ATE374952T1 - Memsstromsensor mit magnetisch-zu-mechanischer umwandlung und bezugsbestandteilen - Google Patents

Memsstromsensor mit magnetisch-zu-mechanischer umwandlung und bezugsbestandteilen

Info

Publication number
ATE374952T1
ATE374952T1 AT05253492T AT05253492T ATE374952T1 AT E374952 T1 ATE374952 T1 AT E374952T1 AT 05253492 T AT05253492 T AT 05253492T AT 05253492 T AT05253492 T AT 05253492T AT E374952 T1 ATE374952 T1 AT E374952T1
Authority
AT
Austria
Prior art keywords
magnetic field
mems
current
conductor
sensing
Prior art date
Application number
AT05253492T
Other languages
English (en)
Inventor
Ertugrul Berkcan
Christopher James Kapusta
Glenn Scott Claydon
Anis Zribi
Laura Jean Meyer
Wei-Cheng Tian
Original Assignee
Gen Electric
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gen Electric filed Critical Gen Electric
Application granted granted Critical
Publication of ATE374952T1 publication Critical patent/ATE374952T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/028—Electrodynamic magnetometers
    • G01R33/0283—Electrodynamic magnetometers in which a current or voltage is generated due to relative movement of conductor and magnetic field
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
    • G01R15/146—Measuring arrangements for current not covered by other subgroups of G01R15/14, e.g. using current dividers, shunts, or measuring a voltage drop
    • G01R15/148—Measuring arrangements for current not covered by other subgroups of G01R15/14, e.g. using current dividers, shunts, or measuring a voltage drop involving the measuring of a magnetic field or electric field
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/028—Electrodynamic magnetometers
    • G01R33/0286—Electrodynamic magnetometers comprising microelectromechanical systems [MEMS]

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Micromachines (AREA)
  • Measuring Magnetic Variables (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
AT05253492T 2004-06-07 2005-06-07 Memsstromsensor mit magnetisch-zu-mechanischer umwandlung und bezugsbestandteilen ATE374952T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/863,442 US7112951B2 (en) 2004-06-07 2004-06-07 MEMS based current sensor using magnetic-to-mechanical conversion and reference components

Publications (1)

Publication Number Publication Date
ATE374952T1 true ATE374952T1 (de) 2007-10-15

Family

ID=34941597

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05253492T ATE374952T1 (de) 2004-06-07 2005-06-07 Memsstromsensor mit magnetisch-zu-mechanischer umwandlung und bezugsbestandteilen

Country Status (4)

Country Link
US (5) US7112951B2 (de)
EP (1) EP1610142B1 (de)
AT (1) ATE374952T1 (de)
DE (1) DE602005002683T2 (de)

Families Citing this family (65)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7741832B2 (en) * 2004-06-07 2010-06-22 General Electric Company Micro-electromechanical system (MEMS) based current and magnetic field sensor using tunneling current sensing
US7378837B2 (en) * 2004-06-07 2008-05-27 General Electric Company Method and system for calibrating a micro-electromechanical system (MEMS) based sensor using tunneling current sensing
EP1655613A3 (de) * 2004-11-09 2006-05-17 LG Electronics Inc. AC-Sensor mit niedriger Leistung und Proximität
WO2008042484A1 (en) * 2006-09-28 2008-04-10 General Electric Company Current sensing module and assembly method thereof
US7546214B2 (en) * 2006-09-28 2009-06-09 General Electric Company System for power sub-metering
US7493221B2 (en) * 2006-09-28 2009-02-17 General Electric Company System for power sub-metering
CN100426001C (zh) * 2006-10-20 2008-10-15 北京赛迪机电新技术开发公司 一种多场耦合测量系统
US7875484B2 (en) * 2006-11-20 2011-01-25 Alces Technology, Inc. Monolithic IC and MEMS microfabrication process
US8144445B2 (en) * 2007-06-12 2012-03-27 General Electric Company Micro-electromechanical system based switching
US7612971B2 (en) * 2007-06-15 2009-11-03 General Electric Company Micro-electromechanical system based switching in heating-ventilation-air-conditioning systems
US7589942B2 (en) * 2007-06-15 2009-09-15 General Electric Company MEMS based motor starter with motor failure detection
US7885043B2 (en) * 2007-06-15 2011-02-08 General Electric Company Remote-operable micro-electromechanical system based over-current protection apparatus
US20080310058A1 (en) * 2007-06-15 2008-12-18 General Electric Company Mems micro-switch array based current limiting arc-flash eliminator
US8358488B2 (en) * 2007-06-15 2013-01-22 General Electric Company Micro-electromechanical system based switching
US7944660B2 (en) * 2007-06-15 2011-05-17 General Electric Company Micro-electromechanical system based selectively coordinated protection systems and methods for electrical distribution
US7903382B2 (en) * 2007-06-19 2011-03-08 General Electric Company MEMS micro-switch array based on current limiting enabled circuit interrupting apparatus
US8072723B2 (en) * 2007-06-19 2011-12-06 General Electric Company Resettable MEMS micro-switch array based on current limiting apparatus
US7508096B1 (en) 2007-09-20 2009-03-24 General Electric Company Switching circuit apparatus having a series conduction path for servicing a load and switching method
US7554222B2 (en) * 2007-11-01 2009-06-30 General Electric Company Micro-electromechanical system based switching
US7839611B2 (en) * 2007-11-14 2010-11-23 General Electric Company Programmable logic controller having micro-electromechanical system based switching
US8965726B2 (en) * 2008-02-20 2015-02-24 Robert Bosch Gmbh System and method for measuring DC offset in a sensor output by modulating a signal-independent operating parameter of the sensor
US8022490B2 (en) * 2008-03-24 2011-09-20 Conexant Systems, Inc. Micro electro-mechanical sensor (MEMS) fabricated with ribbon wire bonds
US20110175603A1 (en) * 2008-06-13 2011-07-21 Vladimir Burtman Method and Apparatus for Measuring Magnetic Fields
US9391423B2 (en) * 2008-12-16 2016-07-12 Massachusetts Institute Of Technology Method and applications of thin-film membrane transfer
US9222992B2 (en) * 2008-12-18 2015-12-29 Infineon Technologies Ag Magnetic field current sensors
FR2941534B1 (fr) 2009-01-26 2011-12-23 Commissariat Energie Atomique Capteur de champ magnetique a jauge de contrainte suspendue
TWI383130B (zh) * 2009-07-13 2013-01-21 Univ Nat Taiwan 電容式壓力感測器裝置及其製造方法
TWM378928U (en) * 2009-07-29 2010-04-21 Pixart Imaging Inc Mems device and spring element of mems
TW201115451A (en) * 2009-10-20 2011-05-01 Ind Tech Res Inst A vectoring data transfer system and method based on sensor assisted positioning method
US9344805B2 (en) * 2009-11-24 2016-05-17 Nxp B.V. Micro-electromechanical system microphone
US8418556B2 (en) * 2010-02-10 2013-04-16 Robert Bosch Gmbh Micro electrical mechanical magnetic field sensor utilizing modified inertial elements
US8717016B2 (en) * 2010-02-24 2014-05-06 Infineon Technologies Ag Current sensors and methods
US8760149B2 (en) 2010-04-08 2014-06-24 Infineon Technologies Ag Magnetic field current sensors
US8680843B2 (en) * 2010-06-10 2014-03-25 Infineon Technologies Ag Magnetic field current sensors
JP2013530398A (ja) * 2010-06-15 2013-07-25 アイト ベスローテンヴェンノーツハップ 少なくとも１つの人間の指の表面上での存在を検出する検出装置、及び機械、装置（特に携帯装置）又はシステムのユーザインターフェース内において当該検出装置を使用する方法
US20120007597A1 (en) * 2010-07-09 2012-01-12 Invensense, Inc. Micromachined offset reduction structures for magnetic field sensing
US8283742B2 (en) 2010-08-31 2012-10-09 Infineon Technologies, A.G. Thin-wafer current sensors
CN102455377A (zh) * 2010-10-27 2012-05-16 财团法人工业技术研究院 微机电系统的电流感测装置
US8975889B2 (en) 2011-01-24 2015-03-10 Infineon Technologies Ag Current difference sensors, systems and methods
US8519843B2 (en) 2011-01-27 2013-08-27 International Business Machines Corporation Power distribution device communications platform
US9063184B2 (en) 2011-02-09 2015-06-23 International Business Machines Corporation Non-contact current-sensing and voltage-sensing clamp
US9588160B2 (en) 2011-02-09 2017-03-07 International Business Machines Corporation Wire manager with current and voltage sensing
US8680845B2 (en) 2011-02-09 2014-03-25 International Business Machines Corporation Non-contact current and voltage sensor
TWI436068B (zh) * 2011-04-01 2014-05-01 Delta Electronics Inc 被動式交流電流感測器
US8963536B2 (en) 2011-04-14 2015-02-24 Infineon Technologies Ag Current sensors, systems and methods for sensing current in a conductor
US8508212B2 (en) 2011-06-14 2013-08-13 International Business Machines Corporation Calibration of non-contact current sensors
US9000752B2 (en) 2011-06-14 2015-04-07 International Business Machines Corporation Multi-conductor cable current and voltage sensors
US8493054B2 (en) 2011-06-14 2013-07-23 International Business Machines Corporation Calibration of non-contact voltage sensors
KR101308104B1 (ko) * 2011-10-24 2013-09-12 한국과학기술연구원 생체용 압력 센서 및 그 제조 방법
TWI439700B (zh) * 2012-01-19 2014-06-01 財團法人工業技術研究院 用於具有雙導線之電力電纜線的電力感測裝置
FR2992066B1 (fr) * 2012-06-15 2014-07-11 Commissariat Energie Atomique Capteur de champ magnetique a force de laplace
US9007077B2 (en) 2012-08-28 2015-04-14 International Business Machines Corporation Flexible current and voltage sensor
GB2508843A (en) * 2012-12-12 2014-06-18 Univ Manchester A current transformer for measuring current in a conductor
US9310397B2 (en) 2013-01-29 2016-04-12 International Business Machines Corporation Multi-branch current/voltage sensor array
GB201313882D0 (en) * 2013-08-01 2013-09-18 Qinetiq Ltd Navigation and integrity monitoring
US10317478B2 (en) 2013-08-21 2019-06-11 Lg Innotek Co., Ltd. Magnetic field sensor package
FR3015688B1 (fr) * 2013-12-20 2016-01-08 Commissariat Energie Atomique Capteur multi-sensoriel
US9806884B2 (en) * 2014-01-10 2017-10-31 Robert Bosch Gmbh System and method for cryptographic key identification
US9535137B2 (en) * 2014-08-22 2017-01-03 Ams International Ag Membrane based magnetometer
US10693057B2 (en) * 2016-05-04 2020-06-23 Tdk-Micronas Gmbh Sensor component with cap over trench and sensor elements
CN106932737B (zh) * 2017-02-27 2019-03-19 上海理工大学 基于膜层增材加工的原子磁力传感器制备方法
CN111190126B (zh) * 2017-06-09 2022-06-07 温州大学 采用折合梁结构的mems磁场传感器的制备方法
KR102615083B1 (ko) * 2022-04-06 2023-12-19 연세대학교 산학협력단 편심 공진기와 전자기 인덕터를 활용한 정전기력 구동 2축 mems 자기장 센서 및 이의 제조방법
EP4462144A1 (de) * 2023-05-12 2024-11-13 Melexis Technologies SA Magnetfeldgradientensensor
US20260036441A1 (en) * 2023-07-13 2026-02-05 Apple Inc. In-situ capacitance detection for integrated circuits and mems sensors

