ATE342871T1 - Mikrobearbeitete ultraschallwandleranordnung - Google Patents

Mikrobearbeitete ultraschallwandleranordnung

Info

Publication number
ATE342871T1
ATE342871T1 AT02755450T AT02755450T ATE342871T1 AT E342871 T1 ATE342871 T1 AT E342871T1 AT 02755450 T AT02755450 T AT 02755450T AT 02755450 T AT02755450 T AT 02755450T AT E342871 T1 ATE342871 T1 AT E342871T1
Authority
AT
Austria
Prior art keywords
mut
elements
transmit
receive
ultrasonic transducer
Prior art date
Application number
AT02755450T
Other languages
English (en)
Inventor
David G Miller
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Application granted granted Critical
Publication of ATE342871T1 publication Critical patent/ATE342871T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
AT02755450T 2001-07-31 2002-07-26 Mikrobearbeitete ultraschallwandleranordnung ATE342871T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/919,536 US6585653B2 (en) 2001-07-31 2001-07-31 Micro-machined ultrasonic transducer (MUT) array

Publications (1)

Publication Number Publication Date
ATE342871T1 true ATE342871T1 (de) 2006-11-15

Family

ID=25442272

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02755450T ATE342871T1 (de) 2001-07-31 2002-07-26 Mikrobearbeitete ultraschallwandleranordnung

Country Status (8)

Country Link
US (1) US6585653B2 (de)
EP (1) EP1414739B1 (de)
JP (1) JP2005510264A (de)
KR (1) KR20040028630A (de)
CN (1) CN1294075C (de)
AT (1) ATE342871T1 (de)
DE (1) DE60215512T2 (de)
WO (1) WO2003011749A2 (de)

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CN102279224B (zh) * 2011-03-08 2013-05-08 中国航空工业集团公司北京航空制造工程研究所 一种超声自适应跟踪扫描阵列换能器
JP5875244B2 (ja) * 2011-04-06 2016-03-02 キヤノン株式会社 電気機械変換装置及びその作製方法
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JP6407719B2 (ja) 2011-12-01 2018-10-17 マウイ イマギング，インコーポレーテッド ピングベース及び多数開口ドップラー超音波を用いた運動の検出
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US10499878B2 (en) * 2012-07-26 2019-12-10 Interson Corporation Portable ultrasonic imaging probe including a transducer array
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KR102207928B1 (ko) 2014-08-13 2021-01-26 삼성전자주식회사 음향 센싱 소자 및 주파수 정보 획득 방법
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CN107613878B (zh) 2015-03-30 2021-04-06 毛伊图像公司 用于检测物体运动的超声成像系统和方法
US10413938B2 (en) * 2015-11-18 2019-09-17 Kolo Medical, Ltd. Capacitive micromachined ultrasound transducers having varying properties
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CN110325293B (zh) * 2016-12-22 2021-06-22 皇家飞利浦有限公司 电容式射频微机电开关的系统和操作方法
CN109939915B (zh) * 2017-12-20 2020-10-23 深圳先进技术研究院 一种拼接式超声换能器及其制作方法
IT201800002952A1 (it) 2018-02-22 2019-08-22 St Microelectronics Srl Trasduttore ultrasonico microlavorato (mut) perfezionato, metodo di fabbricazione del mut, e metodo di progettazione del mut
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Also Published As

Publication number Publication date
US6585653B2 (en) 2003-07-01
KR20040028630A (ko) 2004-04-03
WO2003011749A2 (en) 2003-02-13
EP1414739B1 (de) 2006-10-18
WO2003011749A3 (en) 2003-12-24
EP1414739A2 (de) 2004-05-06
DE60215512D1 (de) 2006-11-30
DE60215512T2 (de) 2007-09-06
CN1294075C (zh) 2007-01-10
JP2005510264A (ja) 2005-04-21
CN1535243A (zh) 2004-10-06
US20030028109A1 (en) 2003-02-06

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