ATE336799T1 - Mikromechanischer elektrostatischer schalter mit niedriger betätigungsspannung - Google Patents

Mikromechanischer elektrostatischer schalter mit niedriger betätigungsspannung

Info

Publication number
ATE336799T1
ATE336799T1 AT03786074T AT03786074T ATE336799T1 AT E336799 T1 ATE336799 T1 AT E336799T1 AT 03786074 T AT03786074 T AT 03786074T AT 03786074 T AT03786074 T AT 03786074T AT E336799 T1 ATE336799 T1 AT E336799T1
Authority
AT
Austria
Prior art keywords
electrodes
conductor paths
distortion means
distorting
support
Prior art date
Application number
AT03786074T
Other languages
English (en)
Inventor
Philippe Robert
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Application granted granted Critical
Publication of ATE336799T1 publication Critical patent/ATE336799T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0063—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stepped actuation, e.g. actuation voltages applied to different sets of electrodes at different times or different spring constants during actuation

Landscapes

  • Micromachines (AREA)
  • Electronic Switches (AREA)
  • Push-Button Switches (AREA)
  • Contacts (AREA)
AT03786074T 2002-11-28 2003-11-27 Mikromechanischer elektrostatischer schalter mit niedriger betätigungsspannung ATE336799T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0214944A FR2848020B1 (fr) 2002-11-28 2002-11-28 Micro-commutateur electrostatique pour composants a faible tension d'actionnement

Publications (1)

Publication Number Publication Date
ATE336799T1 true ATE336799T1 (de) 2006-09-15

Family

ID=32309783

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03786074T ATE336799T1 (de) 2002-11-28 2003-11-27 Mikromechanischer elektrostatischer schalter mit niedriger betätigungsspannung

Country Status (6)

Country Link
US (1) US7283023B2 (de)
EP (1) EP1565922B1 (de)
AT (1) ATE336799T1 (de)
DE (1) DE60307672T2 (de)
FR (1) FR2848020B1 (de)
WO (1) WO2004051688A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2868591B1 (fr) * 2004-04-06 2006-06-09 Commissariat Energie Atomique Microcommutateur a faible tension d'actionnement et faible consommation
US7466215B2 (en) * 2005-08-04 2008-12-16 Wireless Mems, Inc. Balanced MEMS switch for next generation communication systems
GB0516516D0 (en) * 2005-08-11 2005-09-21 Cosmetic Warriors Ltd Incense candles
US8493081B2 (en) 2009-12-08 2013-07-23 Magna Closures Inc. Wide activation angle pinch sensor section and sensor hook-on attachment principle
US9234979B2 (en) 2009-12-08 2016-01-12 Magna Closures Inc. Wide activation angle pinch sensor section

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9309327D0 (en) * 1993-05-06 1993-06-23 Smith Charles G Bi-stable memory element
US6115231A (en) * 1997-11-25 2000-09-05 Tdk Corporation Electrostatic relay
EP1156504A3 (de) * 2000-05-16 2003-12-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanisches Relais mit verbessertem Schaltverhalten
JP2002075156A (ja) * 2000-09-01 2002-03-15 Nec Corp マイクロスイッチおよびその製造方法
SE0101182D0 (sv) * 2001-04-02 2001-04-02 Ericsson Telefon Ab L M Micro electromechanical switches
US6608268B1 (en) * 2002-02-05 2003-08-19 Memtronics, A Division Of Cogent Solutions, Inc. Proximity micro-electro-mechanical system
US7053736B2 (en) * 2002-09-30 2006-05-30 Teravicta Technologies, Inc. Microelectromechanical device having an active opening switch

Also Published As

Publication number Publication date
US20060164193A1 (en) 2006-07-27
US7283023B2 (en) 2007-10-16
EP1565922B1 (de) 2006-08-16
FR2848020A1 (fr) 2004-06-04
WO2004051688A1 (fr) 2004-06-17
DE60307672T2 (de) 2007-09-06
DE60307672D1 (de) 2006-09-28
EP1565922A1 (de) 2005-08-24
FR2848020B1 (fr) 2005-01-07

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties