ATE361481T1 - Laserstrahlabtaster - Google Patents

Laserstrahlabtaster

Info

Publication number
ATE361481T1
ATE361481T1 AT04744510T AT04744510T ATE361481T1 AT E361481 T1 ATE361481 T1 AT E361481T1 AT 04744510 T AT04744510 T AT 04744510T AT 04744510 T AT04744510 T AT 04744510T AT E361481 T1 ATE361481 T1 AT E361481T1
Authority
AT
Austria
Prior art keywords
scanner
torsion
cantilever beam
axis
laser beam
Prior art date
Application number
AT04744510T
Other languages
English (en)
Inventor
Oscar H Willemsen
Antonius H M Holtslag
Willem L Ijzerman
Zwart Siebe T De
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Application granted granted Critical
Publication of ATE361481T1 publication Critical patent/ATE361481T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Laser Surgery Devices (AREA)
  • Facsimile Scanning Arrangements (AREA)
AT04744510T 2003-07-14 2004-07-07 Laserstrahlabtaster ATE361481T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP03102137 2003-07-14

Publications (1)

Publication Number Publication Date
ATE361481T1 true ATE361481T1 (de) 2007-05-15

Family

ID=34042953

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04744510T ATE361481T1 (de) 2003-07-14 2004-07-07 Laserstrahlabtaster

Country Status (8)

Country Link
US (1) US20060250675A1 (de)
EP (1) EP1668397B1 (de)
JP (1) JP2007519023A (de)
KR (1) KR20060035747A (de)
CN (1) CN1823290A (de)
AT (1) ATE361481T1 (de)
DE (1) DE602004006284T2 (de)
WO (1) WO2005006052A1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4645817B2 (ja) * 2005-03-17 2011-03-09 ブラザー工業株式会社 光反射素子、光反射装置、波面曲率変調装置及び光走査型表示装置
KR100923995B1 (ko) * 2005-06-03 2009-10-28 후지 세이유 가부시키가이샤 미반용 품질 개량제 및 그것을 사용한 미반류 및 그 제조법
CN100354687C (zh) * 2005-07-08 2007-12-12 北京航空航天大学 二维压电光学扫描器
RU2330316C2 (ru) * 2006-10-17 2008-07-27 Владимир Семенович Леонов Способ широкоформатной высокоскоростной развертки лазерного луча для передачи и получения видео- и других изображений и устройство для его реализации
DE102007027428A1 (de) * 2007-06-14 2008-12-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Bauelement mit einem Schwingungselement
EP2026116A1 (de) 2007-07-31 2009-02-18 Sercalo Microtechnology Ltd. Mikrospiegelvorrichtung
US8467117B2 (en) * 2009-09-01 2013-06-18 Micronic Mydata AB Pattern generation systems and high bandwidth focus control system with suppressed reaction forces and noise
JP5272989B2 (ja) * 2009-09-17 2013-08-28 ブラザー工業株式会社 ２次元光スキャナ
DE102010062591A1 (de) * 2010-12-08 2012-06-14 Robert Bosch Gmbh Magnetischer Aktor
CN104392200B (zh) * 2014-12-12 2018-02-23 章吉华 一种超高频热压电子的咨询条码激光扫描枪
JP2016126103A (ja) * 2014-12-26 2016-07-11 セイコーエプソン株式会社 光学デバイス、画像表示装置および光学デバイスの製造方法
IT201600079604A1 (it) * 2016-07-28 2018-01-28 St Microelectronics Srl Struttura oscillante con attuazione piezoelettrica, sistema e metodo di fabbricazione
DE102016014001B4 (de) * 2016-11-23 2020-11-12 Blickfeld GmbH MEMS Scanmodul für einen Lichtscanner mit mindestens zwei Stützelementen
DE102017118776B4 (de) * 2017-08-17 2020-11-12 Blickfeld GmbH Scaneinheit mit mindestens zwei Stützelementen und einem freistehenden Umlenkelement und Verfahren zum Scannen von Licht
DE102017219442B8 (de) * 2017-10-30 2023-03-02 Infineon Technologies Ag Spiegelvorrichtung, die eine Blattfeder mit Öffnungen aufweist
US11029512B2 (en) * 2018-06-27 2021-06-08 Microsoft Technology Licensing, Llc Adjusting a resonant frequency of a scanning mirror
CN110764253B (zh) * 2018-07-26 2022-04-08 中科融合感知智能研究院(苏州工业园区)有限公司 一种二维矢量扫描微镜
CN109031861B (zh) * 2018-08-01 2020-11-17 歌尔光学科技有限公司 激光投影机、磁铁极性的检测方法及系统
JP7155967B2 (ja) * 2018-12-04 2022-10-19 セイコーエプソン株式会社 光路シフトデバイスおよび画像表示装置
CN109828427A (zh) * 2019-02-21 2019-05-31 苏州佳世达光电有限公司 致动模块及包含此致动模块的投影装置
JP7318240B2 (ja) * 2019-03-14 2023-08-01 株式会社リコー 光偏向素子、光偏向システム、光走査システム
FR3098606B1 (fr) * 2019-07-08 2022-09-02 Commissariat Energie Atomique Scanner a reseau optique a commande de phase mobile

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5486944A (en) * 1989-10-30 1996-01-23 Symbol Technologies, Inc. Scanner module for symbol scanning system
US5629790A (en) * 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
JP3219123B2 (ja) * 1993-11-29 2001-10-15 株式会社デンソー ２次元光走査装置及びそれを用いたバーコード読取装置
KR980003662A (ko) * 1996-06-28 1998-03-30 배순훈 큰 구동 각도를 가지는 박막형 광로 조절 장치
US6201629B1 (en) * 1997-08-27 2001-03-13 Microoptical Corporation Torsional micro-mechanical mirror system
US6134050A (en) * 1998-11-25 2000-10-17 Advanced Laser Technologies, Inc. Laser beam mixer
DE19857946C1 (de) * 1998-12-16 2000-01-20 Bosch Gmbh Robert Mikroschwingspiegel
DE19934174C1 (de) * 1999-07-21 2001-03-01 Litef Gmbh Verfahren zur Herstellung einer Torsionsfeder
JP2001265275A (ja) * 2000-03-16 2001-09-28 Olympus Optical Co Ltd 画像表示装置
JP2002122808A (ja) * 2000-10-18 2002-04-26 Canon Inc 投射型表示装置
JP2002148554A (ja) * 2000-11-03 2002-05-22 Samsung Electronics Co Ltd 光スキャナ及びこれを適用したレーザ映像投射装置並びにその駆動方法

Also Published As

Publication number Publication date
CN1823290A (zh) 2006-08-23
WO2005006052A1 (en) 2005-01-20
EP1668397A1 (de) 2006-06-14
DE602004006284D1 (de) 2007-06-14
EP1668397B1 (de) 2007-05-02
DE602004006284T2 (de) 2008-01-03
KR20060035747A (ko) 2006-04-26
US20060250675A1 (en) 2006-11-09
JP2007519023A (ja) 2007-07-12

Similar Documents

Publication Publication Date Title
ATE361481T1 (de) Laserstrahlabtaster
US9894329B2 (en) Scanning laser projection display for small handheld devices
KR100742882B1 (ko) 광편향기
CN102027404B (zh) 感应共振梳齿驱动扫描仪
EP0945748A3 (de) Bildanzeigevorrichtung
ES2082770T3 (es) Unidad de escaneo resonante de baja vibracion para un aparato de representacion optica en miniatura.
WO2013031824A1 (ja) 光走査デバイス及びこれを備えた内視鏡、顕微鏡、プロジェクター
JP3956839B2 (ja) 光走査装置および光走査装置を備えた画像形成装置
CA2515598C (en) Inertial drive scanning arrangement and method
US20050121522A1 (en) Inertial drive scanning arrangement and method
WO2005124653A3 (en) Multilaser bi-directional printer with an oscillating scanning mirror
JP2008547056A (ja) 引張り、ねじれ屈曲と、該屈曲を用いて光を走査するコンパクトドライブおよび方法
AU2451201A (en) Scanning force microscope probe cantilever with reflective structure
ATE412199T1 (de) Bilderzeugungsvorrichtung und abtasteinheit
DE69219920D1 (de) Verbesserter optischer Abtaster und Strichkodeleser unter dessen Anwendung
JP2954316B2 (ja) 光ファイバの位置決め装置
JP2005070791A (ja) 微小電子機械システム（ｍｅｍｓ）走査ミラー装置
ATE285082T1 (de) Scanner
JPH06214179A (ja) 共振スキャナの防音装置
FR2836727B1 (fr) Dispositif de balayage optique confocal
Wang et al. Scanning polymeric waveguide design of a 2-D display system
Panergo et al. Resonant polymeric waveguide cantilever integrated for optical scanning
ATE291729T1 (de) Konfokales abbildungssystem mit geteiltem retroreflektor
DE60042615D1 (de) Frequenzabstimmbarer resonanter Rasterabtaster mit Hilfsarmen
US20060119961A1 (en) Driving X and Y mirrors with minimum electrical feeds

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties