ATE385345T1 - Vorrichtung und verfahren zur steuerung einer miniumgebung - Google Patents

Vorrichtung und verfahren zur steuerung einer miniumgebung

Info

Publication number
ATE385345T1
ATE385345T1 AT00420248T AT00420248T ATE385345T1 AT E385345 T1 ATE385345 T1 AT E385345T1 AT 00420248 T AT00420248 T AT 00420248T AT 00420248 T AT00420248 T AT 00420248T AT E385345 T1 ATE385345 T1 AT E385345T1
Authority
AT
Austria
Prior art keywords
sample
controlling
enclosure
mini environment
individual
Prior art date
Application number
AT00420248T
Other languages
English (en)
Inventor
Eric Chevalier
Roland Bernard
Original Assignee
Alcatel Lucent
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Lucent filed Critical Alcatel Lucent
Application granted granted Critical
Publication of ATE385345T1 publication Critical patent/ATE385345T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1924—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control
    • H10P72/1926—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Micromachines (AREA)
  • Eye Examination Apparatus (AREA)
  • Radar Systems Or Details Thereof (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
AT00420248T 1999-12-09 2000-12-06 Vorrichtung und verfahren zur steuerung einer miniumgebung ATE385345T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9915528A FR2802335B1 (fr) 1999-12-09 1999-12-09 Systeme et procede de controle de minienvironnement

Publications (1)

Publication Number Publication Date
ATE385345T1 true ATE385345T1 (de) 2008-02-15

Family

ID=9553053

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00420248T ATE385345T1 (de) 1999-12-09 2000-12-06 Vorrichtung und verfahren zur steuerung einer miniumgebung

Country Status (6)

Country Link
US (1) US6422823B2 (de)
EP (1) EP1107292B1 (de)
JP (1) JP2001223263A (de)
AT (1) ATE385345T1 (de)
DE (1) DE60037932T2 (de)
FR (1) FR2802335B1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7514048B2 (en) * 2002-08-22 2009-04-07 Industrial Technology Research Institute Controlled odor generator
US7367781B2 (en) * 2003-01-16 2008-05-06 The Regents Of The University Of Michigan Packaged micromachined device such as a vacuum micropump, device having a micromachined sealed electrical interconnect and device having a suspended micromachined bonding pad
US6986649B2 (en) * 2003-04-09 2006-01-17 Motorola, Inc. Micropump with integrated pressure sensor
US6913654B2 (en) * 2003-06-02 2005-07-05 Mykrolis Corporation Method for the removal of airborne molecular contaminants using water gas mixtures
FR2861814B1 (fr) * 2003-11-04 2006-02-03 Cit Alcatel Dispositif de pompage par micropompes a transpiration thermique
JP4644189B2 (ja) 2004-03-23 2011-03-02 株式会社大阪真空機器製作所 ポンプ装置及びそのポンプユニット
FR2869451B1 (fr) * 2004-04-21 2006-07-21 Alcatel Sa Enveloppe de transport a protection par effet thermophorese
FR2869452B1 (fr) * 2004-04-21 2006-09-08 Alcatel Sa Dispositif pour le transport de substrats sous atmosphere controlee
US20060001569A1 (en) * 2004-07-01 2006-01-05 Marco Scandurra Radiometric propulsion system
TWI278426B (en) * 2004-12-30 2007-04-11 Prec Instr Dev Ct Nat Composite plate device for thermal transpiration micropump
JP2006218421A (ja) * 2005-02-10 2006-08-24 Kyoto Univ 混合気体の分離方法、及び気体分離装置
KR20080034492A (ko) * 2005-08-03 2008-04-21 엔테그리스, 아이엔씨. 이송 용기
US20070144118A1 (en) * 2005-12-22 2007-06-28 Alvarez Daniel Jr Purging of a wafer conveyance container
JP4893156B2 (ja) * 2006-08-21 2012-03-07 栗田工業株式会社 水質評価方法及びそれに用いられる基板接触器具
US9997325B2 (en) 2008-07-17 2018-06-12 Verity Instruments, Inc. Electron beam exciter for use in chemical analysis in processing systems
WO2012118995A1 (en) * 2011-03-02 2012-09-07 Game Changers, Llc Thermal transpiration device and method of making same
EP2681438B1 (de) 2011-03-02 2019-01-23 Game Changers, Llc Fehlertolerantes steuersystem für verteilte mikroschubdüsen
RU2462615C1 (ru) * 2011-04-19 2012-09-27 Федеральное Государственное Автономное Образовательное Учреждение Высшего Профессионального Образования "Московский Физико-Технический Институт (Государственный Университет)" Газовый микронасос
US11977025B2 (en) 2022-07-07 2024-05-07 Ge Infrastructure Technology Llc System and method for on-board data analysis for multi-gas sensing

Family Cites Families (25)

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Publication number Priority date Publication date Assignee Title
JPS5950538A (ja) * 1982-09-17 1984-03-23 Hitachi Ltd ウエハ搬送装置
JPS59130519A (ja) * 1983-09-05 1984-07-27 Mitsutoshi Kashiwajima 多孔性物質を用いた気体の輸送圧縮装置
US4636128A (en) * 1984-08-30 1987-01-13 Texas Instruments Incorporated Semiconductor slice cassette transport unit
US4966519A (en) * 1985-10-24 1990-10-30 Texas Instruments Incorporated Integrated circuit processing system
US4676884A (en) * 1986-07-23 1987-06-30 The Boc Group, Inc. Wafer processing machine with evacuated wafer transporting and storage system
US4938742A (en) * 1988-02-04 1990-07-03 Smits Johannes G Piezoelectric micropump with microvalves
US4969556A (en) * 1988-05-10 1990-11-13 Hajime Ishimaru Vacuum container
DE3925749C1 (de) * 1989-08-03 1990-10-31 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De
DE4024973C2 (de) * 1990-08-07 1994-11-03 Ibm Anordnung zum Lagern, Transportieren und Einschleusen von Substraten
US5255783A (en) * 1991-12-20 1993-10-26 Fluoroware, Inc. Evacuated wafer container
JPH05340356A (ja) * 1992-06-11 1993-12-21 Aisin Seiki Co Ltd 光駆動型マイクロアクチュエータ
DE4220077A1 (de) * 1992-06-19 1993-12-23 Bosch Gmbh Robert Mikropumpe
EP0582018B1 (de) * 1992-08-04 1995-10-18 International Business Machines Corporation Unter Druck stehende Koppelsysteme zum Transferieren von einem Halbleiterwafer zwischen einem tragbaren abdichtbaren unter druckstehenden Behälter und einer Bearbeitungsanlage
US5295522A (en) * 1992-09-24 1994-03-22 International Business Machines Corporation Gas purge system for isolation enclosure for contamination sensitive items
FR2697000B1 (fr) * 1992-10-16 1994-11-25 Commissariat Energie Atomique Boîte plate de confinement d'un objet plat sous atmosphère spéciale.
JPH0927542A (ja) * 1995-07-13 1997-01-28 Hitachi Ltd 搬送容器
US5810537A (en) * 1995-10-18 1998-09-22 Bye/Oasis Engineering Inc. Isolation chamber transfer apparatus
FR2747112B1 (fr) * 1996-04-03 1998-05-07 Commissariat Energie Atomique Dispositif de transport d'objets plats et procede de transfert de ces objets entre ledit dispositif et une machine de traitement
US5871336A (en) * 1996-07-25 1999-02-16 Northrop Grumman Corporation Thermal transpiration driven vacuum pump
US5843196A (en) * 1997-01-21 1998-12-01 International Business Machines Corporation Ultra-clean transport carrier
JPH10242233A (ja) * 1997-02-26 1998-09-11 Hitachi Ltd 半導体製造方法
DE19719862A1 (de) * 1997-05-12 1998-11-19 Fraunhofer Ges Forschung Mikromembranpumpe
US5975856A (en) * 1997-10-06 1999-11-02 The Aerospace Corporation Method of pumping a fluid through a micromechanical valve having N-type and P-type thermoelectric elements for heating and cooling a fluid between an inlet and an outlet
US5988233A (en) * 1998-03-27 1999-11-23 Asyst Technologies, Inc. Evacuation-driven SMIF pod purge system
US6368079B2 (en) * 1998-12-23 2002-04-09 Battelle Pulmonary Therapeutics, Inc. Piezoelectric micropump

Also Published As

Publication number Publication date
JP2001223263A (ja) 2001-08-17
FR2802335B1 (fr) 2002-04-05
EP1107292B1 (de) 2008-01-30
EP1107292A1 (de) 2001-06-13
FR2802335A1 (fr) 2001-06-15
US6422823B2 (en) 2002-07-23
US20010003572A1 (en) 2001-06-14
DE60037932D1 (de) 2008-03-20
DE60037932T2 (de) 2009-01-29

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