ATE427075T1 - Mikrohergestellte elastomere ventil- und pumpsysteme - Google Patents

Mikrohergestellte elastomere ventil- und pumpsysteme

Info

Publication number
ATE427075T1
ATE427075T1 AT01989783T AT01989783T ATE427075T1 AT E427075 T1 ATE427075 T1 AT E427075T1 AT 01989783 T AT01989783 T AT 01989783T AT 01989783 T AT01989783 T AT 01989783T AT E427075 T1 ATE427075 T1 AT E427075T1
Authority
AT
Austria
Prior art keywords
elastomeric layer
elastomeric
forms
micro
pump systems
Prior art date
Application number
AT01989783T
Other languages
English (en)
Inventor
Marc Unger
Hou-Pu Chou
Todd Thorsen
Axel Scherer
Stephen Quake
Jian Liu
Mark Adams
Carl Hansen
Original Assignee
California Inst Of Techn
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/724,784 external-priority patent/US7144616B1/en
Priority claimed from US09/826,583 external-priority patent/US6899137B2/en
Application filed by California Inst Of Techn filed Critical California Inst Of Techn
Application granted granted Critical
Publication of ATE427075T1 publication Critical patent/ATE427075T1/de

Links

Landscapes

  • Micromachines (AREA)
  • Reciprocating Pumps (AREA)
  • Valve Housings (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
AT01989783T 2000-11-28 2001-11-28 Mikrohergestellte elastomere ventil- und pumpsysteme ATE427075T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/724,784 US7144616B1 (en) 1999-06-28 2000-11-28 Microfabricated elastomeric valve and pump systems
US09/826,583 US6899137B2 (en) 1999-06-28 2001-04-06 Microfabricated elastomeric valve and pump systems

Publications (1)

Publication Number Publication Date
ATE427075T1 true ATE427075T1 (de) 2009-04-15

Family

ID=40503982

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01989783T ATE427075T1 (de) 2000-11-28 2001-11-28 Mikrohergestellte elastomere ventil- und pumpsysteme

Country Status (3)

Country Link
JP (1) JP2009052744A (de)
AT (1) ATE427075T1 (de)
DE (1) DE60138218D1 (de)

Also Published As

Publication number Publication date
DE60138218D1 (de) 2009-05-14
JP2009052744A (ja) 2009-03-12

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Legal Events

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