ATE363668T1 - Wellenleiterstruktur basierend auf einem dreidimensionalen photonischen kristall - Google Patents

Wellenleiterstruktur basierend auf einem dreidimensionalen photonischen kristall

Info

Publication number
ATE363668T1
ATE363668T1 AT03708843T AT03708843T ATE363668T1 AT E363668 T1 ATE363668 T1 AT E363668T1 AT 03708843 T AT03708843 T AT 03708843T AT 03708843 T AT03708843 T AT 03708843T AT E363668 T1 ATE363668 T1 AT E363668T1
Authority
AT
Austria
Prior art keywords
photonic crystal
voids
substrate
bandgap
waveguide
Prior art date
Application number
AT03708843T
Other languages
English (en)
Inventor
Joseph Geusic
Leonard Forbes
Original Assignee
Micron Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/053,003 external-priority patent/US7018467B2/en
Priority claimed from US10/052,952 external-priority patent/US6898362B2/en
Application filed by Micron Technology Inc filed Critical Micron Technology Inc
Application granted granted Critical
Publication of ATE363668T1 publication Critical patent/ATE363668T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1225—Basic optical elements, e.g. light-guiding paths comprising photonic band-gap structures or photonic lattices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12078—Gallium arsenide or alloys (GaAs, GaAlAs, GaAsP, GaInAs)

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Nanotechnology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biophysics (AREA)
  • Optical Integrated Circuits (AREA)
  • Shafts, Cranks, Connecting Bars, And Related Bearings (AREA)
AT03708843T 2002-01-17 2003-01-16 Wellenleiterstruktur basierend auf einem dreidimensionalen photonischen kristall ATE363668T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/053,003 US7018467B2 (en) 2002-01-17 2002-01-17 Three-dimensional complete bandgap photonic crystal formed by crystal modification
US10/052,952 US6898362B2 (en) 2002-01-17 2002-01-17 Three-dimensional photonic crystal waveguide structure and method

Publications (1)

Publication Number Publication Date
ATE363668T1 true ATE363668T1 (de) 2007-06-15

Family

ID=27615942

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03708843T ATE363668T1 (de) 2002-01-17 2003-01-16 Wellenleiterstruktur basierend auf einem dreidimensionalen photonischen kristall

Country Status (7)

Country Link
EP (1) EP1466199B1 (de)
JP (1) JP4150344B2 (de)
KR (1) KR100670080B1 (de)
AT (1) ATE363668T1 (de)
AU (1) AU2003212809A1 (de)
DE (1) DE60314091T2 (de)
WO (1) WO2003062908A2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11042049B2 (en) 2019-10-09 2021-06-22 Cisco Technology, Inc. Thermal isolation element

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5187461A (en) * 1991-02-15 1993-02-16 Karl Brommer Low-loss dielectric resonator having a lattice structure with a resonant defect
EP0678196B1 (de) * 1993-01-08 2002-04-10 Massachusetts Institute Of Technology Verlustarme optische und optoelektronische integrierte schaltungen
US6433931B1 (en) * 1997-02-11 2002-08-13 Massachusetts Institute Of Technology Polymeric photonic band gap materials
US6409907B1 (en) * 1999-02-11 2002-06-25 Lucent Technologies Inc. Electrochemical process for fabricating article exhibiting substantial three-dimensional order and resultant article
JP3980801B2 (ja) * 1999-09-16 2007-09-26 株式会社東芝 三次元構造体およびその製造方法
JP2001093887A (ja) * 1999-09-22 2001-04-06 Toshiba Corp 半導体装置製造方法

Also Published As

Publication number Publication date
JP4150344B2 (ja) 2008-09-17
JP2005516238A (ja) 2005-06-02
WO2003062908A2 (en) 2003-07-31
KR20040066910A (ko) 2004-07-27
DE60314091D1 (de) 2007-07-12
EP1466199A2 (de) 2004-10-13
DE60314091T2 (de) 2008-01-24
EP1466199B1 (de) 2007-05-30
KR100670080B1 (ko) 2007-01-17
WO2003062908A3 (en) 2003-11-13
AU2003212809A1 (en) 2003-09-02

Similar Documents

Publication Publication Date Title
US6898362B2 (en) Three-dimensional photonic crystal waveguide structure and method
Deen et al. Silicon photonics: fundamentals and devices
CN109477936A (zh) 集成结构以及其制造方法
EP1256829A3 (de) Optoelektronisches Substrat für optische Verbindungsleitungen mit einem Photonenkristallwellenleiter
CA2659292A1 (en) Integrated vertical wavelength (de)multiplexer using tapered waveguides
Roth et al. C-band side-entry Ge quantum-well electroabsorption modulator on SOI operating at 1 V swing
Kuchinsky et al. Coupling between photonic crystal waveguides
EP1742314A3 (de) Begrabene Heterostrukturvorrichtung mit integriertem Wellenleitergitter hergestellt mit einstüfigen MOCVD
Johri et al. Photonic band gap materials: Technology, applications and challenges
ATE363668T1 (de) Wellenleiterstruktur basierend auf einem dreidimensionalen photonischen kristall
US20100111478A1 (en) Non-linear fiber array having opposing v-groove structures
WO2007011515A3 (en) Fabrication of quantum dots embedded in three-dimensional photonic crystal lattice
WO2005022594A3 (en) Method and apparatus for a dynamically reconfigurable waveguide in an integrated circuit
KR20090129045A (ko) 나노광결정으로 이루어지며, 경사면이 있는 입체의 배열을적용한 발광소자용 유리기판과 이를 이용한유기발광다이오드
EP1253447A3 (de) Integrierte optische Wellenleitervorrichtung, ein optischer Sender-Empfänger und andere optische Geräte mit dieser optischen Wellenleitervorrichtung
CN115513316A (zh) 一种双轴张应变锗硅量子阱调制器、集成光电子器件
TW200500669A (en) Planar optical wave-guide with dielectric mirrors
Yumin et al. Elastic Strain Field Distribution of a Self2Organized Growth Lensed2Shaped Quantum Dot by Finite Element Method3
Kasper et al. Device concepts for SiGe optoelectronics
CN1035405C (zh) 提高电磁辐射频率用的光学组件和光电子部件
Cheng et al. Analysis of forward stimulated brillouin scattering in nanoscale SiGe waveguides by tailoring optical forces
Seassal et al. 2D photonic crystal membrane surface operation micro-nano-scale photonic devices
WO2004044644A3 (en) Method and apparatus for a dynamically reconfigurable waveguide in an ingrated circuit
Islam et al. Lattice structure dependent modulation of photonic band Gap in gallium phosphide based 2D photonic crystal
WO2002067019A3 (en) Polymer on substrate waveguide structure and corresponding production method

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties