus for removing adjacent conductive and nonconductive materials of a microelectronic substrate
US7153195B2 (en) 2000-08-30 2006-12-26 Micron Technology, Inc. Methods and apparatus for selectively removing conductive material from a microelectronic substrate
US7134934B2 (en) 2000-08-30 2006-11-14 Micron Technology, Inc. Methods and apparatus for electrically detecting characteristics of a microelectronic substrate and/or polishing medium
DE602004008880T2 (de) 2003-02-18 2008-06-26 Parker-Hannifin Corp., Cleveland Polierartikel für elektro-chemisches-mechanisches polieren
KR20060055463A (ko) * 2003-06-06 2006-05-23 어플라이드 머티어리얼스, 인코포레이티드 전기화학적 기계적 폴리싱을 위한 전도성 폴리싱 아티클
US6848977B1 (en) * 2003-08-29 2005-02-01 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Polishing pad for electrochemical mechanical polishing
US7112122B2 (en) 2003-09-17 2006-09-26 Micron Technology, Inc. Methods and apparatus for removing conductive material from a microelectronic substrate
WO2005090648A2 (en) * 2004-03-19 2005-09-29 Ebara Corporation Electrolytic processing apparatus and electrolytic processing method
US7618529B2 (en) * 2004-05-25 2009-11-17 Rohm And Haas Electronic Materials Cmp Holdings, Inc Polishing pad for electrochemical mechanical polishing
US7566391B2 (en) 2004-09-01 2009-07-28 Micron Technology, Inc. Methods and systems for removing materials from microfeature workpieces with organic and/or non-aqueous electrolytic media
US20060163083A1 (en) * 2005-01-21 2006-07-27 International Business Machines Corporation Method and composition for electro-chemical-mechanical polishing
US7655565B2 (en) 2005-01-26 2010-02-02 Applied Materials, Inc. Electroprocessing profile control
JP2006332526A (ja) * 2005-05-30 2006-12-07 Renesas Technology Corp 半導体装置の製造方法、電解研磨方法および研磨パッド
US20070158201A1 (en) * 2006-01-06 2007-07-12 Applied Materials, Inc. Electrochemical processing with dynamic process control
CN103737130B (zh) * 2013-12-03 2016-04-20 同济大学 一种凝胶态电刷电化学去毛刺及表面处理的方法
US9873180B2 (en) 2014-10-17 2018-01-23 Applied Materials, Inc. CMP pad construction with composite material properties using additive manufacturing processes
SG10202002601QA (en) 2014-10-17 2020-05-28 Applied Materials Inc Cmp pad construction with composite material properties using additive manufacturing processes
US10821573B2 (en) 2014-10-17 2020-11-03 Applied Materials, Inc. Polishing pads produced by an additive manufacturing process
US11745302B2 (en) 2014-10-17 2023-09-05 Applied Materials, Inc. Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process
US10875153B2 (en) 2014-10-17 2020-12-29 Applied Materials, Inc. Advanced polishing pad materials and formulations
US10399201B2 (en) 2014-10-17 2019-09-03 Applied Materials, Inc. Advanced polishing pads having compositional gradients by use of an additive manufacturing process
US9776361B2 (en) 2014-10-17 2017-10-03 Applied Materials, Inc. Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles
US10875145B2 (en) 2014-10-17 2020-12-29 Applied Materials, Inc. Polishing pads produced by an additive manufacturing process
CN113103145B (zh) 2015-10-30 2023-04-11 应用材料公司 形成具有期望ζ电位的抛光制品的设备与方法
US10391605B2 (en) 2016-01-19 2019-08-27 Applied Materials, Inc. Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process
US10456886B2 (en) 2016-01-19 2019-10-29 Applied Materials, Inc. Porous chemical mechanical polishing pads
CN107695867B (zh) * 2017-11-02 2019-06-14 德淮半导体有限公司 化学机械研磨装置
EP3910095B1 (de) * 2020-05-11 2022-03-16 Semsysco GmbH Verteilungssystem für eine prozessflüssigkeit zur chemischen und/oder elektrolytischen oberflächenbehandlung eines drehbaren substrats
KR102539172B1 (ko) * 2021-11-12 2023-06-01 케이피엑스케미칼 주식회사 탄소나노튜브로 결속된 고내마모성 박막 코팅을 포함하는 복합 연마패드 및 이의 제조방법

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US4793895A (en) * 1988-01-25 1988-12-27 Ibm Corporation In situ conductivity monitoring technique for chemical/mechanical planarization endpoint detection
US5136817A (en) * 1990-02-28 1992-08-11 Nihon Dempa Kogyo Co., Ltd. Automatic lapping apparatus for piezoelectric materials
US5081421A (en) * 1990-05-01 1992-01-14 At&T Bell Laboratories In situ monitoring technique and apparatus for chemical/mechanical planarization endpoint detection
US5562529A (en) * 1992-10-08 1996-10-08 Fujitsu Limited Apparatus and method for uniformly polishing a wafer
CN1083767A (zh) * 1993-06-03 1994-03-16 浙江大学 用于塑料焊接的电热膜及其制造和用它焊接塑料的方法
US6056851A (en) * 1996-06-24 2000-05-02 Taiwan Semiconductor Manufacturing Company Slurry supply system for chemical mechanical polishing
US6020264A (en) * 1997-01-31 2000-02-01 International Business Machines Corporation Method and apparatus for in-line oxide thickness determination in chemical-mechanical polishing
US5911619A (en) * 1997-03-26 1999-06-15 International Business Machines Corporation Apparatus for electrochemical mechanical planarization
JPH1142554A (ja) * 1997-07-25 1999-02-16 Nec Corp 研磨量制御装置
AU1468199A (en) * 1997-11-25 1999-06-15 Johns Hopkins University, The Electrochemical-control of abrasive polishing and machining rates
US6297159B1 (en) * 1999-07-07 2001-10-02 Advanced Micro Devices, Inc. Method and apparatus for chemical polishing using field responsive materials
US6368184B1 (en) * 2000-01-06 2002-04-09 Advanced Micro Devices, Inc. Apparatus for determining metal CMP endpoint using integrated polishing pad electrodes
US6736952B2 (en) * 2001-02-12 2004-05-18 Speedfam-Ipec Corporation Method and apparatus for electrochemical planarization of a workpiece

Also Published As

Publication number Publication date
DE60232469D1 (de) 2009-07-09
JP2004531885A (ja) 2004-10-14
EP1381491A2 (de) 2004-01-21
KR20070103091A (ko) 2007-10-22
WO2002085570A2 (en) 2002-10-31
TW536450B (en) 2003-06-11
DE60211878T2 (de) 2006-10-26
ATE432145T1 (de) 2009-06-15
EP1381491B1 (de) 2006-05-31
CN1531473A (zh) 2004-09-22
KR20030090788A (ko) 2003-11-28
WO2002085570A3 (en) 2003-04-24
DE60211878D1 (de) 2006-07-06
CN100398261C (zh) 2008-07-02

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Legal Events

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