ATE456416T1 - Verfahren zur herstellung einer siliciumcarbid- wärmetauschvorrichtung und in diesem verfahren hergestellte siliciumcarbid- wärmetauschvorrichtung - Google Patents

Verfahren zur herstellung einer siliciumcarbid- wärmetauschvorrichtung und in diesem verfahren hergestellte siliciumcarbid- wärmetauschvorrichtung

Info

Publication number
ATE456416T1
ATE456416T1 AT07823772T AT07823772T ATE456416T1 AT E456416 T1 ATE456416 T1 AT E456416T1 AT 07823772 T AT07823772 T AT 07823772T AT 07823772 T AT07823772 T AT 07823772T AT E456416 T1 ATE456416 T1 AT E456416T1
Authority
AT
Austria
Prior art keywords
heat exchange
silicon carbide
exchange device
carbide heat
order
Prior art date
Application number
AT07823772T
Other languages
English (en)
Inventor
Marc Ferrato
Original Assignee
Boostec S A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=38180662&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE456416(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Boostec S A filed Critical Boostec S A
Application granted granted Critical
Publication of ATE456416T1 publication Critical patent/ATE456416T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D9/00—Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
    • F28D9/0031—Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits for one heat-exchange medium being formed by paired plates touching each other
    • F28D9/0043—Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits for one heat-exchange medium being formed by paired plates touching each other the plates having openings therein for circulation of at least one heat-exchange medium from one conduit to another
    • F28D9/005—Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits for one heat-exchange medium being formed by paired plates touching each other the plates having openings therein for circulation of at least one heat-exchange medium from one conduit to another the plates having openings therein for both heat-exchange media
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
    • B23K1/0012—Brazing of heat exchangers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
    • C04B37/005—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of glass or ceramic material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F21/00—Constructions of heat-exchange apparatus characterised by the selection of particular materials
    • F28F21/04—Constructions of heat-exchange apparatus characterised by the selection of particular materials of ceramic; of concrete; of natural stone
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/04—Tubular or hollow articles
    • B23K2101/14—Heat exchangers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/612—Machining
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/94—Products characterised by their shape
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/16—Silicon interlayers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/365—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/708—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the interlayers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F2275/00—Fastening; Joining
    • F28F2275/04—Fastening; Joining by brazing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
    • Y10T428/24488—Differential nonuniformity at margin
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
    • Y10T428/24612—Composite web or sheet

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Structural Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
  • Silicon Compounds (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
AT07823772T 2006-09-12 2007-09-05 Verfahren zur herstellung einer siliciumcarbid- wärmetauschvorrichtung und in diesem verfahren hergestellte siliciumcarbid- wärmetauschvorrichtung ATE456416T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0653680A FR2905754B1 (fr) 2006-09-12 2006-09-12 Procede de fabrication d'un dispositif de type echangeur de chaleur en carbure de silicium et dispositif en carbure de silicium realise par le procede
PCT/FR2007/051875 WO2008031966A1 (fr) 2006-09-12 2007-09-05 Procede de fabrication d'un dispositif de type echangeur de chaleur en carbure de silicium et dispositif en carbure de silicium realise par le procede

Publications (1)

Publication Number Publication Date
ATE456416T1 true ATE456416T1 (de) 2010-02-15

Family

ID=38180662

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07823772T ATE456416T1 (de) 2006-09-12 2007-09-05 Verfahren zur herstellung einer siliciumcarbid- wärmetauschvorrichtung und in diesem verfahren hergestellte siliciumcarbid- wärmetauschvorrichtung

Country Status (7)

Country Link
US (1) US20090280299A1 (de)
EP (1) EP2066474B1 (de)
AT (1) ATE456416T1 (de)
DE (1) DE602007004637D1 (de)
ES (1) ES2339407T3 (de)
FR (1) FR2905754B1 (de)
WO (1) WO2008031966A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010030781A1 (de) * 2010-06-30 2012-01-05 Sgl Carbon Se Wärmeübertragerplatte, damit versehener Plattenwärmeübertrager und Verfahren zum Herstellen eines Plattenwärmeübertragers
EP2785666B1 (de) * 2011-11-29 2019-09-18 Corning Incorporated Verfahren zur behandlung einer verbindung bei einer keramischen anordnung
JP6182082B2 (ja) * 2013-03-15 2017-08-16 日本碍子株式会社 緻密質複合材料、その製法及び半導体製造装置用部材
JP6182084B2 (ja) * 2013-03-25 2017-08-16 日本碍子株式会社 緻密質複合材料、その製法、接合体及び半導体製造装置用部材
FR3071750B1 (fr) * 2017-09-29 2022-01-28 Atmostat Reacteur-echangeur a vieillissement maitrise
DE102018204887B3 (de) * 2018-03-29 2019-09-05 Danfoss Silicon Power Gmbh Verfahren zum Montieren einer Halbleiterleistungsmodulkomponente und eines Halbleiterleistungsmoduls mit einer derartigen Modulkomponente
FR3092778B1 (fr) * 2019-02-14 2022-02-25 Thermocoax Cie « Procédé de brasure d’éléments chauffants pour réaliser une source chauffante, plaque de cuisson, thermoplongeur ou source infrarouge »
CN114728854A (zh) * 2019-09-30 2022-07-08 康宁股份有限公司 流动反应器模块的制造和所生产的模块
CN115734814A (zh) * 2020-06-30 2023-03-03 康宁股份有限公司 具有集成热交换的压制碳化硅陶瓷(sic)流体模块
US20230302427A1 (en) * 2020-08-13 2023-09-28 Corning Incorporated Pressed silicon carbide (sic) multilayer fluidic modules
CN117098741A (zh) * 2021-03-26 2023-11-21 康宁股份有限公司 流体装置的制造及生产的流体装置
JP7583698B2 (ja) * 2021-10-08 2024-11-14 日本碍子株式会社 ウエハ載置台
US20250011246A1 (en) * 2021-11-04 2025-01-09 Corning Incorporated Method of forming ceramic fluidic modules with smooth interior surfaces and modules produced
CN118871729B (zh) * 2022-02-14 2025-06-24 大金工业株式会社 制冷剂流路模块以及空调机
JP7736658B2 (ja) * 2022-11-29 2025-09-09 フタバ産業株式会社 熱交換器
WO2024118341A1 (en) * 2022-11-29 2024-06-06 Corning Incorporated Pre-pressed ceramic bodies for fabrication of ceramic fluidic modules via isostatic pressing
JP7722494B1 (ja) * 2024-03-11 2025-08-13 株式会社富士通ゼネラル 熱交換器

