ATE449457T1 - Dünnfilm-körper-oberflächenwellenfilter des leitertyps - Google Patents

Dünnfilm-körper-oberflächenwellenfilter des leitertyps

Info

Publication number
ATE449457T1
ATE449457T1 AT04770075T AT04770075T ATE449457T1 AT E449457 T1 ATE449457 T1 AT E449457T1 AT 04770075 T AT04770075 T AT 04770075T AT 04770075 T AT04770075 T AT 04770075T AT E449457 T1 ATE449457 T1 AT E449457T1
Authority
AT
Austria
Prior art keywords
resonators
series
thin film
body surface
wave filter
Prior art date
Application number
AT04770075T
Other languages
English (en)
Inventor
Robert F Milsom
Hans Peter Loebl
Original Assignee
Nxp Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nxp Bv filed Critical Nxp Bv
Application granted granted Critical
Publication of ATE449457T1 publication Critical patent/ATE449457T1/de

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/564—Monolithic crystal filters implemented with thin-film techniques
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/566—Electric coupling means therefor
    • H03H9/568—Electric coupling means therefor consisting of a ladder configuration

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
AT04770075T 2003-10-06 2004-09-24 Dünnfilm-körper-oberflächenwellenfilter des leitertyps ATE449457T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP03103695 2003-10-06
PCT/IB2004/051851 WO2005034349A1 (en) 2003-10-06 2004-09-24 Ladder-type thin-film bulk acoustic wave filter

Publications (1)

Publication Number Publication Date
ATE449457T1 true ATE449457T1 (de) 2009-12-15

Family

ID=34400560

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04770075T ATE449457T1 (de) 2003-10-06 2004-09-24 Dünnfilm-körper-oberflächenwellenfilter des leitertyps

Country Status (8)

Country Link
US (1) US7474174B2 (de)
EP (1) EP1673860B1 (de)
JP (1) JP4719683B2 (de)
KR (1) KR101323447B1 (de)
CN (1) CN100492902C (de)
AT (1) ATE449457T1 (de)
DE (1) DE602004024224D1 (de)
WO (1) WO2005034349A1 (de)

Families Citing this family (74)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7466213B2 (en) * 2003-10-06 2008-12-16 Nxp B.V. Resonator structure and method of producing it
JP4877966B2 (ja) * 2006-03-08 2012-02-15 日本碍子株式会社 圧電薄膜デバイス
US7639103B2 (en) * 2006-06-26 2009-12-29 Panasonic Corporation Piezoelectric filter, antenna duplexer, and communications apparatus employing piezoelectric resonator
WO2008090651A1 (ja) * 2007-01-24 2008-07-31 Murata Manufacturing Co., Ltd. 圧電共振子及び圧電フィルタ
US7786826B2 (en) * 2007-10-12 2010-08-31 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Apparatus with acoustically coupled BAW resonators and a method for matching impedances
JPWO2009066380A1 (ja) * 2007-11-21 2011-03-31 太陽誘電株式会社 フィルタ、それを用いたデュプレクサおよびそのデュプレクサを用いた通信機
FI20106063A7 (fi) 2010-10-14 2012-06-08 Valtion Teknillinen Tutkimuskeskus Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin
CN102055431A (zh) * 2010-11-16 2011-05-11 深圳市晶峰晶体科技有限公司 一种甚低频小体积特种石英晶体滤波器及其实现方法
US9473106B2 (en) * 2011-06-21 2016-10-18 Georgia Tech Research Corporation Thin-film bulk acoustic wave delay line
FI124732B (en) * 2011-11-11 2014-12-31 Teknologian Tutkimuskeskus Vtt Lateral connected bulk wave filter with improved passband characteristics
US8954008B2 (en) 2013-01-29 2015-02-10 Medtronic, Inc. Medical device communication system and method
KR20220108210A (ko) * 2014-06-06 2022-08-02 어쿠스티스, 인크. 결정 음향 공진기 디바이스를 가지고 구성된 집적 회로
US9537465B1 (en) 2014-06-06 2017-01-03 Akoustis, Inc. Acoustic resonator device with single crystal piezo material and capacitor on a bulk substrate
US9571061B2 (en) 2014-06-06 2017-02-14 Akoustis, Inc. Integrated circuit configured with two or more single crystal acoustic resonator devices
JP2016195305A (ja) * 2015-03-31 2016-11-17 太陽誘電株式会社 弾性波フィルタ、分波器、およびモジュール
CN105427570A (zh) * 2015-12-29 2016-03-23 中电科技德清华莹电子有限公司 一种通用电抗型传感元件用无源无线遥测接口芯片
US10523180B2 (en) 2016-03-11 2019-12-31 Akoustis, Inc. Method and structure for single crystal acoustic resonator devices using thermal recrystallization
US10355659B2 (en) 2016-03-11 2019-07-16 Akoustis, Inc. Piezoelectric acoustic resonator manufactured with piezoelectric thin film transfer process
US10615773B2 (en) 2017-09-11 2020-04-07 Akoustis, Inc. Wireless communication infrastructure system configured with a single crystal piezo resonator and filter structure
US11316496B2 (en) 2016-03-11 2022-04-26 Akoustis, Inc. Method and structure for high performance resonance circuit with single crystal piezoelectric capacitor dielectric material
US11411169B2 (en) 2017-10-16 2022-08-09 Akoustis, Inc. Methods of forming group III piezoelectric thin films via removal of portions of first sputtered material
US11832521B2 (en) 2017-10-16 2023-11-28 Akoustis, Inc. Methods of forming group III-nitride single crystal piezoelectric thin films using ordered deposition and stress neutral template layers
US11424728B2 (en) 2016-03-11 2022-08-23 Akoustis, Inc. Piezoelectric acoustic resonator manufactured with piezoelectric thin film transfer process
US10110189B2 (en) 2016-11-02 2018-10-23 Akoustis, Inc. Structure and method of manufacture for acoustic resonator or filter devices using improved fabrication conditions and perimeter structure modifications
US11689186B2 (en) 2016-03-11 2023-06-27 Akoustis, Inc. 5.5 GHz Wi-Fi 5G coexistence acoustic wave resonator RF filter circuit
US11063576B2 (en) 2016-03-11 2021-07-13 Akoustis, Inc. Front end module for 5.6 GHz Wi-Fi acoustic wave resonator RF filter circuit
US10217930B1 (en) 2016-03-11 2019-02-26 Akoustis, Inc. Method of manufacture for single crystal acoustic resonator devices using micro-vias
US11581866B2 (en) 2016-03-11 2023-02-14 Akoustis, Inc. RF acoustic wave resonators integrated with high electron mobility transistors including a shared piezoelectric/buffer layer and methods of forming the same
US20210257993A1 (en) 2016-03-11 2021-08-19 Akoustis, Inc. Acoustic wave resonator rf filter circuit device
US11394451B2 (en) 2016-03-11 2022-07-19 Akoustis, Inc. Front end module for 6.1 GHz Wi-Fi acoustic wave resonator RF filter circuit
US10985732B2 (en) 2016-03-11 2021-04-20 Akoustis, Inc. 5.6 GHz Wi-Fi acoustic wave resonator RF filter circuit
US11451213B2 (en) 2016-03-11 2022-09-20 Akoustis, Inc. 5G n79 Wi-Fi acoustic triplexer circuit
US11558023B2 (en) 2016-03-11 2023-01-17 Akoustis, Inc. Method for fabricating an acoustic resonator device
US10979026B2 (en) 2016-03-11 2021-04-13 Akoustis, Inc. 5.5 GHz Wi-fi 5G coexistence acoustic wave resonator RF filter circuit
US10979025B2 (en) 2016-03-11 2021-04-13 Akoustis, Inc. 5G band n79 acoustic wave resonator RF filter circuit
US11418169B2 (en) 2016-03-11 2022-08-16 Akoustis, Inc. 5G n41 2.6 GHz band acoustic wave resonator RF filter circuit
US10581398B2 (en) 2016-03-11 2020-03-03 Akoustis, Inc. Method of manufacture for single crystal acoustic resonator devices using micro-vias
US10979024B2 (en) 2016-03-11 2021-04-13 Akoustis, Inc. 5.2 GHz Wi-Fi coexistence acoustic wave resonator RF filter circuit
US11356071B2 (en) 2016-03-11 2022-06-07 Akoustis, Inc. Piezoelectric acoustic resonator with improved TCF manufactured with piezoelectric thin film transfer process
US10673513B2 (en) 2016-03-11 2020-06-02 Akoustis, Inc. Front end module for 5.2 GHz Wi-Fi acoustic wave resonator RF filter circuit
US11411168B2 (en) 2017-10-16 2022-08-09 Akoustis, Inc. Methods of forming group III piezoelectric thin films via sputtering
US11184079B2 (en) 2016-03-11 2021-11-23 Akoustis, Inc. Front end module for 5.5 GHz Wi-Fi acoustic wave resonator RF filter circuit
US10979022B2 (en) 2016-03-11 2021-04-13 Akoustis, Inc. 5.2 GHz Wi-Fi acoustic wave resonator RF filter circuit
US11736177B2 (en) 2016-03-11 2023-08-22 Akoustis Inc. Front end modules for 5.6 GHz and 6.6 GHz Wi-Fi acoustic wave resonator RF filter circuits
US11476825B2 (en) 2016-03-11 2022-10-18 Akoustis, Inc. 5.5 GHz Wi-Fi coexistence acoustic wave resonator RF filter circuit
US10979023B2 (en) 2016-03-11 2021-04-13 Akoustis, Inc. 5.9 GHz c-V2X and DSRC acoustic wave resonator RF filter circuit
US11070184B2 (en) 2016-03-11 2021-07-20 Akoustis, Inc. Piezoelectric acoustic resonator manufactured with piezoelectric thin film transfer process
US11677372B2 (en) 2016-03-11 2023-06-13 Akoustis, Inc. Piezoelectric acoustic resonator with dielectric protective layer manufactured with piezoelectric thin film transfer process
US11683021B2 (en) 2016-03-11 2023-06-20 Akoustis, Inc. 4.5G 3.55-3.7 GHz band bulk acoustic wave resonator RF filter circuit
US11177868B2 (en) 2016-03-11 2021-11-16 Akoustis, Inc. Front end module for 6.5 GHz Wi-Fi acoustic wave resonator RF filter circuit
US11895920B2 (en) 2016-08-15 2024-02-06 Akoustis, Inc. Methods of forming group III piezoelectric thin films via removal of portions of first sputtered material
DE112017004855B4 (de) * 2016-09-28 2025-05-22 Murata Manufacturing Co., Ltd. Abzweigfilter
US10431580B1 (en) 2017-01-12 2019-10-01 Akoustis, Inc. Monolithic single chip integrated radio frequency front end module configured with single crystal acoustic filter devices
US11856858B2 (en) 2017-10-16 2023-12-26 Akoustis, Inc. Methods of forming doped crystalline piezoelectric thin films via MOCVD and related doped crystalline piezoelectric thin films
CN111226393B (zh) * 2017-10-24 2023-10-24 Rf360新加坡私人有限公司 Rf滤波器和设计rf滤波器的方法
KR102722507B1 (ko) * 2017-12-07 2024-10-29 인피니언 테크놀로지스 아게 음향적으로 결합된 공진기 노치 및 대역 통과 필터
JP7205497B2 (ja) * 2018-02-02 2023-01-17 株式会社大真空 圧電フィルタ
US11557716B2 (en) 2018-02-20 2023-01-17 Akoustis, Inc. Method and structure of single crystal electronic devices with enhanced strain interface regions by impurity introduction
DE112019004304T5 (de) 2018-08-27 2021-05-27 Akoustis, Inc. Akustische volumenwellen-resonator filter-vorrichtungen hoher leistung
CN111342808B (zh) * 2018-12-18 2023-08-15 天津大学 基于元素掺杂缩小有效面积的谐振器、滤波器和电子设备
US11618968B2 (en) 2020-02-07 2023-04-04 Akoustis, Inc. Apparatus including horizontal flow reactor with a central injector column having separate conduits for low-vapor pressure metalorganic precursors and other precursors for formation of piezoelectric layers on wafers
US12102010B2 (en) 2020-03-05 2024-09-24 Akoustis, Inc. Methods of forming films including scandium at low temperatures using chemical vapor deposition to provide piezoelectric resonator devices and/or high electron mobility transistor devices
KR102827676B1 (ko) 2020-04-03 2025-07-02 삼성전기주식회사 체적 음향 공진기 및 탄성파 필터 장치
US11496108B2 (en) 2020-08-17 2022-11-08 Akoustis, Inc. RF BAW resonator filter architecture for 6.5GHz Wi-Fi 6E coexistence and other ultra-wideband applications
CN112187212B (zh) * 2020-09-18 2021-12-07 杭州星阖科技有限公司 一种声学谐振器组件及滤波器
US11901880B2 (en) 2021-01-18 2024-02-13 Akoustis, Inc. 5 and 6 GHz Wi-Fi coexistence acoustic wave resonator RF diplexer circuit
US12255637B2 (en) 2021-01-18 2025-03-18 Akoustis, Inc. 5.1-7.1GHz Wi-Fi6E coexistence acoustic wave resonator RF diplexer circuit
CN112511131B (zh) * 2021-02-05 2021-05-25 成都频岢微电子有限公司 一种具有高隔离度和高通频带低频侧高陡峭度的双工器
CN113644895B (zh) * 2021-06-30 2024-02-23 中国电子科技集团公司第十三研究所 薄膜体声波谐振器滤波器及滤波器组件
CN113612464B (zh) * 2021-06-30 2023-06-09 中国电子科技集团公司第十三研究所 阶梯型结构压电滤波器
US12388417B2 (en) 2021-09-30 2025-08-12 Skyworks Solutions, Inc. Acoustic wave filter with series resonator for filter steepness
TW202316794A (zh) 2021-10-05 2023-04-16 南韓商三星電機股份有限公司 體聲波共振器濾波器、體聲波共振器封裝及體聲波共振器
KR102762894B1 (ko) 2021-10-05 2025-02-07 삼성전기주식회사 체적 음향 공진기 필터 및 체적 음향 공진기 패키지
KR102687999B1 (ko) 2021-12-29 2024-07-24 (주)와이팜 Saw 공진기 설계방법, saw 필터 및 그 설계방법, 이를 기록한 컴퓨팅 장치에서 판독 가능한 기록매체

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5231327A (en) * 1990-12-14 1993-07-27 Tfr Technologies, Inc. Optimized piezoelectric resonator-based networks
US5260675A (en) * 1991-04-12 1993-11-09 Ngk Spark Plug Co., Ltd. Ladder-type electric filter device
JPH11330902A (ja) * 1998-05-11 1999-11-30 Murata Mfg Co Ltd ラダー型圧電フィルタ
JP3319393B2 (ja) * 1998-06-26 2002-08-26 株式会社村田製作所 ラダー型圧電フィルタ
US5942958A (en) * 1998-07-27 1999-08-24 Tfr Technologies, Inc. Symmetrical piezoelectric resonator filter
US6262637B1 (en) * 1999-06-02 2001-07-17 Agilent Technologies, Inc. Duplexer incorporating thin-film bulk acoustic resonators (FBARs)
US6323744B1 (en) * 2000-02-04 2001-11-27 Agere Systems Guardian Corp. Grounding of TFR ladder filters
KR20010000084A (ko) * 2000-02-22 2001-01-05 안병엽 수평형 공진기 및 그 제조 방법
GB0014630D0 (en) * 2000-06-16 2000-08-09 Koninkl Philips Electronics Nv Bulk accoustic wave filter
GB0014963D0 (en) * 2000-06-20 2000-08-09 Koninkl Philips Electronics Nv A bulk acoustic wave device
DE10058339A1 (de) * 2000-11-24 2002-06-06 Infineon Technologies Ag Bulk-Acoustic-Wave-Filter
JP2003023337A (ja) * 2001-07-06 2003-01-24 Murata Mfg Co Ltd 圧電共振子およびフィルタ
JP3954395B2 (ja) * 2001-10-26 2007-08-08 富士通株式会社 圧電薄膜共振子、フィルタ、および圧電薄膜共振子の製造方法
JP2003283292A (ja) * 2002-01-15 2003-10-03 Murata Mfg Co Ltd 圧電共振子およびそれを用いたフィルタ・デュプレクサ・通信装置

Also Published As

Publication number Publication date
KR20060120007A (ko) 2006-11-24
WO2005034349A1 (en) 2005-04-14
DE602004024224D1 (de) 2009-12-31
KR101323447B1 (ko) 2013-10-29
EP1673860B1 (de) 2009-11-18
US20070120624A1 (en) 2007-05-31
EP1673860A1 (de) 2006-06-28
CN1864328A (zh) 2006-11-15
JP2007507958A (ja) 2007-03-29
JP4719683B2 (ja) 2011-07-06
US7474174B2 (en) 2009-01-06
CN100492902C (zh) 2009-05-27

Similar Documents

Publication Publication Date Title
ATE449457T1 (de) Dünnfilm-körper-oberflächenwellenfilter des leitertyps
JP2003198324A5 (de)
JP2002198765A5 (de)
ATE388521T1 (de) Akustisches volumenwellenfilter
WO2008008151A3 (en) Bulk acoustic wave filter with reduced nonlinear signal distortion
CN105940605B (zh) 弹性波装置
DE602004030968D1 (de) Leiternetzwerkfilter, Abzweigfilter und Kommunikationsgerät
EP1464115A4 (de) Hauptteil-oberflächenwellenresonator mit zwei piezoelektrischen schichten als symmetrierglied in filtern und duplexern
KR101793055B1 (ko) 래더형 필터
ATE518303T1 (de) Duplexer und isolierungsverfahren für rx-band und tx-band
ATE359687T1 (de) Audiosignalgenerierung
JPH08242140A (ja) Ｓａｗフィルタ
KR102656805B1 (ko) 탄성파 필터
WO2004093328A3 (en) Bidirectional distributed amplifier
EP2043260A3 (de) Elastischer Wellenfilter
EP1330027A3 (de) Oberflächenwellenfilteranordnung mit integriertem Kommunikationsgerät
TW200614705A (en) Signal transmission circuit
EP1289135A3 (de) Akustische Oberflächenwellenvorrichtung
WO2008096514A1 (ja) 弾性波フィルタ装置
ATE434865T1 (de) Oberflächenwellenfilter mit reaktanzelementen
DE60104121D1 (de) Frequenzmultiplexer
EP1361658A3 (de) Frequenzmultiplexer mit einer Übertragungsleitung mit konzentrierten Elementen
KR101119619B1 (ko) 표면탄성파로 작동하는 전자소자
TW200602257A (en) Filter and transceiver
CN203504508U (zh) 用于移动电话的声表面波滤波器

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties