ATE35328T1 - Polyamidester-fotoresist-formulierungen gesteigerter empfindlichkeit. - Google Patents

Polyamidester-fotoresist-formulierungen gesteigerter empfindlichkeit.

Info

Publication number: ATE35328T1
Authority: AT; Austria
Prior art keywords: polyamidester; fotoresist; formulations; increased sensitivity; sensitivity
Prior art date: 1985-01-15

Application number

AT86100099T

Other languages

English (en)

Inventor

Hans-Joachim Dr Merrem

Rudolf Dr Klug

Thomas Dr Herold

Original Assignee

Merck Patent Gmbh

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1985-01-15

Filing date

1986-01-07

Publication date

1988-07-15

1985-01-15 Priority claimed from DE19853501028 external-priority patent/DE3501028A1/de

1985-04-06 Priority claimed from DE19853512544 external-priority patent/DE3512544A1/de

1986-01-07 Application filed by Merck Patent Gmbh filed Critical Merck Patent Gmbh

1986-01-07 Priority claimed from EP86100099A external-priority patent/EP0188205B1/de

1988-07-15 Application granted granted Critical

1988-07-15 Publication of ATE35328T1 publication Critical patent/ATE35328T1/de

Links

239000000203 mixture Substances 0.000 title 1
230000035945 sensitivity Effects 0.000 title 1

AT86100099T 1985-01-15 1986-01-07 Polyamidester-fotoresist-formulierungen gesteigerter empfindlichkeit. ATE35328T1 (de)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
DE19853501028 DE3501028A1 (de)	1985-01-15	1985-01-15	Polyamidester-fotoresist-formulierungen gesteigerter empfindlichkeit
DE19853512544 DE3512544A1 (de)	1985-04-06	1985-04-06	Polyamidester-fotoresist-formulierungen gesteigerter empfindlichkeit
EP86100099A EP0188205B1 (de)	1985-01-15	1986-01-07	Polyamidester-Fotoresist-Formulierungen gesteigerter Empfindlichkeit

Publications (1)

Publication Number	Publication Date
ATE35328T1 true ATE35328T1 (de)	1988-07-15

Family

ID=27192723

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AT86100099T ATE35328T1 (de)	1985-01-15	1986-01-07	Polyamidester-fotoresist-formulierungen gesteigerter empfindlichkeit.

Country Status (1)

Country	Link
AT (1)	ATE35328T1 (de)

1986
- 1986-01-07 AT AT86100099T patent/ATE35328T1/de not_active IP Right Cessation

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Legal Events

Date	Code	Title	Description
1989-06-15	EEIH	Change in the person of patent owner
1997-10-15	REN	Ceased due to non-payment of the annual fee