ATE37629T1 - DEVICE FOR PLASMA PROCESSING OF PLATE-SHAPED OBJECTS. - Google Patents

DEVICE FOR PLASMA PROCESSING OF PLATE-SHAPED OBJECTS.

Info

Publication number: ATE37629T1
Authority: AT; Austria
Prior art keywords: plate; plasma processing; shaped objects; objects; shaped
Prior art date: 1983-07-05

Application number

AT84902592T

Other languages

German (de)

Inventor

Pierre Parrens

Original Assignee

Nextral

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1983-07-05

Filing date

1984-07-05

Publication date

1988-10-15

1983-07-05 Priority claimed from FR8311183A external-priority patent/FR2550044B1/en

1984-07-05 Application filed by Nextral filed Critical Nextral

1988-10-15 Application granted granted Critical

1988-10-15 Publication of ATE37629T1 publication Critical patent/ATE37629T1/en

Links

AT84902592T 1983-07-05 1984-07-05 DEVICE FOR PLASMA PROCESSING OF PLATE-SHAPED OBJECTS. ATE37629T1 (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
FR8311183A FR2550044B1 (en)	1983-07-05	1983-07-05	APPARATUS FOR PLASMA TREATMENT OF WAFER-LIKE SUBSTRATES
PCT/FR1984/000167 WO1985000466A1 (en)	1983-07-05	1984-07-05	Apparatus for plasma treatment of plate-shaped substrats
EP84902592A EP0148898B1 (en)	1983-07-05	1984-07-05	Apparatus for plasma treatment of plate-shaped substrats

Publications (1)

Publication Number	Publication Date
ATE37629T1 true ATE37629T1 (en)	1988-10-15

Family

ID=27227586

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AT84902592T ATE37629T1 (en)	1983-07-05	1984-07-05	DEVICE FOR PLASMA PROCESSING OF PLATE-SHAPED OBJECTS.

Country Status (1)

Country	Link
AT (1)	ATE37629T1 (en)

1984
- 1984-07-05 AT AT84902592T patent/ATE37629T1/en not_active IP Right Cessation

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Legal Events

Date	Code	Title	Description
1989-03-15	RER	Ceased as to paragraph 5 lit. 3 law introducing patent treaties