ATE376935T1 - A VARIETY OF BARRIER LAYERS - Google Patents

A VARIETY OF BARRIER LAYERS

Info

Publication number
ATE376935T1
ATE376935T1 AT03759379T AT03759379T ATE376935T1 AT E376935 T1 ATE376935 T1 AT E376935T1 AT 03759379 T AT03759379 T AT 03759379T AT 03759379 T AT03759379 T AT 03759379T AT E376935 T1 ATE376935 T1 AT E376935T1
Authority
AT
Austria
Prior art keywords
variety
barrier layers
defining
cover layer
ejector
Prior art date
Application number
AT03759379T
Other languages
German (de)
Inventor
Joe Stout
Thomas Strand
Jeremy Donaldson
Paul Benning
Original Assignee
Hewlett Packard Development Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Development Co filed Critical Hewlett Packard Development Co
Application granted granted Critical
Publication of ATE376935T1 publication Critical patent/ATE376935T1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Laminated Bodies (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)

Abstract

A fluid ejection device (103) comprises a substrate (115) having a first surface; a fluid ejector (201) formed over the first surface; and a cover layer (124) defining a firing chamber (202) formed about the gluid ejector, and defining a nozzle (105) over the firing chamger. The cover layer is formed by at least two SU8 layers.
AT03759379T 2003-09-17 2003-09-17 A VARIETY OF BARRIER LAYERS ATE376935T1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2003/029809 WO2005035255A1 (en) 2003-09-17 2003-09-17 Plurality of barrier layers

Publications (1)

Publication Number Publication Date
ATE376935T1 true ATE376935T1 (en) 2007-11-15

Family

ID=34434212

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03759379T ATE376935T1 (en) 2003-09-17 2003-09-17 A VARIETY OF BARRIER LAYERS

Country Status (9)

Country Link
EP (1) EP1680278B1 (en)
JP (1) JP2007528803A (en)
KR (1) KR101012210B1 (en)
CN (1) CN100421945C (en)
AT (1) ATE376935T1 (en)
AU (1) AU2003275109A1 (en)
DE (1) DE60317247T2 (en)
ES (1) ES2295637T3 (en)
WO (1) WO2005035255A1 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4881081B2 (en) * 2005-07-25 2012-02-22 キヤノン株式会社 Method for manufacturing liquid discharge head
US8704333B2 (en) 2007-12-19 2014-04-22 Hewlett-Packard Development Company, L.P. Fuse chambers on a substrate
US8919938B2 (en) 2007-12-20 2014-12-30 Hewlett-Packard Development Company, L.P. Droplet generator
US8206998B2 (en) * 2009-06-17 2012-06-26 Canon Kabushiki Kaisha Method for manufacturing liquid discharge head
US9895885B2 (en) 2012-12-20 2018-02-20 Hewlett-Packard Development Company, L.P. Fluid ejection device with particle tolerant layer extension
DE112012007239B4 (en) 2012-12-20 2021-11-25 Hewlett-Packard Development Co.,L.P. Fluid ejection device with particle-tolerant layer expansion
CN103353708A (en) * 2013-06-14 2013-10-16 大连理工大学 Multilayer negative photoresist mold manufacturing method
CN104669787B (en) * 2013-11-28 2017-11-03 珠海赛纳打印科技股份有限公司 Liquid injection apparatus and its manufacture method
JP6333992B2 (en) 2013-12-26 2018-05-30 大連理工大学 Integrated molding manufacturing method of liquid nozzle and liquid ejecting apparatus and apparatus therefor
CN103770468B (en) * 2013-12-26 2016-02-03 大连理工大学 Liquid injection device and its integral molding manufacturing method
CN107073960B (en) * 2014-10-30 2019-11-08 惠普发展公司，有限责任合伙企业 inkjet print head
CN108136776B (en) * 2015-10-30 2020-08-11 惠普发展公司，有限责任合伙企业 fluid ejection equipment
JP6976081B2 (en) * 2016-06-23 2021-12-01 キヤノン株式会社 Device for liquid discharge head

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4719477A (en) 1986-01-17 1988-01-12 Hewlett-Packard Company Integrated thermal ink jet printhead and method of manufacture
US5317346A (en) 1992-03-04 1994-05-31 Hewlett-Packard Company Compound ink feed slot
JP3069247B2 (en) * 1994-07-29 2000-07-24 アルプス電気株式会社 Thermal head
US6162589A (en) * 1998-03-02 2000-12-19 Hewlett-Packard Company Direct imaging polymer fluid jet orifice
CN1116985C (en) * 1998-06-30 2003-08-06 财团法人工业技术研究院 Method for manufacturing inkjet print head wafer
TW369485B (en) * 1998-07-28 1999-09-11 Ind Tech Res Inst Monolithic producing method for chip of ink-jet printing head

Also Published As

Publication number Publication date
CN1839046A (en) 2006-09-27
DE60317247D1 (en) 2007-12-13
ES2295637T3 (en) 2008-04-16
AU2003275109A1 (en) 2005-04-27
CN100421945C (en) 2008-10-01
DE60317247T2 (en) 2008-08-07
EP1680278B1 (en) 2007-10-31
KR101012210B1 (en) 2011-02-08
WO2005035255A1 (en) 2005-04-21
EP1680278A1 (en) 2006-07-19
JP2007528803A (en) 2007-10-18
KR20060081706A (en) 2006-07-13

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Legal Events

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