ATE387928T1 - Katheterspitze - Google Patents
KatheterspitzeInfo
- Publication number
- ATE387928T1 ATE387928T1 AT04811126T AT04811126T ATE387928T1 AT E387928 T1 ATE387928 T1 AT E387928T1 AT 04811126 T AT04811126 T AT 04811126T AT 04811126 T AT04811126 T AT 04811126T AT E387928 T1 ATE387928 T1 AT E387928T1
- Authority
- AT
- Austria
- Prior art keywords
- trench
- semiconductor substrate
- forming
- filling material
- hardmask layer
- Prior art date
Links
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
- A61F2/00—Filters implantable into blood vessels; Prostheses, i.e. artificial substitutes or replacements for parts of the body; Appliances for connecting them with the body; Devices providing patency to, or preventing collapsing of, tubular structures of the body, e.g. stents
- A61F2/95—Instruments specially adapted for placement or removal of stents or stent-grafts
- A61F2/958—Inflatable balloons for placing stents or stent-grafts
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M25/00—Catheters; Hollow probes
- A61M25/0009—Making of catheters or other medical or surgical tubes
- A61M25/001—Forming the tip of a catheter, e.g. bevelling process, join or taper
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M25/00—Catheters; Hollow probes
- A61M25/0067—Catheters; Hollow probes characterised by the distal end, e.g. tips
- A61M25/0068—Static characteristics of the catheter tip, e.g. shape, atraumatic tip, curved tip or tip structure
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M25/00—Catheters; Hollow probes
- A61M25/0067—Catheters; Hollow probes characterised by the distal end, e.g. tips
- A61M25/008—Strength or flexibility characteristics of the catheter tip
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M25/00—Catheters; Hollow probes
- A61M25/10—Balloon catheters
- A61M25/1027—Making of balloon catheters
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
- H10W10/01—Manufacture or treatment
- H10W10/011—Manufacture or treatment of isolation regions comprising dielectric materials
- H10W10/014—Manufacture or treatment of isolation regions comprising dielectric materials using trench refilling with dielectric materials, e.g. shallow trench isolations
- H10W10/0145—Manufacture or treatment of isolation regions comprising dielectric materials using trench refilling with dielectric materials, e.g. shallow trench isolations of trenches having shapes other than rectangular or V-shape
- H10W10/0147—Manufacture or treatment of isolation regions comprising dielectric materials using trench refilling with dielectric materials, e.g. shallow trench isolations of trenches having shapes other than rectangular or V-shape the shapes being altered by a local oxidation of silicon process, e.g. trench corner rounding by LOCOS
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
- H10W10/10—Isolation regions comprising dielectric materials
- H10W10/17—Isolation regions comprising dielectric materials formed using trench refilling with dielectric materials, e.g. shallow trench isolations
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
- A61F2/00—Filters implantable into blood vessels; Prostheses, i.e. artificial substitutes or replacements for parts of the body; Appliances for connecting them with the body; Devices providing patency to, or preventing collapsing of, tubular structures of the body, e.g. stents
- A61F2/95—Instruments specially adapted for placement or removal of stents or stent-grafts
- A61F2/958—Inflatable balloons for placing stents or stent-grafts
- A61F2002/9583—Means for holding the stent on the balloon, e.g. using protrusions, adhesives or an outer sleeve
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
- A61F2250/00—Special features of prostheses classified in groups A61F2/00 - A61F2/26 or A61F2/82 or A61F9/00 or A61F11/00 or subgroups thereof
- A61F2250/0058—Additional features; Implant or prostheses properties not otherwise provided for
- A61F2250/0096—Markers and sensors for detecting a position or changes of a position of an implant, e.g. RF sensors, ultrasound markers
- A61F2250/0098—Markers and sensors for detecting a position or changes of a position of an implant, e.g. RF sensors, ultrasound markers radio-opaque, e.g. radio-opaque markers
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M25/00—Catheters; Hollow probes
- A61M25/10—Balloon catheters
- A61M2025/1043—Balloon catheters with special features or adapted for special applications
- A61M2025/1079—Balloon catheters with special features or adapted for special applications having radio-opaque markers in the region of the balloon
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M25/00—Catheters; Hollow probes
- A61M25/10—Balloon catheters
- A61M2025/1043—Balloon catheters with special features or adapted for special applications
- A61M2025/1093—Balloon catheters with special features or adapted for special applications having particular tip characteristics
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M2205/00—General characteristics of the apparatus
- A61M2205/32—General characteristics of the apparatus with radio-opaque indicia
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M25/00—Catheters; Hollow probes
- A61M25/0043—Catheters; Hollow probes characterised by structural features
- A61M25/005—Catheters; Hollow probes characterised by structural features with embedded materials for reinforcement, e.g. wires, coils, braids
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M25/00—Catheters; Hollow probes
- A61M25/0043—Catheters; Hollow probes characterised by structural features
- A61M25/0054—Catheters; Hollow probes characterised by structural features with regions for increasing flexibility
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M25/00—Catheters; Hollow probes
- A61M25/0067—Catheters; Hollow probes characterised by the distal end, e.g. tips
- A61M25/0068—Static characteristics of the catheter tip, e.g. shape, atraumatic tip, curved tip or tip structure
- A61M25/0069—Tip not integral with tube
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M25/00—Catheters; Hollow probes
- A61M25/01—Introducing, guiding, advancing, emplacing or holding catheters
- A61M25/0105—Steering means as part of the catheter or advancing means; Markers for positioning
- A61M25/0108—Steering means as part of the catheter or advancing means; Markers for positioning using radio-opaque or ultrasound markers
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M25/00—Catheters; Hollow probes
- A61M25/01—Introducing, guiding, advancing, emplacing or holding catheters
- A61M25/0105—Steering means as part of the catheter or advancing means; Markers for positioning
- A61M25/0127—Magnetic means; Magnetic markers
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Biomedical Technology (AREA)
- Heart & Thoracic Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- Veterinary Medicine (AREA)
- Public Health (AREA)
- General Health & Medical Sciences (AREA)
- Pulmonology (AREA)
- Biophysics (AREA)
- Anesthesiology (AREA)
- Hematology (AREA)
- Vascular Medicine (AREA)
- Transplantation (AREA)
- Oral & Maxillofacial Surgery (AREA)
- Child & Adolescent Psychology (AREA)
- Cardiology (AREA)
- Element Separation (AREA)
- Media Introduction/Drainage Providing Device (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/767,657 US7118987B2 (en) | 2004-01-29 | 2004-01-29 | Method of achieving improved STI gap fill with reduced stress |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE387928T1 true ATE387928T1 (de) | 2008-03-15 |
Family
ID=34807711
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT04811126T ATE387928T1 (de) | 2004-01-29 | 2004-11-17 | Katheterspitze |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7118987B2 (de) |
| CN (2) | CN2796099Y (de) |
| AT (1) | ATE387928T1 (de) |
| DE (1) | DE602004012323T3 (de) |
| ES (1) | ES2302071T5 (de) |
| TW (1) | TWI278960B (de) |
Families Citing this family (85)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100593673B1 (ko) * | 2004-10-27 | 2006-06-28 | 삼성전자주식회사 | 반도체 장치의 제조 방법 및 이를 이용한 반도체 장치의 소자 분리막 제조 방법 |
| US20060113603A1 (en) * | 2004-12-01 | 2006-06-01 | Amberwave Systems Corporation | Hybrid semiconductor-on-insulator structures and related methods |
| US7393733B2 (en) | 2004-12-01 | 2008-07-01 | Amberwave Systems Corporation | Methods of forming hybrid fin field-effect transistor structures |
| KR100620707B1 (ko) * | 2004-12-31 | 2006-09-13 | 동부일렉트로닉스 주식회사 | 반도체 소자의 sti 형성 방법 |
| JP2006237509A (ja) * | 2005-02-28 | 2006-09-07 | Toshiba Corp | 半導体装置 |
| US9153645B2 (en) | 2005-05-17 | 2015-10-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Lattice-mismatched semiconductor structures with reduced dislocation defect densities and related methods for device fabrication |
| US8324660B2 (en) | 2005-05-17 | 2012-12-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Lattice-mismatched semiconductor structures with reduced dislocation defect densities and related methods for device fabrication |
| US20070020877A1 (en) * | 2005-07-21 | 2007-01-25 | Taiwan Semiconductor Manufacturing Co., Ltd. | Shallow trench isolation structure and method of fabricating the same |
| KR100745987B1 (ko) * | 2005-08-09 | 2007-08-06 | 삼성전자주식회사 | 반도체 소자의 트렌치 소자 분리 영역 제조 방법 |
| KR100688750B1 (ko) * | 2005-08-18 | 2007-03-02 | 동부일렉트로닉스 주식회사 | 섀로우 트렌치 아이솔레이션의 제조방법 |
| US8501632B2 (en) * | 2005-12-20 | 2013-08-06 | Infineon Technologies Ag | Methods of fabricating isolation regions of semiconductor devices and structures thereof |
| KR100713924B1 (ko) * | 2005-12-23 | 2007-05-07 | 주식회사 하이닉스반도체 | 돌기형 트랜지스터 및 그의 형성방법 |
| KR100724196B1 (ko) * | 2005-12-28 | 2007-05-31 | 동부일렉트로닉스 주식회사 | 반도체 소자의 sti 갭필 산화막 제조방법 |
| US7767515B2 (en) * | 2006-02-27 | 2010-08-03 | Synopsys, Inc. | Managing integrated circuit stress using stress adjustment trenches |
| US8936995B2 (en) | 2006-03-01 | 2015-01-20 | Infineon Technologies Ag | Methods of fabricating isolation regions of semiconductor devices and structures thereof |
| US7777250B2 (en) | 2006-03-24 | 2010-08-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Lattice-mismatched semiconductor structures and related methods for device fabrication |
| US7884030B1 (en) | 2006-04-21 | 2011-02-08 | Advanced Micro Devices, Inc. and Spansion LLC | Gap-filling with uniform properties |
| US7968425B2 (en) * | 2006-07-14 | 2011-06-28 | Micron Technology, Inc. | Isolation regions |
| US8173551B2 (en) | 2006-09-07 | 2012-05-08 | Taiwan Semiconductor Manufacturing Co., Ltd. | Defect reduction using aspect ratio trapping |
| WO2008039495A1 (en) | 2006-09-27 | 2008-04-03 | Amberwave Systems Corporation | Tri-gate field-effect transistors formed by aspect ratio trapping |
| US7875958B2 (en) | 2006-09-27 | 2011-01-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Quantum tunneling devices and circuits with lattice-mismatched semiconductor structures |
| WO2008051503A2 (en) | 2006-10-19 | 2008-05-02 | Amberwave Systems Corporation | Light-emitter-based devices with lattice-mismatched semiconductor structures |
| KR100868654B1 (ko) * | 2006-12-27 | 2008-11-12 | 동부일렉트로닉스 주식회사 | 반도체 소자의 트렌치 형성 방법 |
| KR100960477B1 (ko) * | 2007-02-16 | 2010-06-01 | 주식회사 하이닉스반도체 | 반도체 소자의 sti 형성 방법 |
| KR100842749B1 (ko) * | 2007-03-27 | 2008-07-01 | 주식회사 하이닉스반도체 | 반도체소자의 트렌치 소자분리막 형성방법 |
| WO2008124154A2 (en) | 2007-04-09 | 2008-10-16 | Amberwave Systems Corporation | Photovoltaics on silicon |
| US8304805B2 (en) | 2009-01-09 | 2012-11-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor diodes fabricated by aspect ratio trapping with coalesced films |
| US7825328B2 (en) | 2007-04-09 | 2010-11-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Nitride-based multi-junction solar cell modules and methods for making the same |
| US8237151B2 (en) | 2009-01-09 | 2012-08-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Diode-based devices and methods for making the same |
| US8927353B2 (en) | 2007-05-07 | 2015-01-06 | Taiwan Semiconductor Manufacturing Co., Ltd. | Fin field effect transistor and method of forming the same |
| JP2008306139A (ja) * | 2007-06-11 | 2008-12-18 | Elpida Memory Inc | 半導体装置の素子分離構造の形成方法、半導体装置の素子分離構造及び半導体記憶装置 |
| US8329541B2 (en) | 2007-06-15 | 2012-12-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | InP-based transistor fabrication |
| KR100894101B1 (ko) * | 2007-09-07 | 2009-04-20 | 주식회사 하이닉스반도체 | 반도체 소자의 소자분리막 형성방법 |
| DE112008002387B4 (de) | 2007-09-07 | 2022-04-07 | Taiwan Semiconductor Manufacturing Co., Ltd. | Struktur einer Mehrfachübergangs-Solarzelle, Verfahren zur Bildung einer photonischenVorrichtung, Photovoltaische Mehrfachübergangs-Zelle und Photovoltaische Mehrfachübergangs-Zellenvorrichtung, |
