ATE395652T1 - System und verfahren zur herstellung und verwendung einer massenströmungseinrichtung - Google Patents
System und verfahren zur herstellung und verwendung einer massenströmungseinrichtungInfo
- Publication number
- ATE395652T1 ATE395652T1 AT02778519T AT02778519T ATE395652T1 AT E395652 T1 ATE395652 T1 AT E395652T1 AT 02778519 T AT02778519 T AT 02778519T AT 02778519 T AT02778519 T AT 02778519T AT E395652 T1 ATE395652 T1 AT E395652T1
- Authority
- AT
- Austria
- Prior art keywords
- fluid
- restrictor
- mass flow
- parameters
- producing
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000012530 fluid Substances 0.000 abstract 5
- 238000000034 method Methods 0.000 abstract 2
- 238000012937 correction Methods 0.000 abstract 1
- 238000012795 verification Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Flow Control (AREA)
- Measuring Volume Flow (AREA)
- Details Of Flowmeters (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Paper (AREA)
- Automobile Manufacture Line, Endless Track Vehicle, Trailer (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US32903101P | 2001-10-12 | 2001-10-12 | |
| US40651102P | 2002-08-28 | 2002-08-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE395652T1 true ATE395652T1 (de) | 2008-05-15 |
Family
ID=26986624
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT02778519T ATE395652T1 (de) | 2001-10-12 | 2002-10-11 | System und verfahren zur herstellung und verwendung einer massenströmungseinrichtung |
Country Status (7)
| Country | Link |
|---|---|
| EP (1) | EP1442343B1 (de) |
| JP (1) | JP5069839B2 (de) |
| KR (1) | KR100937726B1 (de) |
| CN (2) | CN1606721A (de) |
| AT (1) | ATE395652T1 (de) |
| DE (1) | DE60226626D1 (de) |
| WO (1) | WO2003032101A1 (de) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4874576B2 (ja) * | 2004-08-11 | 2012-02-15 | サーパス工業株式会社 | 流量制御システム |
| CN1318930C (zh) * | 2005-04-27 | 2007-05-30 | 杭州电子科技大学 | 智能执行器用阀门流量特性实现方法 |
| EP1890114B1 (de) * | 2005-06-07 | 2021-07-07 | Surpass Industry Co., Ltd. | Flüssigkeitsdurchflussregleranordnung |
| US7971604B2 (en) | 2006-04-20 | 2011-07-05 | Hitachi Metals, Ltd. | Flow controller delivery of a specified-quantity of a fluid |
| US8219329B2 (en) * | 2006-05-26 | 2012-07-10 | Horiba Stec, Co., Ltd. | Thermal type mass flow meter, and thermal type mass flow control device |
| JP5094202B2 (ja) * | 2007-05-14 | 2012-12-12 | アイシン精機株式会社 | 流体送出装置、改質器および燃料電池システム |
| JP5361147B2 (ja) * | 2007-06-25 | 2013-12-04 | アズビル株式会社 | 流量計の調整方法、流量計測装置及び調整データ管理システム |
| US8528427B2 (en) | 2010-10-29 | 2013-09-10 | Becton, Dickinson And Company | Dual feedback vacuum fluidics for a flow-type particle analyzer |
| US9188989B1 (en) | 2011-08-20 | 2015-11-17 | Daniel T. Mudd | Flow node to deliver process gas using a remote pressure measurement device |
| US9958302B2 (en) | 2011-08-20 | 2018-05-01 | Reno Technologies, Inc. | Flow control system, method, and apparatus |
| WO2014040002A2 (en) | 2012-09-10 | 2014-03-13 | Mudd Daniel T | Pressure based mass flow controller |
| EP3043228B1 (de) * | 2015-01-09 | 2018-09-19 | Levitronix GmbH | Strömungsregler sowie verfahren zum einstellen vorgebbaren volumenstroms |
| US10247324B2 (en) * | 2015-02-24 | 2019-04-02 | General Electric Technology Gmbh | Thermostatic flow control device and method of use |
| US10679880B2 (en) | 2016-09-27 | 2020-06-09 | Ichor Systems, Inc. | Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same |
| US11144075B2 (en) | 2016-06-30 | 2021-10-12 | Ichor Systems, Inc. | Flow control system, method, and apparatus |
| US10838437B2 (en) | 2018-02-22 | 2020-11-17 | Ichor Systems, Inc. | Apparatus for splitting flow of process gas and method of operating same |
| US10303189B2 (en) | 2016-06-30 | 2019-05-28 | Reno Technologies, Inc. | Flow control system, method, and apparatus |
| US10663337B2 (en) | 2016-12-30 | 2020-05-26 | Ichor Systems, Inc. | Apparatus for controlling flow and method of calibrating same |
| JP2019200181A (ja) * | 2018-05-18 | 2019-11-21 | 株式会社デンソー | 気体流量測定装置および気体流量測定方法 |
| CN112673239B (zh) * | 2018-09-18 | 2024-11-12 | 斯瓦戈洛克公司 | 流体监测模块布置 |
| US12181328B2 (en) * | 2020-04-17 | 2024-12-31 | Illinois Tool Works Inc. | Flow through pressure sensor structured to remove dead volume |
| JP7583186B2 (ja) | 2021-03-03 | 2024-11-13 | アイコール・システムズ・インク | マニホールドアセンブリを備える流体流れ制御システム |
| US20250130600A1 (en) * | 2023-10-20 | 2025-04-24 | Illinois Took Works Inc. | Valve assembly and system used to control flow rate of a fluid |
| WO2025239048A1 (ja) * | 2024-05-13 | 2025-11-20 | 富士電機株式会社 | 測定装置 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4096746A (en) * | 1977-02-25 | 1978-06-27 | The Perkin-Elmer Corporation | Flow controller-flow sensor assembly for gas chromatographs and the like |
| US5080131A (en) * | 1989-09-26 | 1992-01-14 | Lintec Co., Ltd. | Mass flow controller |
| JPH03156509A (ja) * | 1989-11-14 | 1991-07-04 | Stec Kk | マスフローコントローラ |
| US5311762A (en) * | 1991-12-16 | 1994-05-17 | Dxl Usa | Flow sensor calibration |
| US5190068A (en) * | 1992-07-02 | 1993-03-02 | Brian Philbin | Control apparatus and method for controlling fluid flows and pressures |
| US5606513A (en) * | 1993-09-20 | 1997-02-25 | Rosemount Inc. | Transmitter having input for receiving a process variable from a remote sensor |
| BG98808A (en) * | 1993-10-16 | 1995-05-31 | Koenig | Method and device for determining the m discharge of fluids in pipelines |
| US5660207A (en) * | 1994-12-29 | 1997-08-26 | Tylan General, Inc. | Flow controller, parts of flow controller, and related method |
| US5868159A (en) * | 1996-07-12 | 1999-02-09 | Mks Instruments, Inc. | Pressure-based mass flow controller |
| US5944048A (en) * | 1996-10-04 | 1999-08-31 | Emerson Electric Co. | Method and apparatus for detecting and controlling mass flow |
| US5911238A (en) * | 1996-10-04 | 1999-06-15 | Emerson Electric Co. | Thermal mass flowmeter and mass flow controller, flowmetering system and method |
| DE19713668A1 (de) * | 1997-04-02 | 1998-10-08 | Wagner Int | Vorrichtung und Verfahren zum Messen und zum Regeln des Durchflusses eines Fluids |
| US6152162A (en) * | 1998-10-08 | 2000-11-28 | Mott Metallurgical Corporation | Fluid flow controlling |
| US6119710A (en) * | 1999-05-26 | 2000-09-19 | Cyber Instrument Technologies Llc | Method for wide range gas flow system with real time flow measurement and correction |
| KR20030043951A (ko) * | 1999-09-03 | 2003-06-02 | 마이크로브리지 테크놀로지스 인크. | 여러 가스 유량 측정 장치 및 신호 처리 방법 |
-
2002
- 2002-10-11 WO PCT/US2002/032533 patent/WO2003032101A1/en not_active Ceased
- 2002-10-11 CN CNA028200969A patent/CN1606721A/zh active Pending
- 2002-10-11 AT AT02778519T patent/ATE395652T1/de not_active IP Right Cessation
- 2002-10-11 EP EP02778519A patent/EP1442343B1/de not_active Expired - Lifetime
- 2002-10-11 JP JP2003535006A patent/JP5069839B2/ja not_active Expired - Fee Related
- 2002-10-11 KR KR1020047005401A patent/KR100937726B1/ko not_active Expired - Lifetime
- 2002-10-11 CN CN201310717913.0A patent/CN103838261B/zh not_active Expired - Lifetime
- 2002-10-11 DE DE60226626T patent/DE60226626D1/de not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| CN103838261B (zh) | 2017-05-03 |
| DE60226626D1 (de) | 2008-06-26 |
| EP1442343A1 (de) | 2004-08-04 |
| KR100937726B1 (ko) | 2010-01-20 |
| EP1442343A4 (de) | 2005-11-09 |
| KR20050035159A (ko) | 2005-04-15 |
| CN103838261A (zh) | 2014-06-04 |
| JP5069839B2 (ja) | 2012-11-07 |
| WO2003032101A1 (en) | 2003-04-17 |
| EP1442343B1 (de) | 2008-05-14 |
| JP2005507996A (ja) | 2005-03-24 |
| CN1606721A (zh) | 2005-04-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |