ATE393672T1 - Elektroakustischer wandler für hochfrequenzanwendungen - Google Patents

Elektroakustischer wandler für hochfrequenzanwendungen

Info

Publication number
ATE393672T1
ATE393672T1 AT05425642T AT05425642T ATE393672T1 AT E393672 T1 ATE393672 T1 AT E393672T1 AT 05425642 T AT05425642 T AT 05425642T AT 05425642 T AT05425642 T AT 05425642T AT E393672 T1 ATE393672 T1 AT E393672T1
Authority
AT
Austria
Prior art keywords
cells
micro
high frequency
electroacoustic transducer
frequency applications
Prior art date
Application number
AT05425642T
Other languages
English (en)
Inventor
Alessandro Caronti
Giosue Caliano
Alessandro Savoia
Philipp Gatta
Massimo Pappalardo
Original Assignee
Esaote Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Esaote Spa filed Critical Esaote Spa
Application granted granted Critical
Publication of ATE393672T1 publication Critical patent/ATE393672T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
AT05425642T 2005-09-14 2005-09-14 Elektroakustischer wandler für hochfrequenzanwendungen ATE393672T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP05425642A EP1764162B1 (de) 2005-09-14 2005-09-14 Elektroakustischer Wandler für Hochfrequenzanwendungen

Publications (1)

Publication Number Publication Date
ATE393672T1 true ATE393672T1 (de) 2008-05-15

Family

ID=35645783

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05425642T ATE393672T1 (de) 2005-09-14 2005-09-14 Elektroakustischer wandler für hochfrequenzanwendungen

Country Status (4)

Country Link
US (1) US7477572B2 (de)
EP (1) EP1764162B1 (de)
AT (1) ATE393672T1 (de)
DE (1) DE602005006419T2 (de)

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7489593B2 (en) 2004-11-30 2009-02-10 Vermon Electrostatic membranes for sensors, ultrasonic transducers incorporating such membranes, and manufacturing methods therefor
US7589456B2 (en) * 2005-06-14 2009-09-15 Siemens Medical Solutions Usa, Inc. Digital capacitive membrane transducer
EP1764162B1 (de) * 2005-09-14 2008-04-30 Esaote S.p.A. Elektroakustischer Wandler für Hochfrequenzanwendungen
US7305883B2 (en) * 2005-10-05 2007-12-11 The Board Of Trustees Of The Leland Stanford Junior University Chemical micromachined microsensors
US8456958B2 (en) 2006-02-21 2013-06-04 Vermon S.A. Capacitive micro-machined ultrasonic transducer for element transducer apertures
ITRM20060238A1 (it) * 2006-05-03 2007-11-04 Esaote Spa Trasduttore ultracustico capacitivo multipiano
WO2009001157A1 (en) * 2007-06-26 2008-12-31 Vermon A capacitive micro-machined ultrasonic transducer for element transducer apertures
US8327521B2 (en) * 2007-09-17 2012-12-11 Koninklijke Philips Electronics N.V. Method for production and using a capacitive micro-machined ultrasonic transducer
US8850893B2 (en) * 2007-12-05 2014-10-07 Valtion Teknillinen Tutkimuskeskus Device for measuring pressure, variation in acoustic pressure, a magnetic field, acceleration, vibration, or the composition of a gas
GB2469411B (en) * 2008-05-07 2011-01-19 Wolfson Microelectronics Plc Mems transducers
FR2938918B1 (fr) * 2008-11-21 2011-02-11 Commissariat Energie Atomique Procede et dispositif d'analyse acoustique de microporosites dans un materiau tel que le beton a l'aide d'une pluralite de transducteurs cmuts incorpores dans le materiau
DE102009027355A1 (de) * 2009-06-30 2011-01-05 Endress + Hauser Flowtec Ag Ultraschallsensor und Ultraschall-Durchflussmessgerät
US8531919B2 (en) * 2009-09-21 2013-09-10 The Hong Kong Polytechnic University Flexible capacitive micromachined ultrasonic transducer array with increased effective capacitance
US8406084B2 (en) * 2009-11-20 2013-03-26 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Transducer device having coupled resonant elements
US9032797B2 (en) * 2011-02-11 2015-05-19 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Sensor device and method
CN102178545B (zh) * 2011-02-14 2012-06-06 中国科学院深圳先进技术研究院 电容式超声传感器及其制备方法
CN102353610A (zh) * 2011-06-10 2012-02-15 西安交通大学 一种用于密度测量的电容微加工超声传感器及其制备方法
JP5893352B2 (ja) * 2011-11-14 2016-03-23 キヤノン株式会社 電気機械変換装置
CN102520147B (zh) * 2011-12-05 2014-04-23 西安交通大学 一种用于痕量生化物质检测的cmut及其制备方法
US8767512B2 (en) 2012-05-01 2014-07-01 Fujifilm Dimatix, Inc. Multi-frequency ultra wide bandwidth transducer
US9454954B2 (en) 2012-05-01 2016-09-27 Fujifilm Dimatix, Inc. Ultra wide bandwidth transducer with dual electrode
US9061320B2 (en) * 2012-05-01 2015-06-23 Fujifilm Dimatix, Inc. Ultra wide bandwidth piezoelectric transducer arrays
CN104349722B (zh) * 2012-06-11 2016-08-31 奥林巴斯株式会社 超声波部件以及超声波内窥镜
JP6071285B2 (ja) * 2012-07-06 2017-02-01 キヤノン株式会社 静電容量型トランスデューサ
JP5986441B2 (ja) * 2012-07-06 2016-09-06 キヤノン株式会社 静電容量型トランスデューサ
JP6057571B2 (ja) 2012-07-06 2017-01-11 キヤノン株式会社 静電容量型トランスデューサ
US9660170B2 (en) 2012-10-26 2017-05-23 Fujifilm Dimatix, Inc. Micromachined ultrasonic transducer arrays with multiple harmonic modes
JP6238556B2 (ja) 2013-04-25 2017-11-29 キヤノン株式会社 被検体情報取得装置およびその制御方法、ならびに探触子
EP2796210B1 (de) 2013-04-25 2016-11-30 Canon Kabushiki Kaisha Kapazitiver Wandler und Verfahren zu seiner Herstellung
EP2796209B1 (de) * 2013-04-25 2020-06-17 Canon Kabushiki Kaisha Kapazitiver Wandler und Verfahren zu seiner Herstellung
JP6234073B2 (ja) * 2013-06-07 2017-11-22 キヤノン株式会社 静電容量型トランスデューサの駆動装置、及び被検体情報取得装置
KR102250185B1 (ko) 2014-01-29 2021-05-10 삼성전자주식회사 전기 음향 변환기
JP6424507B2 (ja) * 2014-07-28 2018-11-21 コニカミノルタ株式会社 超音波トランスデューサ及び超音波診断装置
JP6552177B2 (ja) * 2014-10-10 2019-07-31 キヤノン株式会社 静電容量型トランスデューサ及びその駆動方法
CN105036058B (zh) * 2015-05-27 2016-10-05 华南理工大学 集成化电容式微加工超声换能器及其制备方法
JP6429759B2 (ja) * 2015-10-24 2018-11-28 キヤノン株式会社 静電容量型トランスデューサ及びそれを備える情報取得装置
US10413938B2 (en) * 2015-11-18 2019-09-17 Kolo Medical, Ltd. Capacitive micromachined ultrasound transducers having varying properties
CN106925496A (zh) * 2017-01-06 2017-07-07 中北大学 微机电超声探头及电路
CN106744642A (zh) * 2017-01-06 2017-05-31 中北大学 收发平衡的宽频带混合式超声换能器面阵探头及制备方法
CN106862045A (zh) * 2017-01-06 2017-06-20 中北大学 收发性能平衡的微机电超声换能器面阵探头及其制备方法
KR102052257B1 (ko) * 2018-01-04 2019-12-04 재단법인 다차원 스마트 아이티 융합시스템 연구단 송수신 가능한 초음파 시스템 및 그 방법
JP2019212992A (ja) * 2018-05-31 2019-12-12 キヤノン株式会社 静電容量型トランスデューサ、及びその製造方法
EP3881065B1 (de) * 2018-11-15 2023-07-19 BFLY Operations, Inc. Antihaftbodenfläche für mikrobearbeitete ultraschallwandler
CN115367696A (zh) 2019-02-25 2022-11-22 蝴蝶网络有限公司 微加工超声换能器器件的自适应腔体厚度控制
TWI793447B (zh) * 2019-09-12 2023-02-21 美商艾克索影像股份有限公司 經由邊緣溝槽、虛擬樞軸及自由邊界而增強的微加工超音波傳感器(mut)耦合效率及頻寬
EP3900846A1 (de) * 2020-04-21 2021-10-27 Koninklijke Philips N.V. Akustische abbildungssonde mit einem wandlerelement
US12172188B2 (en) 2021-03-04 2024-12-24 Bfly Operations, Inc. Micromachined ultrasound transducer with pedestal
US12246348B2 (en) 2021-03-04 2025-03-11 BFLY Operations, Inc Capacitive Micromachined ultrasonic transducers (CMUTs) having non-uniform pedestals
US12486159B2 (en) 2021-06-30 2025-12-02 Exo Imaging, Inc. Micro-machined ultrasound transducers with insulation layer and methods of manufacture
CN116027308A (zh) * 2021-10-25 2023-04-28 广州视源电子科技股份有限公司 超声换能器及电子设备

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5619476A (en) * 1994-10-21 1997-04-08 The Board Of Trustees Of The Leland Stanford Jr. Univ. Electrostatic ultrasonic transducer
US6381197B1 (en) * 1999-05-11 2002-04-30 Bernard J Savord Aperture control and apodization in a micro-machined ultrasonic transducer
US6829131B1 (en) * 1999-09-13 2004-12-07 Carnegie Mellon University MEMS digital-to-acoustic transducer with error cancellation
US6262946B1 (en) * 1999-09-29 2001-07-17 The Board Of Trustees Of The Leland Stanford Junior University Capacitive micromachined ultrasonic transducer arrays with reduced cross-coupling
DE10122765A1 (de) * 2001-05-10 2002-12-05 Campus Micro Technologies Gmbh Elektroakustischer Wandler zur Erzeugung oder Erfassung von Ultraschall, Wandler-Array und Verfahren zur Herstellung der Wandler bzw. der Wandler-Arrays
WO2004027796A2 (en) * 2002-08-07 2004-04-01 Georgia Tech Research Corporation Capacitive resonators and methods of fabrication
ITRM20030318A1 (it) * 2003-06-25 2004-12-26 Esaote Spa Trasduttore ultracustico capacitivo microlavorato e
US7274623B2 (en) * 2004-04-06 2007-09-25 Board Of Trustees Of The Deland Stanford Junior University Method and system for operating capacitive membrane ultrasonic transducers
ITRM20040300A1 (it) * 2004-06-18 2004-09-18 Esaote Spa Trasduttore a geometria interdigitata per l'ottimizzazione del fascio acustico irradiato.
US7489593B2 (en) * 2004-11-30 2009-02-10 Vermon Electrostatic membranes for sensors, ultrasonic transducers incorporating such membranes, and manufacturing methods therefor
ITRM20050093A1 (it) * 2005-03-04 2006-09-05 Consiglio Nazionale Ricerche Procedimento micromeccanico superficiale di fabbricazione di trasduttori ultracustici capacitivi microlavorati e relativo trasduttore ultracustico capacitivo microlavorato.
EP1764162B1 (de) * 2005-09-14 2008-04-30 Esaote S.p.A. Elektroakustischer Wandler für Hochfrequenzanwendungen

Also Published As

Publication number Publication date
EP1764162A1 (de) 2007-03-21
US20070059858A1 (en) 2007-03-15
US7477572B2 (en) 2009-01-13
EP1764162B1 (de) 2008-04-30
DE602005006419D1 (de) 2008-06-12
DE602005006419T2 (de) 2008-09-25

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