ATE372528T1 - Optisches profilometer mit dualer technologie (konfokal und interferrometrisch) zur untersuchung und dreidimensionalen messung von oberflächen - Google Patents

Optisches profilometer mit dualer technologie (konfokal und interferrometrisch) zur untersuchung und dreidimensionalen messung von oberflächen

Info

Publication number
ATE372528T1
ATE372528T1 AT05739544T AT05739544T ATE372528T1 AT E372528 T1 ATE372528 T1 AT E372528T1 AT 05739544 T AT05739544 T AT 05739544T AT 05739544 T AT05739544 T AT 05739544T AT E372528 T1 ATE372528 T1 AT E372528T1
Authority
AT
Austria
Prior art keywords
confocal
images
lenses
interferometric
interferrometric
Prior art date
Application number
AT05739544T
Other languages
English (en)
Inventor
Bertran Ferran Laguarta
Pursals Roger Artigas
Artigues Cristina Cadevall
Original Assignee
Univ Catalunya Politecnica
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Catalunya Politecnica filed Critical Univ Catalunya Politecnica
Application granted granted Critical
Publication of ATE372528T1 publication Critical patent/ATE372528T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/04—Measuring microscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/0201—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal phase variation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02042—Confocal imaging
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Eye Examination Apparatus (AREA)
  • Measurement Of Optical Distance (AREA)
AT05739544T 2004-04-23 2005-04-20 Optisches profilometer mit dualer technologie (konfokal und interferrometrisch) zur untersuchung und dreidimensionalen messung von oberflächen ATE372528T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ES200401071A ES2243129B1 (es) 2004-04-23 2004-04-23 Perfilometro optico de tecnologia dual (confocal e interferometrica) para la inspeccion y medicion tridimensional de superficies.

Publications (1)

Publication Number Publication Date
ATE372528T1 true ATE372528T1 (de) 2007-09-15

Family

ID=34967345

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05739544T ATE372528T1 (de) 2004-04-23 2005-04-20 Optisches profilometer mit dualer technologie (konfokal und interferrometrisch) zur untersuchung und dreidimensionalen messung von oberflächen

Country Status (11)

Country Link
US (1) US7636167B2 (de)
EP (1) EP1739471B1 (de)
JP (1) JP4521028B2 (de)
KR (1) KR100854976B1 (de)
CN (1) CN100498416C (de)
AT (1) ATE372528T1 (de)
CA (1) CA2562380C (de)
DE (1) DE602005002361T2 (de)
ES (1) ES2243129B1 (de)
TW (1) TWI355508B (de)
WO (1) WO2005103790A1 (de)

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CN113639661B (zh) * 2021-08-11 2022-10-14 中国科学院长春光学精密机械与物理研究所 形貌检测系统及形貌检测方法
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Also Published As

Publication number Publication date
TW200538757A (en) 2005-12-01
CN1961238A (zh) 2007-05-09
DE602005002361D1 (de) 2007-10-18
EP1739471A1 (de) 2007-01-03
ES2243129B1 (es) 2006-08-16
CA2562380C (en) 2011-02-08
ES2243129A1 (es) 2005-11-16
WO2005103790A1 (es) 2005-11-03
DE602005002361T2 (de) 2008-05-29
TWI355508B (en) 2012-01-01
JP2007534019A (ja) 2007-11-22
US7636167B2 (en) 2009-12-22
CN100498416C (zh) 2009-06-10
KR20070012488A (ko) 2007-01-25
EP1739471B1 (de) 2007-09-05
CA2562380A1 (en) 2005-11-03
JP4521028B2 (ja) 2010-08-11
US20070165241A1 (en) 2007-07-19
KR100854976B1 (ko) 2008-08-28

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