ATE402484T1 - Halbleitervorrichtung mit brennstoffzelle und verfahren zu ihrer herstellung - Google Patents

Halbleitervorrichtung mit brennstoffzelle und verfahren zu ihrer herstellung

Info

Publication number
ATE402484T1
ATE402484T1 AT03703040T AT03703040T ATE402484T1 AT E402484 T1 ATE402484 T1 AT E402484T1 AT 03703040 T AT03703040 T AT 03703040T AT 03703040 T AT03703040 T AT 03703040T AT E402484 T1 ATE402484 T1 AT E402484T1
Authority
AT
Austria
Prior art keywords
fuel cell
semiconductor device
separator
producing same
device equipped
Prior art date
Application number
AT03703040T
Other languages
English (en)
Inventor
Kiyoshi Morimoto
Kiyoyuki Morita
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of ATE402484T1 publication Critical patent/ATE402484T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W42/00—Arrangements for protection of devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/8605—Porous electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/02—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/02—Details
    • H01M8/0202—Collectors; Separators, e.g. bipolar separators; Interconnectors
    • H01M8/0258—Collectors; Separators, e.g. bipolar separators; Interconnectors characterised by the configuration of channels, e.g. by the flow field of the reactant or coolant
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M8/1007—Fuel cells with solid electrolytes with both reactants being gaseous or vaporised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/24—Grouping of fuel cells, e.g. stacking of fuel cells
    • H01M8/241—Grouping of fuel cells, e.g. stacking of fuel cells with solid or matrix-supported electrolytes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D88/00—Three-dimensional [3D] integrated devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Fuel Cell (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Seeds, Soups, And Other Foods (AREA)
AT03703040T 2002-01-29 2003-01-23 Halbleitervorrichtung mit brennstoffzelle und verfahren zu ihrer herstellung ATE402484T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002019659 2002-01-29

Publications (1)

Publication Number Publication Date
ATE402484T1 true ATE402484T1 (de) 2008-08-15

Family

ID=27654272

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03703040T ATE402484T1 (de) 2002-01-29 2003-01-23 Halbleitervorrichtung mit brennstoffzelle und verfahren zu ihrer herstellung

Country Status (7)

Country Link
US (1) US6933570B2 (de)
EP (1) EP1471588B1 (de)
JP (1) JP3700979B2 (de)
CN (1) CN1328811C (de)
AT (1) ATE402484T1 (de)
DE (1) DE60322342D1 (de)
WO (1) WO2003065487A1 (de)

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US20120264024A1 (en) * 1999-04-29 2012-10-18 Pelton Walter E Methods and apparatuses for electrochemical cell system with movable medium and non-conducting substrate
CN1328811C (zh) * 2002-01-29 2007-07-25 松下电器产业株式会社 具有燃料电池的半导体装置及其制造方法
US20080233436A1 (en) * 2003-07-28 2008-09-25 General Motors Corporation Diffusion media tailored to account for variations in operating humidity and devices incorporating the same
US7235315B2 (en) * 2003-12-16 2007-06-26 Ballard Power Systems Inc. Electrochemical fuel cell stack having a plurality of integrated voltage reversal protection diodes
KR101065375B1 (ko) * 2004-06-23 2011-09-16 삼성에스디아이 주식회사 연료 전지용 바이폴라 플레이트, 이의 제조 방법 및 이를포함하는 연료 전지
US7842435B2 (en) * 2004-11-01 2010-11-30 Gm Global Technology Operations, Inc. Fuel cell water management enhancement method
JP4200339B2 (ja) * 2005-09-29 2008-12-24 マイクロシリトロン株式会社 燃料電池単位セル、燃料電池単位セルアレイ、燃料電池モジュール及び燃料電池システム
KR100673616B1 (ko) * 2005-12-05 2007-01-24 경상대학교산학협력단 웨이퍼 뒷면에 전원공급장치가 내장된 반도체용 실리콘웨이퍼
JP5234878B2 (ja) * 2006-02-22 2013-07-10 独立行政法人産業技術総合研究所 燃料電池
EP1843422B1 (de) 2006-04-06 2010-11-17 STMicroelectronics Srl Verfahren und beschaltung für regelung des hochfahrens einer mikrobrennstoffzelles
EP2027621A4 (de) * 2006-04-14 2010-01-13 Applied Materials Inc Entwurf für eine zuverlässige brennstoffzellenelektrode
KR100645594B1 (ko) 2006-07-12 2006-11-15 한국에너지기술연구원 연료전지 성능 평가용 셀 또는 스택 및 연료전지 성능 평가방법
US20080093633A1 (en) * 2006-10-18 2008-04-24 United Microelectronics Corp. Complementary metal-oxide-semiconductor (cmos) image sensor and fabricating method thereof
JP2008159447A (ja) * 2006-12-25 2008-07-10 Shinko Electric Ind Co Ltd 固体酸化物型燃料電池発電装置
KR20090119187A (ko) * 2008-05-15 2009-11-19 삼성전자주식회사 연료전지를 포함하는 패키지, 그 제조 방법, 및 패키지를포함하는 카드 및 시스템
JP5610562B2 (ja) * 2008-11-05 2014-10-22 神奈川県 燃料電池セルおよびその製造方法
WO2011062042A1 (en) * 2009-11-20 2011-05-26 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
TWI688047B (zh) * 2010-08-06 2020-03-11 半導體能源研究所股份有限公司 半導體裝置
KR102371046B1 (ko) * 2016-07-15 2022-03-07 현대자동차주식회사 연료전지용 엔드셀 히터
AU2018426555B2 (en) * 2018-06-07 2022-06-02 H2Lab Pte. Ltd Silicon pole plate and preparation method therefor, use of silicon in fuel cell, fuel cell stack structure, fuel cell and use thereof

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JPH0650783B2 (ja) * 1982-03-29 1994-06-29 株式会社半導体エネルギ−研究所 光発電装置
JP3339730B2 (ja) 1992-12-24 2002-10-28 忠弘 大見 半導体装置
JP3401918B2 (ja) 1994-07-04 2003-04-28 株式会社デンソー 半導体装置
JP3503197B2 (ja) * 1994-07-04 2004-03-02 株式会社デンソー 半導体装置
KR100253699B1 (ko) 1996-06-29 2000-05-01 김영환 Soi소자 및 그 제조방법
US6255731B1 (en) 1997-07-30 2001-07-03 Canon Kabushiki Kaisha SOI bonding structure
JP4623451B2 (ja) 1997-07-30 2011-02-02 忠弘 大見 半導体基板及びその作製方法
US6638654B2 (en) * 1999-02-01 2003-10-28 The Regents Of The University Of California MEMS-based thin-film fuel cells
KR100361548B1 (ko) * 1999-04-19 2002-11-21 스미토모 긴조쿠 고교 가부시키가이샤 고체고분자형 연료전지용 스텐레스 강재
EP1190460A4 (de) * 1999-05-06 2003-03-12 Sandia Corp Brennstoffzelle und membran
US6312846B1 (en) * 1999-11-24 2001-11-06 Integrated Fuel Cell Technologies, Inc. Fuel cell and power chip technology
AU2001261026A1 (en) * 2000-04-17 2001-10-30 The Penn State Research Foundation Deposited thin films and their use in separation and sarcrificial layer applications
DE10021907B4 (de) * 2000-05-05 2005-06-02 Ballard Power Systems Ag Brennstoffzellensystem mit einem Brennstoffzellenstapel mit integrierter Verpolschutzdiode
JP2002075399A (ja) * 2000-08-30 2002-03-15 Hitachi Ltd 固体高分子電解質型燃料電池用セパレータ
EP1258937A1 (de) * 2001-05-17 2002-11-20 STMicroelectronics S.r.l. Mikro-Silizium-Brennstoffzelle, Verfahren zur Herstellung und autonome Halbleitervorrichtung mit Mikro-Brennstoffzelle
CN1328811C (zh) * 2002-01-29 2007-07-25 松下电器产业株式会社 具有燃料电池的半导体装置及其制造方法

Also Published As

Publication number Publication date
EP1471588A4 (de) 2007-01-03
WO2003065487A1 (en) 2003-08-07
CN1625818A (zh) 2005-06-08
DE60322342D1 (de) 2008-09-04
EP1471588A1 (de) 2004-10-27
JPWO2003065487A1 (ja) 2005-05-26
US6933570B2 (en) 2005-08-23
CN1328811C (zh) 2007-07-25
EP1471588B1 (de) 2008-07-23
JP3700979B2 (ja) 2005-09-28
US20040099907A1 (en) 2004-05-27

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