ATE407351T1 - Resonanzsensorbaugruppe - Google Patents

Resonanzsensorbaugruppe

Info

Publication number
ATE407351T1
ATE407351T1 AT04708390T AT04708390T ATE407351T1 AT E407351 T1 ATE407351 T1 AT E407351T1 AT 04708390 T AT04708390 T AT 04708390T AT 04708390 T AT04708390 T AT 04708390T AT E407351 T1 ATE407351 T1 AT E407351T1
Authority
AT
Austria
Prior art keywords
resonator
pzt
beams
maximum stresses
regions
Prior art date
Application number
AT04708390T
Other languages
English (en)
Inventor
Edward Barry Jones
Neil M White
John M Tudor
Stephen P Beeby
Original Assignee
Univ Brunel
Univ Southampton
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB0302585A external-priority patent/GB0302585D0/en
Priority claimed from GB0302586A external-priority patent/GB0302586D0/en
Application filed by Univ Brunel, Univ Southampton filed Critical Univ Brunel
Application granted granted Critical
Publication of ATE407351T1 publication Critical patent/ATE407351T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Measuring Fluid Pressure (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
AT04708390T 2003-02-05 2004-02-05 Resonanzsensorbaugruppe ATE407351T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0302585A GB0302585D0 (en) 2003-02-05 2003-02-05 Metallic Resonators
GB0302586A GB0302586D0 (en) 2003-02-05 2003-02-05 Silicon Resonators

Publications (1)

Publication Number Publication Date
ATE407351T1 true ATE407351T1 (de) 2008-09-15

Family

ID=32852405

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04708390T ATE407351T1 (de) 2003-02-05 2004-02-05 Resonanzsensorbaugruppe

Country Status (7)

Country Link
US (1) US7498721B2 (de)
EP (1) EP1590642B1 (de)
JP (1) JP2006518846A (de)
KR (1) KR20050099520A (de)
AT (1) ATE407351T1 (de)
DE (1) DE602004016291D1 (de)
WO (1) WO2004070335A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006103004A (ja) * 2004-09-30 2006-04-20 Fuji Photo Film Co Ltd 液体吐出ヘッド
GB0517340D0 (en) 2005-08-25 2005-10-05 Avery Berkel Ltd Improvements in or relating to vibrating beam sensors
GB2445163B (en) * 2006-12-28 2011-02-16 Highland Biosciences Ltd Disposable test strips
WO2008081181A1 (en) 2006-12-28 2008-07-10 Highland Biosciences Limited Biosensor
GB0716542D0 (en) * 2007-08-24 2007-10-03 Highland Biosciences Ltd Endotoxin biosensor
GB0821592D0 (en) * 2008-11-26 2008-12-31 Rolls Royce Plc Strain measurement of rotating components
CN102439405B (zh) * 2009-05-27 2013-10-16 松下电器产业株式会社 物理量传感器
EP2745096B1 (de) 2011-08-17 2016-10-12 Public Service Solutions Inc Passive detektoren für bildgebungssysteme
WO2015033522A1 (ja) * 2013-09-06 2015-03-12 パナソニックＩｐマネジメント株式会社 歪センサ
JP6862794B2 (ja) * 2016-11-24 2021-04-21 セイコーエプソン株式会社 力検出センサー、力覚センサー、トルクセンサーおよびロボット
CN108195505A (zh) * 2017-11-24 2018-06-22 浙江大学 具有三梁音叉的微谐振式压差传感器及压差检测方法
CN117168662B (zh) * 2023-11-03 2024-01-12 华景传感科技（无锡）有限公司 一种谐振式压力传感器及其制备方法
CN121007659B (zh) * 2025-10-27 2026-02-03 苏州紫芯微电子有限公司 一种硅谐振温压传感器及其制备方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS596370B2 (ja) * 1979-05-11 1984-02-10 横河電機株式会社 力変換機構
JPS59112131U (ja) * 1983-01-19 1984-07-28 横河電機株式会社 トルク検出装置
GB2141231B (en) * 1983-06-07 1986-08-06 Gen Electric Co Plc Force sensors
GB8806214D0 (en) * 1988-03-16 1988-04-13 Avery Ltd W & T Vibrating force sensor
FR2640045B1 (fr) * 1988-12-02 1991-03-08 Sagem Transducteur force-frequence a poutres vibrantes et accelerometre pendulaire en comportant application
US4901586A (en) * 1989-02-27 1990-02-20 Sundstrand Data Control, Inc. Electrostatically driven dual vibrating beam force transducer
FR2669426B1 (fr) * 1990-11-16 1993-10-29 Onera Transducteur de force a poutre vibrante piezoelectrique pour capteur accelerometrique.
DE4231734A1 (de) * 1991-09-26 1993-04-01 Fuji Electric Co Ltd Piezoelektrische einrichtung
US5367217A (en) * 1992-11-18 1994-11-22 Alliedsignal Inc. Four bar resonating force transducer
JP3503213B2 (ja) * 1994-10-19 2004-03-02 松下電器産業株式会社 力センサー
JPH10293077A (ja) * 1997-04-18 1998-11-04 Nikon Corp 広範囲圧力計
US6161440A (en) * 1997-08-14 2000-12-19 Alliedsignal Inc. Low metalization creep sensor
IT1302616B1 (it) * 1998-10-07 2000-09-29 Uni Degli Studi Brescia Dispositivo multisensore per misure chimiche gravimetriche mediantestrati piezoelettrici risonanti in tecnologia a film spesso.

Also Published As

Publication number Publication date
US7498721B2 (en) 2009-03-03
US20060170311A1 (en) 2006-08-03
EP1590642A1 (de) 2005-11-02
WO2004070335A1 (en) 2004-08-19
JP2006518846A (ja) 2006-08-17
EP1590642B1 (de) 2008-09-03
DE602004016291D1 (de) 2008-10-16
KR20050099520A (ko) 2005-10-13

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties