ATE390757T1 - Anordnung mit zwei piezoelektrischen schichten und verfahren zum betreiben einer filtereinrichtung - Google Patents

Anordnung mit zwei piezoelektrischen schichten und verfahren zum betreiben einer filtereinrichtung

Info

Publication number
ATE390757T1
ATE390757T1 AT02764085T AT02764085T ATE390757T1 AT E390757 T1 ATE390757 T1 AT E390757T1 AT 02764085 T AT02764085 T AT 02764085T AT 02764085 T AT02764085 T AT 02764085T AT E390757 T1 ATE390757 T1 AT E390757T1
Authority
AT
Austria
Prior art keywords
piezoelectric layers
arrangement
electrode
operating
filter device
Prior art date
Application number
AT02764085T
Other languages
English (en)
Inventor
Olaf Wunnicke
Hans Loebl
Mareike Klee
Robert Milsom
Original Assignee
Nxp Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nxp Bv filed Critical Nxp Bv
Application granted granted Critical
Publication of ATE390757T1 publication Critical patent/ATE390757T1/de

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/60—Electric coupling means therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Compositions Of Oxide Ceramics (AREA)
AT02764085T 2001-04-25 2002-04-22 Anordnung mit zwei piezoelektrischen schichten und verfahren zum betreiben einer filtereinrichtung ATE390757T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP01201647 2001-04-25

Publications (1)

Publication Number Publication Date
ATE390757T1 true ATE390757T1 (de) 2008-04-15

Family

ID=8180255

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02764085T ATE390757T1 (de) 2001-04-25 2002-04-22 Anordnung mit zwei piezoelektrischen schichten und verfahren zum betreiben einer filtereinrichtung

Country Status (8)

Country Link
US (1) US7459990B2 (de)
EP (1) EP1386393B1 (de)
JP (1) JP4256682B2 (de)
KR (1) KR100854242B1 (de)
CN (1) CN1276577C (de)
AT (1) ATE390757T1 (de)
DE (1) DE60225795T2 (de)
WO (1) WO2002087081A1 (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6927651B2 (en) 2003-05-12 2005-08-09 Agilent Technologies, Inc. Acoustic resonator devices having multiple resonant frequencies and methods of making the same
EP2051377A4 (de) 2006-08-03 2012-03-28 Panasonic Corp Frequenzvariabler akustischer filmresonator, filter und kommunikationsvorrichtung damit
FR2905207B1 (fr) * 2006-08-28 2009-01-30 St Microelectronics Sa Filtre commutable a resonateurs.
US7515018B2 (en) * 2006-08-31 2009-04-07 Martin Handtmann Acoustic resonator
JP5441095B2 (ja) * 2008-01-31 2014-03-12 太陽誘電株式会社 弾性波デバイス、デュープレクサ、通信モジュール、および通信装置
US7889024B2 (en) * 2008-08-29 2011-02-15 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Single cavity acoustic resonators and electrical filters comprising single cavity acoustic resonators
US8513863B2 (en) 2009-06-11 2013-08-20 Qualcomm Mems Technologies, Inc. Piezoelectric resonator with two layers
US20110012696A1 (en) * 2009-07-20 2011-01-20 Sony Ericsson Mobile Communications Ab Switched acoustic wave resonator for tunable filters
US9136819B2 (en) * 2012-10-27 2015-09-15 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator having piezoelectric layer with multiple dopants
US9219464B2 (en) 2009-11-25 2015-12-22 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave (BAW) resonator structure having an electrode with a cantilevered portion and a piezoelectric layer with multiple dopants
EP2922204A1 (de) * 2010-12-10 2015-09-23 Peregrine Semiconductor Corporation Abstimmbares filter mit akkustischen wellen arbeitend mit temperatur- und prozesskompensation
US9300038B2 (en) 2010-12-10 2016-03-29 Peregrine Semiconductor Corporation Method, system, and apparatus for resonator circuits and modulating resonators
US9490771B2 (en) 2012-10-29 2016-11-08 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator comprising collar and frame
US9401692B2 (en) 2012-10-29 2016-07-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator having collar structure
US9490418B2 (en) 2011-03-29 2016-11-08 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator comprising collar and acoustic reflector with temperature compensating layer
JP2013201346A (ja) * 2012-03-26 2013-10-03 Ulvac Japan Ltd 圧電素子及び圧電素子の製造方法
FR2996061B1 (fr) * 2012-09-27 2015-12-25 Commissariat Energie Atomique Structure acoustique comportant au moins un resonateur et au moins une capacite cointegree dans une meme couche piezoelectrique ou ferroelectrique
US9225313B2 (en) 2012-10-27 2015-12-29 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator having doped piezoelectric layer with improved piezoelectric characteristics
US10340885B2 (en) 2014-05-08 2019-07-02 Avago Technologies International Sales Pte. Limited Bulk acoustic wave devices with temperature-compensating niobium alloy electrodes
US11431316B2 (en) 2018-09-20 2022-08-30 Qorvo Us, Inc. Acoustic resonator structure
US10985731B2 (en) 2018-09-20 2021-04-20 Qorvo Us, Inc. Acoustic resonator structure
US11563421B2 (en) 2018-09-21 2023-01-24 Qorvo Us, Inc. Acoustic structure having tunable parallel resonance frequency
US10958244B2 (en) * 2018-10-26 2021-03-23 Qorvo Us, Inc. Acoustic filter apparatus having configurable parallel resonance frequencies
US11757430B2 (en) 2020-01-07 2023-09-12 Qorvo Us, Inc. Acoustic filter circuit for noise suppression outside resonance frequency
US11575363B2 (en) 2021-01-19 2023-02-07 Qorvo Us, Inc. Hybrid bulk acoustic wave filter
DE102021212216A1 (de) 2021-10-29 2023-05-04 Robert Bosch Gesellschaft mit beschränkter Haftung Hochfrequenz-Filtervorrichtung, Hochfrequenzmodul und Hochfrequenz-Filterverfahren

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3109153A (en) * 1960-11-18 1963-10-29 Gen Dynamics Corp Adjustable piezoelectric wave filter having two resonance peaks
US3610969A (en) * 1970-02-06 1971-10-05 Mallory & Co Inc P R Monolithic piezoelectric resonator for use as filter or transformer
US4096756A (en) * 1977-07-05 1978-06-27 Rca Corporation Variable acoustic wave energy transfer-characteristic control device
US4508719A (en) * 1982-06-03 1985-04-02 Pierrel S.P.A. Hydroxyimino and alkoxyimino derivatives of 1,4-dihydropyridine and anti-hypertensive compositions
JP3015481B2 (ja) * 1990-03-28 2000-03-06 株式会社東芝 超音波プローブ・システム
US5394123A (en) * 1991-03-13 1995-02-28 Murata Manufacturing Co., Ltd. Ladder type filter comprised of stacked tuning fork type resonators
US5446306A (en) * 1993-12-13 1995-08-29 Trw Inc. Thin film voltage-tuned semiconductor bulk acoustic resonator (SBAR)
US5825117A (en) * 1996-03-26 1998-10-20 Hewlett-Packard Company Second harmonic imaging transducers
US5910756A (en) * 1997-05-21 1999-06-08 Nokia Mobile Phones Limited Filters and duplexers utilizing thin film stacked crystal filter structures and thin film bulk acoustic wave resonators
FI108583B (fi) * 1998-06-02 2002-02-15 Nokia Corp Resonaattorirakenteita
FI106894B (fi) * 1998-06-02 2001-04-30 Nokia Mobile Phones Ltd Resonaattorirakenteita

Also Published As

Publication number Publication date
EP1386393A1 (de) 2004-02-04
DE60225795T2 (de) 2009-04-16
JP4256682B2 (ja) 2009-04-22
DE60225795D1 (de) 2008-05-08
CN1276577C (zh) 2006-09-20
WO2002087081A1 (en) 2002-10-31
KR100854242B1 (ko) 2008-08-25
CN1465134A (zh) 2003-12-31
EP1386393B1 (de) 2008-03-26
US7459990B2 (en) 2008-12-02
JP2004525577A (ja) 2004-08-19
US20020175781A1 (en) 2002-11-28
KR20030011364A (ko) 2003-02-07

Similar Documents

Publication Publication Date Title
ATE390757T1 (de) Anordnung mit zwei piezoelektrischen schichten und verfahren zum betreiben einer filtereinrichtung
DE60226805D1 (de) Verfahren zur Abstimmung von akustischen Volumenwellen -Resonatoren
ATE518303T1 (de) Duplexer und isolierungsverfahren für rx-band und tx-band
ATE445931T1 (de) Hauptteil-oberflächenwellenresonator mit zwei piezoelektrischen schichten als symmetrierglied in filtern und duplexern
WO2003012988A3 (de) Piezoelektrische resonatorvorrichtung mit akustischem reflektor
ATE515108T1 (de) Abstimmbarer dünnschicht-volumenwellen-resonator, herstellungsmethode dafür, filter, mehrschichtiges zusammengesetztes elektronisches bauelement und kommunikationsvorrichtung
WO2005097509A3 (en) Piezoelectric devices and methods and circuits for driving same
WO2006023892A3 (en) Capacitive vertical silicon bulk acoustic resonator
EP1107346A3 (de) Duplexer mit Mehrschichtstruktur
CN207939487U (zh) 多工器、发送装置以及接收装置
JPH02144181A (ja) マルチ周波数超音波洗浄方法及び洗浄装置
EP1453197A4 (de) Oberflächenwellenfilter
WO2009060594A1 (ja) 弾性波共振器、弾性波フィルタおよびこれを用いたアンテナ共用器
EP1986320A1 (de) Aow-filter
KR950035056A (ko) 다수의 트랩 주파수를 가진 트랩회로용 압전 공진기
JP2007259430A5 (de)
EP1189346A3 (de) Akustisches Oberflächenwellenfilter und Kommunikationsvorrichtung mit demselben
KR20010034613A (ko) 표면파 음향 필터
WO2008146609A1 (ja) 超音波治療器及びプログラム
KR950035055A (ko) 탄성 표면파 장치
ATE474342T1 (de) Keramischer hf-filter mit verbessertem ansprechverhalten für die dritte harmonische antwort
JP3921355B2 (ja) 周波数切替型高周波発振器
KR100663824B1 (ko) 탄성 표면파 디바이스
DE102004047758A1 (de) Temperatursensorvorrichtung
SE0203155D0 (sv) Tunable acoustic wave device

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties