ATE445156T1 - Beschichtung für raue umgebungen und sensoren unter verwendung derselben - Google Patents
Beschichtung für raue umgebungen und sensoren unter verwendung derselbenInfo
- Publication number
- ATE445156T1 ATE445156T1 AT06751299T AT06751299T ATE445156T1 AT E445156 T1 ATE445156 T1 AT E445156T1 AT 06751299 T AT06751299 T AT 06751299T AT 06751299 T AT06751299 T AT 06751299T AT E445156 T1 ATE445156 T1 AT E445156T1
- Authority
- AT
- Austria
- Prior art keywords
- coating
- harsh environments
- sensors
- awd
- same
- Prior art date
Links
- 239000011248 coating agent Substances 0.000 title abstract 5
- 238000000576 coating method Methods 0.000 title abstract 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 abstract 1
- 238000005299 abrasion Methods 0.000 abstract 1
- 230000004888 barrier function Effects 0.000 abstract 1
- 229910052799 carbon Inorganic materials 0.000 abstract 1
- 229910052750 molybdenum Inorganic materials 0.000 abstract 1
- 239000011733 molybdenum Substances 0.000 abstract 1
- 229910052758 niobium Inorganic materials 0.000 abstract 1
- 239000010955 niobium Substances 0.000 abstract 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 229910052715 tantalum Inorganic materials 0.000 abstract 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 abstract 1
- 229910052720 vanadium Inorganic materials 0.000 abstract 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
- H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/32—Arrangements for suppressing undesired influences, e.g. temperature or pressure variations, compensating for signal noise
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/877—Conductive materials
Landscapes
- General Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Pathology (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Pinball Game Machines (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/US2006/015537 WO2007123539A1 (en) | 2006-04-20 | 2006-04-20 | Coating for harsh environments and sensors using same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE445156T1 true ATE445156T1 (de) | 2009-10-15 |
Family
ID=37640271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT06751299T ATE445156T1 (de) | 2006-04-20 | 2006-04-20 | Beschichtung für raue umgebungen und sensoren unter verwendung derselben |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US7800285B2 (de) |
| EP (1) | EP1891429B1 (de) |
| JP (1) | JP4913863B2 (de) |
| CN (1) | CN101180532A (de) |
| AT (1) | ATE445156T1 (de) |
| CH (1) | CH698809B1 (de) |
| DE (1) | DE602006009646D1 (de) |
| WO (1) | WO2007123539A1 (de) |
Families Citing this family (46)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007036473A1 (de) * | 2007-08-01 | 2009-02-05 | Testo Ag | Vorrichtung zum Messen des Zustands eines Messguts, insbesondere von Ölen oder Fetten |
| JP5314963B2 (ja) * | 2008-08-12 | 2013-10-16 | 富士フイルム株式会社 | 積層体、圧電素子、および液体吐出装置 |
| US7936110B2 (en) | 2009-03-14 | 2011-05-03 | Delaware Capital Formation, Inc. | Lateral excitation of pure shear modes |
| WO2011035147A2 (en) | 2009-09-18 | 2011-03-24 | Delaware Capital Formation, Inc. | Controlled compressional wave components of thickness shear mode multi-measurand sensors |
| US8664836B1 (en) * | 2009-09-18 | 2014-03-04 | Sand 9, Inc. | Passivated micromechanical resonators and related methods |
| JP2011103327A (ja) * | 2009-11-10 | 2011-05-26 | Seiko Epson Corp | 圧電素子、圧電アクチュエーター、液体噴射ヘッドおよび液体噴射装置 |
| US9169551B2 (en) | 2010-04-15 | 2015-10-27 | DePuy Synthes Products, Inc. | Coating for a CoCrMo substrate |
| KR101779776B1 (ko) * | 2010-04-15 | 2017-09-19 | 신세스 게엠바하 | 코발트크롬몰리브덴 기재를 위한 코팅 |
| JP5713615B2 (ja) * | 2010-09-17 | 2015-05-07 | 大和製衡株式会社 | ロードセル |
| CN103712872A (zh) * | 2012-09-28 | 2014-04-09 | 中国石油化工股份有限公司 | 一种评价油品的低温腐蚀性能的方法 |
| US9308090B2 (en) | 2013-03-11 | 2016-04-12 | DePuy Synthes Products, Inc. | Coating for a titanium alloy substrate |
| CN105203252A (zh) * | 2014-06-30 | 2015-12-30 | 罗斯蒙特公司 | 具有带类金刚石碳涂层的密封件的过程压力变送器 |
| JP2015096868A (ja) * | 2015-01-20 | 2015-05-21 | 大和製衡株式会社 | ロードセル |
| US10352904B2 (en) | 2015-10-26 | 2019-07-16 | Qorvo Us, Inc. | Acoustic resonator devices and methods providing patterned functionalization areas |
| CN108139364A (zh) | 2015-10-28 | 2018-06-08 | Qorvo美国公司 | 具有baw谐振器和通过衬底的流体通孔的传感器设备 |
| WO2017075354A1 (en) | 2015-10-30 | 2017-05-04 | Qorvo Us, Inc. | Fluidic device including baw resonators along opposing channel surfaces |
| US10393704B2 (en) | 2015-10-30 | 2019-08-27 | Qorvo Us, Inc. | Multi-frequency BAW mixing and sensing system and method |
| CN108474764B (zh) * | 2015-11-06 | 2021-12-10 | Qorvo美国公司 | 声学谐振器设备和提供气密性及表面功能化的制造方法 |
| WO2017083131A1 (en) * | 2015-11-09 | 2017-05-18 | Qorvo Us, Inc. | Baw sensor with enhanced surface area active region |
| US10267770B2 (en) | 2016-07-27 | 2019-04-23 | Qorvo Us, Inc. | Acoustic resonator devices and methods with noble metal layer for functionalization |
| JP7007362B2 (ja) | 2016-08-11 | 2022-01-24 | コーボ ユーエス,インコーポレイティド | 機能化材料を制御して配置した弾性共振装置 |
| CN107068847A (zh) * | 2017-04-27 | 2017-08-18 | 苏州国科昂卓医疗科技有限公司 | 一种压电器件及其制作方法 |
| US10796912B2 (en) | 2017-05-16 | 2020-10-06 | Lam Research Corporation | Eliminating yield impact of stochastics in lithography |
| EP3691830A4 (de) | 2017-10-04 | 2021-11-17 | Saint-Gobain Abrasives, Inc. | Schleifartikel und verfahren zur herstellung davon |
| DE102017222624A1 (de) * | 2017-12-13 | 2019-06-13 | SKF Aerospace France S.A.S | Beschichtete Lagerkomponente und Lager mit einer solchen Komponente |
| DE102018110189A1 (de) * | 2018-04-27 | 2019-10-31 | Endress+Hauser Conducta Gmbh+Co. Kg | Sensor der Prozessautomatisierungstechnik und Herstellung desselben |
| CN113039486B (zh) | 2018-11-14 | 2024-11-12 | 朗姆研究公司 | 可用于下一代光刻法中的硬掩模制作方法 |
| US12211691B2 (en) | 2018-12-20 | 2025-01-28 | Lam Research Corporation | Dry development of resists |
| CN109930120B (zh) * | 2018-12-20 | 2020-12-25 | 兰州空间技术物理研究所 | 一种空间活动零部件表面智能复合润滑薄膜及其制备方法 |
| TW202514246A (zh) | 2019-03-18 | 2025-04-01 | 美商蘭姆研究公司 | 基板處理方法與設備 |
| EP3948702A4 (de) | 2019-03-29 | 2023-07-26 | Saint-Gobain Abrasives, Inc. | Lösungen für leistungsschleifen |
| WO2020206382A1 (en) | 2019-04-03 | 2020-10-08 | Saint-Gobain Abrasives, Inc. | Abrasive article, abrasive system and method for using and forming same |
| US12062538B2 (en) | 2019-04-30 | 2024-08-13 | Lam Research Corporation | Atomic layer etch and selective deposition process for extreme ultraviolet lithography resist improvement |
| CN110265544A (zh) * | 2019-06-24 | 2019-09-20 | 京东方科技集团股份有限公司 | 压电传感器及制备方法、进行指纹识别的方法及电子设备 |
| TWI837391B (zh) | 2019-06-26 | 2024-04-01 | 美商蘭姆研究公司 | 利用鹵化物化學品的光阻顯影 |
| CN114651173B (zh) * | 2019-11-06 | 2024-10-11 | 联邦科学及工业研究组织 | 用于感测pH的多层电极 |
| SG11202108851RA (en) | 2020-01-15 | 2021-09-29 | Lam Res Corp | Underlayer for photoresist adhesion and dose reduction |
| CN115244664A (zh) | 2020-02-28 | 2022-10-25 | 朗姆研究公司 | 用于减少euv图案化缺陷的多层硬掩模 |
| CN111536909A (zh) * | 2020-04-20 | 2020-08-14 | 中物院成都科学技术发展中心 | 一种薄膜镀层质量及超声波紧固件的质量检测方法 |
| CN115702475A (zh) | 2020-06-22 | 2023-02-14 | 朗姆研究公司 | 用于含金属光致抗蚀剂沉积的表面改性 |
| EP4078292A4 (de) | 2020-07-07 | 2023-11-22 | Lam Research Corporation | Integrierte trockenverfahren zur strukturierung von fotolackmustern mittels strahlung |
| US20230107357A1 (en) | 2020-11-13 | 2023-04-06 | Lam Research Corporation | Process tool for dry removal of photoresist |
| JP7681106B2 (ja) | 2020-12-08 | 2025-05-21 | ラム リサーチ コーポレーション | 有機蒸気によるフォトレジストの現像 |
| KR102725782B1 (ko) | 2022-07-01 | 2024-11-05 | 램 리써치 코포레이션 | 에칭 정지 억제 (etch stop deterrence) 를 위한 금속 옥사이드 기반 포토레지스트의 순환적 현상 |
| US12474640B2 (en) | 2023-03-17 | 2025-11-18 | Lam Research Corporation | Integration of dry development and etch processes for EUV patterning in a single process chamber |
| JP7852072B2 (ja) | 2023-07-27 | 2026-04-27 | ラム リサーチ コーポレーション | 金属含有フォトレジストのためのオールインワン乾式現像 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9001833D0 (en) * | 1990-01-26 | 1990-03-28 | De Beers Ind Diamond | Method of bonding a diamond film to a substrate |
| US5440189A (en) * | 1991-09-30 | 1995-08-08 | Sumitomo Electric Industries, Ltd. | Surface acoustic wave device |
| JPH06245754A (ja) * | 1993-02-19 | 1994-09-06 | Terumo Corp | 塩基配列読み取り装置 |
| US5482602A (en) * | 1993-11-04 | 1996-01-09 | United Technologies Corporation | Broad-beam ion deposition coating methods for depositing diamond-like-carbon coatings on dynamic surfaces |
| US5880552A (en) * | 1997-05-27 | 1999-03-09 | The United States Of America As Represented By The Secretary Of The Navy | Diamond or diamond like carbon coated chemical sensors and a method of making same |
| US6394945B1 (en) * | 1997-12-22 | 2002-05-28 | Mds (Canada), Inc. | Radioactively coated devices |
| US6320295B1 (en) * | 1998-11-18 | 2001-11-20 | Mcgill Robert Andrew | Diamond or diamond like carbon coated chemical sensors and a method of making same |
| DE10206480B4 (de) * | 2001-02-16 | 2005-02-10 | Leibniz-Institut für Festkörper- und Werkstoffforschung e.V. | Akustisches Oberflächenwellenbauelement |
| JP2003172737A (ja) * | 2001-12-07 | 2003-06-20 | Toyo Kohan Co Ltd | 固体支持体、基体、バイオセンサ、およびそれらを用いた生体物質の解析方法 |
| JP3953921B2 (ja) * | 2002-09-10 | 2007-08-08 | 日本プレーテック株式会社 | ダイヤモンドqcmの作製方法及びそのダイヤモンドqcm |
| DE10302633B4 (de) * | 2003-01-23 | 2013-08-22 | Epcos Ag | SAW-Bauelement mit verbessertem Temperaturgang |
| US7204128B1 (en) * | 2005-10-05 | 2007-04-17 | James Z T Liu | Engine wear and oil quality sensor |
| US20070228876A1 (en) * | 2006-03-31 | 2007-10-04 | Chien-Min Sung | Diamond Frequency Control Devices and Associated Methods |
| JP2009534651A (ja) * | 2006-04-20 | 2009-09-24 | ヴェクトロン インターナショナル,インク | 高圧環境用の電気音響センサ |
-
2006
- 2006-04-20 JP JP2009506471A patent/JP4913863B2/ja not_active Expired - Fee Related
- 2006-04-20 CN CNA2006800179941A patent/CN101180532A/zh active Pending
- 2006-04-20 WO PCT/US2006/015537 patent/WO2007123539A1/en not_active Ceased
- 2006-04-20 EP EP06751299A patent/EP1891429B1/de not_active Expired - Lifetime
- 2006-04-20 US US11/814,167 patent/US7800285B2/en not_active Expired - Fee Related
- 2006-04-20 DE DE602006009646T patent/DE602006009646D1/de not_active Expired - Lifetime
- 2006-04-20 AT AT06751299T patent/ATE445156T1/de active
- 2006-04-20 CH CH00065/08A patent/CH698809B1/de not_active IP Right Cessation
-
2010
- 2010-08-12 US US12/855,661 patent/US20100304012A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| CN101180532A (zh) | 2008-05-14 |
| CH698809B1 (de) | 2009-10-30 |
| EP1891429A1 (de) | 2008-02-27 |
| WO2007123539A1 (en) | 2007-11-01 |
| EP1891429B1 (de) | 2009-10-07 |
| US7800285B2 (en) | 2010-09-21 |
| JP2009534652A (ja) | 2009-09-24 |
| US20100304012A1 (en) | 2010-12-02 |
| JP4913863B2 (ja) | 2012-04-11 |
| DE602006009646D1 (de) | 2009-11-19 |
| US20100038997A1 (en) | 2010-02-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| ATE445156T1 (de) | Beschichtung für raue umgebungen und sensoren unter verwendung derselben | |
| WO2008067386A3 (en) | Piezoelectric microcantilever sensors for biosensing | |
| US20090020001A1 (en) | Digital capacitive membrane transducer | |
| Littrell | High performance piezoelectric MEMS microphones | |
| WO2008051278A3 (en) | Substrate penetrating acoustic sensor | |
| WO2007030756A3 (en) | Passive saw-based hydrogen sensor and system | |
| WO2007087328A3 (en) | Self-exciting, self-sensing piezoelectric cantilever sensor | |
| JP6081476B2 (ja) | 自動車のオープニングパネルにおける作用をトリガーするためのセンサ | |
| WO2006138697A3 (en) | Integrated displacement sensors for probe microscopy and force spectroscopy | |
| SG10201900469PA (en) | Thin-film resistive-based sensor | |
| WO2005041011A3 (en) | Touch input sensing device | |
| WO2005116813A3 (en) | Multiple region vibration-sensing touch sensor | |
| WO2007084516A3 (en) | Membranes for an analyte sensor | |
| WO2008149570A1 (ja) | 音響センサ | |
| US9967662B2 (en) | Microphone device | |
| EP2150075A3 (de) | Elektronische Vorrichtung und elektroakustischer Wandler | |
| WO2006065770A3 (en) | Corrosion sensor and method of monitoring corrosion | |
| WO2007087179A3 (en) | Magnetic sensor with compensation | |
| KR101012268B1 (ko) | 멤브레인 구조를 갖는 촉각센서 및 제작방법 | |
| WO2008030844A3 (en) | Method and system for determining the direction of fluid flow | |
| ATE512553T1 (de) | GEHÄUSE FÜR MIKROFONARRAYS UND MEHRSENSORANORDNUNGEN FÜR IHRE GRÖßEN-OPTIMIERUNG | |
| WO2008120511A1 (ja) | 液中物質検出センサー | |
| US20230194375A1 (en) | Sensor device | |
| JP2010133775A (ja) | 微小差圧測定用の差圧センサ | |
| DE50309050D1 (de) | Erfassen eines umwelteinflusses durch änderung der leitfähigkeit der sensorschicht eines piezoelektrischen sensors |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| UEP | Publication of translation of european patent specification |
Ref document number: 1891429 Country of ref document: EP |