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4625561A (en) * 1984-12-06 1986-12-02 Ford Motor Company Silicon capacitive pressure sensor and method of making
US5821596A (en) * 1997-03-24 1998-10-13 Integrated Micromachines, Inc. Batch fabricated semiconductor micro-switch
US5952819A (en) 1997-07-24 1999-09-14 General Electric Company Auto-zeroing current sensing element
DE19827056A1 (de) * 1998-06-18 1999-12-23 Bosch Gmbh Robert Mikromechanischer Magnetfeldsensor
KR20000038207A (en) 1998-12-04 2000-07-05 Samsung Electronics Co Ltd Structure having comb using electromagnetic force and actuator and inertia sensing sensor using the same
US6188322B1 (en) * 1999-09-28 2001-02-13 Rockwell Technologies, Llc Method for sensing electrical current
US6348788B1 (en) 1999-09-28 2002-02-19 Rockwell Automation Technologies, Inc. High resolution current sensing apparatus
US6355534B1 (en) * 2000-01-26 2002-03-12 Intel Corporation Variable tunable range MEMS capacitor
US6384353B1 (en) * 2000-02-01 2002-05-07 Motorola, Inc. Micro-electromechanical system device
US6815243B2 (en) 2001-04-26 2004-11-09 Rockwell Automation Technologies, Inc. Method of fabricating a microelectromechanical system (MEMS) device using a pre-patterned substrate
US6664786B2 (en) 2001-07-30 2003-12-16 Rockwell Automation Technologies, Inc. Magnetic field sensor using microelectromechanical system
US6690178B2 (en) 2001-10-26 2004-02-10 Rockwell Automation Technologies, Inc. On-board microelectromechanical system (MEMS) sensing device for power semiconductors
US6734660B1 (en) * 2002-02-07 2004-05-11 Lockheed Martin Corporation Current sensor arrangement with test current generator
US6667549B2 (en) * 2002-05-01 2003-12-23 Bridgewave Communications, Inc. Micro circuits with a sculpted ground plane
US7024936B2 (en) * 2002-06-18 2006-04-11 Corporation For National Research Initiatives Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure
KR100444235B1 (ko) * 2002-12-10 2004-08-16 삼성전기주식회사 자기 및 가속도 동시 검출 방법 및 장치
US20050262943A1 (en) 2004-05-27 2005-12-01 Glenn Claydon Apparatus, methods, and systems to detect an analyte based on changes in a resonant frequency of a spring element

Also Published As

Publication number Publication date
EP1610142A1 (de) 2005-12-28
US7466121B2 (en) 2008-12-16
US20070052410A1 (en) 2007-03-08
US20080070338A1 (en) 2008-03-20
US7315161B2 (en) 2008-01-01
US7112951B2 (en) 2006-09-26
US7495430B2 (en) 2009-02-24
US7901970B2 (en) 2011-03-08
DE602005002683D1 (de) 2007-11-15
US20050270014A1 (en) 2005-12-08
US20070040547A1 (en) 2007-02-22
DE602005002683T2 (de) 2008-07-17
EP1610142B1 (de) 2007-10-03
US20050270013A1 (en) 2005-12-08

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