ATE381709T1 - Verfahren zur abbildungsmessung, abbildungsmesseinrichtung und verwendung gemessener informationen bei der prozesssteuerung - Google Patents

Verfahren zur abbildungsmessung, abbildungsmesseinrichtung und verwendung gemessener informationen bei der prozesssteuerung

Info

Publication number
ATE381709T1
ATE381709T1 AT01925588T AT01925588T ATE381709T1 AT E381709 T1 ATE381709 T1 AT E381709T1 AT 01925588 T AT01925588 T AT 01925588T AT 01925588 T AT01925588 T AT 01925588T AT E381709 T1 ATE381709 T1 AT E381709T1
Authority
AT
Austria
Prior art keywords
target
detector
filter
imaging
screen
Prior art date
Application number
AT01925588T
Other languages
English (en)
Inventor
Esa Haemaelaeinen
Juha Vattulainen
Original Assignee
Oseir Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oseir Oy filed Critical Oseir Oy
Application granted granted Critical
Publication of ATE381709T1 publication Critical patent/ATE381709T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/60—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Radiation Pyrometers (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Radiation (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
AT01925588T 2000-03-31 2001-03-30 Verfahren zur abbildungsmessung, abbildungsmesseinrichtung und verwendung gemessener informationen bei der prozesssteuerung ATE381709T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20000737A FI111192B (fi) 2000-03-31 2000-03-31 Menetelmä kuvantavaan mittaukseen, kuvantava mittalaite ja mitatun informaation käyttö prosessin valvonnassa

Publications (1)

Publication Number Publication Date
ATE381709T1 true ATE381709T1 (de) 2008-01-15

Family

ID=8558062

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01925588T ATE381709T1 (de) 2000-03-31 2001-03-30 Verfahren zur abbildungsmessung, abbildungsmesseinrichtung und verwendung gemessener informationen bei der prozesssteuerung

Country Status (9)

Country Link
US (1) US6927856B2 (de)
EP (1) EP1281052B1 (de)
JP (1) JP2003529066A (de)
CN (1) CN1432126A (de)
AT (1) ATE381709T1 (de)
AU (1) AU2001252288A1 (de)
DE (1) DE60131961T2 (de)
FI (1) FI111192B (de)
WO (1) WO2001073384A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1329860B1 (de) 2002-01-11 2006-11-08 Hochiki Corporation Vorrichtung zur Flammenerkennung
WO2005115737A2 (en) * 2004-03-22 2005-12-08 Quantaspec Inc. System and method for detecting and identifying an analyte
US20070177650A1 (en) * 2006-01-31 2007-08-02 Diamond Power International, Inc. Two-color flame imaging pyrometer
FI119708B (fi) 2006-02-01 2009-02-13 Viconsys Oy Laite rainan tarkkailemiseksi
US20070196005A1 (en) * 2006-02-23 2007-08-23 White Christopher A Feature Tracing Process for M-mode Images
DE102006028204A1 (de) * 2006-06-20 2007-12-27 Mtu Aero Engines Gmbh Verfahren zur Beschichtung eines Werkstücks
US9795285B2 (en) * 2011-07-07 2017-10-24 Boston Scientific Scimed, Inc. Imaging system for endoscope
US9625569B2 (en) * 2012-12-17 2017-04-18 pmdtechnologies ag Time-of-flight camera with motion detection
GB2516078A (en) * 2013-07-10 2015-01-14 Trinean Nv Shaped filter for spectrometer detector arrays
US11573124B2 (en) 2016-04-14 2023-02-07 National University Corporation Hokkaido University Computer storage medium, network system for distributing spectral camera control program and spectral image capturing method using spectral camera control device
EP3444579B1 (de) * 2016-04-14 2021-11-10 National University Corporation Hokkaido University Spektralkamerasteuerungsvorrichtung, spektralkamerasteuerungsprogramm, spektralkamerasteuerungssystem, flugzeug mit besagtem system und spektralbilderfassungsverfahren
KR102375624B1 (ko) * 2017-11-10 2022-03-17 세메스 주식회사 기판 처리 장치 및 약액 검사 방법
US10837897B2 (en) * 2018-01-09 2020-11-17 Shahid Abbas HAIDER System, method and apparatus for measuring polarization using spatially-varying polarization beams
US11986845B2 (en) 2019-06-24 2024-05-21 Oseir Oy Method and apparatus for controlling cold spraying
US12022172B2 (en) * 2022-04-19 2024-06-25 United States Of America As Represented By The Administrator Of Nasa Methods and apparatus for multi-spectral imaging pyrometer utilizing tunable optics

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4346992A (en) * 1969-02-07 1982-08-31 Sanders Associates, Inc. Laser detector and spectral analyzer
US4222663A (en) * 1977-08-01 1980-09-16 United Technologies Corporation Optical pyrometer and technique for temperature measurement
US4413324A (en) * 1981-02-25 1983-11-01 Sumitomo Kinzoku Kogyo Kabushiki Kaisha Temperature pattern measuring method and a device therefor
US5225883A (en) 1991-06-05 1993-07-06 The Babcock & Wilcox Company Video temperature monitor
JPH07301569A (ja) 1994-05-06 1995-11-14 Tetsudo Kizai Kogyo Kk ２つのフィルタを使用した赤外線温度画像処理方法及び装置
DE4422861C2 (de) * 1994-06-30 1996-05-09 Honeywell Ag Vorrichtung zur Bestimmung von Materialeigenschaften von bewegtem blattförmigem Material
US5822222A (en) 1995-04-05 1998-10-13 New Jersey Institute Of Technology Multi-wavelength imaging pyrometer
US5963311A (en) 1997-09-12 1999-10-05 Stratonics, Inc. Surface and particle imaging pyrometer and method of use
US6357910B1 (en) * 1999-08-04 2002-03-19 Photosonic, Inc. Multiwavelength pyrometer for measurement in hostile environments

Also Published As

Publication number Publication date
JP2003529066A (ja) 2003-09-30
FI20000737A0 (fi) 2000-03-31
DE60131961D1 (de) 2008-01-31
US6927856B2 (en) 2005-08-09
EP1281052A1 (de) 2003-02-05
AU2001252288A1 (en) 2001-10-08
CN1432126A (zh) 2003-07-23
US20030038944A1 (en) 2003-02-27
EP1281052B1 (de) 2007-12-19
FI20000737L (fi) 2001-10-01
DE60131961T2 (de) 2008-12-04
FI111192B (fi) 2003-06-13
WO2001073384A1 (en) 2001-10-04

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