ATE355543T1 - Spiegel einer laserbearbeitungsmaschine - Google Patents

Spiegel einer laserbearbeitungsmaschine

Info

Publication number
ATE355543T1
ATE355543T1 AT02026664T AT02026664T ATE355543T1 AT E355543 T1 ATE355543 T1 AT E355543T1 AT 02026664 T AT02026664 T AT 02026664T AT 02026664 T AT02026664 T AT 02026664T AT E355543 T1 ATE355543 T1 AT E355543T1
Authority
AT
Austria
Prior art keywords
mirror
laser processing
processing machine
membrane
borders
Prior art date
Application number
AT02026664T
Other languages
English (en)
Inventor
Christian Boettcher
Original Assignee
Trumpf Werkzeugmaschinen Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trumpf Werkzeugmaschinen Gmbh filed Critical Trumpf Werkzeugmaschinen Gmbh
Application granted granted Critical
Publication of ATE355543T1 publication Critical patent/ATE355543T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Laser Beam Processing (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Lasers (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
AT02026664T 2002-11-29 2002-11-29 Spiegel einer laserbearbeitungsmaschine ATE355543T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP02026664A EP1424584B1 (de) 2002-11-29 2002-11-29 Spiegel einer Laserbearbeitungsmaschine

Publications (1)

Publication Number Publication Date
ATE355543T1 true ATE355543T1 (de) 2006-03-15

Family

ID=32241312

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02026664T ATE355543T1 (de) 2002-11-29 2002-11-29 Spiegel einer laserbearbeitungsmaschine

Country Status (5)

Country Link
US (1) US7102806B2 (de)
EP (1) EP1424584B1 (de)
JP (1) JP4603790B2 (de)
AT (1) ATE355543T1 (de)
DE (1) DE50209599D1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4182034B2 (ja) * 2004-08-05 2008-11-19 ファナック株式会社 切断加工用レーザ装置
DE202005006838U1 (de) * 2005-04-29 2006-08-31 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Optisches Modul zum Einbau in den Laser einer Laserbearbeitungsmaschine
JP4691166B2 (ja) * 2005-12-23 2011-06-01 トルンプフ ヴェルクツォイクマシーネン ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディートゲゼルシャフト スキャナヘッド及び当該スキャナヘッドを用いた加工機器
US8648279B2 (en) * 2008-04-04 2014-02-11 Mitsubishi Electric Corporation Process control apparatus and laser processing apparatus
US8243133B1 (en) * 2008-06-28 2012-08-14 Aoptix Technologies, Inc. Scale-invariant, resolution-invariant iris imaging using reflection from the eye
JP2010040784A (ja) * 2008-08-05 2010-02-18 Fanuc Ltd レーザ加工装置
DE102013008647B4 (de) * 2013-05-21 2019-02-21 Lt-Ultra Precision Technology Gmbh Laserbearbeitungsvorrichtung mit zwei adaptiven Spiegeln
DE102013212685A1 (de) 2013-06-28 2014-12-31 Trumpf Laser- Und Systemtechnik Gmbh Strahlbeeinflussungsoptik und Strahlformungssystem
US9360600B2 (en) * 2013-11-20 2016-06-07 Asml Netherlands B.V. System and method for correcting the focus of a laser beam
DE102015215645B4 (de) 2015-08-17 2017-04-13 Trumpf Laser- Und Systemtechnik Gmbh Vorrichtung und Verfahren zur Erwärmung eines Objekts und Vorrichtung zur Oberflächenbehandlung
CN114924407A (zh) * 2022-06-10 2022-08-19 北京工业大学 激光扫描振镜系统

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4783155A (en) * 1983-10-17 1988-11-08 Canon Kabushiki Kaisha Optical device with variably shaped optical surface and a method for varying the focal length
GB2183059B (en) 1985-11-05 1989-09-27 Michel Treisman Suspension system for a flexible optical membrane
DE3900467C2 (de) * 1989-01-10 1995-09-07 Trumpf Lasertechnik Gmbh Vorrichtung mit einem Spiegelkopf
US4932768A (en) * 1989-07-25 1990-06-12 Chromex, Inc. Aspheric mirror produced by the elastic deformation of a spherical mirror
US5148324A (en) * 1991-01-25 1992-09-15 U.S. Philips Corp. Mirror unit
JP3138613B2 (ja) * 1995-05-24 2001-02-26 三菱電機株式会社 レーザ加工装置
DE19628672C2 (de) * 1996-07-16 1999-07-29 Precitec Gmbh Deformierbarer Spiegel
JPH11202110A (ja) * 1998-01-20 1999-07-30 Nippon Steel Corp 可変形反射鏡
JP3854010B2 (ja) * 1999-05-20 2006-12-06 株式会社アマダエンジニアリングセンター 曲率可変ミラーの曲率調整装置
DE10001900B4 (de) * 2000-01-19 2004-02-26 Diehl Munitionssysteme Gmbh & Co. Kg Deformierbarer Spiegel
US6425671B1 (en) * 2000-04-13 2002-07-30 Alan Adler Optical mirror flexing structure and assembly
DE10052249A1 (de) * 2000-10-21 2002-04-25 Lt Ultra Prec Technology Gmbh Deformierbarer Spiegel, insbesondere adaptiver Spiegel

Also Published As

Publication number Publication date
US20050002078A1 (en) 2005-01-06
EP1424584B1 (de) 2007-02-28
JP2004181532A (ja) 2004-07-02
DE50209599D1 (de) 2007-04-12
JP4603790B2 (ja) 2010-12-22
US7102806B2 (en) 2006-09-05
EP1424584A1 (de) 2004-06-02

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Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee