ATE330716T1 - Ultraschall wandler mit membran - Google Patents
Ultraschall wandler mit membranInfo
- Publication number
- ATE330716T1 ATE330716T1 AT03715276T AT03715276T ATE330716T1 AT E330716 T1 ATE330716 T1 AT E330716T1 AT 03715276 T AT03715276 T AT 03715276T AT 03715276 T AT03715276 T AT 03715276T AT E330716 T1 ATE330716 T1 AT E330716T1
- Authority
- AT
- Austria
- Prior art keywords
- piezoelectric material
- planar member
- coupled
- transducer includes
- layer
- Prior art date
Links
- 239000012528 membrane Substances 0.000 title abstract 2
- 239000000463 material Substances 0.000 abstract 8
- 239000004065 semiconductor Substances 0.000 abstract 3
- 230000005684 electric field Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K13/00—Cones, diaphragms, or the like, for emitting or receiving sound in general
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Multimedia (AREA)
- Mechanical Engineering (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
- Surgical Instruments (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/137,491 US6784600B2 (en) | 2002-05-01 | 2002-05-01 | Ultrasonic membrane transducer for an ultrasonic diagnostic probe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE330716T1 true ATE330716T1 (de) | 2006-07-15 |
Family
ID=29269091
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT03715276T ATE330716T1 (de) | 2002-05-01 | 2003-04-28 | Ultraschall wandler mit membran |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6784600B2 (de) |
| EP (1) | EP1503871B1 (de) |
| JP (1) | JP4317123B2 (de) |
| CN (1) | CN100438992C (de) |
| AT (1) | ATE330716T1 (de) |
| AU (1) | AU2003219464A1 (de) |
| DE (1) | DE60306367T2 (de) |
| WO (1) | WO2003092916A1 (de) |
Families Citing this family (60)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040190377A1 (en) * | 2003-03-06 | 2004-09-30 | Lewandowski Robert Stephen | Method and means for isolating elements of a sensor array |
| CN100427222C (zh) * | 2003-11-17 | 2008-10-22 | 财团法人工业技术研究院 | 以压印技术制作微电容式超声波换能器的方法 |
| US9808221B2 (en) * | 2004-04-02 | 2017-11-07 | Koninklijke Philips N.V. | Ultrasonic intracavity probe for 3D imaging |
| US20070222339A1 (en) * | 2004-04-20 | 2007-09-27 | Mark Lukacs | Arrayed ultrasonic transducer |
| JP4805254B2 (ja) | 2004-04-20 | 2011-11-02 | ビジュアルソニックス インコーポレイテッド | 配列された超音波トランスデューサ |
| US7356905B2 (en) * | 2004-05-25 | 2008-04-15 | Riverside Research Institute | Method of fabricating a high frequency ultrasound transducer |
| DE102004031310B4 (de) * | 2004-06-29 | 2017-02-09 | Robert Bosch Gmbh | Membrantopf für einen Ultraschallwandler |
| JP2008545501A (ja) * | 2005-06-07 | 2008-12-18 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 超音波センサ組立体に対するバッキングブロック |
| JP4991722B2 (ja) * | 2005-08-08 | 2012-08-01 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 超音波トランスデューサアレイ |
| KR100642761B1 (ko) * | 2005-09-07 | 2006-11-10 | 삼성전자주식회사 | 반도체 소자 및 그 제조 방법 |
| US7901358B2 (en) | 2005-11-02 | 2011-03-08 | Visualsonics Inc. | High frequency array ultrasound system |
| JP2007149995A (ja) * | 2005-11-28 | 2007-06-14 | Fujifilm Corp | 積層型圧電素子及びその製造方法 |
| JP4730162B2 (ja) * | 2006-03-24 | 2011-07-20 | 株式会社日立製作所 | 超音波送受信デバイス,超音波探触子およびその製造方法 |
| JP2007335977A (ja) * | 2006-06-12 | 2007-12-27 | Toshiba Corp | 電子素子 |
| US7405512B2 (en) * | 2006-06-22 | 2008-07-29 | Gooch And Housego Plc | Acoustic transducers having localized ferroelectric domain inverted regions |
| US20090171253A1 (en) * | 2006-09-06 | 2009-07-02 | Cutera, Inc. | System and method for dermatological treatment using ultrasound |
| US20080183110A1 (en) * | 2006-09-06 | 2008-07-31 | Davenport Scott A | Ultrasound system and method for hair removal |
| US20080195000A1 (en) * | 2006-09-06 | 2008-08-14 | Spooner Gregory J R | System and Method for Dermatological Treatment Using Ultrasound |
| DE602007004242D1 (de) * | 2006-09-25 | 2010-02-25 | Koninkl Philips Electronics Nv | Flip-chip-verbindung über chip-durchgangswege |
| KR20090003617A (ko) * | 2007-07-03 | 2009-01-12 | 삼성에스디아이 주식회사 | 연료전지 시스템 |
| CN101352710B (zh) * | 2007-07-25 | 2011-03-16 | 中国科学院声学研究所 | 薄膜压电超声换能器 |
| WO2009055767A2 (en) * | 2007-10-26 | 2009-04-30 | Trs Technologies, Inc. | Micromachined piezoelectric ultrasound transducer arrays |
| CN102056680B (zh) * | 2008-05-07 | 2015-02-18 | 沃福森微电子股份有限公司 | 微机电系统换能器 |
| DK2326970T3 (da) * | 2008-08-21 | 2021-01-25 | Wassp Ltd | Akustisk transducer til båndstråler |
| US9184369B2 (en) | 2008-09-18 | 2015-11-10 | Fujifilm Sonosite, Inc. | Methods for manufacturing ultrasound transducers and other components |
| EP3309823B1 (de) | 2008-09-18 | 2020-02-12 | FUJIFILM SonoSite, Inc. | Ultraschallwandler |
| US9173047B2 (en) | 2008-09-18 | 2015-10-27 | Fujifilm Sonosite, Inc. | Methods for manufacturing ultrasound transducers and other components |
| EP2283935A1 (de) * | 2009-08-13 | 2011-02-16 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Ultraschallwandlersystem und Verfahren zu dessen Betrieb |
| JP5716897B2 (ja) * | 2010-03-02 | 2015-05-13 | セイコーエプソン株式会社 | 液体噴射ヘッド、液体噴射装置、圧電素子、超音波センサー及び赤外センサー |
| JP5839157B2 (ja) * | 2010-03-02 | 2016-01-06 | セイコーエプソン株式会社 | 液体噴射ヘッド、液体噴射装置、圧電素子、超音波センサー及び赤外センサー |
| JP5854184B2 (ja) * | 2010-03-02 | 2016-02-09 | セイコーエプソン株式会社 | 液体噴射ヘッド、液体噴射装置、圧電素子、超音波センサー及び赤外センサー |
| JP5754619B2 (ja) * | 2010-03-02 | 2015-07-29 | セイコーエプソン株式会社 | 液体噴射ヘッド、液体噴射装置、圧電素子、超音波センサー及び赤外センサー |
| JP5854183B2 (ja) * | 2010-03-02 | 2016-02-09 | セイコーエプソン株式会社 | 液体噴射ヘッド、液体噴射装置、圧電素子、超音波センサー及び赤外センサー |
| CN102172575A (zh) * | 2011-03-11 | 2011-09-07 | 深圳大学 | 一种压电式微加工换能器 |
| US20130035660A1 (en) | 2011-08-01 | 2013-02-07 | Alcyone Lifesciences, Inc. | Multidirectional microfluidic drug delivery devices with conformable balloons |
| GB201209424D0 (en) * | 2012-05-28 | 2012-07-11 | Element Six Ltd | Free-standing non-planar polycrystalline synthetic diamond components |
| KR101314408B1 (ko) | 2012-06-07 | 2013-10-04 | 전남대학교산학협력단 | 초음파 광섬유 수소감지센서 모듈 |
| EP3868541A1 (de) | 2012-12-18 | 2021-08-25 | Alcyone Lifesciences, Inc. | Vorrichtungen und verfahren zur verminderung oder verhinderung von rückstrom in einem abgabesystem |
| CN105122488B (zh) * | 2013-03-14 | 2018-01-26 | 火山公司 | 晶片级换能器涂覆和方法 |
| CN109954646B (zh) | 2013-03-15 | 2021-04-27 | 蝴蝶网络有限公司 | 超声装置 |
| EP3010574B1 (de) | 2013-06-17 | 2019-12-18 | Alcyone Lifesciences, Inc. | Vorrichtungen zum schutz von katheterspitzen und stereotaktische befestigungen für mikrokatheter |
| AU2014293274B2 (en) | 2013-07-23 | 2018-11-01 | Butterfly Network, Inc. | Interconnectable ultrasound transducer probes and related methods and apparatus |
| WO2015017609A2 (en) | 2013-07-31 | 2015-02-05 | Alcyone Lifesciences, Inc. | Systems and methods for drug delivery, treatment, and monitoring |
| CN104916773B (zh) * | 2014-03-14 | 2017-10-20 | 中国科学院苏州纳米技术与纳米仿生研究所 | 电致变形薄膜阵列、其制备方法及应用 |
| JP6519212B2 (ja) * | 2014-03-27 | 2019-05-29 | セイコーエプソン株式会社 | 圧電素子、圧電デバイスおよびプローブ並びに電子機器および超音波画像装置 |
| JP6495338B2 (ja) | 2014-05-06 | 2019-04-03 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | 超音波トランスデューサチップアセンブリ、超音波プローブ、超音波イメージングシステム並びに超音波アセンブリ及びプローブ製造方法 |
| US10806396B2 (en) | 2015-01-26 | 2020-10-20 | Alcyone Lifesciences, Inc. | Drug delivery methods with tracer |
| CN107851514B (zh) * | 2015-05-27 | 2020-08-21 | 爱普科斯公司 | 基于铋钠锶钛酸盐的介电组合物、其介电元件、电子组件和层叠电子组件 |
| EP3101441B1 (de) * | 2015-06-03 | 2018-05-16 | Pepperl + Fuchs GmbH | Ultraschallwandler |
| CN105149201A (zh) * | 2015-09-25 | 2015-12-16 | 无锡市博阳超声电器有限公司 | 一种超声波换能器 |
| US10497748B2 (en) * | 2015-10-14 | 2019-12-03 | Qualcomm Incorporated | Integrated piezoelectric micromechanical ultrasonic transducer pixel and array |
| JP6728630B2 (ja) * | 2015-10-29 | 2020-07-22 | セイコーエプソン株式会社 | 圧電素子、圧電モジュール、電子機器、及び圧電素子の製造方法 |
| DE102015226143A1 (de) * | 2015-12-21 | 2017-06-22 | Robert Bosch Gmbh | Vielschichtaktor |
| US10531882B2 (en) | 2016-01-04 | 2020-01-14 | Alcyone Lifesciences, Inc. | Methods and devices for treating stroke |
| WO2017189435A1 (en) * | 2016-04-24 | 2017-11-02 | Flodesign Sonics, Inc. | Electronic configuration and control for acoustic standing wave generation |
| JP6805630B2 (ja) * | 2016-08-24 | 2020-12-23 | セイコーエプソン株式会社 | 超音波デバイス、超音波モジュール、及び超音波測定装置 |
| EP3508131A1 (de) * | 2018-01-03 | 2019-07-10 | Koninklijke Philips N.V. | Akustische kopplung eines ultraschallwandlers |
| JP7298225B2 (ja) * | 2019-03-20 | 2023-06-27 | セイコーエプソン株式会社 | Memsデバイス、及び電子機器 |
| KR20210105017A (ko) * | 2020-02-18 | 2021-08-26 | 삼성메디슨 주식회사 | 초음파 프로브 및 그 제조 방법 |
| CN114181428B (zh) * | 2021-12-09 | 2022-12-23 | 四川大学 | 一种具有压电性能的高分子复合膜及其制备和应用 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4401910A (en) * | 1981-11-30 | 1983-08-30 | Analogic Corporation | Multi-focus spiral ultrasonic transducer |
| US4452084A (en) * | 1982-10-25 | 1984-06-05 | Sri International | Inherent delay line ultrasonic transducer and systems |
| JPS59178378A (ja) * | 1983-03-29 | 1984-10-09 | Toshiba Corp | 超音波探触子 |
| JPS6059899A (ja) * | 1983-09-13 | 1985-04-06 | Toshiba Corp | 超音波探触子 |
| US4709361A (en) * | 1986-10-30 | 1987-11-24 | Allied Corporation | Flexural disk transducer |
| US5309411A (en) * | 1992-12-08 | 1994-05-03 | Dehua Huang | Transducer |
| US5433917A (en) | 1993-09-16 | 1995-07-18 | The Penn State Research Foundation | PZT ceramic compositions having reduced sintering temperatures and process for producing same |
| US5488954A (en) * | 1994-09-09 | 1996-02-06 | Georgia Tech Research Corp. | Ultrasonic transducer and method for using same |
| US5894452A (en) | 1994-10-21 | 1999-04-13 | The Board Of Trustees Of The Leland Stanford Junior University | Microfabricated ultrasonic immersion transducer |
| US5619476A (en) | 1994-10-21 | 1997-04-08 | The Board Of Trustees Of The Leland Stanford Jr. Univ. | Electrostatic ultrasonic transducer |
| US5828394A (en) | 1995-09-20 | 1998-10-27 | The Board Of Trustees Of The Leland Stanford Junior University | Fluid drop ejector and method |
| EP0785299A1 (de) * | 1996-01-19 | 1997-07-23 | Murata Manufacturing Co., Ltd. | Dünnmetallschicht und Verfahren zu ihrer Herstellung, akustische Oberflächenwellen anordnung enthaltend diese Schicht und Verfahren zu ihrer Herstellung |
| DE19726355A1 (de) * | 1997-06-21 | 1999-04-15 | Univ Ilmenau Tech | Mikromechanische Resonanzstruktur |
| US6329739B1 (en) * | 1998-06-16 | 2001-12-11 | Oki Electric Industry Co., Ltd. | Surface-acoustic-wave device package and method for fabricating the same |
| JP3303791B2 (ja) * | 1998-09-02 | 2002-07-22 | 株式会社村田製作所 | 電子部品の製造方法 |
| US6548937B1 (en) * | 2002-05-01 | 2003-04-15 | Koninklijke Philips Electronics N.V. | Array of membrane ultrasound transducers |
-
2002
- 2002-05-01 US US10/137,491 patent/US6784600B2/en not_active Expired - Fee Related
-
2003
- 2003-04-28 WO PCT/IB2003/001724 patent/WO2003092916A1/en not_active Ceased
- 2003-04-28 JP JP2004501089A patent/JP4317123B2/ja not_active Expired - Fee Related
- 2003-04-28 AU AU2003219464A patent/AU2003219464A1/en not_active Abandoned
- 2003-04-28 EP EP03715276A patent/EP1503871B1/de not_active Expired - Lifetime
- 2003-04-28 CN CNB038099314A patent/CN100438992C/zh not_active Expired - Fee Related
- 2003-04-28 DE DE60306367T patent/DE60306367T2/de not_active Expired - Lifetime
- 2003-04-28 AT AT03715276T patent/ATE330716T1/de not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| CN100438992C (zh) | 2008-12-03 |
| AU2003219464A1 (en) | 2003-11-17 |
| EP1503871B1 (de) | 2006-06-21 |
| DE60306367D1 (de) | 2006-08-03 |
| DE60306367T2 (de) | 2007-05-31 |
| CN1649678A (zh) | 2005-08-03 |
| US20030205947A1 (en) | 2003-11-06 |
| US6784600B2 (en) | 2004-08-31 |
| JP4317123B2 (ja) | 2009-08-19 |
| EP1503871A1 (de) | 2005-02-09 |
| WO2003092916A1 (en) | 2003-11-13 |
| JP2005523816A (ja) | 2005-08-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |