ATE439944T1 - Gewellte kissenaufbereitungsvorrichtung und verwendungsverfahren dafür - Google Patents

Gewellte kissenaufbereitungsvorrichtung und verwendungsverfahren dafür

Info

Publication number
ATE439944T1
ATE439944T1 AT05711980T AT05711980T ATE439944T1 AT E439944 T1 ATE439944 T1 AT E439944T1 AT 05711980 T AT05711980 T AT 05711980T AT 05711980 T AT05711980 T AT 05711980T AT E439944 T1 ATE439944 T1 AT E439944T1
Authority
AT
Austria
Prior art keywords
disk
processing device
cushion processing
undulating
abrasive
Prior art date
Application number
AT05711980T
Other languages
English (en)
Inventor
Gary M Palmgren
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Application granted granted Critical
Publication of ATE439944T1 publication Critical patent/ATE439944T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/06—Devices or means for dressing or conditioning abrasive surfaces of profiled abrasive wheels
    • B24B53/07—Devices or means for dressing or conditioning abrasive surfaces of profiled abrasive wheels by means of forming tools having a shape complementary to that to be produced, e.g. blocks, profile rolls
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D9/00—Wheels or drums supporting in exchangeable arrangement a layer of flexible abrasive material, e.g. sandpaper
    • B24D9/08—Circular back-plates for carrying flexible material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/02—Devices or means for dressing or conditioning abrasive surfaces of plane surfaces on abrasive tools
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Secondary Cells (AREA)
  • Branch Pipes, Bends, And The Like (AREA)
AT05711980T 2004-03-09 2005-01-25 Gewellte kissenaufbereitungsvorrichtung und verwendungsverfahren dafür ATE439944T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/797,892 US6951509B1 (en) 2004-03-09 2004-03-09 Undulated pad conditioner and method of using same
PCT/US2005/002310 WO2005095059A1 (en) 2004-03-09 2005-01-25 Undulated pad conditioner and method of using same

Publications (1)

Publication Number Publication Date
ATE439944T1 true ATE439944T1 (de) 2009-09-15

Family

ID=34920155

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05711980T ATE439944T1 (de) 2004-03-09 2005-01-25 Gewellte kissenaufbereitungsvorrichtung und verwendungsverfahren dafür

Country Status (10)

Country Link
US (1) US6951509B1 (de)
EP (1) EP1722926B1 (de)
JP (1) JP4885838B2 (de)
KR (1) KR101127256B1 (de)
CN (1) CN100563931C (de)
AT (1) ATE439944T1 (de)
DE (1) DE602005016086D1 (de)
MY (1) MY135136A (de)
TW (1) TWI358743B (de)
WO (1) WO2005095059A1 (de)

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TWI290337B (en) * 2005-08-09 2007-11-21 Princo Corp Pad conditioner for conditioning a CMP pad and method of making the same
JP4791121B2 (ja) * 2005-09-22 2011-10-12 新日鉄マテリアルズ株式会社 研磨布用ドレッサー
JP5013202B2 (ja) * 2005-10-14 2012-08-29 旭硝子株式会社 研磨パッド用ツルーイング部材及び研磨パッドのツルーイング方法
WO2009158507A2 (en) * 2008-06-26 2009-12-30 Saint-Gobain Abrasives, Inc. Chemical mechanical planarization pad conditioner and method of forming
TW201016387A (en) * 2008-10-22 2010-05-01 jian-min Song CMP Pad Dressers with Hybridized abrasive surface and related methods
US8628597B2 (en) 2009-06-25 2014-01-14 3M Innovative Properties Company Method of sorting abrasive particles, abrasive particle distributions, and abrasive articles including the same
WO2017110156A1 (ja) * 2015-12-25 2017-06-29 ニューレジストン株式会社 研削装置および当該研削装置用の研削具
CN106078517A (zh) * 2016-08-03 2016-11-09 咏巨科技有限公司 一种抛光垫修整装置
US10471567B2 (en) * 2016-09-15 2019-11-12 Entegris, Inc. CMP pad conditioning assembly
CN106733792A (zh) * 2016-12-12 2017-05-31 北京中电科电子装备有限公司 一种用于半导体磨削台的清洁装置
JP7232763B2 (ja) * 2016-12-21 2023-03-03 スリーエム イノベイティブ プロパティズ カンパニー スペーサ及びウェハ平坦化システムを有するパッドコンディショナ
CN111372727B (zh) * 2017-11-21 2022-02-15 3M创新有限公司 涂覆磨盘及其制备和使用方法
US20200094375A1 (en) * 2018-09-26 2020-03-26 Cana Diamond Technology, LLC Multiple zone pad conditioning disk
US12325106B2 (en) * 2018-10-31 2025-06-10 Taiwan Semiconductor Manufacturing Company, Ltd. Device for conditioning chemical mechanical polishing
US11331767B2 (en) 2019-02-01 2022-05-17 Micron Technology, Inc. Pads for chemical mechanical planarization tools, chemical mechanical planarization tools, and related methods
US11524385B2 (en) * 2019-06-07 2022-12-13 Rohm And Haas Electronic Materials Cmp Holdings, Inc. CMP polishing pad with lobed protruding structures
GB2590511B (en) * 2019-11-20 2023-10-25 Best Engineered Surface Tech Llc Hybrid CMP conditioning head
CN116749080B (zh) * 2023-08-18 2023-11-14 浙江求是半导体设备有限公司 修整方法
CN117863092A (zh) * 2024-02-01 2024-04-12 杭州萧山昌宇五金机械有限公司 一种合金齿磨轮及其制造工艺

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US2990661A (en) 1958-07-10 1961-07-04 Donald P Hackett Backing disk for abrasive sheet
US3110140A (en) 1961-01-03 1963-11-12 Helen M Jacox Backing plate for abrasive disks
FR1596322A (de) * 1968-01-05 1970-06-15
US4652275A (en) 1985-08-07 1987-03-24 Minnesota Mining And Manufacturing Company Erodable agglomerates and abrasive products containing the same
US4799939A (en) 1987-02-26 1989-01-24 Minnesota Mining And Manufacturing Company Erodable agglomerates and abrasive products containing the same
US5014468A (en) 1989-05-05 1991-05-14 Norton Company Patterned coated abrasive for fine surface finishing
US5152917B1 (en) 1991-02-06 1998-01-13 Minnesota Mining & Mfg Structured abrasive article
US5437754A (en) 1992-01-13 1995-08-01 Minnesota Mining And Manufacturing Company Abrasive article having precise lateral spacing between abrasive composite members
MY114512A (en) 1992-08-19 2002-11-30 Rodel Inc Polymeric substrate with polymeric microelements
US5549962A (en) 1993-06-30 1996-08-27 Minnesota Mining And Manufacturing Company Precisely shaped particles and method of making the same
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JP3036348B2 (ja) 1994-03-23 2000-04-24 三菱マテリアル株式会社 ウェーハ研磨パッドのツルーイング装置
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Also Published As

Publication number Publication date
TW200539256A (en) 2005-12-01
US20050202760A1 (en) 2005-09-15
MY135136A (en) 2008-02-29
TWI358743B (en) 2012-02-21
US6951509B1 (en) 2005-10-04
JP2007528300A (ja) 2007-10-11
WO2005095059A1 (en) 2005-10-13
CN1929956A (zh) 2007-03-14
EP1722926A1 (de) 2006-11-22
DE602005016086D1 (de) 2009-10-01
KR101127256B1 (ko) 2012-03-29
EP1722926B1 (de) 2009-08-19
JP4885838B2 (ja) 2012-02-29
KR20060132717A (ko) 2006-12-21
CN100563931C (zh) 2009-12-02

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Legal Events

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