ATE411408T1 - Aluminiumoxidschicht mit kontrollierter textur - Google Patents

Aluminiumoxidschicht mit kontrollierter textur

Info

Publication number
ATE411408T1
ATE411408T1 AT05445083T AT05445083T ATE411408T1 AT E411408 T1 ATE411408 T1 AT E411408T1 AT 05445083 T AT05445083 T AT 05445083T AT 05445083 T AT05445083 T AT 05445083T AT E411408 T1 ATE411408 T1 AT E411408T1
Authority
AT
Austria
Prior art keywords
layer
present
pulses
oxide layer
aluminum oxide
Prior art date
Application number
AT05445083T
Other languages
English (en)
Inventor
Sakari Ruppi
Original Assignee
Seco Tools Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=33488165&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE411408(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Seco Tools Ab filed Critical Seco Tools Ab
Application granted granted Critical
Publication of ATE411408T1 publication Critical patent/ATE411408T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C23C16/029—Graded interfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/403—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523—Pulsed gas flow or change of composition over time
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Fibers (AREA)
AT05445083T 2004-11-05 2005-10-26 Aluminiumoxidschicht mit kontrollierter textur ATE411408T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0402693A SE528432C2 (sv) 2004-11-05 2004-11-05 Med aluminiumoxid belagt skärverktygsskär samt metod för att framställa detta

Publications (1)

Publication Number Publication Date
ATE411408T1 true ATE411408T1 (de) 2008-10-15

Family

ID=33488165

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05445083T ATE411408T1 (de) 2004-11-05 2005-10-26 Aluminiumoxidschicht mit kontrollierter textur

Country Status (5)

Country Link
US (2) US7442432B2 (de)
EP (1) EP1655388B2 (de)
AT (1) ATE411408T1 (de)
DE (1) DE602005010365D1 (de)
SE (1) SE528432C2 (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE528432C2 (sv) * 2004-11-05 2006-11-14 Seco Tools Ab Med aluminiumoxid belagt skärverktygsskär samt metod för att framställa detta
SE528430C2 (sv) * 2004-11-05 2006-11-14 Seco Tools Ab Med aluminiumoxid belagt skärverktygsskär samt metod att framställa detta
SE528431C2 (sv) * 2004-11-05 2006-11-14 Seco Tools Ab Med aluminiumoxid belagt skärverktygsskär samt metod att framställa detta
DE602006002859D1 (de) * 2005-11-18 2008-11-06 Mitsubishi Materials Corp Hartstoffbeschichtetes Cermet-Schneidwerkzeug mit modifizierter alpha-Al2O3 Schicht
EP1905870A3 (de) 2006-09-27 2008-05-14 Seco Tools Ab Aluminiumoxidschicht mit verbesserter Textur
SE531938C2 (sv) * 2007-02-01 2009-09-15 Seco Tools Ab Belagt skärverktyg för fin till medelgrov svarvning av rostfria stål
SE532023C2 (sv) 2007-02-01 2009-09-29 Seco Tools Ab Texturhärdat alfa-aluminiumoxidbelagt skär för metallbearbetning
SE531929C2 (sv) 2007-07-13 2009-09-08 Seco Tools Ab Belagt hårdmetallskär för svarvning av stål eller rostfritt stål
SE531670C2 (sv) 2007-02-01 2009-06-30 Seco Tools Ab Texturerat alfa-aluminiumoxidbelagt skär för metallbearbetning
SE532047C2 (sv) 2008-03-07 2009-10-13 Seco Tools Ab Oxidbelagt skärverktygsskär för spånavskiljande bearbetning av gjutjärn
SE532048C2 (sv) 2008-03-07 2009-10-13 Seco Tools Ab Oxidbelagt skärverktygsskär för spånavskiljande bearbetning av stål
SE532049C2 (sv) 2008-03-07 2009-10-13 Seco Tools Ab Oxidbelagt skärverktygsskär för spånavskiljande bearbetning av stål
SE532050C2 (sv) 2008-03-07 2009-10-13 Seco Tools Ab Oxidbelagt skärverktygsskär för spånavskiljande bearbetning av stål
US8747990B2 (en) 2009-11-06 2014-06-10 Tungaloy Corporation Coated tool
EP2395126A1 (de) 2010-06-08 2011-12-14 Seco Tools AB Strukturierte Aluminiumschicht
EP2446988A1 (de) 2010-10-29 2012-05-02 Seco Tools AB Schneidwerkzeugeinsatz mit einer Alpha-Aluminid-Schicht enthaltend eine mit mehreren Komponenten Textur
KR101179255B1 (ko) * 2010-11-17 2012-09-03 한국야금 주식회사 절삭공구 공구용 피막
WO2012079769A1 (en) 2010-12-17 2012-06-21 Seco Tools Ab Coated cubic boron nitride tool for machining applications
JP5818159B2 (ja) * 2011-02-03 2015-11-18 三菱マテリアル株式会社 硬質被覆層がすぐれた耐チッピング性、耐欠損性を備える表面被覆切削工具
US8507082B2 (en) 2011-03-25 2013-08-13 Kennametal Inc. CVD coated polycrystalline c-BN cutting tools
ES2728705T3 (es) * 2011-09-16 2019-10-28 Walter Ag Herramienta de corte recubierta con alfa-alúmina diseñada con límites de grano
RU2675190C2 (ru) 2014-01-30 2018-12-17 Сандвик Интеллекчуал Проперти Аб Покрытый оксидом алюминия режущий инструмент
ES2586479T3 (es) 2014-01-30 2016-10-14 Walter Ag Herramienta de corte recubierta con alúmina con límites de grano de alúmina en zigzag
WO2015146918A1 (ja) * 2014-03-22 2015-10-01 京セラ株式会社 被覆工具および切削工具
US10369632B2 (en) * 2014-08-28 2019-08-06 Kyocera Corporation Coated tool
WO2016047685A1 (ja) * 2014-09-24 2016-03-31 京セラ株式会社 被覆工具
EP3848485A1 (de) 2020-01-10 2021-07-14 Sakari Ruppi Verbesserte alpha-aluminiumoxidschicht, die mit kontrollierten texturen abgeschieden wird
EP3848484A3 (de) 2020-01-10 2021-09-15 Sakari Ruppi Bei niedriger temperatur abgeschiedene geprägte aluminiumoxidschicht

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SE519339C2 (sv) 2000-11-22 2003-02-18 Sandvik Ab Skärverktyg belagt med aluminiumoxid och sätt att tillverka detsamma
SE522736C2 (sv) 2001-02-16 2004-03-02 Sandvik Ab Aluminiumoxidbelagt skärverktyg och metod för att framställa detsamma
US6689450B2 (en) 2001-03-27 2004-02-10 Seco Tools Ab Enhanced Al2O3-Ti(C,N) multi-coating deposited at low temperature
SE525581C2 (sv) 2002-05-08 2005-03-15 Seco Tools Ab Skär belagt med aluminiumoxid framställt med CVD
US6984636B2 (en) 2002-08-12 2006-01-10 Medical Research Council Mitochondrially targeted antioxidants
SE528431C2 (sv) 2004-11-05 2006-11-14 Seco Tools Ab Med aluminiumoxid belagt skärverktygsskär samt metod att framställa detta
SE528432C2 (sv) 2004-11-05 2006-11-14 Seco Tools Ab Med aluminiumoxid belagt skärverktygsskär samt metod för att framställa detta
SE528430C2 (sv) 2004-11-05 2006-11-14 Seco Tools Ab Med aluminiumoxid belagt skärverktygsskär samt metod att framställa detta

Also Published As

Publication number Publication date
US7914849B2 (en) 2011-03-29
SE528432C2 (sv) 2006-11-14
US20060199026A1 (en) 2006-09-07
EP1655388B1 (de) 2008-10-15
US7442432B2 (en) 2008-10-28
EP1655388B2 (de) 2011-03-16
SE0402693L (sv) 2006-05-06
DE602005010365D1 (de) 2008-11-27
SE0402693D0 (sv) 2004-11-05
EP1655388A3 (de) 2006-05-24
US20080311290A1 (en) 2008-12-18
EP1655388A2 (de) 2006-05-10

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