ATE350580T1 - Elektrostatisch betätigte pumpenarray - Google Patents

Elektrostatisch betätigte pumpenarray

Info

Publication number
ATE350580T1
ATE350580T1 AT98965368T AT98965368T ATE350580T1 AT E350580 T1 ATE350580 T1 AT E350580T1 AT 98965368 T AT98965368 T AT 98965368T AT 98965368 T AT98965368 T AT 98965368T AT E350580 T1 ATE350580 T1 AT E350580T1
Authority
AT
Austria
Prior art keywords
diaphragm
electrodes
cell
fluid
mesopump
Prior art date
Application number
AT98965368T
Other languages
English (en)
Inventor
Cleopatra Cabuz
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Application granted granted Critical
Publication of ATE350580T1 publication Critical patent/ATE350580T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/043—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms two or more plate-like pumping flexible members in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Saccharide Compounds (AREA)
  • Steroid Compounds (AREA)
  • Seal Device For Vehicle (AREA)
  • Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
AT98965368T 1998-11-06 1998-11-06 Elektrostatisch betätigte pumpenarray ATE350580T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US1998/023658 WO2000028215A1 (en) 1998-11-06 1998-11-06 Electrostatically actuated pumping array

Publications (1)

Publication Number Publication Date
ATE350580T1 true ATE350580T1 (de) 2007-01-15

Family

ID=22268244

Family Applications (1)

Application Number Title Priority Date Filing Date
AT98965368T ATE350580T1 (de) 1998-11-06 1998-11-06 Elektrostatisch betätigte pumpenarray

Country Status (7)

Country Link
EP (1) EP1163446B1 (de)
CN (1) CN1327132C (de)
AT (1) ATE350580T1 (de)
CA (1) CA2350076C (de)
DE (1) DE69836836T2 (de)
HK (1) HK1046945B (de)
WO (1) WO2000028215A1 (de)

