ATE370105T1 - Verfahren und vorrichtung zum verdampfen eines flüssigen vorlaüfers beim herstellen einer glasvorform - Google Patents

Verfahren und vorrichtung zum verdampfen eines flüssigen vorlaüfers beim herstellen einer glasvorform

Info

Publication number
ATE370105T1
ATE370105T1 AT02753075T AT02753075T ATE370105T1 AT E370105 T1 ATE370105 T1 AT E370105T1 AT 02753075 T AT02753075 T AT 02753075T AT 02753075 T AT02753075 T AT 02753075T AT E370105 T1 ATE370105 T1 AT E370105T1
Authority
AT
Austria
Prior art keywords
vaporizing
liquid
liquid reactant
vaporizing plate
producing
Prior art date
Application number
AT02753075T
Other languages
English (en)
Inventor
Marco Galante
Marco Arimondi
Giacomo Roba
Ilenia Santi
Original Assignee
Prysmian Cavi Sistemi Energia
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Prysmian Cavi Sistemi Energia filed Critical Prysmian Cavi Sistemi Energia
Application granted granted Critical
Publication of ATE370105T1 publication Critical patent/ATE370105T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C03B2207/87—Controlling the temperature
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C03B2207/88—Controlling the pressure

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Vapour Deposition (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
AT02753075T 2002-06-28 2002-06-28 Verfahren und vorrichtung zum verdampfen eines flüssigen vorlaüfers beim herstellen einer glasvorform ATE370105T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2002/007165 WO2004002909A1 (en) 2002-06-28 2002-06-28 Method and device for vaporizing a liquid reactant in manufacturing a glass preform

Publications (1)

Publication Number Publication Date
ATE370105T1 true ATE370105T1 (de) 2007-09-15

Family

ID=29797102

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02753075T ATE370105T1 (de) 2002-06-28 2002-06-28 Verfahren und vorrichtung zum verdampfen eines flüssigen vorlaüfers beim herstellen einer glasvorform

Country Status (7)

Country Link
US (1) US7730747B2 (de)
EP (1) EP1517863B1 (de)
AT (1) ATE370105T1 (de)
AU (1) AU2002313486A1 (de)
DE (1) DE60221908T2 (de)
ES (1) ES2292788T3 (de)
WO (1) WO2004002909A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5179739B2 (ja) * 2006-09-27 2013-04-10 東京エレクトロン株式会社 蒸着装置、蒸着装置の制御装置、蒸着装置の制御方法および蒸着装置の使用方法
US8137462B2 (en) * 2006-10-10 2012-03-20 Asm America, Inc. Precursor delivery system
US10107490B2 (en) * 2014-06-30 2018-10-23 Lam Research Corporation Configurable liquid precursor vaporizer
US9982341B2 (en) 2015-01-30 2018-05-29 Lam Research Corporation Modular vaporizer
US10672921B2 (en) 2015-03-12 2020-06-02 Vitro Flat Glass Llc Article with transparent conductive layer and method of making the same
WO2016144869A1 (en) 2015-03-12 2016-09-15 Ppg Industries Ohio, Inc. Optoelectronic device and method of making the same
US10112209B2 (en) 2015-12-11 2018-10-30 VITRO S.A.B. de C.V. Glass drawdown coating system
WO2017100607A1 (en) 2015-12-11 2017-06-15 Vitro, S.A.B. De C.V. Coating system and articles made thereby
US11926894B2 (en) 2016-09-30 2024-03-12 Asm Ip Holding B.V. Reactant vaporizer and related systems and methods
US10876205B2 (en) 2016-09-30 2020-12-29 Asm Ip Holding B.V. Reactant vaporizer and related systems and methods
KR20200020608A (ko) 2018-08-16 2020-02-26 에이에스엠 아이피 홀딩 비.브이. 고체 소스 승화기
CN109485249A (zh) * 2018-12-21 2019-03-19 江苏通鼎光棒有限公司 一种用于制备光纤预制棒的蒸发柜补料装置
US11624113B2 (en) 2019-09-13 2023-04-11 Asm Ip Holding B.V. Heating zone separation for reactant evaporation system
JP7449842B2 (ja) * 2020-11-02 2024-03-14 信越化学工業株式会社 多孔質ガラス母材の製造方法及び製造装置
CN113912281A (zh) * 2021-09-23 2022-01-11 武汉烽火锐拓科技有限公司 一种用于光纤预制棒包层沉积的供料装置
JP7855502B2 (ja) * 2022-12-15 2026-05-08 信越化学工業株式会社 多孔質ガラス母材製造システム及びガラス母材の製造方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4529427A (en) * 1977-05-19 1985-07-16 At&T Bell Laboratories Method for making low-loss optical waveguides on an industrial scale
US4314837A (en) * 1979-03-01 1982-02-09 Corning Glass Works Reactant delivery system method
EP0058571A1 (de) 1981-02-18 1982-08-25 National Research Development Corporation Verfahren und Vorrichtung zum Zuführen einer kontrollierten Menge eines Reaktanten bei einem Dampfphasen-Abscheidungsverfahren
US5090985A (en) * 1989-10-17 1992-02-25 Libbey-Owens-Ford Co. Method for preparing vaporized reactants for chemical vapor deposition
US5078092A (en) * 1989-12-22 1992-01-07 Corning Incorporated Flash vaporizer system for use in manufacturing optical waveguide fiber
JP3013645B2 (ja) 1993-03-03 2000-02-28 住友電気工業株式会社 原料供給装置
JPH0781965A (ja) 1993-07-22 1995-03-28 Sumitomo Electric Ind Ltd ガス生成装置並びに光導波路及び光ファイバ母材を製造する方法及び装置
US5356451A (en) * 1993-12-20 1994-10-18 Corning Incorporated Method and apparatus for vaporization of liquid reactants
DE4430619A1 (de) * 1994-08-17 1996-02-22 Eduard Kirschmann Verdampfungsanlage
US5558687A (en) * 1994-12-30 1996-09-24 Corning Incorporated Vertical, packed-bed, film evaporator for halide-free, silicon-containing compounds
US5632797A (en) 1994-12-30 1997-05-27 Corning Incorporated Method of providing vaporized halide-free, silicon-containing compounds
US5703191A (en) * 1995-09-01 1997-12-30 Corning Incorporated Method for purifying polyalkylsiloxanes and the resulting products
US6734405B2 (en) * 2002-06-12 2004-05-11 Steris Inc. Vaporizer using electrical induction to produce heat

Also Published As

Publication number Publication date
DE60221908T2 (de) 2008-05-15
ES2292788T3 (es) 2008-03-16
EP1517863A1 (de) 2005-03-30
WO2004002909A1 (en) 2004-01-08
US7730747B2 (en) 2010-06-08
US20060010922A1 (en) 2006-01-19
AU2002313486A1 (en) 2004-01-19
EP1517863B1 (de) 2007-08-15
DE60221908D1 (de) 2007-09-27

Similar Documents

Publication Publication Date Title
DE60221908D1 (de) Verfahren und vorrichtung zum verdampfen eines flüssigen vorlaüfers beim herstellen einer glasvorform
AU2003301700A1 (en) Device and method for tempering and humidifying gas, especially respiratory air
ATE503860T1 (de) Vorrichtung und verfahren zur steuerung der oberflächentemperatur eines substrates in einer prozesskammer
ATE471942T1 (de) Verfahren zur herstellung von isocyanatoorganosilanen
TW200746303A (en) Film precursor evaporation system and method of using
IL190848A (en) Methods to generate hydrocarbons are conserved in alkyls by heat treatment generated in liquid treatment processes
CY1124067T1 (el) Μεθοδος και συσκευη για την επεξεργασια καθαρισμου υγρων καυσιμων υδρογονανθρακων
TW200610039A (en) Heated gas box for PECVD applications
TW200728498A (en) CVD reactor with glidable holder on a substrate base
BRPI0409674A (pt) método de controle ou modelagem do processo de densificação de pelo menos um substrato poroso com carbono pirolìtico por infiltração a vapor quìmico
ATE468421T1 (de) Vorrichtung und verfahren zur steuerung des dampfdrucks einer chemikalienquelle
DE69009893D1 (de) Vorrichtung zur Abscheidung von synthetischem Diamant, die unter Federdruck stehende Drähte enthält.
ATE371587T1 (de) Vorrichtung zur endwärmebehandlung einer verpackung mit einer thermoplastischen folie
DE69628057D1 (de) Verfahren zur Versorgung eines Rohres mit Kohlenmonoxidhemmenden Eigenschaften beim thermischen Kracken von Kohlenwasserstoffen
WO2008102358A3 (en) Group-iii metal nitride and preparation thereof
TW200739727A (en) Semiconductor processing system and vaporizer
DE60331542D1 (de) Verfahren und vorrichtung zur verringerung von nebenprodukten in einem methanol zu olefin reaktorsystem
IL135550A0 (en) Method and apparatus for temperature controlled vapor deposition on a substrate
NZ594714A (en) Method for recovery of carbon dioxide from a gas using a process gas heated reboiler for carbon dioxide removal in a stripper
ATE443838T1 (de) Wärmetauscher und herstellungsverfahren dafür
WO2010006181A3 (en) Methods and apparatus for abating electronic device manufacturing process effluent
CN201791389U (zh) 土壤阳离子交换容量蒸馏装置
TW200710240A (en) Vaporizing material at a uniform rate
DE602004028184D1 (de) Vorrichtung zur Herstellung eines Heißgetränkes
WO2008111231A1 (ja) 化学気相成長装置、膜の形成方法及び半導体装置の製造方法

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties