ATE433275T1 - Geschichtetes zweidraht-heizelementsystem - Google Patents
Geschichtetes zweidraht-heizelementsystemInfo
- Publication number
- ATE433275T1 ATE433275T1 AT04812091T AT04812091T ATE433275T1 AT E433275 T1 ATE433275 T1 AT E433275T1 AT 04812091 T AT04812091 T AT 04812091T AT 04812091 T AT04812091 T AT 04812091T AT E433275 T1 ATE433275 T1 AT E433275T1
- Authority
- AT
- Austria
- Prior art keywords
- resistive layer
- temperature
- layered
- heater
- heating element
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B1/00—Details of electric heating devices
- H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
- H05B1/0227—Applications
- H05B1/023—Industrial applications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/26—Moulds
- B29C45/27—Sprue channels ; Runner channels or runner nozzles
- B29C45/2737—Heating or cooling means therefor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible
- H05B3/26—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible
- H05B3/28—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/40—Heating elements having the shape of rods or tubes
- H05B3/42—Heating elements having the shape of rods or tubes non-flexible
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/40—Heating elements having the shape of rods or tubes
- H05B3/42—Heating elements having the shape of rods or tubes non-flexible
- H05B3/46—Heating elements having the shape of rods or tubes non-flexible heating conductor mounted on insulating base
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/26—Moulds
- B29C45/27—Sprue channels ; Runner channels or runner nozzles
- B29C45/2737—Heating or cooling means therefor
- B29C2045/274—Thermocouples or heat sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/26—Moulds
- B29C45/27—Sprue channels ; Runner channels or runner nozzles
- B29C45/2737—Heating or cooling means therefor
- B29C2045/2743—Electrical heating element constructions
- B29C2045/2745—Film-like electrical heaters
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/002—Heaters using a particular layout for the resistive material or resistive elements
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/011—Heaters using laterally extending conductive material as connecting means
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/013—Heaters using resistive films or coatings
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/017—Manufacturing methods or apparatus for heaters
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/035—Electrical circuits used in resistive heating apparatus
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Control Of Resistance Heating (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Resistance Heating (AREA)
- Heat Treatment Of Strip Materials And Filament Materials (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Control Of Temperature (AREA)
- Injection Moulding Of Plastics Or The Like (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/719,327 US7196295B2 (en) | 2003-11-21 | 2003-11-21 | Two-wire layered heater system |
| PCT/US2004/039500 WO2005053360A2 (en) | 2003-11-21 | 2004-11-19 | Two-wire layered heater system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE433275T1 true ATE433275T1 (de) | 2009-06-15 |
Family
ID=34591294
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT04812091T ATE433275T1 (de) | 2003-11-21 | 2004-11-19 | Geschichtetes zweidraht-heizelementsystem |
Country Status (12)
| Country | Link |
