ATE459974T1 - Mikrosystem mit elektromagnetischer steuerung - Google Patents
Mikrosystem mit elektromagnetischer steuerungInfo
- Publication number
- ATE459974T1 ATE459974T1 AT06700703T AT06700703T ATE459974T1 AT E459974 T1 ATE459974 T1 AT E459974T1 AT 06700703 T AT06700703 T AT 06700703T AT 06700703 T AT06700703 T AT 06700703T AT E459974 T1 ATE459974 T1 AT E459974T1
- Authority
- AT
- Austria
- Prior art keywords
- mobile element
- microsystem
- substrate
- electromagnetic control
- subjects
- Prior art date
Links
- 230000005291 magnetic effect Effects 0.000 abstract 4
- 239000000758 substrate Substances 0.000 abstract 3
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H50/00—Details of electromagnetic relays
- H01H50/005—Details of electromagnetic relays using micromechanics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H36/00—Switches actuated by change of magnetic field or of electric field, e.g. by change of relative position of magnet and switch, by shielding
- H01H2036/0093—Micromechanical switches actuated by a change of the magnetic field
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H50/00—Details of electromagnetic relays
- H01H50/005—Details of electromagnetic relays using micromechanics
- H01H2050/007—Relays of the polarised type, e.g. the MEMS relay beam having a preferential magnetisation direction
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Micromachines (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
- Magnetic Treatment Devices (AREA)
- Developing Agents For Electrophotography (AREA)
- Linear Motors (AREA)
- Electromagnets (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0550085A FR2880729B1 (fr) | 2005-01-10 | 2005-01-10 | Microsysteme a commande electromagnetique |
| PCT/EP2006/050074 WO2006072627A1 (fr) | 2005-01-10 | 2006-01-06 | Microsysteme a commande electromagnetique |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE459974T1 true ATE459974T1 (de) | 2010-03-15 |
Family
ID=34952790
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT06700703T ATE459974T1 (de) | 2005-01-10 | 2006-01-06 | Mikrosystem mit elektromagnetischer steuerung |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US7724111B2 (de) |
| EP (1) | EP1836714B1 (de) |
| JP (1) | JP4519921B2 (de) |
| KR (1) | KR101023581B1 (de) |
| CN (1) | CN101138060B (de) |
| AT (1) | ATE459974T1 (de) |
| DE (1) | DE602006012620D1 (de) |
| FR (1) | FR2880729B1 (de) |
| WO (1) | WO2006072627A1 (de) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2911719B1 (fr) * | 2007-01-19 | 2009-02-27 | Schneider Electric Ind Sas | Dispositif d'interruption/enclenchement d'un circuit electrique |
| FR2911675B1 (fr) * | 2007-01-19 | 2009-08-21 | Schneider Electric Ind Sas | Initiateur electro-pyrotechnique a commande magnetique |
| WO2010035184A1 (en) * | 2008-09-23 | 2010-04-01 | Nxp B.V. | Device with a micro electromechanical structure |
| DE102008042346A1 (de) * | 2008-09-25 | 2010-04-01 | Robert Bosch Gmbh | Magnetjoch, mikromechanisches Bauteil und Herstellungsverfahren für ein Magnetjoch und ein mikromechanisches Bauteil |
| US8581679B2 (en) * | 2010-02-26 | 2013-11-12 | Stmicroelectronics Asia Pacific Pte. Ltd. | Switch with increased magnetic sensitivity |
| IT201700088417A1 (it) * | 2017-08-01 | 2019-02-01 | Hike S R L | Dispositivo elettromeccanico integrato. |
| CN110739808B (zh) * | 2019-10-23 | 2021-07-20 | 西安工程大学 | 一种便于集成的微型电磁致动器及其驱动方法 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55137427U (de) * | 1979-03-23 | 1980-09-30 | ||
| US5070317A (en) * | 1989-01-17 | 1991-12-03 | Bhagat Jayant K | Miniature inductor for integrated circuits and devices |
| US5644177A (en) * | 1995-02-23 | 1997-07-01 | Wisconsin Alumni Research Foundation | Micromechanical magnetically actuated devices |
| CA2211830C (en) * | 1997-08-22 | 2002-08-13 | Cindy Xing Qiu | Miniature electromagnetic microwave switches and switch arrays |
| US6320145B1 (en) * | 1998-03-31 | 2001-11-20 | California Institute Of Technology | Fabricating and using a micromachined magnetostatic relay or switch |
| US6410360B1 (en) * | 1999-01-26 | 2002-06-25 | Teledyne Industries, Inc. | Laminate-based apparatus and method of fabrication |
| JP2001076605A (ja) * | 1999-07-01 | 2001-03-23 | Advantest Corp | 集積型マイクロスイッチおよびその製造方法 |
| US6310526B1 (en) * | 1999-09-21 | 2001-10-30 | Lap-Sum Yip | Double-throw miniature electromagnetic microwave (MEM) switches |
| US6469602B2 (en) * | 1999-09-23 | 2002-10-22 | Arizona State University | Electronically switching latching micro-magnetic relay and method of operating same |
| EP1352408B1 (de) * | 2001-01-18 | 2007-03-21 | Arizona State University | Mikromagnetischer verriegelbarer schalter mit weniger beschränktem ausrichtungsbedarf |
| WO2002095896A2 (en) * | 2001-05-18 | 2002-11-28 | Microlab, Inc. | Apparatus utilizing latching micromagnetic switches |
| US6593834B2 (en) * | 2001-07-30 | 2003-07-15 | Cindy Xing Qiu | Double-throw miniature electromagnetic microwave switches with latching mechanism |
| US6750745B1 (en) * | 2001-08-29 | 2004-06-15 | Magfusion Inc. | Micro magnetic switching apparatus and method |
| AU2003272500A1 (en) * | 2002-09-18 | 2004-04-08 | Mark Goranson | Method of assembling a laminated electro-mechanical structure |
-
2005
- 2005-01-10 FR FR0550085A patent/FR2880729B1/fr not_active Expired - Fee Related
-
2006
- 2006-01-06 CN CN2006800076856A patent/CN101138060B/zh not_active Expired - Fee Related
- 2006-01-06 AT AT06700703T patent/ATE459974T1/de not_active IP Right Cessation
- 2006-01-06 DE DE602006012620T patent/DE602006012620D1/de not_active Expired - Lifetime
- 2006-01-06 EP EP06700703A patent/EP1836714B1/de not_active Expired - Lifetime
- 2006-01-06 JP JP2007549897A patent/JP4519921B2/ja not_active Expired - Fee Related
- 2006-01-06 KR KR1020077017940A patent/KR101023581B1/ko not_active Expired - Fee Related
- 2006-01-06 WO PCT/EP2006/050074 patent/WO2006072627A1/fr not_active Ceased
- 2006-01-06 US US11/813,591 patent/US7724111B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| EP1836714B1 (de) | 2010-03-03 |
| CN101138060B (zh) | 2010-12-15 |
| WO2006072627A1 (fr) | 2006-07-13 |
| DE602006012620D1 (de) | 2010-04-15 |
| KR101023581B1 (ko) | 2011-03-21 |
| EP1836714A1 (de) | 2007-09-26 |
| KR20070117546A (ko) | 2007-12-12 |
| JP4519921B2 (ja) | 2010-08-04 |
| JP2008527642A (ja) | 2008-07-24 |
| US7724111B2 (en) | 2010-05-25 |
| CN101138060A (zh) | 2008-03-05 |
| FR2880729B1 (fr) | 2009-02-27 |
| FR2880729A1 (fr) | 2006-07-14 |
| US20080106360A1 (en) | 2008-05-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |