ATE389888T1 - Gerät und verfahren, um die leistung von mikromaschinen oder mikroelektromechanischen bauelementen zu bestimmen - Google Patents

Gerät und verfahren, um die leistung von mikromaschinen oder mikroelektromechanischen bauelementen zu bestimmen

Info

Publication number
ATE389888T1
ATE389888T1 AT03447115T AT03447115T ATE389888T1 AT E389888 T1 ATE389888 T1 AT E389888T1 AT 03447115 T AT03447115 T AT 03447115T AT 03447115 T AT03447115 T AT 03447115T AT E389888 T1 ATE389888 T1 AT E389888T1
Authority
AT
Austria
Prior art keywords
voltage
frequency
determining
capacitive structure
micromachinery
Prior art date
Application number
AT03447115T
Other languages
English (en)
Inventor
Spengen Willem Merlijn Van
Original Assignee
Imec Vzw Interuniversitair Mic
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from EP02447137A external-priority patent/EP1382977A1/de
Application filed by Imec Vzw Interuniversitair Mic filed Critical Imec Vzw Interuniversitair Mic
Application granted granted Critical
Publication of ATE389888T1 publication Critical patent/ATE389888T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/327—Testing of circuit interrupters, switches or circuit-breakers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/40—Structural combinations of variable capacitors with other electric elements not covered by this subclass, the structure mainly consisting of a capacitor, e.g. RC combinations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2822—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere of microwave or radiofrequency circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H11/00—Apparatus or processes specially adapted for the manufacture of electric switches
    • H01H11/0062—Testing or measuring non-electrical properties of switches, e.g. contact velocity

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
AT03447115T 2002-05-29 2003-05-20 Gerät und verfahren, um die leistung von mikromaschinen oder mikroelektromechanischen bauelementen zu bestimmen ATE389888T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US38444802P 2002-05-29 2002-05-29
EP02447137A EP1382977A1 (de) 2002-07-19 2002-07-19 Gerät und Verfahren um die Leistung von Mikromaschinen oder Mikroelektromechanischen Bauelementen zu bestimmen

Publications (1)

Publication Number Publication Date
ATE389888T1 true ATE389888T1 (de) 2008-04-15

Family

ID=39244686

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03447115T ATE389888T1 (de) 2002-05-29 2003-05-20 Gerät und verfahren, um die leistung von mikromaschinen oder mikroelektromechanischen bauelementen zu bestimmen

Country Status (3)

Country Link
US (1) US6998851B2 (de)
AT (1) ATE389888T1 (de)
DE (1) DE60319770T2 (de)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040212026A1 (en) * 2002-05-07 2004-10-28 Hewlett-Packard Company MEMS device having time-varying control
US7345806B2 (en) * 2004-06-23 2008-03-18 Texas Instruments Incorporated Method and apparatus for characterizing microelectromechanical devices on wafers
US7551159B2 (en) 2004-08-27 2009-06-23 Idc, Llc System and method of sensing actuation and release voltages of an interferometric modulator
US7417735B2 (en) 2004-09-27 2008-08-26 Idc, Llc Systems and methods for measuring color and contrast in specular reflective devices
US7289256B2 (en) 2004-09-27 2007-10-30 Idc, Llc Electrical characterization of interferometric modulators
US7299681B2 (en) 2004-09-27 2007-11-27 Idc, Llc Method and system for detecting leak in electronic devices
US7545550B2 (en) * 2004-09-27 2009-06-09 Idc, Llc Systems and methods of actuating MEMS display elements
US7453579B2 (en) 2004-09-27 2008-11-18 Idc, Llc Measurement of the dynamic characteristics of interferometric modulators
US7675669B2 (en) * 2004-09-27 2010-03-09 Qualcomm Mems Technologies, Inc. Method and system for driving interferometric modulators
US7343080B2 (en) 2004-09-27 2008-03-11 Idc, Llc System and method of testing humidity in a sealed MEMS device
US7359066B2 (en) 2004-09-27 2008-04-15 Idc, Llc Electro-optical measurement of hysteresis in interferometric modulators
US7415186B2 (en) 2004-09-27 2008-08-19 Idc, Llc Methods for visually inspecting interferometric modulators for defects
US20060176487A1 (en) 2004-09-27 2006-08-10 William Cummings Process control monitors for interferometric modulators
DE102004055939B4 (de) 2004-11-19 2007-05-03 Siemens Ag Schaltmatrix
US7617064B2 (en) * 2005-04-12 2009-11-10 Analog Devices, Inc. Self-test circuit for high-definition multimedia interface integrated circuits
US20070080695A1 (en) * 2005-10-11 2007-04-12 Morrell Gary A Testing system and method for a MEMS sensor
US7808253B2 (en) * 2005-12-02 2010-10-05 Semiconductor Energy Laboratory Co., Ltd. Test method of microstructure body and micromachine
US7636151B2 (en) 2006-01-06 2009-12-22 Qualcomm Mems Technologies, Inc. System and method for providing residual stress test structures
US7582952B2 (en) 2006-02-21 2009-09-01 Qualcomm Mems Technologies, Inc. Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof
US7550810B2 (en) * 2006-02-23 2009-06-23 Qualcomm Mems Technologies, Inc. MEMS device having a layer movable at asymmetric rates
US7388704B2 (en) 2006-06-30 2008-06-17 Qualcomm Mems Technologies, Inc. Determination of interferometric modulator mirror curvature and airgap variation using digital photographs
US7586238B2 (en) 2006-08-17 2009-09-08 Freescale Semiconductor, Inc. Control and testing of a micro electromechanical switch having a piezo element
US7479785B2 (en) 2006-08-17 2009-01-20 Freescale Semiconductor, Inc. Control and testing of a micro electromechanical switch
DE102006046403A1 (de) * 2006-09-29 2008-04-03 Robert Bosch Gmbh Schaltungsanordnung für ein mikromechanisches Sensorelement mit einer Kondensatoranordnung
US7830066B2 (en) * 2007-07-26 2010-11-09 Freescale Semiconductor, Inc. Micromechanical device with piezoelectric and electrostatic actuation and method therefor
US7911754B2 (en) * 2008-01-21 2011-03-22 Biosense Webster, Inc. Detection of current leakage through opto-switches
US20090201282A1 (en) * 2008-02-11 2009-08-13 Qualcomm Mems Technologies, Inc Methods of tuning interferometric modulator displays
US8395371B2 (en) * 2008-02-11 2013-03-12 Qualcomm Mems Technologies, Inc. Methods for characterizing the behavior of microelectromechanical system devices
BRPI0908803A2 (pt) * 2008-02-11 2015-07-21 Qualcomm Mems Technologie Inc Dispositivo e método de sensoreamento, mensuração ou caracterização de elementos de tela integrados com o esquema de drive de tela
WO2009102621A2 (en) * 2008-02-11 2009-08-20 Qualcomm Mems Technologies, Inc. Methods for measurement and characterization of interferometric modulators
US8466858B2 (en) * 2008-02-11 2013-06-18 Qualcomm Mems Technologies, Inc. Sensing to determine pixel state in a passively addressed display array
US20090241634A1 (en) * 2008-03-28 2009-10-01 Cenk Acar Micromachined accelerometer and method with continuous self-testing
US8638093B2 (en) 2011-03-31 2014-01-28 General Electric Company Systems and methods for enhancing reliability of MEMS devices
CN102565697B (zh) * 2012-02-16 2014-05-28 常州工学院 欠压脱扣器测试装置
US11192779B2 (en) * 2018-02-07 2021-12-07 The Board Of Trustees Of The Leland Stanford Junior University Method and apparatus for evaluating electrostatic or nonlinear devices
CN113074930A (zh) * 2021-04-16 2021-07-06 西安交通大学 基于单一加速因子的微机电器件寿命预测方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5211051A (en) * 1987-11-09 1993-05-18 California Institute Of Technology Methods and apparatus for improving sensor performance
US5506454A (en) * 1991-03-20 1996-04-09 Hitachi, Ltd. System and method for diagnosing characteristics of acceleration sensor
US5447051A (en) * 1993-08-05 1995-09-05 Hewlett-Packard Company Method and apparatus for testing a piezoelectric force sensor
FI93579C (fi) 1993-08-20 1995-04-25 Vaisala Oy Sähköstaattisen voiman avulla takaisinkytketty kapasitiivinen anturi ja menetelmä sen aktiivisen elementin muodon ohjaamiseksi
US5659262A (en) * 1996-03-15 1997-08-19 Analog Devices, Inc. Offset trimming for a micromachined sensing device
FI981457A0 (fi) 1998-06-24 1998-06-24 Valtion Teknillinen Mikromekaaninen vaihto- ja tasajännitereferenssilaitteisto
US6629448B1 (en) * 2000-02-25 2003-10-07 Seagate Technology Llc In-situ testing of a MEMS accelerometer in a disc storage system
AU2001268742A1 (en) 2000-06-28 2002-01-08 The Regents Of The University Of California Capacitive microelectromechanical switches
US6959583B2 (en) * 2002-04-30 2005-11-01 Honeywell International Inc. Passive temperature compensation technique for MEMS devices

Also Published As

Publication number Publication date
US6998851B2 (en) 2006-02-14
DE60319770D1 (de) 2008-04-30
DE60319770T2 (de) 2009-04-23
US20040070400A1 (en) 2004-04-15

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