|---|---|
| US (5) | US7196295B2 (de) |
| EP (1) | EP1692920B2 (de) |
| CN (1) | CN100556217C (de) |
| AT (1) | ATE433275T1 (de) |
| CA (1) | CA2546826C (de) |
| DE (1) | DE602004021420D1 (de) |
| ES (1) | ES2327934T5 (de) |
| MX (1) | MXPA06005752A (de) |
| PL (1) | PL1692920T3 (de) |
| PT (1) | PT1692920E (de) |
| TW (1) | TWI290004B (de) |
| WO (1) | WO2005053360A2 (de) |
Families Citing this family (119)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6731925B2 (en) * | 2001-10-24 | 2004-05-04 | Mouhamad Ahmad Naboulsi | Safety control system for vehicles |
| US7196295B2 (en) * | 2003-11-21 | 2007-03-27 | Watlow Electric Manufacturing Company | Two-wire layered heater system |
| US8536496B2 (en) * | 2004-09-15 | 2013-09-17 | Watlow Electric Manufacturing Company | Adaptable layered heater system |
| CA2582453C (en) * | 2004-09-30 | 2012-11-06 | Watlow Electric Manufacturing Company | Modular layered heater system |
| TWI252813B (en) * | 2004-11-10 | 2006-04-11 | Benq Corp | Fluid injector device with sensors and method of manufacturing the same |
| EP2042290B1 (de) * | 2005-04-07 | 2013-09-25 | Mold-Masters (2007) Limited | Spritzgießvorrichtung |
| WO2006113918A2 (en) * | 2005-04-21 | 2006-10-26 | Noble Fiber Technologies, Llc | Flexible electrically conductive circuits |
| US7459104B2 (en) * | 2005-07-18 | 2008-12-02 | Datec Coating Corporation | Low temperature fired, lead-free thick film heating element |
| KR100645688B1 (ko) * | 2005-08-30 | 2006-11-14 | 삼성에스디아이 주식회사 | 증착장치의 히터 및 이를 채용한 증발원 |
| US7280750B2 (en) * | 2005-10-17 | 2007-10-09 | Watlow Electric Manufacturing Company | Hot runner nozzle heater and methods of manufacture thereof |
| US20080188845A1 (en) * | 2007-02-01 | 2008-08-07 | Mcgreevy Francis T | Tissue fusion instrument and method to reduce the adhesion of tissue to its working surfaces |
| US9498277B2 (en) * | 2007-02-01 | 2016-11-22 | Conmed Corporation | Apparatus and method for rapid reliable electrothermal tissue fusion and simultaneous cutting |
| US9492220B2 (en) * | 2007-02-01 | 2016-11-15 | Conmed Corporation | Apparatus and method for rapid reliable electrothermal tissue fusion |
| US20080290542A1 (en) * | 2007-05-25 | 2008-11-27 | Mold-Masters (2007) Limited | Hot Runner Having Temperature Sensor for Controlling Nozzle Heater |
| US7800021B2 (en) * | 2007-06-30 | 2010-09-21 | Husky Injection Molding Systems Ltd. | Spray deposited heater element |
| US8557082B2 (en) * | 2007-07-18 | 2013-10-15 | Watlow Electric Manufacturing Company | Reduced cycle time manufacturing processes for thick film resistive devices |
| US8089337B2 (en) * | 2007-07-18 | 2012-01-03 | Watlow Electric Manufacturing Company | Thick film layered resistive device employing a dielectric tape |
| WO2009026667A1 (en) * | 2007-08-24 | 2009-03-05 | Husky Injection Molding Systems Ltd. | An apparatus for controlling melt flow in a melt distribution network |
| DE202007014964U1 (de) * | 2007-10-25 | 2009-02-26 | Günther Heisskanaltechnik Gmbh | Anschlusseinrichtung |
| US10159114B2 (en) * | 2008-03-18 | 2018-12-18 | Watlow Electric Manufacturing Company | Layered heater system with honeycomb core structure |
| US8061402B2 (en) * | 2008-04-07 | 2011-11-22 | Watlow Electric Manufacturing Company | Method and apparatus for positioning layers within a layered heater system |
| US20100025391A1 (en) * | 2008-07-31 | 2010-02-04 | Itherm Technologies, L.P. | Composite inductive heating assembly and method of heating and manufacture |
| WO2010045221A1 (en) * | 2008-10-13 | 2010-04-22 | Egc Enterprises, Incorporated | Temperature monitoring and control system for negative temperature coefficient heaters |
| US9345067B2 (en) * | 2008-10-13 | 2016-05-17 | ECG Operating Company LLC | Temperature monitoring and control system for negative temperature coefficient heaters |
| IT1392225B1 (it) * | 2008-12-12 | 2012-02-22 | Microglass S R L | Metodo di regolazione e di controllo automatico della potenza e della temperatura di riscaldamento di componenti riscaldanti destinati a riscaldare superfici od ambienti in particolare per apparecchiature di riscaldamento e per applicazioni di vario genere. |
| IT1392224B1 (it) * | 2008-12-12 | 2012-02-22 | Microglass S R L | Dispositivo di controllo elettronico per la regolazione automatica della potenza e della temperatura di riscaldamento di componenti riscaldanti destinati a riscaldare superfici od ambienti, in particolare per apparecchiature di riscaldamento e per applicazioni di vario genere. |
| WO2012012519A2 (en) | 2010-07-22 | 2012-01-26 | Watlow Electric Manufacturing Company | Combination fluid sensor system |
| US8840609B2 (en) | 2010-07-23 | 2014-09-23 | Conmed Corporation | Tissue fusion system and method of performing a functional verification test |
| US8927909B2 (en) * | 2010-10-11 | 2015-01-06 | Stmicroelectronics, Inc. | Closed loop temperature controlled circuit to improve device stability |
| US9062354B2 (en) * | 2011-02-24 | 2015-06-23 | General Electric Company | Surface treatment system, a surface treatment process and a system treated component |
| US8692605B2 (en) * | 2011-06-27 | 2014-04-08 | Mediatek Inc. | Receiving circuits for core circuits |
| CA2847437C (en) * | 2011-08-30 | 2017-03-14 | Watlow Electric Manufacturing Company | Thermal array system |
| CN103959900B (zh) | 2011-09-29 | 2016-08-24 | 沃特洛电气制造公司 | 高动态温度控制系统 |
| CN102361520B (zh) * | 2011-10-21 | 2013-11-27 | 无锡绿波新能源设备有限公司 | 温控反馈电加热板 |
| DE102012103120B4 (de) * | 2012-04-11 | 2025-04-30 | Günther Heisskanaltechnik Gmbh | Werkzeugeinsatz mit Schichtheizung, Formplatte mit einem solchen Werkzeugeinsatz und Verfahren zum Betrieb eines solchen Werkzeugeinsatzes |
| JP5536136B2 (ja) * | 2012-04-19 | 2014-07-02 | 株式会社九州日昌 | 恒温装置 |
| US9224626B2 (en) | 2012-07-03 | 2015-12-29 | Watlow Electric Manufacturing Company | Composite substrate for layered heaters |
| US20140034628A1 (en) * | 2012-08-06 | 2014-02-06 | Chien-Chou Chen | Temperature control module for electric blankets |
| EP3000281A1 (de) * | 2013-05-21 | 2016-03-30 | Heat Trace Limited | Elektrisches heizaggregat |
| DE102014218149A1 (de) * | 2013-09-10 | 2015-09-03 | Otto Männer Innovation GmbH | Hot runner nozzle with a segmented heater |
| US9716022B2 (en) | 2013-12-17 | 2017-07-25 | Lam Research Corporation | Method of determining thermal stability of a substrate support assembly |
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| US11540358B2 (en) * | 2015-05-29 | 2022-12-27 | Watlow Electric Manufacturing Company | Modular heater assembly with interchangeable auxiliary sensing junctions |
| US9888526B2 (en) * | 2015-07-30 | 2018-02-06 | Edwards Vacuum Llc | Detecting heater failure in a group of electric heaters in a process equipment heating system |
| EP3334480B1 (de) * | 2015-08-14 | 2024-04-17 | Mequ A/S | Infusionsflüssigkeitserwärmer |
| US10154542B2 (en) | 2015-10-19 | 2018-12-11 | Watlow Electric Manufacturing Company | Composite device with cylindrical anisotropic thermal conductivity |
| US9826574B2 (en) | 2015-10-28 | 2017-11-21 | Watlow Electric Manufacturing Company | Integrated heater and sensor system |
| US9812342B2 (en) | 2015-12-08 | 2017-11-07 | Watlow Electric Manufacturing Company | Reduced wire count heater array block |
| US10690414B2 (en) * | 2015-12-11 | 2020-06-23 | Lam Research Corporation | Multi-plane heater for semiconductor substrate support |
| US10975750B2 (en) | 2016-03-02 | 2021-04-13 | Watlow Electric Manufacturing Company | Heater-actuated flow bypass |
| US10247445B2 (en) | 2016-03-02 | 2019-04-02 | Watlow Electric Manufacturing Company | Heater bundle for adaptive control |
| CN108700336B (zh) | 2016-03-02 | 2021-09-17 | 沃特洛电气制造公司 | 用于加热流体流的裸加热元件 |
| US12560356B2 (en) | 2016-03-02 | 2026-02-24 | Watlow Electric Manufacturing Company | Heater bundles having virtual sensing for thermal gradient compensation |
| US10340171B2 (en) | 2016-05-18 | 2019-07-02 | Lam Research Corporation | Permanent secondary erosion containment for electrostatic chuck bonds |
| US10690705B2 (en) | 2016-06-15 | 2020-06-23 | Watlow Electric Manufacturing Company | Power converter for a thermal system |
| CN109416406B (zh) * | 2016-07-05 | 2023-06-20 | 深圳帧观德芯科技有限公司 | 具有不同热膨胀系数的接合材料 |
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| US11069553B2 (en) * | 2016-07-07 | 2021-07-20 | Lam Research Corporation | Electrostatic chuck with features for preventing electrical arcing and light-up and improving process uniformity |
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| CN109476059A (zh) * | 2016-10-17 | 2019-03-15 | 赫斯基注塑系统有限公司 | 加热侧浇口喷嘴的装置和方法 |
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| US10910195B2 (en) | 2017-01-05 | 2021-02-02 | Lam Research Corporation | Substrate support with improved process uniformity |
| EP3879564B1 (de) | 2017-06-15 | 2023-11-15 | Watlow Electric Manufacturing Company | System und verfahren zur leistungsregelung eines heizgerätes |
| MX391557B (es) | 2017-06-16 | 2025-03-21 | Watlow Electric Mfg | Control de distribucion de reactivos basado en temperatura. |
| CA3071112A1 (en) | 2017-07-27 | 2019-01-31 | Watlow Electric Manufacturing Company | Sensor system and integrated heater-sensor for measuring and controlling performance of a heater system |
| US11236422B2 (en) | 2017-11-17 | 2022-02-01 | Lam Research Corporation | Multi zone substrate support for ALD film property correction and tunability |
| CN212365925U (zh) * | 2017-11-21 | 2021-01-15 | 沃特洛电气制造公司 | 一种支撑基座 |
| KR20250007684A (ko) * | 2018-03-08 | 2025-01-14 | 와틀로 일렉트릭 매뉴팩츄어링 컴파니 | 히터 제어를 위한 제어 시스템 |
| DE202018101634U1 (de) * | 2018-03-23 | 2018-04-03 | Türk & Hillinger GmbH | Vorrichtung zur Umwandlung von elektrischer Energie in Wärme und elektrische Heizvorrichtung mit einer solchen Vorrichtung |
| DE102018108573A1 (de) * | 2018-04-11 | 2019-10-17 | Deutsches Zentrum für Luft- und Raumfahrt e.V. | Verfahren zum Betrieb eines thermischen Menschmodells, Elektronikbaugruppe und thermische Simulatorbaugruppe |
| JP7374922B2 (ja) | 2018-04-11 | 2023-11-07 | ワットロー・エレクトリック・マニュファクチャリング・カンパニー | 温度センシング電源ピン及び補助センシングジャンクションを備えた抵抗ヒータ |
| US10633742B2 (en) | 2018-05-07 | 2020-04-28 | Lam Research Foundation | Use of voltage and current measurements to control dual zone ceramic pedestals |
| CN118360588A (zh) | 2018-07-05 | 2024-07-19 | 朗姆研究公司 | 衬底处理系统中的衬底支撑件的动态温度控制 |
| US10872747B2 (en) | 2018-08-08 | 2020-12-22 | Lam Research Corporation | Controlling showerhead heating via resistive thermal measurements |
| US11183400B2 (en) | 2018-08-08 | 2021-11-23 | Lam Research Corporation | Progressive heating of components of substrate processing systems using TCR element-based heaters |
| JP7419353B2 (ja) | 2018-09-14 | 2024-01-22 | ワットロー・エレクトリック・マニュファクチャリング・カンパニー | 閉ループベークアウト制御のためのシステムおよび方法 |
| CN109862632A (zh) * | 2019-01-24 | 2019-06-07 | 广西桂仪科技有限公司 | 一种新能源汽车热管理的平板厚膜加热器及其制备工艺 |
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| US11240881B2 (en) | 2019-04-08 | 2022-02-01 | Watlow Electric Manufacturing Company | Method of manufacturing and adjusting a resistive heater |
| JP2022526020A (ja) * | 2019-04-09 | 2022-05-20 | ワットロー・エレクトリック・マニュファクチャリング・カンパニー | 温度制限装置を備えた熱システム |
| KR102848261B1 (ko) * | 2019-06-07 | 2025-08-27 | 와틀로 일렉트릭 매뉴팩츄어링 컴파니 | 전기 히터를 작동시키는 제어 시스템을 교정하는 시스템 및 방법 |
| TWI903074B (zh) * | 2019-11-04 | 2025-11-01 | 美商瓦特洛威電子製造公司 | 用於監測半導體處理系統之系統及方法 |
| JP7753235B2 (ja) | 2020-02-24 | 2025-10-14 | ワットロー・エレクトリック・マニュファクチャリング・カンパニー | ヒータを制御する制御システムの動的校正 |
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| KR20230004861A (ko) | 2020-05-02 | 2023-01-06 | 와틀로 일렉트릭 매뉴팩츄어링 컴파니 | 컴포넌트의 표면 상태 모니터링 방법 |
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-
2003
- 2003-11-21 US US10/719,327 patent/US7196295B2/en not_active Expired - Lifetime
-
2004
- 2004-11-19 CA CA2546826A patent/CA2546826C/en not_active Expired - Lifetime
- 2004-11-19 PT PT04812091T patent/PT1692920E/pt unknown
- 2004-11-19 WO PCT/US2004/039500 patent/WO2005053360A2/en not_active Ceased
- 2004-11-19 DE DE602004021420T patent/DE602004021420D1/de not_active Expired - Lifetime
- 2004-11-19 TW TW093135714A patent/TWI290004B/zh not_active IP Right Cessation
- 2004-11-19 PL PL04812091T patent/PL1692920T3/pl unknown
- 2004-11-19 AT AT04812091T patent/ATE433275T1/de not_active IP Right Cessation
- 2004-11-19 CN CNB2004800385649A patent/CN100556217C/zh not_active Expired - Lifetime
- 2004-11-19 EP EP04812091.9A patent/EP1692920B2/de not_active Expired - Lifetime
- 2004-11-19 ES ES04812091.9T patent/ES2327934T5/es not_active Expired - Lifetime
- 2004-11-19 MX MXPA06005752A patent/MXPA06005752A/es active IP Right Grant
-
2006
- 2006-09-07 US US11/517,434 patent/US7601935B2/en not_active Expired - Lifetime
-
2007
- 2007-02-13 US US11/705,884 patent/US20070138166A1/en not_active Abandoned
-
2012
- 2012-07-02 US US13/540,094 patent/US20120292308A1/en not_active Abandoned
-
2019
- 2019-11-25 US US16/694,252 patent/US20200092951A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| DE602004021420D1 (de) | 2009-07-16 |
| US20070000914A1 (en) | 2007-01-04 |
| PT1692920E (pt) | 2009-09-03 |
| ES2327934T5 (es) | 2018-02-27 |
| ES2327934T3 (es) | 2009-11-05 |
| CA2546826C (en) | 2011-02-15 |
| EP1692920A4 (de) | 2008-01-16 |
| EP1692920A2 (de) | 2006-08-23 |
| TWI290004B (en) | 2007-11-11 |
| US7196295B2 (en) | 2007-03-27 |
| EP1692920B1 (de) | 2009-06-03 |
| CN100556217C (zh) | 2009-10-28 |
| WO2005053360A3 (en) | 2007-04-19 |
| MXPA06005752A (es) | 2006-08-23 |
| US20200092951A1 (en) | 2020-03-19 |
| US20050109767A1 (en) | 2005-05-26 |
| EP1692920B2 (de) | 2017-11-22 |
| CN101077035A (zh) | 2007-11-21 |
| WO2005053360A2 (en) | 2005-06-09 |
| US7601935B2 (en) | 2009-10-13 |
| TW200529690A (en) | 2005-09-01 |
| CA2546826A1 (en) | 2005-06-09 |
| PL1692920T3 (pl) | 2009-12-31 |
| US20120292308A1 (en) | 2012-11-22 |
| US20070138166A1 (en) | 2007-06-21 |
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