ATE374936T1 - Verfahren und vorrichtung zur überwachung chemischer prozesse - Google Patents

Verfahren und vorrichtung zur überwachung chemischer prozesse

Info

Publication number
ATE374936T1
ATE374936T1 AT04778841T AT04778841T ATE374936T1 AT E374936 T1 ATE374936 T1 AT E374936T1 AT 04778841 T AT04778841 T AT 04778841T AT 04778841 T AT04778841 T AT 04778841T AT E374936 T1 ATE374936 T1 AT E374936T1
Authority
AT
Austria
Prior art keywords
consumption
patterns
analysis
relevant patterns
workpiece
Prior art date
Application number
AT04778841T
Other languages
English (en)
Inventor
Gary Powell
Herbert Litvak
Original Assignee
Lightwind Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lightwind Corp filed Critical Lightwind Corp
Application granted granted Critical
Publication of ATE374936T1 publication Critical patent/ATE374936T1/de

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/71Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
    • G01N21/73Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using plasma burners or torches
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00Chemistry: analytical and immunological testing
    • Y10T436/10Composition for standardization, calibration, simulation, stabilization, preparation or preservation; processes of use in preparation for chemical testing
    • Y10T436/106664Blood serum or blood plasma standard or control

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  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Drying Of Semiconductors (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Chemical Vapour Deposition (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
AT04778841T 2003-07-25 2004-07-22 Verfahren und vorrichtung zur überwachung chemischer prozesse ATE374936T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US49037203P 2003-07-25 2003-07-25
US49008403P 2003-07-25 2003-07-25
US49011303P 2003-07-25 2003-07-25

Publications (1)

Publication Number Publication Date
ATE374936T1 true ATE374936T1 (de) 2007-10-15

Family

ID=34119792

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04778841T ATE374936T1 (de) 2003-07-25 2004-07-22 Verfahren und vorrichtung zur überwachung chemischer prozesse

Country Status (6)

Country Link
US (3) US7072028B2 (de)
EP (1) EP1697727B1 (de)
AT (1) ATE374936T1 (de)
DE (1) DE602004009341D1 (de)
TW (1) TWI333055B (de)
WO (1) WO2005012855A2 (de)

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US7072028B2 (en) 2006-07-04
EP1697727A2 (de) 2006-09-06
US20070064227A1 (en) 2007-03-22
US20050046825A1 (en) 2005-03-03
TW200508578A (en) 2005-03-01
EP1697727B1 (de) 2007-10-03
US7580119B2 (en) 2009-08-25

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