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3071853A (en) * 1955-10-17 1963-01-08 Solar Aircraft Co Method and apparatus for making brazed honeycomb
US4130160A (en) * 1976-09-27 1978-12-19 Gte Sylvania Incorporated Composite ceramic cellular structure and heat recuperative apparatus incorporating same
JPS56133598A (en) * 1980-03-24 1981-10-19 Ngk Insulators Ltd Heat transfer type ceramic heat exchanger and its manufacture
DE3136253A1 (de) * 1981-09-12 1983-03-31 Rosenthal Technik Ag, 8672 Selb Verfahren und vorrichtung zum herstellen von waermetauschern aus keramischen folien
US4488920A (en) * 1982-05-18 1984-12-18 Williams International Corporation Process of making a ceramic heat exchanger element
DE3643750A1 (de) * 1986-12-20 1988-06-30 Hoechst Ag Waermetauschermodul aus gebranntem keramischen material
US5234152A (en) * 1992-01-07 1993-08-10 Regents Of The University Of California Transient liquid phase ceramic bonding
JP2004361022A (ja) * 2003-06-05 2004-12-24 Denso Corp 熱交換器
DE102005054093A1 (de) * 2004-11-18 2006-06-14 Helmut Aaslepp Wärmeaustausch durch Siliziumcarbid-Rohre

Also Published As

Publication number Publication date
WO2008031966A1 (fr) 2008-03-20
ES2339407T3 (es) 2010-05-19
FR2905754B1 (fr) 2008-10-31
FR2905754A1 (fr) 2008-03-14
DE602007004637D1 (de) 2010-03-18
EP2066474B1 (de) 2010-01-27
EP2066474A1 (de) 2009-06-10
US20090280299A1 (en) 2009-11-12

Similar Documents

Publication Publication Date Title
DE602007004637D1 (de) Verfahren zur herstellung einer siliciumcarbid-wärmetauschvorrichtung und in diesem verfahren hergestellte siliciumcarbid-wärmetauschvorrichtung
ATE527050T1 (de) Mikromischkammer, mikromischer mit mehreren derartigen mikromischkammern und verfahren zur herstellung davon
ATE489725T1 (de) Glasartiges flächensubstrat, seine verwendung und verfahren zu seiner herstellung
ATE284513T1 (de) Kühlbares segment für turbomaschinen und turbinen mit brennkammer
WO2008119900A3 (fr) Procede de fabrication d'un dispositif de type echangeur de chaleur en ceramique et dispositifs obtenus par le procede
EP2400532A3 (de) Diamanthalbleiterbauelement und Herstellungsverfahren dafür
JP2010532244A (ja) 押出体および流体処理方法
WO2007076393A3 (en) A process for the preparation of a chemical derivable from an olefin oxide, and a reactor suitable for such a process
DE60239196D1 (de) Verfahren zur herstellung eines monolithischen wanddurchflussfilters
EP1459871A3 (de) Verfahren zur Herstellung von dreidimensionalen Objekten mittels Mikrowellenstrahlung
RU2010130572A (ru) Узел микрореактора, включающий в себя соединительную основу
DE60333019D1 (de) Herstellung von metallteilen unter verwendung von sis-sintern (sis - selective inhibition of sintering)
WO2007082774A3 (de) Wärmetauscher
WO2005006395A3 (en) Heat transfer device and method of making same
EP2009135A4 (de) Basissubstrat für epitaktischen diamantfilm, verfahren zur herstellung des basissubstrats für epitaktischen diamantfilm, durch das basissubstrat für epitaktischen diamantfilm hergestellter epitaktischer diamantfilm und verfahren zur herstellung des epitaktischen diamantfilms
DE502005010233D1 (de) Verfahren zum herstellen eines metall-keramik-substrates
EP1621048A4 (de) Mehrzonen-keramikheizsystem und verfahren zu seiner herstellung
TWM387160U (en) Double flow-circuit heat exchange device for periodic positive and reverse directional pumping
EA200870100A1 (ru) Микроканальное устройство для типовых процессов в производстве этиленоксида
TW200604131A (en) Method for purifying silicon carbide coated structures
CN104995475B (zh) 热氧化器再生器的改进的块通道几何形状和布置
WO2009015984A3 (de) Waferfügeverfahren mit senterschritt, waferverbund sowie chip
US10625251B2 (en) Multistage body having a plurality of flow channels
ATE541659T1 (de) Verfahren zum verdichten einer verzahnung mit unterschiedlichen verfahren
MA29971B1 (fr) Methode de selection d'une structure de filtration d'un gaz

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties