ATE391997T1 - Ferromagnetischer raumtemperatur-halbleiter und plasma unterstützte molekularstrahlepitaxie wie verfahren zu seiner herstellung - Google Patents
Ferromagnetischer raumtemperatur-halbleiter und plasma unterstützte molekularstrahlepitaxie wie verfahren zu seiner herstellungInfo
- Publication number
- ATE391997T1 ATE391997T1 AT03250653T AT03250653T ATE391997T1 AT E391997 T1 ATE391997 T1 AT E391997T1 AT 03250653 T AT03250653 T AT 03250653T AT 03250653 T AT03250653 T AT 03250653T AT E391997 T1 ATE391997 T1 AT E391997T1
- Authority
- AT
- Austria
- Prior art keywords
- ferromagnetic
- room temperature
- molecular beam
- group
- beam epitaxy
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/40—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials of magnetic semiconductor materials, e.g. CdCr2S4
- H01F1/401—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials of magnetic semiconductor materials, e.g. CdCr2S4 diluted
- H01F1/404—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials of magnetic semiconductor materials, e.g. CdCr2S4 diluted of III-V type, e.g. In1-x Mnx As
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/38—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
- H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
- H01F10/18—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being compounds
- H01F10/193—Magnetic semiconductor compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/3213—Exchange coupling of magnetic semiconductor multilayers, e.g. MnSe/ZnSe superlattices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/30—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
- H10D48/385—Devices using spin-polarised carriers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/80—Constructional details
- H10N50/85—Materials of the active region
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N52/00—Hall-effect devices
- H10N52/80—Constructional details
- H10N52/85—Materials of the active region
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/22—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using physical deposition, e.g. vacuum deposition or sputtering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/24—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using chemical vapour deposition [CVD]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/29—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by the substrates
- H10P14/2901—Materials
- H10P14/2921—Materials being crystalline insulating materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/34—Deposited materials, e.g. layers
- H10P14/3402—Deposited materials, e.g. layers characterised by the chemical composition
- H10P14/3414—Deposited materials, e.g. layers characterised by the chemical composition being group IIIA-VIA materials
- H10P14/3416—Nitrides
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/34—Deposited materials, e.g. layers
- H10P14/3402—Deposited materials, e.g. layers characterised by the chemical composition
- H10P14/3414—Deposited materials, e.g. layers characterised by the chemical composition being group IIIA-VIA materials
- H10P14/3418—Phosphides
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/34—Deposited materials, e.g. layers
- H10P14/3438—Doping during depositing
- H10P14/3441—Conductivity type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/34—Deposited materials, e.g. layers
- H10P14/3438—Doping during depositing
- H10P14/3441—Conductivity type
- H10P14/3446—Transition metal elements; Rare earth elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/83—Electrodes
- H10H20/832—Electrodes characterised by their material
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Power Engineering (AREA)
- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Inorganic Chemistry (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Hall/Mr Elements (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Hard Magnetic Materials (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Thin Magnetic Films (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2002-0053306A KR100492482B1 (ko) | 2002-09-04 | 2002-09-04 | Pembe로 제조된 상온 자성반도체 및 그 소자 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE391997T1 true ATE391997T1 (de) | 2008-04-15 |
Family
ID=31713179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT03250653T ATE391997T1 (de) | 2002-09-04 | 2003-01-31 | Ferromagnetischer raumtemperatur-halbleiter und plasma unterstützte molekularstrahlepitaxie wie verfahren zu seiner herstellung |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US20040041217A1 (de) |
| EP (1) | EP1396867B1 (de) |
| JP (1) | JP2004104070A (de) |
| KR (1) | KR100492482B1 (de) |
| AT (1) | ATE391997T1 (de) |
| DE (1) | DE60320191T2 (de) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4477305B2 (ja) * | 2002-07-25 | 2010-06-09 | 独立行政法人科学技術振興機構 | スピントランジスタ及びそれを用いた不揮発性メモリ |
| KR100681379B1 (ko) * | 2003-03-07 | 2007-02-12 | 도꾸리쯔교세이호징 가가꾸 기쥬쯔 신꼬 기꼬 | 스핀 의존 전달 특성을 갖는 전계 효과 트랜지스터 및그것을 이용한 비휘발성 메모리 |
| EP1610386A4 (de) * | 2003-03-31 | 2009-04-01 | Japan Science & Tech Agency | Tunneltransistor mit spin-abhängiger transfercharakteristik und nichtflüchtiger speicher damit |
| KR100666729B1 (ko) * | 2005-07-11 | 2007-01-09 | 한국과학기술연구원 | ZnS 나노벨트 상온 자성반도체 제조방법 |
| FR2898414B1 (fr) * | 2006-03-07 | 2008-06-06 | Commissariat Energie Atomique | Composant sensible a un champ magnetique comportant un semi-conducteur magnetique dilue, dispositifs l'incorporant et procede de mise en oeuvre. |
| US20080012004A1 (en) * | 2006-03-17 | 2008-01-17 | Mears Technologies, Inc. | Spintronic devices with constrained spintronic dopant |
| AU2007227418A1 (en) * | 2006-03-17 | 2007-09-27 | Mears Technologies, Inc. | Spintronic devices with constrained spintronic dopant and associated methods |
| US7342244B2 (en) * | 2006-07-19 | 2008-03-11 | Tokyo Electron Limited | Spintronic transistor |
| KR100869290B1 (ko) * | 2007-04-25 | 2008-11-18 | 국민대학교산학협력단 | 양성자 주입에 따른 자성반도체 물질의 자성제어 방법 |
| KR100953532B1 (ko) * | 2007-10-09 | 2010-04-21 | 한국과학기술연구원 | 나노자성체/자성반도체 하이브리드형 스핀 소자 및 그 제조방법 |
| EP2400558A4 (de) * | 2009-02-20 | 2013-08-21 | Nat Univ Corp Kyoto Inst Tech | Lichtabsorbierendes material und dieses verwendendes fotoelektrisches wandlungselement |
| KR101039384B1 (ko) * | 2009-05-28 | 2011-06-08 | 한국기초과학지원연구원 | 스핀소자를 이용한 이완발진기 |
| JP5443502B2 (ja) * | 2009-09-18 | 2014-03-19 | 株式会社東芝 | 半導体装置およびその製造方法 |
| EP2549546A4 (de) * | 2010-03-18 | 2017-08-23 | National University Corporation Kyoto Institute of Technology | Lichtabsorbierendes material und dieses verwendendes fotoelektrisches wandlungselement |
| FR2971364B1 (fr) * | 2011-02-07 | 2013-02-15 | Centre Nat Rech Scient | Agencement optimise de particules de triazole |
| DE102013209278B4 (de) * | 2013-05-17 | 2016-02-18 | Helmholtz-Zentrum Dresden - Rossendorf E.V. | Magnetisierbare Halbleiter mit permanenter Magnetisierung und deren Verwendung |
| NZ725497A (en) * | 2014-04-02 | 2020-05-29 | Franck Natali | Magnetic materials and devices comprising rare earth nitrides |
| DE102015221521A1 (de) | 2015-11-03 | 2017-05-04 | Forschungszentrum Jülich GmbH | Tunneldiode und -transistor |
| US9966901B2 (en) * | 2015-11-19 | 2018-05-08 | Samsung Electronics Co., Ltd. | Spin-torque oscillator based on easy-cone anisotropy |
| CN106637416B (zh) * | 2016-12-28 | 2018-11-20 | 厦门大学 | 矢量强磁场下分子束外延及其原位表征装置 |
| CN116013961B (zh) * | 2023-03-24 | 2023-06-02 | 北京大学 | 一种表面自氧化的氮化镓自旋注入结制备方法 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69008770T2 (de) * | 1989-05-31 | 1994-11-24 | Ibm | Magnetische Materialien für Festkörpervorrichtungen. |
| JP3556457B2 (ja) | 1998-02-20 | 2004-08-18 | 株式会社東芝 | スピン依存伝導素子とそれを用いた電子部品および磁気部品 |
| JP4095200B2 (ja) | 1998-05-19 | 2008-06-04 | キヤノン株式会社 | 巨大磁気抵抗効果を利用したメモリ素子 |
| JP3477638B2 (ja) * | 1999-07-09 | 2003-12-10 | 科学技術振興事業団 | 強磁性2重量子井戸トンネル磁気抵抗デバイス |
| JP4424840B2 (ja) | 1999-09-08 | 2010-03-03 | シャープ株式会社 | Iii−n系化合物半導体装置 |
| JP2001108951A (ja) * | 1999-10-04 | 2001-04-20 | Rikogaku Shinkokai | 光変調磁性半導体およびその作製方法 |
| JP3284239B2 (ja) * | 2000-03-07 | 2002-05-20 | 東北大学長 | スピン偏極伝導電子生成方法および半導体素子 |
| US6281538B1 (en) | 2000-03-22 | 2001-08-28 | Motorola, Inc. | Multi-layer tunneling device with a graded stoichiometry insulating layer |
| JP4421065B2 (ja) * | 2000-04-07 | 2010-02-24 | 株式会社アルバック | トンネル磁気抵抗素子の製造方法、トンネル磁気抵抗素子 |
| JP3736322B2 (ja) | 2000-04-26 | 2006-01-18 | 昭和電工株式会社 | 気相成長装置 |
| US20020075920A1 (en) * | 2000-12-15 | 2002-06-20 | Sylvia Spruytte | Laser diode device with nitrogen incorporating barrier |
| JP2002198615A (ja) | 2000-12-25 | 2002-07-12 | Sharp Corp | 半導体レーザ素子 |
| JP2003137698A (ja) | 2001-10-26 | 2003-05-14 | Ulvac Japan Ltd | Iii−v族半導体材料 |
| US6955858B2 (en) * | 2001-12-07 | 2005-10-18 | North Carolina State University | Transition metal doped ferromagnetic III-V nitride material films and methods of fabricating the same |
| AU2003222000A1 (en) * | 2002-03-14 | 2003-09-29 | Wisys Technology Foundation, Inc. | Mbe-method for the production of a gallium manganese nitride ferromagnetic film |
| KR100483318B1 (ko) * | 2002-03-18 | 2005-04-15 | 주식회사 컴텍스 | 상온 강자성 반도체 단결정 및 그 제조방법 |
| US6986693B2 (en) * | 2003-03-26 | 2006-01-17 | Lucent Technologies Inc. | Group III-nitride layers with patterned surfaces |
-
2002
- 2002-09-04 KR KR10-2002-0053306A patent/KR100492482B1/ko not_active Expired - Fee Related
-
2003
- 2003-01-14 US US10/342,004 patent/US20040041217A1/en not_active Abandoned
- 2003-01-31 EP EP03250653A patent/EP1396867B1/de not_active Expired - Lifetime
- 2003-01-31 AT AT03250653T patent/ATE391997T1/de not_active IP Right Cessation
- 2003-01-31 DE DE60320191T patent/DE60320191T2/de not_active Expired - Lifetime
- 2003-02-19 JP JP2003041152A patent/JP2004104070A/ja active Pending
-
2004
- 2004-08-03 US US10/910,745 patent/US7063986B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US20040041217A1 (en) | 2004-03-04 |
| KR100492482B1 (ko) | 2005-06-03 |
| US7063986B2 (en) | 2006-06-20 |
| EP1396867A1 (de) | 2004-03-10 |
| US20050045976A1 (en) | 2005-03-03 |
| DE60320191D1 (de) | 2008-05-21 |
| JP2004104070A (ja) | 2004-04-02 |
| KR20040021459A (ko) | 2004-03-10 |
| DE60320191T2 (de) | 2009-06-25 |
| EP1396867B1 (de) | 2008-04-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |