ATE453735T1 - Verfahren zur entfernung der verbundbeschichtung von einem keramischen substrat - Google Patents

Verfahren zur entfernung der verbundbeschichtung von einem keramischen substrat

Info

Publication number
ATE453735T1
ATE453735T1 AT04254708T AT04254708T ATE453735T1 AT E453735 T1 ATE453735 T1 AT E453735T1 AT 04254708 T AT04254708 T AT 04254708T AT 04254708 T AT04254708 T AT 04254708T AT E453735 T1 ATE453735 T1 AT E453735T1
Authority
AT
Austria
Prior art keywords
ceramic substrate
removal
composite coating
solution
sufficient time
Prior art date
Application number
AT04254708T
Other languages
English (en)
Inventor
Ronald Reginald Burgess
Ian Martin Davies
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Application granted granted Critical
Publication of ATE453735T1 publication Critical patent/ATE453735T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4407—Cleaning of reactor or reactor parts by using wet or mechanical methods
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/16—Acidic compositions
    • C23F1/20—Acidic compositions for etching aluminium or alloys thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/16—Acidic compositions
    • C23F1/26—Acidic compositions for etching refractory metals
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Structural Engineering (AREA)
  • Metallurgy (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Chemically Coating (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Manufacturing Of Printed Wiring (AREA)
AT04254708T 2003-08-19 2004-08-05 Verfahren zur entfernung der verbundbeschichtung von einem keramischen substrat ATE453735T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/643,409 US7097713B2 (en) 2003-08-19 2003-08-19 Method for removing a composite coating containing tantalum deposition and arc sprayed aluminum from ceramic substrates

Publications (1)

Publication Number Publication Date
ATE453735T1 true ATE453735T1 (de) 2010-01-15

Family

ID=34063460

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04254708T ATE453735T1 (de) 2003-08-19 2004-08-05 Verfahren zur entfernung der verbundbeschichtung von einem keramischen substrat

Country Status (7)

Country Link
US (1) US7097713B2 (de)
EP (1) EP1508629B1 (de)
CN (1) CN1598061B (de)
AT (1) ATE453735T1 (de)
DE (1) DE602004024850D1 (de)
SG (1) SG109558A1 (de)
TW (1) TWI357621B (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4653406B2 (ja) * 2004-03-10 2011-03-16 株式会社アルバック 水崩壊性Ａｌ複合材料、水崩壊性Ａｌ溶射膜、及び水崩壊性Ａｌ粉の製造方法、並びに成膜室用構成部材及び成膜材料の回収方法
US20050238807A1 (en) * 2004-04-27 2005-10-27 Applied Materials, Inc. Refurbishment of a coated chamber component
US7554052B2 (en) 2005-07-29 2009-06-30 Applied Materials, Inc. Method and apparatus for the application of twin wire arc spray coatings
US8061888B2 (en) 2006-03-17 2011-11-22 Barrick Gold Corporation Autoclave with underflow dividers
CN102686963B (zh) * 2009-10-28 2014-09-03 陶氏技术投资有限责任公司 干燥催化剂烘烤器传送带的装置及其使用方法
US8709537B2 (en) * 2010-10-22 2014-04-29 Applied Materials, Inc. Methods for enhancing tantalum filament life in hot wire chemical vapor deposition processes
US9212099B2 (en) * 2012-02-22 2015-12-15 Applied Materials, Inc. Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramics
CN106048543B (zh) * 2016-06-02 2018-08-03 泉州市依科达半导体致冷科技有限公司 半导体晶片表面真空镀膜工艺
CN114315428B (zh) * 2020-09-29 2024-03-08 航天特种材料及工艺技术研究所 一种去除多孔石英陶瓷透波材料锈渍的方法
CN115846252B (zh) * 2022-11-22 2024-05-14 富乐德科技发展（天津）有限公司 一种半导体行业用氧化铝陶瓷的清洗方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4971631A (en) 1988-03-07 1990-11-20 Bernard Lietaer Compositions and methods for cleaning hard surfaces
US5660640A (en) 1995-06-16 1997-08-26 Joray Corporation Method of removing sputter deposition from components of vacuum deposition equipment
US6494960B1 (en) 1998-04-27 2002-12-17 General Electric Company Method for removing an aluminide coating from a substrate
US6296716B1 (en) 1999-10-01 2001-10-02 Saint-Gobain Ceramics And Plastics, Inc. Process for cleaning ceramic articles
US6530388B1 (en) 2000-02-15 2003-03-11 Quantum Global Technologies, Llc Volume efficient cleaning systems
EP1320879A4 (de) * 2000-08-11 2009-03-11 Chem Trace Corp System und verfahren zum reinigen von teilen von halbleiterherstellungsgeräteteilen
US6569253B2 (en) 2001-04-25 2003-05-27 United Microelectronics Corp. Method of cleaning a chamber of a CVD machine and elements within
US6899798B2 (en) 2001-12-21 2005-05-31 Applied Materials, Inc. Reusable ceramic-comprising component which includes a scrificial surface layer
US6656535B2 (en) 2001-12-21 2003-12-02 Applied Materials, Inc Method of fabricating a coated process chamber component
US6902628B2 (en) 2002-11-25 2005-06-07 Applied Materials, Inc. Method of cleaning a coated process chamber component

Also Published As

Publication number Publication date
EP1508629B1 (de) 2009-12-30
DE602004024850D1 (de) 2010-02-11
SG109558A1 (en) 2005-03-30
CN1598061B (zh) 2011-05-18
TW200522191A (en) 2005-07-01
CN1598061A (zh) 2005-03-23
US7097713B2 (en) 2006-08-29
EP1508629A1 (de) 2005-02-23
TWI357621B (en) 2012-02-01
US20050039774A1 (en) 2005-02-24

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