ATE371483T1 - Behandlung von gasen aus der halbleiterherstellung - Google Patents

Behandlung von gasen aus der halbleiterherstellung

Info

Publication number
ATE371483T1
ATE371483T1 AT01301545T AT01301545T ATE371483T1 AT E371483 T1 ATE371483 T1 AT E371483T1 AT 01301545 T AT01301545 T AT 01301545T AT 01301545 T AT01301545 T AT 01301545T AT E371483 T1 ATE371483 T1 AT E371483T1
Authority
AT
Austria
Prior art keywords
gases
treatment
semiconductor production
gas stream
pyrophoric gases
Prior art date
Application number
AT01301545T
Other languages
English (en)
Inventor
Andrew James Seeley
James Robert Smith
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Application granted granted Critical
Publication of ATE371483T1 publication Critical patent/ATE371483T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B01D53/70—Organic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treating Waste Gases (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Silicon Compounds (AREA)
AT01301545T 2000-03-03 2001-02-21 Behandlung von gasen aus der halbleiterherstellung ATE371483T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0005231.6A GB0005231D0 (en) 2000-03-03 2000-03-03 Abatement of semiconductor processing gases

Publications (1)

Publication Number Publication Date
ATE371483T1 true ATE371483T1 (de) 2007-09-15

Family

ID=9886963

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01301545T ATE371483T1 (de) 2000-03-03 2001-02-21 Behandlung von gasen aus der halbleiterherstellung

Country Status (7)

Country Link
US (1) US6530977B2 (de)
EP (1) EP1129763B1 (de)
JP (1) JP5265828B2 (de)
AT (1) ATE371483T1 (de)
DE (1) DE60130161T2 (de)
GB (1) GB0005231D0 (de)
TW (1) TW575455B (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0005231D0 (en) * 2000-03-03 2000-04-26 Boc Group Plc Abatement of semiconductor processing gases
US6527828B2 (en) * 2001-03-19 2003-03-04 Advanced Technology Materials, Inc. Oxygen enhanced CDA modification to a CDO integrated scrubber
US6596054B2 (en) * 2001-07-23 2003-07-22 Advanced Technology Materials, Inc. Method for carbon monoxide reduction during thermal/wet abatement of organic compounds
US6551381B2 (en) * 2001-07-23 2003-04-22 Advanced Technology Materials, Inc. Method for carbon monoxide reduction during thermal/wet abatement of organic compounds
GB0207284D0 (en) 2002-03-27 2002-05-08 Boc Group Plc Semiconductor exhaust gas treatment
US7569193B2 (en) 2003-12-19 2009-08-04 Applied Materials, Inc. Apparatus and method for controlled combustion of gaseous pollutants
US7771514B1 (en) * 2004-02-03 2010-08-10 Airgard, Inc. Apparatus and method for providing heated effluent gases to a scrubber
GB0417378D0 (en) * 2004-08-04 2004-09-08 Boc Group Plc Gas abatement
US7736599B2 (en) 2004-11-12 2010-06-15 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
US20070020115A1 (en) * 2005-07-01 2007-01-25 The Boc Group, Inc. Integrated pump apparatus for semiconductor processing
CN101300411B (zh) 2005-10-31 2012-10-03 应用材料公司 制程减降反应器
DE102005059481B3 (de) * 2005-12-07 2007-07-12 DAS - Dünnschicht Anlagen Systeme GmbH Vorrichtung und Verfahren zur Reinigung von Reaktionsraumwänden im Inneren eines Reaktionsraums einer thermischen Nachbehandlung von Prozessabgasen
US7638106B2 (en) * 2006-04-21 2009-12-29 Edwards Limited Method of treating a gas stream
US20110017140A1 (en) * 2006-07-21 2011-01-27 Christopher Mark Bailey Method of treating a gas stream
US7611684B2 (en) * 2006-08-09 2009-11-03 Airgard, Inc. Effluent gas scrubber and method of scrubbing effluent gasses
GB0724717D0 (en) * 2007-12-19 2008-01-30 Edwards Ltd Method of treating a gas stream
US7854792B2 (en) 2008-09-17 2010-12-21 Airgard, Inc. Reactive gas control
GB2504335A (en) * 2012-07-26 2014-01-29 Edwards Ltd Radiant burner for the combustion of manufacturing effluent gases.
JP6151945B2 (ja) * 2013-03-28 2017-06-21 株式会社荏原製作所 除害機能付真空ポンプ
KR102427056B1 (ko) * 2020-06-02 2022-08-01 씨에스케이(주) 스크러버용 버너
GB2608820A (en) * 2021-07-13 2023-01-18 Edwards Ltd Inlet assembly
DE102022212009A1 (de) 2022-11-11 2024-05-16 Ebara Precision Machinery Europe Gmbh Vorrichtung und Verfahren zum Abreinigen eines mindestens ein Schadgas enthaltenden Prozessgases
KR20250149991A (ko) 2023-02-17 2025-10-17 파이퍼 팝 솔루션즈 게엠베하 환경적으로 해로운 및/또는 독성을 갖는 배기 가스를 처리하고 중화하기 위한 방법 및 장치

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3036418A (en) * 1958-10-29 1962-05-29 Basf Ag Apparatus for the production of hydrochloric acid from waste gases containing hydrogen chloride
DE2005010B2 (de) * 1970-02-04 1979-08-02 Bayer Ag, 5090 Leverkusen Vorrichtung zum Abkühlen und Naßabscheiden heißer metalloxidhaltiger Reaktionsgase
US4968336A (en) * 1989-05-16 1990-11-06 Nec Electronics Incorporated Plasma etch vaporous exhaust collection system
DE3921255A1 (de) * 1989-06-29 1991-01-03 Krebsoege Gmbh Sintermetall Verfahren zur erzeugung eines in einem traegergasstrom foerderbaren fluessigkeitsnebels und vorrichtung zur durchfuehrung des verfahrens
DE4320044A1 (de) * 1993-06-17 1994-12-22 Das Duennschicht Anlagen Sys Verfahren und Einrichtung zur Reinigung von Abgasen
JP3280173B2 (ja) * 1994-11-29 2002-04-30 日本エア・リキード株式会社 排ガス処理装置
US5649985A (en) * 1995-11-29 1997-07-22 Kanken Techno Co., Ltd. Apparatus for removing harmful substances of exhaust gas discharged from semiconductor manufacturing process
TW299453B (en) * 1996-07-29 1997-03-01 United Microelectronics The dust processor
TW342436B (en) * 1996-08-14 1998-10-11 Nippon Oxygen Co Ltd Combustion type harm removal apparatus (1)
JP3242875B2 (ja) * 1997-12-26 2001-12-25 カンケンテクノ株式会社 排ガス除害装置及び排ガスの除害方法
US6153150A (en) * 1998-01-12 2000-11-28 Advanced Technology Materials, Inc. Apparatus and method for controlled decomposition oxidation of gaseous pollutants
JP3866412B2 (ja) * 1998-05-28 2007-01-10 カンケンテクノ株式会社 半導体製造排ガスの除害方法及び除害装置
WO2000001465A1 (en) * 1998-07-07 2000-01-13 Techarmonic, Inc. System and method for oxidizing toxic, flammable, and pyrophoric gases
US6969250B1 (en) * 1998-12-01 2005-11-29 Ebara Corporation Exhaust gas treating device
GB0005231D0 (en) * 2000-03-03 2000-04-26 Boc Group Plc Abatement of semiconductor processing gases

Also Published As

Publication number Publication date
DE60130161D1 (de) 2007-10-11
EP1129763B1 (de) 2007-08-29
JP2001313263A (ja) 2001-11-09
US6530977B2 (en) 2003-03-11
EP1129763A1 (de) 2001-09-05
DE60130161T2 (de) 2008-05-21
US20010032543A1 (en) 2001-10-25
GB0005231D0 (en) 2000-04-26
TW575455B (en) 2004-02-11
JP5265828B2 (ja) 2013-08-14

Similar Documents

Publication Publication Date Title
ATE371483T1 (de) Behandlung von gasen aus der halbleiterherstellung
ATE449159T1 (de) Verfahren und vorrichtung zur gastrennung
EP1320875A4 (de) Gaszusammensetzungen zur innenreaktorreinigung und zum ätzen von silizium enthaltenden verbindungen
EA200600014A1 (ru) Способ отгонки соводяным паром из газовых потоков
WO2004064078A3 (en) Magnetic activated carbon and the removal of contaminants from a fluid streams
WO2004071617A3 (en) Deep well sparging
ATE423216T1 (de) Neue fructosylpeptidoxidase und deren nutzung
EA200970975A1 (ru) Удаление co, nили hs из содержащих их газовых смесей
EA200800616A1 (ru) Способ удаления диоксида серы из потока дымового газа
DE60027493D1 (de) Vorrichtung zur Produktion von mit Sauerstoff angereichertem Gas aus Luft
DE60212546D1 (de) Gaswäscher zur Entfernung von Feststoffpartikeln von Abgasen
EP0968156A4 (de) Gaserzeugende zusammensetzungen, verfahren zur herstellung und diese zusammensetzungen enthaltende vorrichtungen
ATE268209T1 (de) Verfahren und vorrichtung zur gasbehandlung
DE69925056D1 (de) Verfahren und System zur Behandlung schadstoffhaltiger Materialien
ATE267770T1 (de) Reaktor zur herstellung von hochreinem, granularem silizium
GC0000299A (en) Process for purifying carbon dioxide-containing gas streams
ATE236079T1 (de) Verfahren zur abscheidung von chlorsilanen aus gasströmen
CA2353219A1 (en) Method for oxidation of volatile organic compounds contained in gaseous effluents and device thereof
ZA200309761B (en) Process for the recovery of combustible components of a gas stream.
DE50110986D1 (de) Verfahren zur Reinigung von Kerzenfiltern und Membrananlagen
MX231659B (es) Metodo para la regeneracion de un catalizador zeolitico.
ATE300348T1 (de) Verfahren zur behandlung eines eine so3- komponente enthaltenden gases mit na2co3
FI20011327L (fi) Menetelmä kaasutuskaasun puhdistamiseksi
FI20015028L (fi) Prosessi nestemäisen hiilidioksidin tuottamiseksi normaalipaineisesta savukaasusta
ATE445453T1 (de) Verfahren und vorrichtung zur reduzierung von polyhalogenierten verbindungen in verbrennungsanlagen

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties