ATE368526T1 - Gruppe von membran-ultraschallwandlern - Google Patents

Gruppe von membran-ultraschallwandlern

Info

Publication number
ATE368526T1
ATE368526T1 AT03717473T AT03717473T ATE368526T1 AT E368526 T1 ATE368526 T1 AT E368526T1 AT 03717473 T AT03717473 T AT 03717473T AT 03717473 T AT03717473 T AT 03717473T AT E368526 T1 ATE368526 T1 AT E368526T1
Authority
AT
Austria
Prior art keywords
piezoelectric layer
barrier structure
group
ultrasonic transducers
membrane
Prior art date
Application number
AT03717473T
Other languages
English (en)
Inventor
Mareike Klee
Hans-Wolfgang Brand
Egon Krafczyk
Hans-Peter Loebl
Peter Bachmann
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Application granted granted Critical
Publication of ATE368526T1 publication Critical patent/ATE368526T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
AT03717473T 2002-05-01 2003-04-29 Gruppe von membran-ultraschallwandlern ATE368526T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/137,492 US6548937B1 (en) 2002-05-01 2002-05-01 Array of membrane ultrasound transducers

Publications (1)

Publication Number Publication Date
ATE368526T1 true ATE368526T1 (de) 2007-08-15

Family

ID=22477670

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03717473T ATE368526T1 (de) 2002-05-01 2003-04-29 Gruppe von membran-ultraschallwandlern

Country Status (8)

Country Link
US (1) US6548937B1 (de)
EP (1) EP1503872B1 (de)
KR (1) KR20050006204A (de)
CN (1) CN100438991C (de)
AT (1) ATE368526T1 (de)
AU (1) AU2003222387A1 (de)
DE (1) DE60315286T2 (de)
WO (1) WO2003092915A2 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6784600B2 (en) * 2002-05-01 2004-08-31 Koninklijke Philips Electronics N.V. Ultrasonic membrane transducer for an ultrasonic diagnostic probe
US7148079B1 (en) * 2002-11-01 2006-12-12 Advanced Micro Devices, Inc. Diamond like carbon silicon on insulator substrates and methods of fabrication thereof
JP2005094735A (ja) * 2003-08-12 2005-04-07 Murata Mfg Co Ltd 電子部品およびその製造方法
US20050075571A1 (en) * 2003-09-18 2005-04-07 Siemens Medical Solutions Usa, Inc. Sound absorption backings for ultrasound transducers
JP4952164B2 (ja) * 2006-09-20 2012-06-13 株式会社デンソー 流量計測素子、質量流量計
CN101919079B (zh) * 2007-07-03 2014-01-01 皇家飞利浦电子股份有限公司 用于存在性检测的薄膜检测器
CN101352710B (zh) * 2007-07-25 2011-03-16 中国科学院声学研究所 薄膜压电超声换能器
JP5444662B2 (ja) * 2008-08-25 2014-03-19 ソニー株式会社 圧電デバイスの製造方法
CN102577120B (zh) * 2009-10-13 2015-04-01 株式会社村田制作所 声表面波装置
JP2013539254A (ja) 2010-07-30 2013-10-17 コーニンクレッカ フィリップス エヌ ヴェ 薄膜超音波振動子
DE102012205996A1 (de) 2012-04-12 2013-10-17 Robert Bosch Gmbh Sensoranordnung und Verfahren zur Umfelderfassung eines Fahrzeugs
JP6089499B2 (ja) * 2012-08-28 2017-03-08 セイコーエプソン株式会社 超音波トランスデューサー装置およびプローブ並びに電子機器および超音波診断装置
US9364863B2 (en) * 2013-01-23 2016-06-14 Siemens Medical Solutions Usa, Inc. Method for forming an ultrasound transducer array
DE102013205157A1 (de) 2013-03-22 2014-10-09 Robert Bosch Gmbh Sensoranordnung und Verfahren zur Umfelderfassung eines Fahrzeugs
WO2014156976A1 (ja) * 2013-03-28 2014-10-02 富士フイルム株式会社 ユニモルフ型超音波探触子
JP6728630B2 (ja) * 2015-10-29 2020-07-22 セイコーエプソン株式会社 圧電素子、圧電モジュール、電子機器、及び圧電素子の製造方法
JP6805630B2 (ja) * 2016-08-24 2020-12-23 セイコーエプソン株式会社 超音波デバイス、超音波モジュール、及び超音波測定装置
CN116944006B (zh) * 2023-09-19 2023-12-15 中北大学 一种d11工作模式驱动的PMUT单元及其制备方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5075641A (en) * 1990-12-04 1991-12-24 Iowa State University Research Foundation, Inc. High frequency oscillator comprising cointegrated thin film resonator and active device
JP2990926B2 (ja) * 1992-03-16 1999-12-13 住友電気工業株式会社 超音波振動子
US5433917A (en) 1993-09-16 1995-07-18 The Penn State Research Foundation PZT ceramic compositions having reduced sintering temperatures and process for producing same
US5650362A (en) * 1993-11-04 1997-07-22 Fuji Xerox Co. Oriented conductive film and process for preparing the same
US5619476A (en) 1994-10-21 1997-04-08 The Board Of Trustees Of The Leland Stanford Jr. Univ. Electrostatic ultrasonic transducer
US5894452A (en) 1994-10-21 1999-04-13 The Board Of Trustees Of The Leland Stanford Junior University Microfabricated ultrasonic immersion transducer
JP3374557B2 (ja) * 1994-11-29 2003-02-04 住友電気工業株式会社 ダイヤモンド基材および表面弾性波素子
US5828394A (en) 1995-09-20 1998-10-27 The Board Of Trustees Of The Leland Stanford Junior University Fluid drop ejector and method
JP3344888B2 (ja) * 1995-12-28 2002-11-18 日本碍子株式会社 圧電／電歪膜型素子及びその製造方法
TW330341B (en) * 1996-01-19 1998-04-21 Murada Seisakusho Kk Metallic thin film and method of manufacturing the same and surface acoustic wave device using the metallic thin film and the same thereof
DE19712496A1 (de) * 1996-03-26 1997-10-30 Mitsubishi Materials Corp Piezoelektrische Dünnfilm-Bauelemente
JP2001196896A (ja) * 2000-01-11 2001-07-19 Seiko Epson Corp 表面弾性波素子
JP2001267877A (ja) * 2000-03-21 2001-09-28 Sanyo Electric Co Ltd 弾性表面波デバイス
JP3509709B2 (ja) * 2000-07-19 2004-03-22 株式会社村田製作所 圧電薄膜共振子及び圧電薄膜共振子の製造方法

Also Published As

Publication number Publication date
EP1503872A2 (de) 2005-02-09
WO2003092915A3 (en) 2004-03-04
AU2003222387A1 (en) 2003-11-17
CN1649677A (zh) 2005-08-03
AU2003222387A8 (en) 2003-11-17
EP1503872B1 (de) 2007-08-01
CN100438991C (zh) 2008-12-03
KR20050006204A (ko) 2005-01-15
DE60315286T2 (de) 2008-02-14
US6548937B1 (en) 2003-04-15
WO2003092915A2 (en) 2003-11-13
DE60315286D1 (de) 2007-09-13

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Legal Events

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