ATE345444T1 - Verbesserungen an trockenpumpen - Google Patents

Verbesserungen an trockenpumpen

Info

Publication number
ATE345444T1
ATE345444T1 AT03748302T AT03748302T ATE345444T1 AT E345444 T1 ATE345444 T1 AT E345444T1 AT 03748302 T AT03748302 T AT 03748302T AT 03748302 T AT03748302 T AT 03748302T AT E345444 T1 ATE345444 T1 AT E345444T1
Authority
AT
Austria
Prior art keywords
pumping mechanism
temperature
controller
steps
predefined
Prior art date
Application number
AT03748302T
Other languages
English (en)
Inventor
Mark Christopher Hope
Original Assignee
Boc Group Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boc Group Plc filed Critical Boc Group Plc
Application granted granted Critical
Publication of ATE345444T1 publication Critical patent/ATE345444T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/19—Temperature

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Control Of Non-Positive-Displacement Pumps (AREA)
  • Medicines Containing Material From Animals Or Micro-Organisms (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Rotary Pumps (AREA)
AT03748302T 2002-10-24 2003-09-24 Verbesserungen an trockenpumpen ATE345444T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0224709.6A GB0224709D0 (en) 2002-10-24 2002-10-24 Improvements in dry pumps

Publications (1)

Publication Number Publication Date
ATE345444T1 true ATE345444T1 (de) 2006-12-15

Family

ID=9946464

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03748302T ATE345444T1 (de) 2002-10-24 2003-09-24 Verbesserungen an trockenpumpen

Country Status (11)

Country Link
US (1) US8398376B2 (de)
EP (1) EP1556614B1 (de)
JP (1) JP4359240B2 (de)
KR (1) KR100983747B1 (de)
CN (1) CN100408854C (de)
AT (1) ATE345444T1 (de)
AU (1) AU2003267611A1 (de)
DE (1) DE60309734T2 (de)
GB (1) GB0224709D0 (de)
TW (1) TWI338744B (de)
WO (1) WO2004038222A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4987660B2 (ja) * 2007-10-12 2012-07-25 株式会社荏原製作所 真空ポンプの運転制御装置及び運転停止方法
DE102011088974A1 (de) * 2011-12-19 2013-06-20 Continental Automotive Gmbh Verfahren zur Anlaufsteuerung einer elektrischen Unterdruckpumpe
WO2016112442A1 (en) * 2015-01-15 2016-07-21 Atlas Copco Airpower, Naamloze Vennootschap Method for controlling a gas supply to a vacuum pump
EP4027016A1 (de) * 2015-01-15 2022-07-13 ATLAS COPCO AIRPOWER, naamloze vennootschap Verfahren zur regelung der geschwindigkeit eines verdichters/einer vakuumpumpe
BE1023207B1 (nl) * 2015-01-15 2016-12-21 Atlas Copco Airpower Naamloze Vennootschap Werkwijze voor het regelen van een gastoevoer naar een vacuümpomp
GB2553374B (en) 2016-09-06 2021-05-12 Edwards Ltd Temperature sensor for a high speed rotating machine
JP7141332B2 (ja) * 2018-12-28 2022-09-22 株式会社荏原製作所 真空ポンプ装置
GB2588890A (en) 2019-10-24 2021-05-19 Edwards Ltd Sensor assembly
GB2602625B (en) 2020-12-15 2023-05-31 Edwards S R O Method for stopping a vacuum pump
CN119021861B (zh) * 2024-09-02 2025-09-23 广东鸿浩半导体设备有限公司 一种适用于干泵的双机测试系统及其测试方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2537696B2 (ja) 1990-09-21 1996-09-25 株式会社荏原製作所 多段真空ポンプ
GB9222227D0 (en) 1992-10-22 1992-12-02 Boc Group Plc Improvements in vacuum pumps
US5443644A (en) 1994-03-15 1995-08-22 Kashiyama Industry Co., Ltd. Gas exhaust system and pump cleaning system for a semiconductor manufacturing apparatus
US5713724A (en) * 1994-11-23 1998-02-03 Coltec Industries Inc. System and methods for controlling rotary screw compressors
JP3550465B2 (ja) * 1996-08-30 2004-08-04 株式会社日立製作所 ターボ真空ポンプ及びその運転方法
JPH11204508A (ja) 1998-01-09 1999-07-30 Toshiba Corp 半導体装置の製造方法及び半導体製造装置
WO1999040322A1 (en) * 1998-02-09 1999-08-12 Ebara Corporation Fluid machinery
US6116032A (en) * 1999-01-12 2000-09-12 Applied Materials, Inc. Method for reducing particulate generation from regeneration of cryogenic vacuum pumps
US6596123B1 (en) 2000-01-28 2003-07-22 Applied Materials, Inc. Method and apparatus for cleaning a semiconductor wafer processing system
JP2001342950A (ja) * 2000-06-01 2001-12-14 Ebara Corp 真空ドライポンプ及びトラップ方法
US20060198735A1 (en) * 2002-08-20 2006-09-07 Naoki Iijima Vacuum pump and method of starting the same
EP1684014A1 (de) * 2004-12-01 2006-07-26 Riello S.p.a. Verfahren zur Steuerung eines mit flüssigen Brennstoff betriebenen Verbrennungssystems

Also Published As

Publication number Publication date
KR100983747B1 (ko) 2010-09-24
EP1556614A1 (de) 2005-07-27
TW200417691A (en) 2004-09-16
JP2006504033A (ja) 2006-02-02
EP1556614B1 (de) 2006-11-15
KR20050055033A (ko) 2005-06-10
AU2003267611A1 (en) 2004-05-13
CN100408854C (zh) 2008-08-06
TWI338744B (en) 2011-03-11
DE60309734T2 (de) 2007-09-20
US20060099083A1 (en) 2006-05-11
CN1688815A (zh) 2005-10-26
WO2004038222A1 (en) 2004-05-06
GB0224709D0 (en) 2002-12-04
DE60309734D1 (de) 2006-12-28
US8398376B2 (en) 2013-03-19
JP4359240B2 (ja) 2009-11-04

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Legal Events

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