ATE416410T1 - Vorrichtung und verfahren zum regeln der temperatur in einem einspannsystem - Google Patents

Vorrichtung und verfahren zum regeln der temperatur in einem einspannsystem

Info

Publication number
ATE416410T1
ATE416410T1 AT06736186T AT06736186T ATE416410T1 AT E416410 T1 ATE416410 T1 AT E416410T1 AT 06736186 T AT06736186 T AT 06736186T AT 06736186 T AT06736186 T AT 06736186T AT E416410 T1 ATE416410 T1 AT E416410T1
Authority
AT
Austria
Prior art keywords
temperature
air
fluid
controlling
chuck
Prior art date
Application number
AT06736186T
Other languages
English (en)
Inventor
Norbert Elsdoerfer
Olga Mikulina
Abdellah Mourchid
Original Assignee
Temptronic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Temptronic Corp filed Critical Temptronic Corp
Application granted granted Critical
Publication of ATE416410T1 publication Critical patent/ATE416410T1/de

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/1919—Control of temperature characterised by the use of electric means characterised by the type of controller
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0602—Temperature monitoring

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Temperature (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Physical Vapour Deposition (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
AT06736186T 2005-03-04 2006-02-27 Vorrichtung und verfahren zum regeln der temperatur in einem einspannsystem ATE416410T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US65845205P 2005-03-04 2005-03-04
US66968505P 2005-04-08 2005-04-08

Publications (1)

Publication Number Publication Date
ATE416410T1 true ATE416410T1 (de) 2008-12-15

Family

ID=36686031

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06736186T ATE416410T1 (de) 2005-03-04 2006-02-27 Vorrichtung und verfahren zum regeln der temperatur in einem einspannsystem

Country Status (7)

Country Link
US (3) US20060196653A1 (de)
EP (1) EP1861759B1 (de)
JP (1) JP2008537322A (de)
AT (1) ATE416410T1 (de)
DE (1) DE602006004018D1 (de)
TW (1) TW200707149A (de)
WO (1) WO2006096361A2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5085534B2 (ja) 2005-04-27 2012-11-28 エイアー テスト システムズ 電子デバイスを試験するための装置
US7800382B2 (en) 2007-12-19 2010-09-21 AEHR Test Ststems System for testing an integrated circuit of a device and its method of use
US7848840B2 (en) * 2008-01-04 2010-12-07 Applied Materials, Inc. Method of controlling process parameters for semiconductor manufacturing apparatus
US8030957B2 (en) 2009-03-25 2011-10-04 Aehr Test Systems System for testing an integrated circuit of a device and its method of use
TWI402644B (zh) * 2010-01-15 2013-07-21 Moxa Inc 溫度增益控制裝置及其方法
US9335080B2 (en) * 2011-10-17 2016-05-10 Temptronic Corporation Temperature system having an impurity filter
US20140167795A1 (en) * 2012-12-14 2014-06-19 Texas Instruments Incorporated Active feedback silicon failure analysis die temperature control system
US12255123B2 (en) 2015-09-30 2025-03-18 Microfabrica Inc. Micro heat transfer arrays, micro cold plates, and thermal management systems for semiconductor devices, and methods for using and making such arrays, plates, and systems
TWI782508B (zh) 2016-01-08 2022-11-01 美商艾爾測試系統 電子測試器中裝置之熱控制的方法與系統
US20170248973A1 (en) * 2016-02-29 2017-08-31 Cascade Microtech, Inc. Probe systems and methods including active environmental control
EP3589965B1 (de) 2017-03-03 2023-12-06 AEHR Test Systems Elektroniktester
JP7132484B2 (ja) * 2018-03-22 2022-09-07 株式会社東京精密 プローバの冷却システム
KR102639158B1 (ko) * 2019-07-23 2024-02-22 삼성전자주식회사 웨이퍼 처리 장치 및 이를 이용한 웨이퍼 처리 방법
KR102949167B1 (ko) 2020-10-07 2026-04-06 에어 테스트 시스템즈 일렉트로닉스 테스터
KR102804411B1 (ko) * 2022-10-13 2025-05-07 세메스 주식회사 기판 처리 장치 및 기판 온도 제어 방법
CN121114724A (zh) 2022-12-30 2025-12-12 雅赫测试系统公司 电子测试器

