ATE381709T1 - Verfahren zur abbildungsmessung, abbildungsmesseinrichtung und verwendung gemessener informationen bei der prozesssteuerung - Google Patents

Verfahren zur abbildungsmessung, abbildungsmesseinrichtung und verwendung gemessener informationen bei der prozesssteuerung

Info

Publication number
ATE381709T1
ATE381709T1 AT01925588T AT01925588T ATE381709T1 AT E381709 T1 ATE381709 T1 AT E381709T1 AT 01925588 T AT01925588 T AT 01925588T AT 01925588 T AT01925588 T AT 01925588T AT E381709 T1 ATE381709 T1 AT E381709T1
Authority
AT
Austria
Prior art keywords
target
detector
filter
imaging
screen
Prior art date
Application number
AT01925588T
Other languages
English (en)
Inventor
Esa Haemaelaeinen
Juha Vattulainen
Original Assignee
Oseir Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oseir Oy filed Critical Oseir Oy
Application granted granted Critical
Publication of ATE381709T1 publication Critical patent/ATE381709T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/60—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Measurement Of Radiation (AREA)
  • Radiation Pyrometers (AREA)
  • Length Measuring Devices By Optical Means (AREA)
AT01925588T 2000-03-31 2001-03-30 Verfahren zur abbildungsmessung, abbildungsmesseinrichtung und verwendung gemessener informationen bei der prozesssteuerung ATE381709T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20000737A FI111192B (fi) 2000-03-31 2000-03-31 Menetelmä kuvantavaan mittaukseen, kuvantava mittalaite ja mitatun informaation käyttö prosessin valvonnassa

Publications (1)

Publication Number Publication Date
ATE381709T1 true ATE381709T1 (de) 2008-01-15

Family

ID=8558062

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01925588T ATE381709T1 (de) 2000-03-31 2001-03-30 Verfahren zur abbildungsmessung, abbildungsmesseinrichtung und verwendung gemessener informationen bei der prozesssteuerung

Country Status (9)

Country Link
US (1) US6927856B2 (de)
EP (1) EP1281052B1 (de)
JP (1) JP2003529066A (de)
CN (1) CN1432126A (de)
AT (1) ATE381709T1 (de)
AU (1) AU2001252288A1 (de)
DE (1) DE60131961T2 (de)
FI (1) FI111192B (de)
WO (1) WO2001073384A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1329860B1 (de) 2002-01-11 2006-11-08 Hochiki Corporation Vorrichtung zur Flammenerkennung
US7623234B2 (en) * 2004-03-22 2009-11-24 Quantaspec, Inc. System and method for detecting and identifying an analyte
US20070177650A1 (en) * 2006-01-31 2007-08-02 Diamond Power International, Inc. Two-color flame imaging pyrometer
FI119708B (fi) * 2006-02-01 2009-02-13 Viconsys Oy Laite rainan tarkkailemiseksi
US20070196005A1 (en) * 2006-02-23 2007-08-23 White Christopher A Feature Tracing Process for M-mode Images
DE102006028204A1 (de) * 2006-06-20 2007-12-27 Mtu Aero Engines Gmbh Verfahren zur Beschichtung eines Werkstücks
US9795285B2 (en) * 2011-07-07 2017-10-24 Boston Scientific Scimed, Inc. Imaging system for endoscope
US9625569B2 (en) * 2012-12-17 2017-04-18 pmdtechnologies ag Time-of-flight camera with motion detection
GB2516078A (en) * 2013-07-10 2015-01-14 Trinean Nv Shaped filter for spectrometer detector arrays
WO2017179378A1 (ja) * 2016-04-14 2017-10-19 国立大学法人北海道大学 スペクトルカメラ制御装置、スペクトルカメラ制御プログラム、スペクトルカメラ制御システム、このシステムを搭載した飛行体およびスペクトル画像撮像方法
US11573124B2 (en) 2016-04-14 2023-02-07 National University Corporation Hokkaido University Computer storage medium, network system for distributing spectral camera control program and spectral image capturing method using spectral camera control device
KR102375624B1 (ko) * 2017-11-10 2022-03-17 세메스 주식회사 기판 처리 장치 및 약액 검사 방법
CA3029683A1 (en) * 2018-01-09 2019-07-09 Shahid Abbas Haider System, method and apparatus for measuring polarization using spatially-varying polarization beams
WO2020260755A1 (en) * 2019-06-24 2020-12-30 Oseir Oy Method and apparatus for controlling cold spraying
US12022172B2 (en) * 2022-04-19 2024-06-25 United States Of America As Represented By The Administrator Of Nasa Methods and apparatus for multi-spectral imaging pyrometer utilizing tunable optics

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4346992A (en) * 1969-02-07 1982-08-31 Sanders Associates, Inc. Laser detector and spectral analyzer
US4222663A (en) * 1977-08-01 1980-09-16 United Technologies Corporation Optical pyrometer and technique for temperature measurement
US4413324A (en) * 1981-02-25 1983-11-01 Sumitomo Kinzoku Kogyo Kabushiki Kaisha Temperature pattern measuring method and a device therefor
US5225883A (en) * 1991-06-05 1993-07-06 The Babcock & Wilcox Company Video temperature monitor
JPH07301569A (ja) 1994-05-06 1995-11-14 Tetsudo Kizai Kogyo Kk ２つのフィルタを使用した赤外線温度画像処理方法及び装置
DE4422861C2 (de) * 1994-06-30 1996-05-09 Honeywell Ag Vorrichtung zur Bestimmung von Materialeigenschaften von bewegtem blattförmigem Material
US5822222A (en) * 1995-04-05 1998-10-13 New Jersey Institute Of Technology Multi-wavelength imaging pyrometer
US5963311A (en) * 1997-09-12 1999-10-05 Stratonics, Inc. Surface and particle imaging pyrometer and method of use
US6357910B1 (en) * 1999-08-04 2002-03-19 Photosonic, Inc. Multiwavelength pyrometer for measurement in hostile environments

Also Published As

Publication number Publication date
FI20000737A0 (fi) 2000-03-31
EP1281052B1 (de) 2007-12-19
WO2001073384A1 (en) 2001-10-04
AU2001252288A1 (en) 2001-10-08
FI111192B (fi) 2003-06-13
DE60131961T2 (de) 2008-12-04
EP1281052A1 (de) 2003-02-05
CN1432126A (zh) 2003-07-23
FI20000737L (fi) 2001-10-01
DE60131961D1 (de) 2008-01-31
US20030038944A1 (en) 2003-02-27
US6927856B2 (en) 2005-08-09
JP2003529066A (ja) 2003-09-30

Similar Documents

Publication Publication Date Title
ATE381709T1 (de) Verfahren zur abbildungsmessung, abbildungsmesseinrichtung und verwendung gemessener informationen bei der prozesssteuerung
DK2267451T3 (da) Todimensionalt spektralt billedsystem og fremgangsmåde
JP2015225049A (ja) 検査装置及び検査方法
EP2514193B1 (de) Verfahren zur visualisierung von ortsaufgelösten messergebnissen und korrespondierende messanordnung
WO2003081188A3 (en) High speed analyzer using near infrared radiation transmitted through thick samples of optically dense material
US6642999B2 (en) Method and device for analyzing flows
JP2008281513A (ja) 文化財検査装置
JP2008002909A (ja) ３次元形状測定方法及び装置
CA3170608A1 (en) Hyperspectral imaging system for geological sample analysis
Yue et al. Color crosstalk correction for synchronous measurement of full-field temperature and deformation
CN120641726A (zh) 傅里叶变换光谱仪
CN120112779A (zh) 用于测量悬浮在流体中的颗粒的颗粒尺寸的方法和组件
Žídek et al. Lensless photoluminescence hyperspectral camera employing random speckle patterns
ATE437527T1 (de) Sensorelementanordnung
EP3486690A1 (de) Detektionsvorrichtung und verfahren zur detektion von chi-energie
DE4203272A1 (de) Verfahren zur phasenempfindlichen effektmodulierten rasterabbildung
Singh et al. Objective evaluation method for advance thermal imagers based on minimum resolvable temperature difference
del Hoyo‐Meléndez et al. Measuring photostability through glass: the application of microfading testing to the study of framed pastel artworks
DE102016212810A1 (de) Verfahren und Messsystem für die Prüfung eines Bauteils durch aktive Thermografie
US20210318244A1 (en) Spectroscopic imaging apparatus and fluorescence observation apparatus
JP2001165775A (ja) スペクトルイメージセンサ
EP4283400A3 (de) Messvorrichtung, lithografievorrichtung und artikelherstellungsverfahren
JP5929338B2 (ja) 撮像装置、分光情報作成方法
Hegyi Birefringent static Fourier-transform spectrometer for flow cytometry and imaging spectroscopy
CN113108908A (zh) 一种宽波段成像传感器的相对光谱响应测量装置及方法

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties