ATE328273T1 - Vorrichtung zur gestaltung eines röntgenstrahls und methode zur lenkung eines röntgenstrahls durch eine öffnung - Google Patents

Vorrichtung zur gestaltung eines röntgenstrahls und methode zur lenkung eines röntgenstrahls durch eine öffnung

Info

Publication number
ATE328273T1
ATE328273T1 AT00988122T AT00988122T ATE328273T1 AT E328273 T1 ATE328273 T1 AT E328273T1 AT 00988122 T AT00988122 T AT 00988122T AT 00988122 T AT00988122 T AT 00988122T AT E328273 T1 ATE328273 T1 AT E328273T1
Authority
AT
Austria
Prior art keywords
ray beam
directing
designing
opening
ray
Prior art date
Application number
AT00988122T
Other languages
English (en)
Inventor
Licai Jiang
Original Assignee
Osmic Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osmic Inc filed Critical Osmic Inc
Application granted granted Critical
Publication of ATE328273T1 publication Critical patent/ATE328273T1/de

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/201—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials by measuring small-angle scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
  • Cold Cathode And The Manufacture (AREA)
AT00988122T 1999-12-17 2000-12-18 Vorrichtung zur gestaltung eines röntgenstrahls und methode zur lenkung eines röntgenstrahls durch eine öffnung ATE328273T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/466,261 US6330301B1 (en) 1999-12-17 1999-12-17 Optical scheme for high flux low-background two-dimensional small angle x-ray scattering

Publications (1)

Publication Number Publication Date
ATE328273T1 true ATE328273T1 (de) 2006-06-15

Family

ID=23851101

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00988122T ATE328273T1 (de) 1999-12-17 2000-12-18 Vorrichtung zur gestaltung eines röntgenstrahls und methode zur lenkung eines röntgenstrahls durch eine öffnung

Country Status (9)

Country Link
US (1) US6330301B1 (de)
EP (1) EP1238266B1 (de)
JP (3) JP2003517603A (de)
AT (1) ATE328273T1 (de)
AU (1) AU2436601A (de)
CA (1) CA2395293C (de)
CZ (1) CZ20022115A3 (de)
DE (1) DE60028412T2 (de)
WO (1) WO2001044793A2 (de)

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US6870896B2 (en) 2000-12-28 2005-03-22 Osmic, Inc. Dark-field phase contrast imaging
US6804324B2 (en) * 2001-03-01 2004-10-12 Osmo, Inc. X-ray phase contrast imaging using a fabry-perot interferometer concept
US6510200B1 (en) 2001-06-29 2003-01-21 Osmic, Inc. Multi-layer structure with variable bandpass for monochromatization and spectroscopy
US6643353B2 (en) 2002-01-10 2003-11-04 Osmic, Inc. Protective layer for multilayers exposed to x-rays
JP3717115B2 (ja) * 2002-06-12 2005-11-16 株式会社リガク 伝播線を用いた解析方法及びその装置
JP3674006B2 (ja) * 2002-06-19 2005-07-20 株式会社リガク イオン交換膜の評価方法及び有機物の評価方法
JP3666862B2 (ja) * 2002-06-19 2005-06-29 株式会社リガク イオン交換膜の評価方法及び有機物の評価方法
JP3757199B2 (ja) * 2002-09-03 2006-03-22 株式会社リガク Ｘ線小角散乱光学系
US6751288B1 (en) * 2002-10-02 2004-06-15 The United States Of America As Represented By The United States Department Of Energy Small angle x-ray scattering detector
DE602004003347T2 (de) 2003-02-28 2007-06-21 Osmic, Inc., Auburn Hills Optische röntgenstrahlungsvorrichtung mit verstellbarer konvergenz
US6956928B2 (en) * 2003-05-05 2005-10-18 Bruker Axs, Inc. Vertical small angle x-ray scattering system
WO2004114325A2 (en) * 2003-06-13 2004-12-29 Osmic, Inc. Beam conditioning system
US7280634B2 (en) * 2003-06-13 2007-10-09 Osmic, Inc. Beam conditioning system with sequential optic
RU2239178C1 (ru) 2003-08-22 2004-10-27 Общество с ограниченной ответственностью "Институт рентгеновской оптики" Способ определения наличия упругих деформаций в монокристаллических пластинах и устройство для его осуществления
DE102004052350B4 (de) * 2004-10-28 2008-01-10 Bruker Axs B.V. Röntgendiffraktometer mit Wechselapertur
US7139366B1 (en) 2005-05-31 2006-11-21 Osmic, Inc. Two-dimensional small angle x-ray scattering camera
US7406151B1 (en) * 2005-07-19 2008-07-29 Xradia, Inc. X-ray microscope with microfocus source and Wolter condenser
JP4669004B2 (ja) * 2005-08-29 2011-04-13 株式会社リガク 縦横小角ｘ線散乱装置及び小角ｘ線散乱の測定方法
EP1947448B1 (de) 2007-01-19 2013-07-03 Panalytical B.V. Röntgendiffraktionsanlage zur Röntgenstreuung
US7706503B2 (en) * 2007-11-20 2010-04-27 Rigaku Innovative Technologies, Inc. X-ray optic with varying focal points
US7848483B2 (en) * 2008-03-07 2010-12-07 Rigaku Innovative Technologies Magnesium silicide-based multilayer x-ray fluorescence analyzers
JP5033712B2 (ja) * 2008-05-28 2012-09-26 株式会社日立ハイテクノロジーズ 表面検査装置
DE102008050851B4 (de) * 2008-10-08 2010-11-11 Incoatec Gmbh Röntgenanalyseinstrument mit verfahrbarem Aperturfenster
US20110158379A1 (en) * 2009-12-24 2011-06-30 Wonkwang University Center for Industry Academy Cooperation Computed tomography system having nano-spatial resolution
US8406374B2 (en) * 2010-06-25 2013-03-26 Rigaku Innovative Technologies, Inc. X-ray optical systems with adjustable convergence and focal spot size
DE102010063122B3 (de) * 2010-12-15 2012-05-24 Technische Universität Dresden Röntgendiffraktometersystem mit Anordnung zur gezielten Auswahl und Anregung von Einzelkristalliten in polykristallinen Kristallkörpern
JP6322627B2 (ja) * 2012-06-08 2018-05-09 リガク イノベイティブ テクノロジーズ インコーポレイテッド デュアルモード小角散乱カメラ
KR101608669B1 (ko) 2015-10-19 2016-04-05 테크밸리 주식회사 빔스토퍼장치
CN107941827B (zh) * 2017-12-26 2023-10-20 中国工程物理研究院激光聚变研究中心 一种icf靶丸内爆压缩过程分阶段高精度成像装置
CN112654861B (zh) * 2018-07-05 2024-06-11 布鲁克科技公司 小角度x射线散射测量
US11181489B2 (en) * 2018-07-31 2021-11-23 Lam Research Corporation Determining tilt angle in patterned arrays of high aspect-ratio structures by small-angle x-ray scattering
CN110243848B (zh) * 2019-06-20 2022-04-01 中国科学院上海高等研究院 一种x射线光束挡光器及其使用方法
US12436115B2 (en) * 2022-02-25 2025-10-07 Proto Patents Ltd. Transmission X-ray diffraction apparatus and related method

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JPS62159035A (ja) * 1985-12-31 1987-07-15 ノ−ス・アメリカン・フイリツプス・コ−ポレ−シヨン 長波長ｘ線回折計
JPH0541440Y2 (de) * 1988-02-09 1993-10-20
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JP2867523B2 (ja) * 1990-01-13 1999-03-08 株式会社島津製作所 Ｘ線回折装置
JPH04164239A (ja) * 1990-10-26 1992-06-09 Natl Inst For Res In Inorg Mater 粉末ｘ線回折計
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JPH05256800A (ja) * 1992-03-13 1993-10-05 Nippon Steel Corp 塗膜下ｘ線回折強度測定法
JP2783070B2 (ja) * 1992-07-28 1998-08-06 日本電気株式会社 光ヘッド装置のピンホール板及びメインビーム検出器
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JP2526409B2 (ja) * 1994-02-18 1996-08-21 工業技術院長 Ｘ線レンズ
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US6041099A (en) * 1998-02-19 2000-03-21 Osmic, Inc. Single corner kirkpatrick-baez beam conditioning optic assembly
JP3465136B2 (ja) * 1998-05-28 2003-11-10 理学電機工業株式会社 円筒結晶型分光装置とこれを用いたｘ線分析装置

Also Published As

Publication number Publication date
WO2001044793A3 (en) 2002-03-21
AU2436601A (en) 2001-06-25
CA2395293A1 (en) 2001-06-21
JP2006250952A (ja) 2006-09-21
DE60028412T2 (de) 2006-10-12
WO2001044793A2 (en) 2001-06-21
EP1238266B1 (de) 2006-05-31
CZ20022115A3 (cs) 2003-01-15
CA2395293C (en) 2009-12-29
EP1238266A2 (de) 2002-09-11
US6330301B1 (en) 2001-12-11
DE60028412D1 (de) 2006-07-06
JP2003517603A (ja) 2003-05-27
JP2006071651A (ja) 2006-03-16

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