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3710251A (en) * 1971-04-07 1973-01-09 Collins Radio Co Microelectric heat exchanger pedestal
US4056708A (en) * 1975-07-22 1977-11-01 Baxter Travenol Laboratories, Inc. Digital temperature controller
US4547977A (en) * 1984-05-21 1985-10-22 The Virtis Company, Inc. Freeze dryer with improved temperature control
US5205132A (en) * 1992-06-12 1993-04-27 Thermonics Incorporated Computer-implemented method and system for precise temperature control of a device under test
US5977785A (en) * 1996-05-28 1999-11-02 Burward-Hoy; Trevor Method and apparatus for rapidly varying the operating temperature of a semiconductor device in a testing environment
US6866094B2 (en) * 1997-12-31 2005-03-15 Temptronic Corporation Temperature-controlled chuck with recovery of circulating temperature control fluid
WO2000004396A1 (en) * 1998-07-14 2000-01-27 Schlumberger Technologies, Inc. Apparatus, method and system of liquid-based, wide range, fast response temperature cycling control of electronic devices
US6076803A (en) * 1999-03-12 2000-06-20 Snap-Tite Technologies, Inc. Axial flow solenoid valve
EP1356499A2 (de) * 2000-07-10 2003-10-29 Temptronic Corporation Scheibenhalter mit verschachtelten wärme- und kühlelementen
US6771086B2 (en) * 2002-02-19 2004-08-03 Lucas/Signatone Corporation Semiconductor wafer electrical testing with a mobile chiller plate for rapid and precise test temperature control

Also Published As

Publication number Publication date
WO2006096361A3 (en) 2007-04-19
EP1861759A2 (de) 2007-12-05
US20080188990A1 (en) 2008-08-07
TW200707149A (en) 2007-02-16
US20060196653A1 (en) 2006-09-07
EP1861759B1 (de) 2008-12-03
DE602006004018D1 (de) 2009-01-15
WO2006096361A2 (en) 2006-09-14
JP2008537322A (ja) 2008-09-11
US20080231304A1 (en) 2008-09-25

Similar Documents

Publication Publication Date Title
ATE416410T1 (de) Vorrichtung und verfahren zum regeln der temperatur in einem einspannsystem
EP4462867A4 (de) Verfahren zur steuerung des zellenwechselbetriebs und vorrichtung dafür
EP4029311A4 (de) Verfahren und vorrichtung zur strömungssteuerung
EP4317709A4 (de) Verfahren, vorrichtung und vorrichtung zur steuerung der strömungsverteilung für ein hydrauliksystem und hydrauliksystem
EP4306889A3 (de) Behandlungsanlage und verfahren zum behandeln von werkstücken
ATE403085T1 (de) Mikrovorrichtung zum handhaben von flüssigkeiten und verfahren zur deren verwendung
ATE319126T1 (de) Verfahren und vorrichtung zur regelung der temperatur des auslasses eines kernreaktors
CN103838274B (zh) 一种多路水冷温度控制系统及控制方法
MY149373A (en) Improved apparatus and method for temperature controlled processes
EP4167473C0 (de) Verfahren zur steuerung der fotovoltaischen stromerzeugung, steuerungsvorrichtung und fotovoltaisches stromerzeugungssystem
WO2010107302A3 (en) Flow controller assembly for microfluidic applications and system for performing a plurality of experiments in parallel
EP4283855C0 (de) Phasenverschobener vollbrückenwandler, steuerungsverfahren und vorrichtung dafür und medium
DK3689733T3 (da) System til at cirkulere luft gennem dobbeltrør for at levere gas og fremgangsmåde til luftcirkulation under anvendelse af samme
EP3997318C0 (de) Kraftwerkssystem und verfahren zum betrieb davon
EP4580325A4 (de) Flüssigkeitskühlsystem und steuerungsverfahren dafür
EP4245585C0 (de) Flüssigkeitskühlsystem, steuerungsverfahren und steuerungsvorrichtung dafür
MY196017A (en) Improved Fluid Flow in a Temperature Control Actuator for Semiconductor Device Test
EP4060484A4 (de) Verfahren und vorrichtung zur steuerung des betriebs eines anwendungsprogramms in mehreren systemen
EP4290631A4 (de) Batterieübertragungssystem, steuerungsverfahren, simulationsverfahren, vorrichtung, plc und medium
DE50309521D1 (de) Verfahren zur kombinatorischen Herstellung von Mischungen sowie seine Verwendung
MY194245A (en) Water treatment
EP4116068C0 (de) Vorrichtung zum 3d-drucken und verfahren zu ihrer steuerung
ATE517457T1 (de) Stromversorgungseinrichtung und verfahren für leitungsangeschlossenes brennstoffzellensystem
ATE487038T1 (de) Vorrichtung zur steuerung einer brennkraftmaschine
FI20096286A7 (fi) VOC-kaasujen käsittelylaitteisto

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties