ATE408149T1 - Verfahren zur kalibrierung und de-embedding, geräte für de-embedding und netzwerk- vektoranalysator - Google Patents

Verfahren zur kalibrierung und de-embedding, geräte für de-embedding und netzwerk- vektoranalysator

Info

Publication number
ATE408149T1
ATE408149T1 AT03720805T AT03720805T ATE408149T1 AT E408149 T1 ATE408149 T1 AT E408149T1 AT 03720805 T AT03720805 T AT 03720805T AT 03720805 T AT03720805 T AT 03720805T AT E408149 T1 ATE408149 T1 AT E408149T1
Authority
AT
Austria
Prior art keywords
embedding
load device
substantially identical
parameter values
calibration
Prior art date
Application number
AT03720805T
Other languages
English (en)
Inventor
Lukas Tiemeijer
Original Assignee
Nxp Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nxp Bv filed Critical Nxp Bv
Application granted granted Critical
Publication of ATE408149T1 publication Critical patent/ATE408149T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/28—Measuring attenuation, gain, phase shift or derived characteristics of electric four pole networks, i.e. two-port networks; Measuring transient response
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
    • G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
  • Testing, Inspecting, Measuring Of Stereoscopic Televisions And Televisions (AREA)
AT03720805T 2002-05-16 2003-05-08 Verfahren zur kalibrierung und de-embedding, geräte für de-embedding und netzwerk- vektoranalysator ATE408149T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP02076911 2002-05-16

Publications (1)

Publication Number Publication Date
ATE408149T1 true ATE408149T1 (de) 2008-09-15

Family

ID=29433146

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03720805T ATE408149T1 (de) 2002-05-16 2003-05-08 Verfahren zur kalibrierung und de-embedding, geräte für de-embedding und netzwerk- vektoranalysator

Country Status (9)

Country Link
US (2) US7026829B2 (de)
EP (1) EP1506428B1 (de)
JP (1) JP2005526250A (de)
CN (1) CN100541224C (de)
AT (1) ATE408149T1 (de)
AU (1) AU2003224379A1 (de)
DE (1) DE60323484D1 (de)
TW (1) TWI306705B (de)
WO (1) WO2003098255A1 (de)

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US7518378B2 (en) * 2007-02-13 2009-04-14 Keithley Instruments, Inc. Cable compensation for pulsed I-V measurements
US7876114B2 (en) 2007-08-08 2011-01-25 Cascade Microtech, Inc. Differential waveguide probe
US7741857B2 (en) * 2008-03-06 2010-06-22 International Business Machines Corporation System and method for de-embedding a device under test employing a parametrized netlist
US8350586B2 (en) * 2009-07-02 2013-01-08 Taiwan Semiconductor Manufacturing Company, Ltd. Method and apparatus of deembedding
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CN102147434B (zh) * 2010-02-09 2013-10-30 中芯国际集成电路制造(上海)有限公司 一种测试电感的方法
CN102156235B (zh) * 2010-02-12 2013-05-08 中芯国际集成电路制造(上海)有限公司 射频电路中电感的短路测试装置及短路测试方法
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US8917083B2 (en) * 2010-11-24 2014-12-23 International Business Machines Corporation Structures and methods for RF de-embedding
CN102645625B (zh) * 2011-02-17 2016-01-20 台湾积体电路制造股份有限公司 短路虚拟架构、解内嵌的方法及装置
US8681945B2 (en) * 2011-12-22 2014-03-25 Telefonaktiebolaget Lm Ericsson (Publ) Calibration of a line driving device
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CN103063999B (zh) * 2012-12-21 2016-03-16 上海华虹宏力半导体制造有限公司 去嵌入的方法
CN103364751B (zh) * 2013-07-11 2016-09-07 中国电子科技集团公司第四十一研究所 一种矢量网络分析仪电子校准件及校准方法
CN104569734B (zh) * 2013-10-12 2017-07-18 北京航天计量测试技术研究所 一种电缆网冗余线故障诊断方法
CN103675457B (zh) * 2013-11-05 2017-02-08 中国人民解放军国防科学技术大学 一种微波器件阻抗测量校准方法
CN103630864B (zh) * 2013-11-26 2016-12-07 中国电子科技集团公司第四十一研究所 一种用于自由空间材料电磁参数测试系统的校准方法
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US11215655B2 (en) * 2014-10-12 2022-01-04 Compass Technology Group, LLC Correction of transmission line induced phase and amplitude errors in reflectivity measurements
WO2016065531A1 (zh) * 2014-10-28 2016-05-06 上海集成电路研发中心有限公司 利用引入器件判断射频器件去嵌入精度的测试结构及方法
CN104635135A (zh) * 2015-01-30 2015-05-20 中国科学院微电子研究所 一种化合物半导体器件的去嵌入方法
CN105891628B (zh) * 2016-03-30 2018-05-29 清华大学 通用四端口在片高频去嵌入方法
DE102017117800B4 (de) 2016-12-29 2024-03-28 Taiwan Semiconductor Manufacturing Co., Ltd. Halbleitervorrichtungen und Verfahren für ihre Herstellung
US10164106B2 (en) 2016-12-29 2018-12-25 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor device and a method for fabricating the same
CN108646208B (zh) * 2018-06-08 2020-06-05 中国电子科技集团公司第四十一研究所 一种多端口夹具自动去嵌入方法
CN109524214B (zh) * 2018-11-22 2020-06-12 上海华力集成电路制造有限公司 螺旋电感去嵌入的开路结构及其去嵌入方法
CN112666506A (zh) * 2020-12-10 2021-04-16 中国电子技术标准化研究院 集成电路校准用在片电容标准样片
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CN113655360B (zh) * 2021-08-10 2025-04-01 中国科学院上海微系统与信息技术研究所 Rf mos器件的在片测试结构的去嵌方法
CN113804994B (zh) * 2021-08-16 2024-09-24 西安理工大学 一种电子器件高频阻抗曲线测量接插板及其设计方法
CN119619808B (zh) * 2025-02-11 2025-05-13 上海知白智能科技有限公司 一种被测件谐波测试链路、有源负载牵引系统及方法

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Also Published As

Publication number Publication date
US20060114004A1 (en) 2006-06-01
CN100541224C (zh) 2009-09-16
US7026829B2 (en) 2006-04-11
AU2003224379A1 (en) 2003-12-02
US20050179444A1 (en) 2005-08-18
WO2003098255A1 (en) 2003-11-27
EP1506428A1 (de) 2005-02-16
US7071707B2 (en) 2006-07-04
TW200400718A (en) 2004-01-01
DE60323484D1 (de) 2008-10-23
TWI306705B (en) 2009-02-21
JP2005526250A (ja) 2005-09-02
EP1506428B1 (de) 2008-09-10
CN1735815A (zh) 2006-02-15

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