ATE394598T1 - Erfassung von verunreinigungen in einem durch eine vakuumpumpe gepumpten fluid - Google Patents

Erfassung von verunreinigungen in einem durch eine vakuumpumpe gepumpten fluid

Info

Publication number
ATE394598T1
ATE394598T1 AT04768529T AT04768529T ATE394598T1 AT E394598 T1 ATE394598 T1 AT E394598T1 AT 04768529 T AT04768529 T AT 04768529T AT 04768529 T AT04768529 T AT 04768529T AT E394598 T1 ATE394598 T1 AT E394598T1
Authority
AT
Austria
Prior art keywords
vacuum pump
impurities
capture
fluid pumped
fluid
Prior art date
Application number
AT04768529T
Other languages
English (en)
Inventor
Barrie Brewster
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB0322609A external-priority patent/GB0322609D0/en
Application filed by Edwards Ltd filed Critical Edwards Ltd
Application granted granted Critical
Publication of ATE394598T1 publication Critical patent/ATE394598T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B29/00—Other pumps with movable, e.g. rotatable cylinders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/50—Presence of foreign matter in the fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
AT04768529T 2003-09-26 2004-09-16 Erfassung von verunreinigungen in einem durch eine vakuumpumpe gepumpten fluid ATE394598T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0322609A GB0322609D0 (en) 2003-09-26 2003-09-26 Detection of contaminants within pumped fluid
GB0409275A GB0409275D0 (en) 2003-09-26 2004-04-26 Detection of contaminants within pumped fluid

Publications (1)

Publication Number Publication Date
ATE394598T1 true ATE394598T1 (de) 2008-05-15

Family

ID=34395448

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04768529T ATE394598T1 (de) 2003-09-26 2004-09-16 Erfassung von verunreinigungen in einem durch eine vakuumpumpe gepumpten fluid

Country Status (7)

Country Link
US (1) US20070028669A1 (de)
EP (1) EP1668253B1 (de)
JP (1) JP2007506903A (de)
KR (1) KR20060090232A (de)
AT (1) ATE394598T1 (de)
DE (1) DE602004013612D1 (de)
WO (1) WO2005031169A1 (de)

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US7900315B2 (en) 2005-10-07 2011-03-08 Cube Investments Limited Integrated central vacuum cleaner suction device and control
US7958594B2 (en) 2005-10-07 2011-06-14 Cube Investments Limited Central vacuum cleaner cross-controls
US7690075B2 (en) 2005-10-07 2010-04-06 Cube Investments Limited Central vacuum cleaner control, unit and system with contaminant sensor
DE102008041592A1 (de) * 2008-08-27 2010-03-04 Carl Zeiss Smt Ag Detektion von kontaminierenden Stoffen in einer EUV-Lithographieanlage
DE102009059824A1 (de) * 2009-12-21 2011-06-22 Inficon GmbH, 50968 Verfahren und Vorrichtung zur Leckbestimmung
US8998899B2 (en) 2010-11-08 2015-04-07 Bovie Medical Corporation Multi-button electrosurgical apparatus
US9770285B2 (en) 2010-11-08 2017-09-26 Bovie Medical Corporation System and method for identifying and controlling an electrosurgical apparatus
US9144453B2 (en) 2010-11-08 2015-09-29 Bovie Medical Corporation Multi-mode electrosurgical apparatus
US9060765B2 (en) 2010-11-08 2015-06-23 Bovie Medical Corporation Electrosurgical apparatus with retractable blade
US9095333B2 (en) 2012-07-02 2015-08-04 Bovie Medical Corporation Systems and methods of discriminating between argon and helium gases for enhanced safety of medical devices
CN107077073B (zh) 2014-09-11 2018-12-07 Asml荷兰有限公司 用于监测辐射源的装置、辐射源、监测辐射源的方法、器件制造方法
EP3250141B1 (de) 2015-01-28 2023-10-11 Apyx Medical Corporation Elektrochirurgische kaltplasmavorrichtung mit applikator mit gebogener spitze
GB201519145D0 (en) * 2015-10-29 2015-12-16 Gas Measurement Instr Ltd Smart pump for a portable gas detection instrument
US10386259B2 (en) * 2016-08-25 2019-08-20 General Electric Company Hazgas system with acoustic wave sensors
JP7112100B2 (ja) 2017-01-30 2022-08-03 アピックス メディカル コーポレーション 可撓性を有するシャフトを備えた電気手術装置
WO2018222562A1 (en) 2017-05-30 2018-12-06 Bovie Medical Corporation Electrosurgical apparatus with robotic tip
CN112534563B (zh) * 2018-06-15 2025-08-05 朗姆研究公司 用于从衬底处理系统的排放装置的泵去除沉积物的清洁系统
CN110895179B (zh) * 2019-08-20 2025-07-11 中国船舶重工集团公司第七一八研究所 一种宽动态真空检漏装置
AU2021225786B2 (en) 2020-02-26 2026-01-08 Apyx Medical Corporation Electrosurgical apparatus with flexible shaft
US11284018B1 (en) * 2020-09-15 2022-03-22 Applied Materials, Inc. Smart camera substrate
DE102021002178A1 (de) * 2021-04-24 2022-10-27 Hydac Technology Gmbh Fördereinrichtung
CN117191924B (zh) * 2023-08-03 2024-04-05 哈尔滨工业大学 高效分离和动态表征的分子污染物原位分析检测装置

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Also Published As

Publication number Publication date
KR20060090232A (ko) 2006-08-10
DE602004013612D1 (de) 2008-06-19
EP1668253A1 (de) 2006-06-14
JP2007506903A (ja) 2007-03-22
WO2005031169A1 (en) 2005-04-07
US20070028669A1 (en) 2007-02-08
EP1668253B1 (de) 2008-05-07

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