ATE395624T1 - Interferenz-spektroskopiedetektor und kamera - Google Patents

Interferenz-spektroskopiedetektor und kamera

Info

Publication number
ATE395624T1
ATE395624T1 AT05826577T AT05826577T ATE395624T1 AT E395624 T1 ATE395624 T1 AT E395624T1 AT 05826577 T AT05826577 T AT 05826577T AT 05826577 T AT05826577 T AT 05826577T AT E395624 T1 ATE395624 T1 AT E395624T1
Authority
AT
Austria
Prior art keywords
camera
spectroscopy detector
interference spectroscopy
mirror
input side
Prior art date
Application number
AT05826577T
Other languages
English (en)
Inventor
Coarer Etienne Le
Pierre Benech
Original Assignee
Univ Joseph Fourier
Inst Nat Polytech Grenoble
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Joseph Fourier, Inst Nat Polytech Grenoble filed Critical Univ Joseph Fourier
Application granted granted Critical
Publication of ATE395624T1 publication Critical patent/ATE395624T1/de

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/45Interferometric spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
AT05826577T 2004-12-15 2005-12-15 Interferenz-spektroskopiedetektor und kamera ATE395624T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0452992A FR2879287B1 (fr) 2004-12-15 2004-12-15 Detecteur et camera speectroscopiques interferentiels

Publications (1)

Publication Number Publication Date
ATE395624T1 true ATE395624T1 (de) 2008-05-15

Family

ID=34952731

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05826577T ATE395624T1 (de) 2004-12-15 2005-12-15 Interferenz-spektroskopiedetektor und kamera

Country Status (9)

Country Link
US (1) US7812958B2 (de)
EP (1) EP1825312B1 (de)
JP (2) JP5479682B2 (de)
AT (1) ATE395624T1 (de)
CA (1) CA2590072C (de)
DE (1) DE602005006841D1 (de)
ES (1) ES2307231T3 (de)
FR (1) FR2879287B1 (de)
WO (1) WO2006064134A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2889587B1 (fr) * 2005-08-08 2008-02-22 Univ Grenoble 1 Spectrographie a onde contra-propagative
FR2924803A1 (fr) 2007-12-11 2009-06-12 Commissariat Energie Atomique Dispositif d'analyse spectroscopique interferentielle
RU2485440C2 (ru) * 2011-02-17 2013-06-20 Сергей Фёдорович Якутов Устройство для активного контроля линейных перемещений объекта
FR2976072B1 (fr) * 2011-05-31 2014-09-12 Commissariat Energie Atomique Detecteur spectroscopique et detecteur de gaz incluant au moins un tel detecteur
EP3222964B1 (de) 2016-03-25 2020-01-15 Fogale Nanotech Chromatische konfokale vorrichtung und verfahren zur 2d/3d-inspektion eines objekts wie etwa eines wafers
EP3270127A1 (de) 2016-07-15 2018-01-17 Micos Engineering GmbH Miniaturisiertes wellenleiterbildgebungsspektrometer
EP3270128A1 (de) 2016-07-15 2018-01-17 Micos Engineering GmbH Wellenleiterspektrometer zur durchführung der integrierten interferogrammabtastung
WO2018115566A1 (en) * 2016-12-19 2018-06-28 Nokia Technologies Oy Spectroscopic detection apparatus and method
JP6702283B2 (ja) * 2017-08-29 2020-06-03 株式会社豊田中央研究所 受光素子
EP4261506A1 (de) * 2022-04-12 2023-10-18 Eidgenössische Materialprüfungs- und Forschungsanstalt Komponente zur herstellung eines miniaturisierten spektrometers und verfahren zur verwendung davon

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56124262A (en) * 1980-03-04 1981-09-29 Nippon Telegr & Teleph Corp <Ntt> Waveguide passage light detecting device
US4755668A (en) * 1986-10-03 1988-07-05 Optical Technologies, Inc. Fiber optic interferometric thermometer with serially positioned fiber optic sensors
FR2734676B1 (fr) 1995-05-23 1997-08-08 Labeyrie Antoine Procede et dispositifs d'emission ou reception laser pour la transmission d'informations par voie optique
US5943136A (en) * 1997-10-31 1999-08-24 The United States Of America As Represented By The Secretary Of Commerce Intra-cavity total reflection for high sensitivity measurement of optical properties
JP2001215371A (ja) * 2000-02-04 2001-08-10 Sumitomo Osaka Cement Co Ltd モニタ付光導波路型素子
JP3429282B2 (ja) * 2001-02-02 2003-07-22 リサーチ・インターナショナル・インコーポレーテッド 自動化されたシステム、及びサンプルの分析方法
ATE278181T1 (de) * 2001-02-23 2004-10-15 Ericsson Telefon Ab L M Monochromatoranordnung
US20030026532A1 (en) * 2001-03-01 2003-02-06 Applied Optoelectronics, Inc. Reflectively coupled zigzag waveguide device for wavelength locking
US20030038938A1 (en) * 2002-06-20 2003-02-27 Jung Wayne D. Apparatus and method for measuring optical characteristics of an object or material
GB0302434D0 (en) * 2003-02-03 2003-03-05 Sensor Highway Ltd Interferometric method and apparatus for measuring physical parameters

Also Published As

Publication number Publication date
EP1825312A1 (de) 2007-08-29
US20080130008A1 (en) 2008-06-05
FR2879287B1 (fr) 2007-03-16
CA2590072A1 (fr) 2006-06-22
EP1825312B1 (de) 2008-05-14
DE602005006841D1 (de) 2008-06-26
US7812958B2 (en) 2010-10-12
JP2014055970A (ja) 2014-03-27
WO2006064134A1 (fr) 2006-06-22
FR2879287A1 (fr) 2006-06-16
CA2590072C (en) 2014-10-21
JP5479682B2 (ja) 2014-04-23
ES2307231T3 (es) 2008-11-16
JP2008524569A (ja) 2008-07-10

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