ATE385032T1 - Mehrfachsonden-messgerät und zugehöriges anwendungsverfahren - Google Patents

Mehrfachsonden-messgerät und zugehöriges anwendungsverfahren

Info

Publication number
ATE385032T1
ATE385032T1 AT00127692T AT00127692T ATE385032T1 AT E385032 T1 ATE385032 T1 AT E385032T1 AT 00127692 T AT00127692 T AT 00127692T AT 00127692 T AT00127692 T AT 00127692T AT E385032 T1 ATE385032 T1 AT E385032T1
Authority
AT
Austria
Prior art keywords
local
probes
measurements
sample
application method
Prior art date
Application number
AT00127692T
Other languages
English (en)
Inventor
Stephan Maximilian Altmann
Johann Karl Heinrich Hoerber
Original Assignee
Europ Lab Molekularbiolog
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Europ Lab Molekularbiolog filed Critical Europ Lab Molekularbiolog
Application granted granted Critical
Publication of ATE385032T1 publication Critical patent/ATE385032T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q40/00—Calibration, e.g. of probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/06—Probe tip arrays
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/874—Probe tip array

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
  • Measuring And Recording Apparatus For Diagnosis (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
AT00127692T 2000-09-13 2000-12-18 Mehrfachsonden-messgerät und zugehöriges anwendungsverfahren ATE385032T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/660,885 US6583411B1 (en) 2000-09-13 2000-09-13 Multiple local probe measuring device and method

Publications (1)

Publication Number Publication Date
ATE385032T1 true ATE385032T1 (de) 2008-02-15

Family

ID=24651352

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00127692T ATE385032T1 (de) 2000-09-13 2000-12-18 Mehrfachsonden-messgerät und zugehöriges anwendungsverfahren

Country Status (4)

Country Link
US (1) US6583411B1 (de)
EP (1) EP1189240B1 (de)
AT (1) ATE385032T1 (de)
DE (1) DE60037884T2 (de)

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US6545492B1 (en) * 1999-09-20 2003-04-08 Europaisches Laboratorium Fur Molekularbiologie (Embl) Multiple local probe measuring device and method
JP2003202284A (ja) * 2002-01-09 2003-07-18 Hitachi Ltd 走査プローブ顕微鏡およびこれを用いた試料観察方法およびデバイス製造方法
US20050034542A1 (en) * 2002-02-08 2005-02-17 Jacob Thaysen Sensor comprising mechanical amplification of surface stress sensitive cantilever
US6850050B2 (en) * 2002-05-24 2005-02-01 Intel Corporation Reticle inspection
JP4628099B2 (ja) * 2002-07-08 2011-02-09 マルチプローブ・インコーポレーテッド 複数の走査プローブのソフトウエア同期化
US6835589B2 (en) * 2002-11-14 2004-12-28 International Business Machines Corporation Three-dimensional integrated CMOS-MEMS device and process for making the same
US7260980B2 (en) * 2003-03-11 2007-08-28 Adams Jesse D Liquid cell and passivated probe for atomic force microscopy and chemical sensing
US7460462B2 (en) * 2003-12-17 2008-12-02 Hewlett-Packard Development Company, L.P. Contact probe storage fet sensor and write heater arrangements
JP2005266650A (ja) * 2004-03-22 2005-09-29 Sii Nanotechnology Inc スクラッチ修正加工方法及びそれに用いるｓｐｍ
EP1617293A1 (de) * 2004-07-14 2006-01-18 Universität Kassel Verfahren und Vorrichtung zum Ausrichten von einem ersten Gegenstand zu einem zweiten Gegenstand
JP2006039260A (ja) * 2004-07-28 2006-02-09 Sii Nanotechnology Inc 原子間力顕微鏡を用いたフォトマスクのパーティクル除去方法
US7694346B2 (en) 2004-10-01 2010-04-06 Board Of Regents Of The Nevada System Of Higher Education On Behalf Of The University Of Nevada Cantilevered probe detector with piezoelectric element
WO2007024711A2 (en) * 2005-08-19 2007-03-01 Arthur Beyder Oscillator and method of making for atomic force microscope and other applications
US20100294927A1 (en) * 2005-09-12 2010-11-25 Nanolnk, Inc. High throughput inspecting
JP4694629B2 (ja) * 2005-11-09 2011-06-08 メトグラス・インコーポレーテッド カレントトランスおよび電力計
US7526949B1 (en) 2006-07-21 2009-05-05 The United States Of America As Represented By The Secretary Of The Army High resolution coherent dual-tip scanning probe microscope
DE102007023435A1 (de) * 2007-05-16 2008-11-20 Jpk Instruments Ag Verfahren zum rastersondenmikroskopischen Untersuchen einer Messprobe, Messsystem und Messsondensystem
US7569077B2 (en) * 2007-06-15 2009-08-04 Rhk Technology, Inc. Position control for scanning probe spectroscopy
US7597717B1 (en) * 2007-06-25 2009-10-06 The United States Of America As Represented By The Secretary Of The Navy Rotatable multi-cantilever scanning probe microscopy head
US7958776B2 (en) * 2007-09-06 2011-06-14 Chunhai Wang Atomic force gradient microscope and method of using this microscope
US20090287120A1 (en) 2007-12-18 2009-11-19 Searete Llc, A Limited Liability Corporation Of The State Of Delaware Circulatory monitoring systems and methods
US9717896B2 (en) 2007-12-18 2017-08-01 Gearbox, Llc Treatment indications informed by a priori implant information
US8636670B2 (en) 2008-05-13 2014-01-28 The Invention Science Fund I, Llc Circulatory monitoring systems and methods
DE102008022230A1 (de) * 2008-05-06 2009-11-19 Photonik Zentrum Hessen In Wetzlar Ag Vorrichtung zur referenzbezogenen Messung von Form und Struktur
US10566169B1 (en) 2008-06-30 2020-02-18 Nexgen Semi Holding, Inc. Method and device for spatial charged particle bunching
CN101629885B (zh) * 2009-07-07 2011-06-29 清华大学 双探针微纳米力学检测系统
US20110167913A1 (en) * 2009-10-15 2011-07-14 Nexgen Semi Holding, Inc. Imaging devices for measuring the structure of a surface
US20120047610A1 (en) 2010-04-09 2012-02-23 Boise State University Cantilever-based optical interface force microscope
US8549660B2 (en) 2010-04-09 2013-10-01 Boise State University Cantilever-based optical fiber probe interfacial force microscope for partial immersion in liquid
JP5525377B2 (ja) * 2010-08-17 2014-06-18 株式会社ミツトヨ 高ダイナミックレンジプローブ
US8479309B2 (en) 2011-04-28 2013-07-02 The Board Of Trustees Of The University Of Illinois Ultra-low damping imaging mode related to scanning probe microscopy in liquid
US9472374B2 (en) 2011-09-28 2016-10-18 Hysitron, Inc. Testing assembly including a multiple degree of freedom stage
WO2014144018A2 (en) 2013-03-15 2014-09-18 Bruker Nano, Inc. Dual-probe scanning probe microscope
US9645144B2 (en) * 2014-08-15 2017-05-09 Bogazici Üniversitesi Atomic force microscope integrated with a multiple degrees-of-freedom magnetic actuator
US10712364B2 (en) 2015-11-03 2020-07-14 Board Of Regents, The University Of Texas Systems Metrology devices for rapid specimen setup
US20180321276A1 (en) * 2015-11-03 2018-11-08 Board Of Regents, The University Of Texas System Metrology devices and methods for independently controlling a plurality of sensing probes
CN105424697B (zh) * 2015-11-05 2018-02-09 清华大学 对微米纤维进行检测的方法
CN110596428B (zh) * 2019-08-20 2021-06-01 电子科技大学 应用于近场扫描微波显微镜的扫描区域平面纠斜的方法
CN112924275B (zh) * 2021-01-25 2022-06-24 武汉大学 一种微力测量装置、其制备方法及原位力学测试的方法
US12493005B1 (en) 2022-06-07 2025-12-09 Nexgen Semi Holding, Inc. Extended range active illumination imager
CN119044544A (zh) * 2022-12-23 2024-11-29 百及纳米科技(上海)有限公司 用于提高信噪比的扫描探针系统测量方法与扫描探针系统

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Also Published As

Publication number Publication date
US6583411B1 (en) 2003-06-24
EP1189240A1 (de) 2002-03-20
DE60037884D1 (de) 2008-03-13
EP1189240B1 (de) 2008-01-23
DE60037884T2 (de) 2009-01-15

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