| CN101442020B (zh) * | 2007-11-21 | 2010-07-28 | 中芯国际集成电路制造(上海)有限公司 | 一种可避免氮氧化硅残留的沟槽隔离结构制作方法 |
| KR100940661B1 (ko) * | 2007-12-24 | 2010-02-05 | 주식회사 동부하이텍 | 플래시 메모리 소자의 제조 방법 |
| KR100955677B1 (ko) | 2007-12-27 | 2010-05-06 | 주식회사 하이닉스반도체 | 반도체 메모리소자의 소자분리막 형성방법 |
| US8183667B2 (en) | 2008-06-03 | 2012-05-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Epitaxial growth of crystalline material |
| KR20090128902A (ko) * | 2008-06-11 | 2009-12-16 | 크로스텍 캐피탈, 엘엘씨 | 이중 하드마스크막을 이용한 씨모스이미지센서 제조 방법 |
| US8274097B2 (en) | 2008-07-01 | 2012-09-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Reduction of edge effects from aspect ratio trapping |
| US8981427B2 (en) | 2008-07-15 | 2015-03-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Polishing of small composite semiconductor materials |
| US7674684B2 (en) * | 2008-07-23 | 2010-03-09 | Applied Materials, Inc. | Deposition methods for releasing stress buildup |
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| JP5602414B2 (ja) * | 2009-11-05 | 2014-10-08 | ピーエスフォー ルクスコ エスエイアールエル | 半導体装置の製造方法および半導体装置 |
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| RU2609458C2 (ru) | 2011-07-01 | 2017-02-01 | Колопласт А/С | Катетер с баллоном |
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| US8647941B2 (en) | 2011-08-17 | 2014-02-11 | United Microelectronics Corp. | Method of forming semiconductor device |
| JP5977002B2 (ja) * | 2011-08-25 | 2016-08-24 | 東京エレクトロン株式会社 | トレンチの埋め込み方法および半導体集積回路装置の製造方法 |
| US8691659B2 (en) | 2011-10-26 | 2014-04-08 | United Microelectronics Corp. | Method for forming void-free dielectric layer |
| US8679938B2 (en) | 2012-02-06 | 2014-03-25 | International Business Machines Corporation | Shallow trench isolation for device including deep trench capacitors |
| CN103367395B (zh) * | 2012-03-29 | 2016-09-21 | 中国科学院微电子研究所 | 半导体器件及其制造方法 |
| US8829642B2 (en) | 2012-03-29 | 2014-09-09 | The Institute of Microelectronics, Chinese Academy of Science | Semiconductor device and method for manufacturing the same |
| US8835243B2 (en) | 2012-05-04 | 2014-09-16 | United Microelectronics Corp. | Semiconductor process |
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| TW388100B (en) * | 1997-02-18 | 2000-04-21 | Hitachi Ulsi Eng Corp | Semiconductor deivce and process for producing the same |
| JP2000082808A (ja) * | 1998-09-04 | 2000-03-21 | Toshiba Corp | 半導体装置及びその製造方法 |
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| KR100322531B1 (ko) * | 1999-01-11 | 2002-03-18 | 윤종용 | 파임방지막을 이용하는 반도체소자의 트랜치 소자분리방법 및이를 이용한 반도체소자 |
| US6297128B1 (en) * | 1999-01-29 | 2001-10-02 | Vantis Corporation | Process for manufacturing shallow trenches filled with dielectric material having low mechanical stress |
| KR100354439B1 (ko) * | 2000-12-08 | 2002-09-28 | 삼성전자 주식회사 | 트렌치 소자 분리막 형성 방법 |
| KR100568100B1 (ko) * | 2001-03-05 | 2006-04-05 | 삼성전자주식회사 | 트렌치형 소자 분리막 형성 방법 |
| KR100512167B1 (ko) * | 2001-03-12 | 2005-09-02 | 삼성전자주식회사 | 트렌치 소자 분리형 반도체 장치 및 트렌치형 소자 분리막형성방법 |
| US6693050B1 (en) * | 2003-05-06 | 2004-02-17 | Applied Materials Inc. | Gapfill process using a combination of spin-on-glass deposition and chemical vapor deposition techniques |
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- 2004-10-18 TW TW093131574A patent/TWI278960B/zh not_active IP Right Cessation
- 2004-11-17 ES ES04811126.4T patent/ES2302071T5/es not_active Expired - Lifetime
- 2004-11-17 AT AT04811126T patent/ATE387928T1/de not_active IP Right Cessation
- 2004-11-17 DE DE602004012323.4T patent/DE602004012323T3/de not_active Expired - Lifetime
- 2004-12-21 CN CNU2004201202801U patent/CN2796099Y/zh not_active Expired - Lifetime
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| CN1324673C (zh) | 2007-07-04 |
| ES2302071T5 (es) | 2017-09-28 |
| CN2796099Y (zh) | 2006-07-12 |
| DE602004012323D1 (de) | 2008-04-17 |
| JP4717831B2 (ja) | 2011-07-06 |
| TWI278960B (en) | 2007-04-11 |
| JP2007519469A (ja) | 2007-07-19 |
| DE602004012323T2 (de) | 2009-03-19 |
| ES2302071T3 (es) | 2008-07-01 |
| US7118987B2 (en) | 2006-10-10 |
| CN1649122A (zh) | 2005-08-03 |
| US20050170606A1 (en) | 2005-08-04 |
| DE602004012323T3 (de) | 2017-09-07 |
| TW200525690A (en) | 2005-08-01 |
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