ATE457062T1 - System, verfahren und vorrichtung für ein mikrogefertigtes interferometer mit optischem strahlteiler - Google Patents

System, verfahren und vorrichtung für ein mikrogefertigtes interferometer mit optischem strahlteiler

Info

Publication number
ATE457062T1
ATE457062T1 AT07301406T AT07301406T ATE457062T1 AT E457062 T1 ATE457062 T1 AT E457062T1 AT 07301406 T AT07301406 T AT 07301406T AT 07301406 T AT07301406 T AT 07301406T AT E457062 T1 ATE457062 T1 AT E457062T1
Authority
AT
Austria
Prior art keywords
beam splitter
micro
medium
optical beam
half plane
Prior art date
Application number
AT07301406T
Other languages
English (en)
Inventor
Bassam Amanallah Saadany
Diaa Abdelmaguid Khalil
Tarik Essif Eddine Bourouina
Original Assignee
Si Ware Systems
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Si Ware Systems filed Critical Si Ware Systems
Application granted granted Critical
Publication of ATE457062T1 publication Critical patent/ATE457062T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G01B9/02051—Integrated design, e.g. on-chip or monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4535—Devices with moving mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
AT07301406T 2006-09-28 2007-09-28 System, verfahren und vorrichtung für ein mikrogefertigtes interferometer mit optischem strahlteiler ATE457062T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US84801806P 2006-09-28 2006-09-28

Publications (1)

Publication Number Publication Date
ATE457062T1 true ATE457062T1 (de) 2010-02-15

Family

ID=38920731

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07301406T ATE457062T1 (de) 2006-09-28 2007-09-28 System, verfahren und vorrichtung für ein mikrogefertigtes interferometer mit optischem strahlteiler

Country Status (5)

Country Link
US (1) US7796267B2 (de)
EP (1) EP1906159B1 (de)
JP (1) JP5204450B2 (de)
AT (1) ATE457062T1 (de)
DE (1) DE602007004659D1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5302020B2 (ja) * 2009-01-26 2013-10-02 浜松ホトニクス株式会社 光モジュール
JP5860809B2 (ja) * 2009-09-08 2016-02-16 シーウェア システムズＳｉ−Ｗａｒｅ Ｓｙｓｔｅｍｓ マイクロ電子機械的システム（ｍｅｍｓ）干渉計
WO2011091012A2 (en) * 2010-01-19 2011-07-28 Si-Ware Systems Interferometer with variable optical path length reference mirror and applications thereof
US8873125B2 (en) * 2010-03-09 2014-10-28 Si-Ware Systems Technique to determine mirror position in optical interferometers
JP5715481B2 (ja) * 2011-05-16 2015-05-07 浜松ホトニクス株式会社 光モジュール及びその製造方法
JP5739224B2 (ja) 2011-05-16 2015-06-24 浜松ホトニクス株式会社 光学部品の製造方法及び光学部品
EP2769257B1 (de) * 2011-10-20 2018-12-12 SI-Ware Systems Integrierte monolithische optische bank mit doppelt gekrümmtem optischen element und verfahren zu ihrer herstellung
US8922787B2 (en) 2013-01-07 2014-12-30 Si-Ware Systems Spatial splitting-based optical MEMS interferometers
US9557556B2 (en) 2013-03-18 2017-01-31 Si-Ware Systems Integrated apertured micromirror and applications thereof
WO2015025691A1 (ja) 2013-08-19 2015-02-26 浜松ホトニクス株式会社 光干渉計を製造する方法
US9395465B2 (en) 2014-07-31 2016-07-19 Baker Hughes Incorporated Gravity and/or acceleration measurements using dual interferometer configurations
US10562055B2 (en) 2015-02-20 2020-02-18 Si-Ware Systems Selective step coverage for micro-fabricated structures
WO2017218778A1 (en) * 2016-06-15 2017-12-21 Si-Ware Systems Integrated spectral unit
JP6704833B2 (ja) * 2016-10-27 2020-06-03 浜松ホトニクス株式会社 位置検出方法及び光モジュール
FR3076357B1 (fr) * 2017-12-29 2021-10-22 Cailabs Cavite multi passage d’un dispositif optique de manipulation spatiale d’un rayonnement lumineux.
US11085825B2 (en) 2018-03-30 2021-08-10 Si-Ware Systems Self-referenced spectrometer
US11895779B2 (en) * 2018-09-20 2024-02-06 Sumitomo Precision Products Co., Ltd. Substrate processing method
CN113557415B (zh) * 2019-02-06 2024-12-20 加州理工学院 紧凑型高光谱中红外光谱仪
WO2021092579A1 (en) 2019-11-08 2021-05-14 California Institute Of Technology Infrared spectrometer having dielectric-polymer-based spectral filter
US11774289B2 (en) 2021-11-02 2023-10-03 Saudi Arabian Oil Company Micro-electromechanical system (MEMS) interferometer for FT-MIR spectroscopy
US11635369B1 (en) 2021-11-02 2023-04-25 Saudi Arabian Oil Company Miniature FT-MIR using a MEMS interferometer with a metasurface emitter and detector

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4632553A (en) 1985-02-25 1986-12-30 Nicolet Instrument Corporation Silicon beamsplitter
US5087124A (en) * 1989-05-09 1992-02-11 Smith Rosemary L Interferometric pressure sensor capable of high temperature operation and method of fabrication
US5159408A (en) * 1991-03-27 1992-10-27 Hughes Danbury Optical Systems, Inc. Optical thickness profiler using synthetic wavelengths
DE4241045C1 (de) 1992-12-05 1994-05-26 Bosch Gmbh Robert Verfahren zum anisotropen Ätzen von Silicium
US5628917A (en) * 1995-02-03 1997-05-13 Cornell Research Foundation, Inc. Masking process for fabricating ultra-high aspect ratio, wafer-free micro-opto-electromechanical structures
IL149016A0 (en) * 2002-04-07 2004-03-28 Green Vision Systems Ltd Green Method and device for real time high speed high resolution spectral imaging
US7180603B2 (en) * 2003-06-26 2007-02-20 Zygo Corporation Reduction of thermal non-cyclic error effects in interferometers
US7349072B2 (en) * 2003-10-09 2008-03-25 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
WO2006000120A1 (en) * 2004-06-25 2006-01-05 Carag Ag Miniature lamellar grating interferometer based on silicon technology
JP2008521011A (ja) * 2004-11-18 2008-06-19 モーガン・リサーチ・コーポレーション 小型のフーリエ変換分光計
US7705994B2 (en) * 2005-11-23 2010-04-27 Agilent Technologies, Inc. Monolithic displacement measuring interferometer with spatially separated but substantially equivalent optical pathways and optional dual beam outputs
KR100737177B1 (ko) * 2006-05-15 2007-07-10 경북대학교 산학협력단 수직 공진 표면광 레이저를 이용한 간섭계
US7719693B2 (en) * 2007-04-23 2010-05-18 The Aerospace Corporation Interferometry system chamber viewing window

Also Published As

Publication number Publication date
US7796267B2 (en) 2010-09-14
EP1906159A1 (de) 2008-04-02
JP2008102132A (ja) 2008-05-01
US20080080034A1 (en) 2008-04-03
JP5204450B2 (ja) 2013-06-05
EP1906159B1 (de) 2010-02-03
DE602007004659D1 (de) 2010-03-25

Similar Documents

Publication Publication Date Title
DE602007004659D1 (de) System, Verfahren und Vorrichtung für ein mikrogefertigtes Interferometer mit optischem Strahlteiler
WO2010062860A3 (en) Fiber-based interferometer system for monitoring an imaging interferometer
JP2008541088A5 (de)
WO2008073486A3 (en) Multiple-degree of freedom interferometer with compensation for gas effects
WO2006058835A3 (fr) Piece d'horlogerie comprenant un guide optique qui remplit la fonction de glace
WO2009064670A3 (en) Interferometer utilizing polarization scanning
WO2005067579A3 (en) Multi-axis interferometers and methods and systems using multi-axis interferometers
DE60323580D1 (de) Flüssigkeitsbehälter, Verfahren zum Detektieren einer Flüssigkeitsmenge in dem Flüssigkeitsbehälter und Flüssigkeitsausstossaufzeichnungsgerät
EP1684109A4 (de) Laser-verarbeitungsvorrichtung
ATE369547T1 (de) Optisches messsystem
WO2005070166A3 (en) Method and system for optically tracking a target using an interferometric technique
WO2003068052A3 (en) Smoothing laser beam integration using optical element motion
WO2008008223A3 (en) Combination ellipsometry and optical stress generation and detection
WO2009017694A3 (en) Optical spatial heterodyne fourier transform interferometer
DK1535048T3 (da) Bestemmelse af refraktionsindeks ved mikrointerferometrisk refleksionsdektion
WO2010092302A3 (fr) Microscope de plasmon de surface a haute resolution comportant un interferometre heterodyne fibre
CN105674875A (zh) 一种全视场低频外差点衍射干涉仪
TW200745602A (en) Optical measurement instrument and optical measurement method
WO2007019548A3 (en) Apparatus and methods for reduction and compensation of effects of vibrations and of environmental effects in wavefront interferometry
WO2008136404A1 (ja) 光学部材、干渉計システム、ステージ装置、露光装置、及びデバイス製造方法
WO2004113826A3 (en) Compensation for imperfections in a measurement object and for beam misalignments in plane mirror interferometers
JP2001272605A (ja) 透明試料の照明方法および照明装置
CN201037880Y (zh) 激光衰减器
CN104359863B (zh) 自由空间干涉光路平衡探测装置
ATE426146T1 (de) Verfahren und vorrichtung zur bestimmung der position eines ersten teils relativ zu einem zweiten

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties