ATE356426T1 - Verfahren zur messung und quantitative profilbestimmung geladener teilchenstrahlen - Google Patents

Verfahren zur messung und quantitative profilbestimmung geladener teilchenstrahlen

Info

Publication number
ATE356426T1
ATE356426T1 AT03758647T AT03758647T ATE356426T1 AT E356426 T1 ATE356426 T1 AT E356426T1 AT 03758647 T AT03758647 T AT 03758647T AT 03758647 T AT03758647 T AT 03758647T AT E356426 T1 ATE356426 T1 AT E356426T1
Authority
AT
Austria
Prior art keywords
feedthrough
motion
measuring
charged particle
particle beams
Prior art date
Application number
AT03758647T
Other languages
German (de)
English (en)
Inventor
Shripad Rajaram Halbe
Vinod Chandra Sahni
Original Assignee
Secretary Dept Atomic Energy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Secretary Dept Atomic Energy filed Critical Secretary Dept Atomic Energy
Application granted granted Critical
Publication of ATE356426T1 publication Critical patent/ATE356426T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
AT03758647T 2003-08-01 2003-08-01 Verfahren zur messung und quantitative profilbestimmung geladener teilchenstrahlen ATE356426T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/IN2003/000260 WO2005013313A1 (en) 2003-08-01 2003-08-01 Device for measuring and quantitative profiling of charged particle beams

Publications (1)

Publication Number Publication Date
ATE356426T1 true ATE356426T1 (de) 2007-03-15

Family

ID=34113374

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03758647T ATE356426T1 (de) 2003-08-01 2003-08-01 Verfahren zur messung und quantitative profilbestimmung geladener teilchenstrahlen

Country Status (6)

Country Link
EP (1) EP1649487B1 (da)
AT (1) ATE356426T1 (da)
AU (1) AU2003274679A1 (da)
DE (1) DE60312396T2 (da)
DK (1) DK1649487T3 (da)
WO (1) WO2005013313A1 (da)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111128657A (zh) * 2018-10-31 2020-05-08 北京中科信电子装备有限公司 一种法拉第真空移动装置
GB202019143D0 (en) * 2020-12-04 2021-01-20 Thermo Fisher Scient Bremen Gmbh Flexible muliple ion detector system
WO2022269466A1 (en) 2021-06-22 2022-12-29 Pfizer Inc. Production of adeno-associated virus vector in insect cells

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1161395A (en) * 1966-05-17 1969-08-13 Ass Elect Ind Improvements relating to Mass Spectrometers
US4524275A (en) * 1981-12-07 1985-06-18 Cottrell John S Multiple collector mass spectrometers
WO2001051183A1 (en) * 2000-01-07 2001-07-19 Proteros, Llc. Enhanced faraday cup for diagnostic measurements in an ion implanter

Also Published As

Publication number Publication date
WO2005013313A1 (en) 2005-02-10
EP1649487B1 (en) 2007-03-07
DE60312396T2 (de) 2007-11-29
DK1649487T3 (da) 2007-07-02
DE60312396D1 (de) 2007-04-19
AU2003274679A1 (en) 2005-02-15
EP1649487A1 (en) 2006-04-26

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