ATE342871T1 - Mikrobearbeitete ultraschallwandleranordnung - Google Patents

Mikrobearbeitete ultraschallwandleranordnung

Info

Publication number
ATE342871T1
ATE342871T1 AT02755450T AT02755450T ATE342871T1 AT E342871 T1 ATE342871 T1 AT E342871T1 AT 02755450 T AT02755450 T AT 02755450T AT 02755450 T AT02755450 T AT 02755450T AT E342871 T1 ATE342871 T1 AT E342871T1
Authority
AT
Austria
Prior art keywords
mut
elements
transmit
receive
ultrasonic transducer
Prior art date
Application number
AT02755450T
Other languages
English (en)
Inventor
David G Miller
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Application granted granted Critical
Publication of ATE342871T1 publication Critical patent/ATE342871T1/de

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292Electrostatic transducers, e.g. electret-type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
AT02755450T 2001-07-31 2002-07-26 Mikrobearbeitete ultraschallwandleranordnung ATE342871T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/919,536 US6585653B2 (en) 2001-07-31 2001-07-31 Micro-machined ultrasonic transducer (MUT) array

Publications (1)

Publication Number Publication Date
ATE342871T1 true ATE342871T1 (de) 2006-11-15

Family

ID=25442272

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02755450T ATE342871T1 (de) 2001-07-31 2002-07-26 Mikrobearbeitete ultraschallwandleranordnung

Country Status (8)

Country Link
US (1) US6585653B2 (de)
EP (1) EP1414739B1 (de)
JP (1) JP2005510264A (de)
KR (1) KR20040028630A (de)
CN (1) CN1294075C (de)
AT (1) ATE342871T1 (de)
DE (1) DE60215512T2 (de)
WO (1) WO2003011749A2 (de)

Families Citing this family (71)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6605043B1 (en) * 1998-11-19 2003-08-12 Acuson Corp. Diagnostic medical ultrasound systems and transducers utilizing micro-mechanical components
US6865140B2 (en) * 2003-03-06 2005-03-08 General Electric Company Mosaic arrays using micromachined ultrasound transducers
US7313053B2 (en) * 2003-03-06 2007-12-25 General Electric Company Method and apparatus for controlling scanning of mosaic sensor array
US7443765B2 (en) 2003-03-06 2008-10-28 General Electric Company Reconfigurable linear sensor arrays for reduced channel count
US7280435B2 (en) * 2003-03-06 2007-10-09 General Electric Company Switching circuitry for reconfigurable arrays of sensor elements
US7257051B2 (en) * 2003-03-06 2007-08-14 General Electric Company Integrated interface electronics for reconfigurable sensor array
US7353056B2 (en) 2003-03-06 2008-04-01 General Electric Company Optimized switching configurations for reconfigurable arrays of sensor elements
JP2004350701A (ja) * 2003-05-26 2004-12-16 Olympus Corp 超音波内視鏡装置
CN1863485B (zh) * 2003-10-02 2010-09-08 株式会社日立医药 超声波探头、超声波成像设备以及超声波成像方法
US7646133B2 (en) 2004-02-27 2010-01-12 Georgia Tech Research Corporation Asymmetric membrane cMUT devices and fabrication methods
WO2005084284A2 (en) 2004-02-27 2005-09-15 Georgia Tech Research Corporation Multiple element electrode cmut devices and fabrication methods
JP2007531357A (ja) 2004-02-27 2007-11-01 ジョージア テック リサーチ コーポレイション ハーモニックcmut素子及び製造方法
JP2008510324A (ja) * 2004-03-11 2008-04-03 ジョージア テック リサーチ コーポレイション 非対称薄膜cMUT素子及び製作方法
US20050215909A1 (en) * 2004-03-19 2005-09-29 Siemens Medical Solutions Usa, Inc. Electric field control for capacitive micromachined ultrasound transducers
US20060004289A1 (en) * 2004-06-30 2006-01-05 Wei-Cheng Tian High sensitivity capacitive micromachined ultrasound transducer
JP4503423B2 (ja) * 2004-11-29 2010-07-14 富士フイルム株式会社 容量性マイクロマシン超音波振動子及びその製造方法、並びに、超音波トランスデューサアレイ
RU2404711C2 (ru) * 2005-04-25 2010-11-27 Конинклейке Филипс Электроникс Н.В. Способ и устройство для непрерывной визуализации посредством системы ультразвукового преобразователя
CN101223633A (zh) * 2005-05-18 2008-07-16 科隆科技公司 穿过晶片的互连
CA2607887A1 (en) 2005-05-18 2006-11-23 Kolo Technologies, Inc. Methods for fabricating micro-electro-mechanical devices
CA2608164A1 (en) * 2005-06-17 2006-12-21 Kolo Technologies, Inc. Micro-electro-mechanical transducer having an insulation extension
US20070016056A1 (en) * 2005-07-15 2007-01-18 Scott Kerwin Methods and systems for providing control components in an ultrasound system
US8477983B2 (en) * 2005-08-23 2013-07-02 Analog Devices, Inc. Multi-microphone system
JP4776349B2 (ja) * 2005-11-14 2011-09-21 株式会社日立メディコ 超音波撮像装置
US7764003B2 (en) * 2006-04-04 2010-07-27 Kolo Technologies, Inc. Signal control in micromachined ultrasonic transducer
KR100781467B1 (ko) * 2006-07-13 2007-12-03 학교법인 포항공과대학교 공기중 파라메트릭 트랜스미팅 어레이를 이용한 초지향성초음파 거리측정을 위한 멤스 기반의 다공진 초음파트랜스듀서
JP4885779B2 (ja) 2007-03-29 2012-02-29 オリンパスメディカルシステムズ株式会社 静電容量型トランスデューサ装置及び体腔内超音波診断システム
EP2164396A2 (de) * 2007-06-01 2010-03-24 Koninklijke Philips Electronics N.V. Leichtgewichtige drahtlose ultraschallsonde
JP5019997B2 (ja) * 2007-08-28 2012-09-05 オリンパスメディカルシステムズ株式会社 超音波トランスデューサ、超音波診断装置及び超音波顕微鏡
US8047995B2 (en) 2007-08-28 2011-11-01 Olympus Medical Systems Corp. Ultrasonic transducer, method of manufacturing ultrasonic transducer, ultrasonic diagnostic apparatus, and ultrasonic microscope
ITTO20070779A1 (it) * 2007-11-05 2009-05-06 Fond Istituto Italiano Di T Ec Disposizione di sensori tattili e sistema sensoriale corrispondente
JP5438983B2 (ja) * 2008-02-08 2014-03-12 株式会社東芝 超音波プローブ及び超音波診断装置
EP2254476A4 (de) * 2008-02-29 2013-10-30 Stc Unm Therapeutischer ultraschallkopfchip mit integriertem ultraschallbildgeber und herstellungsverfahren dafür
JP4594995B2 (ja) 2008-04-16 2010-12-08 オリンパスメディカルシステムズ株式会社 超音波トランスデューサ及び電子機器
GB2459863B (en) * 2008-05-07 2011-01-19 Wolfson Microelectronics Plc Mems transducers
GB2459866B (en) * 2008-05-07 2011-08-31 Wolfson Microelectronics Plc Mems transducer
CN102056680B (zh) * 2008-05-07 2015-02-18 沃福森微电子股份有限公司 微机电系统换能器
JP2010042146A (ja) * 2008-08-13 2010-02-25 Ge Medical Systems Global Technology Co Llc 超音波撮像装置
FR2939003B1 (fr) * 2008-11-21 2011-02-25 Commissariat Energie Atomique Cellule cmut formee d'une membrane de nano-tubes ou de nano-fils ou de nano-poutres et dispositif d'imagerie acoustique ultra haute frequence comprenant une pluralite de telles cellules
JP5293557B2 (ja) * 2008-12-17 2013-09-18 セイコーエプソン株式会社 超音波トランスデューサー、超音波トランスデューサーアレイ及び超音波デバイス
BRPI1006205B8 (pt) * 2009-03-23 2021-07-27 Koninklijke Philips Electronics Nv câmara de ar de medição com um chip sensor e método para a medição da concentração de pelo menos um componente de um gás
EP2536339B1 (de) 2010-02-18 2024-05-15 Maui Imaging, Inc. Punktquellenübertragung und schallgeschwindigkeitskorrektur mittels ultraschallbildgebung mit mehreren blenden
US9668714B2 (en) 2010-04-14 2017-06-06 Maui Imaging, Inc. Systems and methods for improving ultrasound image quality by applying weighting factors
JP6092109B2 (ja) 2010-10-13 2017-03-08 マウイ イマギング,インコーポレーテッド 凹面超音波トランスデューサ及び3dアレイ
JP5734620B2 (ja) 2010-10-27 2015-06-17 オリンパス株式会社 超音波プローブ装置及びその制御方法
CN102279224B (zh) * 2011-03-08 2013-05-08 中国航空工业集团公司北京航空制造工程研究所 一种超声自适应跟踪扫描阵列换能器
JP5875244B2 (ja) * 2011-04-06 2016-03-02 キヤノン株式会社 電気機械変換装置及びその作製方法
WO2013065365A1 (ja) 2011-11-01 2013-05-10 オリンパスメディカルシステムズ株式会社 超音波振動子エレメントおよび超音波内視鏡
WO2013082455A1 (en) 2011-12-01 2013-06-06 Maui Imaging, Inc. Motion detection using ping-based and multiple aperture doppler ultrasound
JP2015503404A (ja) 2011-12-29 2015-02-02 マウイ イマギング,インコーポレーテッド 任意経路のmモード超音波イメージング
JP6438769B2 (ja) 2012-02-21 2018-12-19 マウイ イマギング,インコーポレーテッド 多数開口超音波を用いた物質の硬度の決定
CN104349722B (zh) 2012-06-11 2016-08-31 奥林巴斯株式会社 超声波部件以及超声波内窥镜
JP6071285B2 (ja) * 2012-07-06 2017-02-01 キヤノン株式会社 静電容量型トランスデューサ
US10499878B2 (en) * 2012-07-26 2019-12-10 Interson Corporation Portable ultrasonic imaging probe including a transducer array
WO2014026185A1 (en) 2012-08-10 2014-02-13 Maui Imaging, Inc. Calibration of multiple aperture ultrasound probes
CN103676827A (zh) 2012-09-06 2014-03-26 Ip音乐集团有限公司 用于远程控制音频设备的系统和方法
KR101919013B1 (ko) 2012-09-13 2019-02-08 삼성전자주식회사 미세가공 초음파 변환기 어레이
US9883848B2 (en) 2013-09-13 2018-02-06 Maui Imaging, Inc. Ultrasound imaging using apparent point-source transmit transducer
KR102250185B1 (ko) * 2014-01-29 2021-05-10 삼성전자주식회사 전기 음향 변환기
KR102207928B1 (ko) 2014-08-13 2021-01-26 삼성전자주식회사 음향 센싱 소자 및 주파수 정보 획득 방법
KR102617888B1 (ko) 2014-08-18 2023-12-22 마우이 이미징, 인코포레이티드 네트워크-기반 초음파 이미징 시스템
KR102681141B1 (ko) 2015-03-30 2024-07-02 마우이 이미징, 인코포레이티드 오브젝트 모션을 검출하기 위한 초음파 이미징 시스템들 및 방법들
US10413938B2 (en) * 2015-11-18 2019-09-17 Kolo Medical, Ltd. Capacitive micromachined ultrasound transducers having varying properties
EP4697068A3 (de) * 2016-01-27 2026-04-22 Maui Imaging, Inc. Ultraschallbildgebung mit spärlichen arraysonden
US10816650B2 (en) 2016-05-27 2020-10-27 Interson Corporation Ultrasonic imaging probe including composite aperture receiving array
EP4289521A3 (de) * 2016-12-22 2024-03-27 Koninklijke Philips N.V. Systeme und verfahren zum betrieb kapazitiver mikroelektromechanischer hochfrequenzschalter
CN109939915B (zh) * 2017-12-20 2020-10-23 深圳先进技术研究院 一种拼接式超声换能器及其制作方法
IT201800002952A1 (it) * 2018-02-22 2019-08-22 St Microelectronics Srl Trasduttore ultrasonico microlavorato (mut) perfezionato, metodo di fabbricazione del mut, e metodo di progettazione del mut
FR3086063B1 (fr) * 2018-09-13 2022-11-11 Moduleus Dispositif d'imagerie ultrasonore
CN110560352B (zh) * 2019-08-15 2021-04-02 武汉大学 基于Helmholtz共振腔的可调频超声传感器阵列
JP7724853B2 (ja) 2020-10-21 2025-08-18 マウイ イマギング,インコーポレーテッド 多数開口超音波を用いた組織の特徴付けのためのシステム及び方法
CN116635162A (zh) 2020-11-02 2023-08-22 毛伊图像公司 用于改进超声图像质量的系统和方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3512500B2 (ja) * 1994-12-26 2004-03-29 株式会社東芝 超音波トランスジューサとその製造方法
US5938612A (en) * 1997-05-05 1999-08-17 Creare Inc. Multilayer ultrasonic transducer array including very thin layer of transducer elements
US6013032A (en) * 1998-03-13 2000-01-11 Hewlett-Packard Company Beamforming methods and apparatus for three-dimensional ultrasound imaging using two-dimensional transducer array
US6381197B1 (en) * 1999-05-11 2002-04-30 Bernard J Savord Aperture control and apodization in a micro-machined ultrasonic transducer
US6314057B1 (en) * 1999-05-11 2001-11-06 Rodney J Solomon Micro-machined ultrasonic transducer array
US6271620B1 (en) * 1999-05-20 2001-08-07 Sen Corporation Acoustic transducer and method of making the same
US6262946B1 (en) * 1999-09-29 2001-07-17 The Board Of Trustees Of The Leland Stanford Junior University Capacitive micromachined ultrasonic transducer arrays with reduced cross-coupling

Also Published As

Publication number Publication date
US20030028109A1 (en) 2003-02-06
DE60215512T2 (de) 2007-09-06
KR20040028630A (ko) 2004-04-03
WO2003011749A3 (en) 2003-12-24
DE60215512D1 (de) 2006-11-30
WO2003011749A2 (en) 2003-02-13
CN1535243A (zh) 2004-10-06
CN1294075C (zh) 2007-01-10
EP1414739A2 (de) 2004-05-06
EP1414739B1 (de) 2006-10-18
US6585653B2 (en) 2003-07-01
JP2005510264A (ja) 2005-04-21

Similar Documents

Publication Publication Date Title
DE60215512D1 (de) Mikrobearbeitete Ultraschallwandleranordnung
NI200800193A (es) Anticuerpos humanos anti-il-23, composiciones, métodos y usos.
AU2003223177A1 (en) Power amplifier array with same type predistortion amplifier
DE60303679D1 (de) Elektrophysiologische elektrode mit mehreren energieversorgungsleitungen
WO2003063208A3 (en) Array-based architecture for molecular electronics
CR7875A (es) Variantes de inmunoglobina y usos de esto
BRPI0507118A (pt) polipeptìdeos de interferon humano modificado e seus usos
DE60332272D1 (de) Niedrigprofilierte implantierbare medizinische vorrichtung
AU2003245360A1 (en) Wavelength-selective 1xn2 switches with two-dimensional input/output fiber arrays
TW200513021A (en) Low power consumption adaptive power amplifier
ATE347057T1 (de) Federelement
ATE460134T1 (de) Doppel entenschnabel-ventilanordnung
TW200710864A (en) Semiconductor device
DK1368274T3 (da) Indstillelig sadel
ATE293786T1 (de) Sensoreinrichtung zur abfrage einer sensoreinrichtung
MX2008006834A (es) Modulo transductor ultrasonico que comprende una capa transmisora y una capa receptora.
TW200501040A (en) Display device
ATE497506T1 (de) Sars-verwandte proteine
ATE550885T1 (de) Elektroakustische line-array-wandlung
DE60008800D1 (de) Programmierbare pufferschaltung
WO2004075396A3 (en) Darlington cascode
ATE338380T1 (de) Sende-empfangs-modul für radar
DK1743029T3 (da) Cellefremstilling
ATE335651T1 (de) Haltevorrichtung mit dämpfer
EP1654522A4 (de) Lastmess-wandler mit elastischer struktur und messeinrichtung mit induzierter spannung und lastmesssystem damit

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties