ATE342871T1 - Mikrobearbeitete ultraschallwandleranordnung - Google Patents

Mikrobearbeitete ultraschallwandleranordnung

Info

Publication number
ATE342871T1
ATE342871T1 AT02755450T AT02755450T ATE342871T1 AT E342871 T1 ATE342871 T1 AT E342871T1 AT 02755450 T AT02755450 T AT 02755450T AT 02755450 T AT02755450 T AT 02755450T AT E342871 T1 ATE342871 T1 AT E342871T1
Authority
AT
Austria
Prior art keywords
mut
elements
transmit
receive
ultrasonic transducer
Prior art date
Application number
AT02755450T
Other languages
English (en)
Inventor
David G Miller
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Application granted granted Critical
Publication of ATE342871T1 publication Critical patent/ATE342871T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
AT02755450T 2001-07-31 2002-07-26 Mikrobearbeitete ultraschallwandleranordnung ATE342871T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/919,536 US6585653B2 (en) 2001-07-31 2001-07-31 Micro-machined ultrasonic transducer (MUT) array

Publications (1)

Publication Number Publication Date
ATE342871T1 true ATE342871T1 (de) 2006-11-15

Family

ID=25442272

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02755450T ATE342871T1 (de) 2001-07-31 2002-07-26 Mikrobearbeitete ultraschallwandleranordnung

Country Status (8)

Country Link
US (1) US6585653B2 (de)
EP (1) EP1414739B1 (de)
JP (1) JP2005510264A (de)
KR (1) KR20040028630A (de)
CN (1) CN1294075C (de)
AT (1) ATE342871T1 (de)
DE (1) DE60215512T2 (de)
WO (1) WO2003011749A2 (de)

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CN104349722B (zh) * 2012-06-11 2016-08-31 奥林巴斯株式会社 超声波部件以及超声波内窥镜
JP6071285B2 (ja) * 2012-07-06 2017-02-01 キヤノン株式会社 静電容量型トランスデューサ
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KR102250185B1 (ko) * 2014-01-29 2021-05-10 삼성전자주식회사 전기 음향 변환기
KR102207928B1 (ko) 2014-08-13 2021-01-26 삼성전자주식회사 음향 센싱 소자 및 주파수 정보 획득 방법
KR102617888B1 (ko) 2014-08-18 2023-12-22 마우이 이미징, 인코포레이티드 네트워크-기반 초음파 이미징 시스템
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CN109939915B (zh) * 2017-12-20 2020-10-23 深圳先进技术研究院 一种拼接式超声换能器及其制作方法
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Also Published As

Publication number Publication date
EP1414739B1 (de) 2006-10-18
WO2003011749A3 (en) 2003-12-24
CN1535243A (zh) 2004-10-06
DE60215512T2 (de) 2007-09-06
US6585653B2 (en) 2003-07-01
WO2003011749A2 (en) 2003-02-13
DE60215512D1 (de) 2006-11-30
JP2005510264A (ja) 2005-04-21
KR20040028630A (ko) 2004-04-03
US20030028109A1 (en) 2003-02-06
EP1414739A2 (de) 2004-05-06
CN1294075C (zh) 2007-01-10

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