ATE394682T1 - Kraftsensor - Google Patents

Kraftsensor

Info

Publication number
ATE394682T1
ATE394682T1 AT04804166T AT04804166T ATE394682T1 AT E394682 T1 ATE394682 T1 AT E394682T1 AT 04804166 T AT04804166 T AT 04804166T AT 04804166 T AT04804166 T AT 04804166T AT E394682 T1 ATE394682 T1 AT E394682T1
Authority
AT
Austria
Prior art keywords
force sensors
force
carbon nanotube
force sensor
nanostructure
Prior art date
Application number
AT04804166T
Other languages
English (en)
Inventor
Christopher Hierold
Alain Jungen
Christoph Stampfer
Original Assignee
Eth Zuerich
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eth Zuerich filed Critical Eth Zuerich
Application granted granted Critical
Publication of ATE394682T1 publication Critical patent/ATE394682T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/005—Measuring force or stress, in general by electrical means and not provided for in G01L1/06 - G01L1/22
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/025—Inertial sensors not provided for in B81B2201/0235 - B81B2201/0242
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y10S977/724—Devices having flexible or movable element
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/902—Specified use of nanostructure
    • Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
    • Y10S977/953—Detector using nanostructure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/902—Specified use of nanostructure
    • Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
    • Y10S977/953—Detector using nanostructure
    • Y10S977/956—Of mechanical property

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Molecular Biology (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Control Of High-Frequency Heating Circuits (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
  • Pressure Sensors (AREA)
AT04804166T 2004-03-02 2004-12-22 Kraftsensor ATE394682T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP04004883 2004-03-02

Publications (1)

Publication Number Publication Date
ATE394682T1 true ATE394682T1 (de) 2008-05-15

Family

ID=34959826

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04804166T ATE394682T1 (de) 2004-03-02 2004-12-22 Kraftsensor

Country Status (5)

Country Link
US (1) US7404338B2 (de)
EP (1) EP1721173B1 (de)
AT (1) ATE394682T1 (de)
DE (1) DE602004013641D1 (de)
WO (1) WO2005095997A1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007002297A2 (en) 2005-06-24 2007-01-04 Crafts Douglas E Temporary planar electrical contact device and method using vertically-compressible nanotube contact structures
ITTO20050758A1 (it) * 2005-10-26 2007-04-27 Fiat Ricerche Dispositivo di rilevazione di grandezze fisiche in particolare un campo magnetico a film sottile e relativo procedimento di rilevazione
RU2304273C1 (ru) * 2006-06-22 2007-08-10 Государственное образовательное учреждение высшего профессионального образования "Таганрогский государственный радиотехнический университет" (ТРТУ) Интегральный микромеханический гироскоп на основе углеродных нанотрубок
US7884525B2 (en) * 2006-08-03 2011-02-08 Massachusetts Institute Of Technology Carbon nanotube based compliant mechanism
US7731503B2 (en) * 2006-08-21 2010-06-08 Formfactor, Inc. Carbon nanotube contact structures
US8354855B2 (en) * 2006-10-16 2013-01-15 Formfactor, Inc. Carbon nanotube columns and methods of making and using carbon nanotube columns as probes
US8130007B2 (en) * 2006-10-16 2012-03-06 Formfactor, Inc. Probe card assembly with carbon nanotube probes having a spring mechanism therein
US7810373B2 (en) * 2007-02-22 2010-10-12 Seagate Technology Llc MEMS shock sensors
RU2334237C1 (ru) * 2007-04-16 2008-09-20 Технологический институт Федерального государственного образовательного учреждения высшего профессионального образования "Южный федеральный университет" в г. Таганроге (ТТИ ЮФУ) Интегральный микромеханический гироскоп-акселерометр на основе углеродных нанотрубок
WO2009029043A1 (en) * 2007-08-24 2009-03-05 Quantum Precision Instruments Asia Private Limited Quantum tunnelling sensor device and method
US8149007B2 (en) * 2007-10-13 2012-04-03 Formfactor, Inc. Carbon nanotube spring contact structures with mechanical and electrical components
DE102008013624A1 (de) * 2008-03-10 2009-09-24 Siemens Aktiengesellschaft Mikrosensor mit einem CNT-Sensorelement und Verfahren zu dessen Herstellung
US8272124B2 (en) * 2009-04-03 2012-09-25 Formfactor, Inc. Anchoring carbon nanotube columns
US20100252317A1 (en) * 2009-04-03 2010-10-07 Formfactor, Inc. Carbon nanotube contact structures for use with semiconductor dies and other electronic devices
US8327715B2 (en) * 2009-07-02 2012-12-11 Honeywell International Inc. Force sensor apparatus
US8872176B2 (en) 2010-10-06 2014-10-28 Formfactor, Inc. Elastic encapsulated carbon nanotube based electrical contacts
US8316725B2 (en) 2010-12-15 2012-11-27 Honeywell International Inc. Force sensor
US8746075B2 (en) 2012-02-16 2014-06-10 7-Sigma, Inc. Flexible electrically conductive nanotube sensor for elastomeric devices
US9534972B2 (en) 2012-02-16 2017-01-03 7-Sigma Inc. Pressure sensor with a deformable electrically resistive membrane
US9003899B2 (en) 2012-03-23 2015-04-14 Honeywell International Inc. Force sensor
US8806964B2 (en) 2012-03-23 2014-08-19 Honeywell International Inc. Force sensor
US9003897B2 (en) 2012-05-10 2015-04-14 Honeywell International Inc. Temperature compensated force sensor
US20150064675A1 (en) * 2013-08-30 2015-03-05 7-Sigma, Inc. Responsive tool with sensors
US10073522B2 (en) * 2014-12-12 2018-09-11 Regents Of The University Of Minnesota Articles of handwear for sensing forces applied to medical devices
CH713600A2 (de) * 2017-03-21 2018-09-28 Digi Sens Ag Vorrichtung und Verfahren zum Messen einer Last.

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002080360A1 (en) 2001-03-30 2002-10-10 California Institute Of Technology Pattern-aligned carbon nanotube growth and tunable resonator apparatus

Also Published As

Publication number Publication date
US7404338B2 (en) 2008-07-29
EP1721173B1 (de) 2008-05-07
WO2005095997A1 (en) 2005-10-13
US20070186665A1 (en) 2007-08-16
DE602004013641D1 (de) 2008-06-19
EP1721173A1 (de) 2006-11-15

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