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US7420659B1 (en) 2000-06-02 2008-09-02 Honeywell Interantional Inc. Flow control system of a cartridge
US6568286B1 (en) * 2000-06-02 2003-05-27 Honeywell International Inc. 3D array of integrated cells for the sampling and detection of air bound chemical and biological species
US6729856B2 (en) 2001-10-09 2004-05-04 Honeywell International Inc. Electrostatically actuated pump with elastic restoring forces
US6637476B2 (en) 2002-04-01 2003-10-28 Protedyne Corporation Robotically manipulable sample handling tool
DE10302304B3 (de) * 2003-01-22 2004-01-29 Festo Ag & Co. Elektronisches Mikroventil und Verfahren zu seinem Betreiben
US7249529B2 (en) 2003-03-28 2007-07-31 Protedyne Corporation Robotically manipulable sample handling tool
US7100453B2 (en) 2003-12-30 2006-09-05 Honeywell International Inc. Modified dual diaphragm pressure sensor
US6991213B2 (en) * 2003-12-30 2006-01-31 Honeywell International Inc. Dual diaphragm valve
AU2005317188B2 (en) * 2004-12-14 2011-06-09 Mark Banister Actuator pump system
US7222639B2 (en) 2004-12-29 2007-05-29 Honeywell International Inc. Electrostatically actuated gas valve
US7328882B2 (en) 2005-01-06 2008-02-12 Honeywell International Inc. Microfluidic modulating valve
US7445017B2 (en) 2005-01-28 2008-11-04 Honeywell International Inc. Mesovalve modulator
US7517201B2 (en) 2005-07-14 2009-04-14 Honeywell International Inc. Asymmetric dual diaphragm pump
US7353747B2 (en) * 2005-07-28 2008-04-08 Ethicon Endo-Surgery, Inc. Electroactive polymer-based pump
US7624755B2 (en) 2005-12-09 2009-12-01 Honeywell International Inc. Gas valve with overtravel
US7523762B2 (en) 2006-03-22 2009-04-28 Honeywell International Inc. Modulating gas valves and systems
CA2657435A1 (en) 2006-07-10 2008-07-03 Medipacs, Inc. Super elastic epoxy hydrogel
DE602006009405D1 (de) 2006-10-28 2009-11-05 Sensirion Holding Ag Mehrzellenpumpe
NL2000466C2 (nl) * 2007-02-02 2008-08-05 Grood Johannes Petrus Wilhelmu Werkwijze en inrichting voor het dispenseren van een vloeistof.
US9995295B2 (en) 2007-12-03 2018-06-12 Medipacs, Inc. Fluid metering device
JP2013501882A (ja) * 2009-08-11 2013-01-17 プロミネント ドジールテヒニク ゲーエムベーハー ダイヤフラム装置
US9238102B2 (en) 2009-09-10 2016-01-19 Medipacs, Inc. Low profile actuator and improved method of caregiver controlled administration of therapeutics
US8556392B2 (en) 2009-11-24 2013-10-15 De Grood Innovations B.V. Method and device for dispensing a liquid
US9500186B2 (en) 2010-02-01 2016-11-22 Medipacs, Inc. High surface area polymer actuator with gas mitigating components
US9846440B2 (en) 2011-12-15 2017-12-19 Honeywell International Inc. Valve controller configured to estimate fuel comsumption
US8947242B2 (en) 2011-12-15 2015-02-03 Honeywell International Inc. Gas valve with valve leakage test
US8899264B2 (en) 2011-12-15 2014-12-02 Honeywell International Inc. Gas valve with electronic proof of closure system
US9851103B2 (en) 2011-12-15 2017-12-26 Honeywell International Inc. Gas valve with overpressure diagnostics
US8839815B2 (en) 2011-12-15 2014-09-23 Honeywell International Inc. Gas valve with electronic cycle counter
US8905063B2 (en) 2011-12-15 2014-12-09 Honeywell International Inc. Gas valve with fuel rate monitor
US9557059B2 (en) 2011-12-15 2017-01-31 Honeywell International Inc Gas valve with communication link
US9835265B2 (en) 2011-12-15 2017-12-05 Honeywell International Inc. Valve with actuator diagnostics
US9074770B2 (en) 2011-12-15 2015-07-07 Honeywell International Inc. Gas valve with electronic valve proving system
US9995486B2 (en) 2011-12-15 2018-06-12 Honeywell International Inc. Gas valve with high/low gas pressure detection
US10000605B2 (en) 2012-03-14 2018-06-19 Medipacs, Inc. Smart polymer materials with excess reactive molecules
US9234661B2 (en) 2012-09-15 2016-01-12 Honeywell International Inc. Burner control system
US10422531B2 (en) 2012-09-15 2019-09-24 Honeywell International Inc. System and approach for controlling a combustion chamber
DE102013209866B4 (de) 2013-05-28 2021-11-04 Robert Bosch Gmbh Vorrichtung mit vorgegebener Fluidverdrängung
EP2868970B1 (de) 2013-10-29 2020-04-22 Honeywell Technologies Sarl Regelungsvorrichtung
US10024439B2 (en) 2013-12-16 2018-07-17 Honeywell International Inc. Valve over-travel mechanism
US9841122B2 (en) 2014-09-09 2017-12-12 Honeywell International Inc. Gas valve with electronic valve proving system
US9645584B2 (en) 2014-09-17 2017-05-09 Honeywell International Inc. Gas valve with electronic health monitoring
CN104358674A (zh) * 2014-10-24 2015-02-18 安徽理工大学 一种基于超磁致伸缩薄膜驱动器的双平面线圈驱动式微泵
CN105201796A (zh) * 2015-10-29 2015-12-30 宁波大学 一种压电蠕动微泵
US10503181B2 (en) 2016-01-13 2019-12-10 Honeywell International Inc. Pressure regulator
JP6292359B2 (ja) * 2016-02-01 2018-03-14 株式会社村田製作所 気体制御装置
US10564062B2 (en) 2016-10-19 2020-02-18 Honeywell International Inc. Human-machine interface for gas valve
WO2018122080A1 (en) * 2016-12-30 2018-07-05 Koninklijke Philips N.V. Electrostatic peristaltic pump and method of operation
CA3055775A1 (en) 2017-03-13 2018-09-20 Stephen Alan MARSH Micro pump systems and processing techniques
TW201912248A (zh) 2017-08-31 2019-04-01 研能科技股份有限公司 氣體輸送裝置
US11073281B2 (en) 2017-12-29 2021-07-27 Honeywell International Inc. Closed-loop programming and control of a combustion appliance
DE102018207858B4 (de) 2018-05-18 2021-06-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Haltevorrichtung zum Herstellen einer Mikropumpe mit mechanisch vorgespanntem Membranaktor
US10697815B2 (en) 2018-06-09 2020-06-30 Honeywell International Inc. System and methods for mitigating condensation in a sensor module
WO2020053485A1 (en) * 2018-09-14 2020-03-19 Teknologian Tutkimuskeskus Vtt Oy Pressure sensor
CN109771740B (zh) * 2019-03-01 2020-11-27 浙江师范大学 一种气动输液装置
DE102019004450B4 (de) 2019-06-26 2024-03-14 Drägerwerk AG & Co. KGaA Mikropumpensystem und Verfahren zur Führung eines kompressiblen Fluids
CN113482893B (zh) * 2021-06-10 2022-04-01 浙江大学 一种基于介电弹性材料的柔性泵
CN115387986A (zh) * 2022-09-21 2022-11-25 北京京东方技术开发有限公司 气味释放装置、设备及其制备方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB514815A (en) * 1938-06-08 1939-11-17 Nils Nilsen Straatveit Improvements connected with reciprocating compressors or pumps
DE3926066A1 (de) * 1989-08-07 1991-02-14 Ibm Deutschland Mikromechanische kompressorkaskade und verfahren zur druckerhoehung bei extrem niedrigem arbeitsdruck
EP0518524B1 (de) * 1991-05-30 1996-09-04 Hitachi, Ltd. Ventil und seine Verwendung in einer Vorrichtung hergestellt aus Halbleitermaterial

Also Published As

Publication number Publication date
DE69836836T2 (de) 2007-06-28
CN1354823A (zh) 2002-06-19
EP1163446B1 (de) 2007-01-03
HK1046945B (zh) 2008-05-23
DE69836836D1 (de) 2007-02-15
CA2350076C (en) 2008-12-30
CN1327132C (zh) 2007-07-18
WO2000028215A1 (en) 2000-05-18
HK1046945A1 (zh) 2003-01-30
EP1163446A1 (de) 2001-12-19
CA2350076A1 (en) 2000-05-18

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